CN217361529U

CN217361529U - Pushing mechanism suitable for wafer box

Info

Publication number: CN217361529U
Application number: CN202220916322.0U
Authority: CN
Inventors: 陈曙光; 林坚; 王彭
Original assignee: Honghu Suzhou Semiconductor Technology Co ltd
Current assignee: Honghu Suzhou Semiconductor Technology Co ltd
Priority date: 2022-04-20
Filing date: 2022-04-20
Publication date: 2022-09-02
Anticipated expiration: 2032-04-20

Abstract

The utility model relates to a pushing equipment suitable for wafer box, including frame and material pushing and limiting mechanism, all be provided with along the both sides of X axle direction in the frame and push away material limiting mechanism, and two push away material limiting mechanism and all set up along Y axle direction, push away material limiting mechanism including pushing away spacing motor, turning block, pivot and spacing ejector pad. The utility model relates to a material pushing mechanism suitable for a wafer box, which can push material to the deviated wafer through two material pushing limiting mechanisms on a frame, thereby avoiding the adverse effect of the wafer deviation on the subsequent processing; through the structural arrangement of the induction sheet and the sensor mechanism, the position of the limit push block can be induced, and the controllability is strong.

Description

Pushing mechanism suitable for wafer box

Technical Field

The utility model relates to a wafer processing correlation technique field especially relates to a pushing equipment suitable for wafer box.

Background

A wafer is a very expensive product and must be protected from damage during the placement process. The wafer cassette is a common device for holding wafers and sapphire in the industry. The wafers in the wafer cassette may shift during the processing, and a material pushing mechanism is required to be designed to limit the wafers.

In view of the above-mentioned drawbacks, the present designer has made active research and innovation to create a material pushing mechanism suitable for wafer cassettes, so that the material pushing mechanism has industrial application value.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the present invention provides a material pushing mechanism suitable for a wafer cassette.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a material pushing mechanism suitable for a wafer box comprises a rack and material pushing limiting mechanisms, wherein the two sides of the rack along the X-axis direction are respectively provided with the material pushing limiting mechanisms, the two material pushing limiting mechanisms are respectively arranged along the Y-axis direction, each material pushing limiting mechanism comprises a material pushing limiting motor, a rotating block, a rotating shaft and a limiting pushing block, the material pushing limiting motors are connected with the rotating blocks through lead screws and lead screw nuts along the driving ends of one side of the positive direction of the Y axis, the rotating blocks are connected with the rotating shafts, the rotating shafts are installed on the rack through bearings, the bottoms of the rotating shafts are connected with the limiting pushing blocks through connecting rods, the tops of the rotating blocks are also provided with sensing pieces, sensor mechanisms matched with the sensing pieces are arranged on the rack of one side of the positive direction of the Y axis, and the sensor mechanisms are located above the sensing pieces.

As a further improvement, the two pushing limiting mechanisms are arranged on the frame near one side of the Y-axis negative direction.

As a further improvement, the two pushing limiting mechanisms are arranged on the frame near one side of the positive direction of the Y axis.

As a further improvement, the two pushing limiting mechanisms are arranged on the frame at the middle position along the Y-axis direction.

As a further improvement, one material pushing limiting mechanism is arranged in the frame near one side of the Y-axis negative direction, and the other material pushing limiting mechanism is arranged in the frame near one side of the Y-axis positive direction.

As a further improvement of the present invention, the sensor mechanism includes a first sensor and a second sensor.

As a further improvement, the spacing push block is a cylindrical PEEK material push wheel.

Borrow by above-mentioned scheme, the utility model discloses at least, have following advantage:

the utility model relates to a material pushing mechanism suitable for a wafer box, which can push material to the deviated wafer through two material pushing limiting mechanisms on a frame, thereby avoiding the adverse effect of the wafer deviation on the subsequent processing; through the structural arrangement of the induction sheet and the sensor mechanism, the position of the limit push block can be induced, and the controllability is strong.

The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

Fig. 1 is a schematic structural diagram of a material pushing mechanism suitable for a wafer cassette according to the present invention;

fig. 2 is a schematic structural view of the material pushing limiting mechanism in fig. 1.

In the drawings, the meanings of the reference numerals are as follows.

1 rack 2 pushing limiting mechanism

3 pushing motor 4 motor support

5 lead screw nut 6 turning block

7 rotating shaft 8 bearing

9 induction sheet 10 connecting rod

11 spacing ejector pad 12 sensor mechanism

13 first sensor 14 second sensor

Detailed Description

The following detailed description of the embodiments of the present invention is made with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

In order to make the technical solution of the present invention better understood, the technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by the person skilled in the art without creative work belong to the protection scope of the present invention.

