CN217360548U - Nano-imprinting working mold workstation - Google Patents
Nano-imprinting working mold workstation Download PDFInfo
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- CN217360548U CN217360548U CN202220655827.6U CN202220655827U CN217360548U CN 217360548 U CN217360548 U CN 217360548U CN 202220655827 U CN202220655827 U CN 202220655827U CN 217360548 U CN217360548 U CN 217360548U
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Abstract
A nanometer impression work mould workstation, work mould workstation and work mould frock, the said work mould workstation can be installed on one side of the existing nanometer impression apparatus, integrate with existing nanometer impression apparatus; the working mould workstation comprises a deionization device arranged at the top of the workstation, and the deionization device sucks filtered air and blows the filtered air and static-removing ions together to the working mould for removing static electricity generated by the working mould; the mechanical arm in the nano-imprinting equipment can transfer the working mold tool from the working mold workstation to the interior of the nano-imprinting equipment or from the interior of the nano-imprinting equipment to the interior of the working mold workstation. The working die is kept at constant temperature and humidity inside, so that the working die is prevented from being damped, and the nano structure is prevented from being damaged and the surface energy of the working die is prevented from rising. The top of the workstation is provided with a deionization device, so that static electricity of a working die is eliminated, and static pollution is avoided.
Description
Technical Field
The utility model relates to a nanometer impression technical field specifically is a nanometer impression working die workstation.
Background
Since Stephen Chou, chinese scientist, proposed the concept of nanoimprinting in 1995, nanoimprinting technology has evolved as one of the core nanotechnologies hit by the scientific leather. The nanoimprint technology overcomes the resolution limit caused by diffraction in the photoetching technology, and the resolution reaches below 5nm at present, so that powerful support is provided for manufacturing small-size and high-density integrated circuits.
Nanoimprinting is mainly divided into two major steps of copying and imprinting of a working mold. The replication of the working mold comprises the processes of spin coating of the working mold material, imprinting of the working mold, exposure, demolding and the like.
The working mold is composed of a flexible substrate (e.g., PET/PMMA/PC, etc.) or a rigid substrate (e.g., quartz, glass, etc.) and a high molecular polymer material in the middle, wherein the nanostructure is present in the high molecular polymer.
In actual production, one working mold can be repeatedly imprinted several tens or hundreds of times. After the work die is copied, the work die needs to be stored in an appropriate environment after repeated imprinting. Flexible substrates shrink when left for extended periods of time or in high temperature environments. The static electricity on the surface of the polymer material can adsorb particles in the air to cause electrostatic pollution. The surface energy of the polymer material can be increased when the polymer material is in a humid environment for a long time, and the sticking phenomenon is easy to occur in the subsequent stamping step.
In order to better preserve a working mold, prevent deformation, prolong the service life of the working mold and reduce production cost, the nano-imprinting working mold workstation is provided.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a nanoimprint work mould workstation to solve the problem of proposing among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a nanometer impression work mould workstation, work mould workstation and work mould frock, the said work mould workstation can be installed on one side of the existing nanometer impression apparatus, integrate with existing nanometer impression apparatus;
the working mould workstation comprises a deionization device arranged at the top of the workstation, and the deionization device sucks filtered air and blows the filtered air and static-removing ions to the working mould together for removing static electricity generated by the working mould;
a plurality of material taking windows are arranged on one side, close to the nano-imprinting equipment, of the working mold workstation, and a mechanical arm in the nano-imprinting equipment can transfer a working mold tool from the working mold workstation to the inside of the nano-imprinting equipment or from the inside of the nano-imprinting equipment to the working mold workstation through the material taking windows;
the inside device that bears that is provided with of working die workstation bears the weight of the device, bears the weight of the device and is fixed in inside the working die workstation with the working die frock.
Preferably, the working die tool is used for fixing a working die and comprises a working die pull plate, a plurality of groups of uniformly installed springs are arranged in the working die pull plate, and one end of each spring is fixed on the working die press plate;
the working die pressing plates are arranged in two groups, a plurality of screw holes are formed in the working die pressing plates, and the working die pressing plates are screwed and fixed on a working die tool through screws with the same number as the screw holes;
preferably, a plurality of electromagnets are arranged on the working die tool, when the working die is transferred, the mechanical arm in the nano-imprinting equipment is fixed through the electromagnets, and then the working die tool and the working die are driven to transfer.
Preferably, the working mold comprises a nanostructure in the middle and through holes arranged at four corners.
Preferably, one side of the working mold workstation is provided with a transparent observation window for workers to observe the state inside the working mold.
Preferably, the number of the observation windows is not less than five, and the number of the observation windows is the same as that of the material taking windows.
Preferably, an access window is arranged right below the observation window positioned at the lowest part, and a handle is arranged on a door body of the access window.
Preferably, the bottom of the working mold workstation is provided with universal wheels.
Preferably, the number of the universal wheels is at least four, and the four universal wheels are distributed at four corners of the bottom surface of the working mold workstation.
Preferably, a temperature and humidity controller is arranged at the bottom of the working mold working station.
Compared with the prior art, the beneficial effects of the utility model are that: the working die is arranged on the tool with moderate elasticity, so that the deformation of the working die can be reduced. The inside constant temperature and humidity of the working die prevents the working die from being affected with damp, thereby preventing the nano structure from being damaged and the surface energy of the working die from rising. The top of the workstation is provided with a deionization device, so that static electricity of the working die is eliminated, and static pollution is avoided.