Examples

As shown in figures 1-2 of the drawings,

a material pushing mechanism suitable for a wafer box, which comprises a machine frame 1 and material pushing limiting mechanisms 2, wherein the material pushing limiting mechanisms 2 are arranged on two sides of the machine frame 1 along the X-axis direction, and two material pushing limiting mechanisms 2 are arranged along the Y-axis direction, each material pushing limiting mechanism 2 comprises a material pushing limiting motor 3, a rotating block 6, a rotating shaft 7 and a limiting push block 11, the driving end of the material pushing limiting motor 3 along one side of the positive direction of the Y-axis is connected with the rotating block 6 through a lead screw and a lead screw nut 18, the rotating block 6 is connected with the rotating shaft 7, the rotating shaft 7 is installed on the rack 1 through a bearing 8, the bottom of the rotating shaft 7 is connected with the limiting push block 11 through a connecting rod 10, an induction sheet 9 is further arranged at the top of the rotating block 6, a sensor mechanism 12 matched with the induction sheet 9 is arranged on the rack 1 of the rotating block 6 along one side of the positive direction of the Y-axis, and the sensor mechanism 12 is located above the induction sheet 9.

Preferably, the two material pushing limiting mechanisms 2 are both arranged on the machine frame 1 close to one side of the Y-axis in the negative direction.

Preferably, the two material pushing limiting mechanisms 2 are both arranged on the machine frame 1 close to one side of the positive direction of the Y axis.

Preferably, the two material pushing limiting mechanisms 2 are both arranged on the machine frame 1 at the middle position along the Y-axis direction.

Preferably, one material pushing limiting mechanism 2 is arranged on the rack 1 close to one side of the Y-axis in the negative direction, and the other material pushing limiting mechanism 2 is arranged on the rack 1 close to one side of the Y-axis in the positive direction.

Preferably, the sensor mechanism 12 comprises a first sensor 13 and a second sensor 14. When the sensing piece 9 is respectively located in the sensing areas of the first sensor 13 and the second sensor 14, the limiting push block 11 is located at different operation positions, and the position of the limiting push block 11 can be monitored.

Preferably, the limiting push block 11 is a cylindrical PEEK push wheel.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly referring to the number of technical features being grined. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected: either mechanically or electrically: the terms may be directly connected or indirectly connected through an intermediate member, or may be a communication between two elements.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims

1. The material pushing mechanism suitable for the wafer box is characterized by comprising a rack (1) and material pushing limiting mechanisms (2), wherein the two sides of the rack (1) along the X-axis direction are respectively provided with the material pushing limiting mechanisms (2), and the two material pushing limiting mechanisms (2) are respectively arranged along the Y-axis direction, the material pushing limiting mechanisms (2) comprise material pushing limiting motors (3), rotating blocks (6), rotating shafts (7) and limiting push blocks (11), the driving ends of the material pushing limiting motors (3) along one side of the Y-axis positive direction are connected with the rotating blocks (6) through screw rods and screw rod nuts (18), the rotating blocks (6) are connected with the rotating shafts (7), the rotating shafts (7) are installed on the rack (1) through bearings (8), the bottoms of the rotating shafts (7) are connected with the limiting push blocks (11) through connecting rods (10), the top of turning block (6) still is provided with response piece (9), be provided with on frame (1) of turning block (6) along Y axle positive direction one side with response piece (9) matched with sensor mechanism (12), sensor mechanism (12) are located the top position of responding to piece (9).

2. The material pushing mechanism suitable for the wafer cassette as claimed in claim 1, wherein the two material pushing limiting mechanisms (2) are both arranged on the frame (1) near one side of the negative direction of the Y axis.

3. The material pushing mechanism suitable for the wafer cassette as claimed in claim 1, wherein the two material pushing limiting mechanisms (2) are arranged on the frame (1) near one side of the positive direction of the Y axis.

4. The pushing mechanism for wafer cassettes as claimed in claim 1, wherein the two pushing limiting mechanisms (2) are disposed on the frame (1) at the middle position along the Y-axis direction.

5. The material pushing mechanism suitable for the wafer cassette as claimed in claim 1, wherein one of the material pushing limiting mechanisms (2) is disposed on the rack (1) near the negative side of the Y axis, and the other material pushing limiting mechanism (2) is disposed on the rack (1) near the positive side of the Y axis.

6. The pusher mechanism adapted to a wafer cassette according to claim 5, wherein the sensor mechanism (12) comprises a first sensor (13) and a second sensor (14).

7. The pushing mechanism suitable for the wafer cassette as claimed in claim 1, wherein the limiting push block (11) is a cylindrical PEEK push wheel.