Drawings
FIG. 1: the working mould workstation and the nanoimprint equipment are schematically structured;
FIG. 2: the working die workstation is a schematic structural diagram;
FIG. 3: a side view of a working mold workstation;
FIG. 4: working die station side profile view;
FIG. 5: working die tooling plan view;
FIG. 6: a front view of a working die tool;
FIG. 7: the structure of the working die is shown schematically.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-7, the present invention provides a technical solution: a nanometer impression work mould workstation, work mould workstation 1 and work mould frock 3, the said work mould workstation 1 can be installed on one side of the existing nanometer impression apparatus 2, integrate with existing nanometer impression apparatus 2;
the working mold workstation 1 comprises a deionization device 11 arranged at the top of the workstation, and the deionization device 11 sucks filtered air and blows the filtered air and static-removing ions together to the working mold 4 for removing static electricity generated by the working mold 4;
a plurality of material taking windows 15 are arranged on one side, close to the nano-imprinting equipment 2, of the working mold workstation 1, and through the material taking windows 15, a mechanical arm in the nano-imprinting equipment 2 can transfer a working mold tool from the working mold workstation 1 to the inside of the nano-imprinting equipment 2 or from the inside of the nano-imprinting equipment 2 to the inside of the working mold workstation 1;
the inside bearing device 17 that is provided with of work die workstation 1 bears the weight of the device, bears the weight of the device and is fixed in inside work die workstation 1 with work die frock 3.
The working die tool 3 is used for fixing a working die 4, the working die tool 3 comprises a working die pull plate 31, a plurality of groups of uniformly installed springs are arranged in the working die pull plate 31, and one ends of the springs are fixed on a working die press plate 32;
the working die pressing plates 32 are arranged in two groups, a plurality of screw holes are formed in the working die pressing plates 32, and the working die pressing plates 32 are screwed and fixed on the working die tooling 3 through screws 33 with the same number as the screw holes;
the number of screw holes and screws 33 is not less than three.
The working die tool 3 is provided with a plurality of electromagnets 34, and when the working die is transferred, the mechanical arm in the nano-imprinting equipment 2 is fixed through the electromagnets 34 and then drives the working die tool 3 and the working die 4 to be transferred.
The working mold 4 comprises a nano structure 41 in the middle and through holes 42 arranged at four corners.
A transparent observation window 12 is arranged on one side of the working mold workstation 1, so that workers can observe the state inside the working mold conveniently.
The number of the observation windows 12 is not less than five, and the number of the observation windows 12 is the same as that of the material taking windows 15.
An access window 13 is arranged right below the lowest observation window 12, and a handle 131 is arranged on the door body of the access window 13.
The bottom of the working mould station 1 is provided with universal wheels 14. The movement and transport of the working mould station 1 can be facilitated.
The quantity of universal wheel 14 is four at least, and four universal wheels 14 distribute in the four corners department of 1 bottom surfaces of work mould workstation, make the swift more steady that 1 removal of work mould workstation transported.
The bottom of the working mold workstation 1 is provided with a temperature and humidity controller 16, so that the inside of the workstation is constant in temperature and humidity, and the working mold 4 is prevented from being damped and deformed.
The storage process comprises the following steps:
s1: the both ends of the working die 4 are punched to form the punched holes 42 in accordance with the punching positions of the working die platen 32.
S2: the working die 4 is placed on the working die tooling 3, the working die pressing plate 32 is placed above the working die 4, and the working die 4 is pressed and fixed on the working die tooling 3 through the screw 33. One end of the working die tool 3 is provided with a working die pull plate 31, which is used for leveling the working die and preventing the working die from shrinking.
S4: the working die tooling 3 fixed with the working die 4 is placed in the working die workstation 1, and the bearing device 17 fixes the working die tooling inside the workstation.
The working die is arranged on the tool with moderate elasticity, so that the deformation of the working die can be reduced. The constant temperature and humidity inside the working die can prevent the working die from being affected with damp, thereby preventing the nano structure from being damaged and the surface energy of the working die from rising. The top of the workstation is provided with a deionization device, so that static electricity of the working die is eliminated, and static pollution is avoided.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. The utility model provides a nanometer impression working die workstation, working die workstation (1) and working die frock (3), its characterized in that: the working mould workstation (1) can be arranged at one side of the existing nano-imprinting equipment (2) and integrated with the existing nano-imprinting equipment (2);
the working mold workstation (1) comprises a deionization device (11) arranged at the top of the workstation, and the deionization device (11) sucks filtered air and blows the filtered air and static-removing ions to the working mold (4) together for removing static electricity generated by the working mold (4);
a plurality of material taking windows (15) are arranged on one side, close to the nano-imprinting equipment (2), of the working mold workstation (1), and through the material taking windows (15), a mechanical arm in the nano-imprinting equipment (2) can transfer a working mold tool from the working mold workstation (1) to the inside of the nano-imprinting equipment (2) or from the inside of the nano-imprinting equipment (2) to the inside of the working mold workstation (1);
the bearing device (17) is arranged inside the working die workstation (1) and fixes the working die tool (3) inside the working die workstation (1).
2. A nanoimprint work mold station as defined in claim 1, characterized by: the working die tool (3) is used for fixing the working die (4), the working die tool (3) comprises a working die pull plate (31), a plurality of groups of uniformly installed springs are arranged in the working die pull plate (31), and one end of each spring is fixed on the working die press plate (32);
the working die pressing plates (32) are arranged in two groups, a plurality of screw holes are formed in the working die pressing plates (32), and the working die pressing plates (32) are screwed and fixed on the working die tooling (3) through screws (33) with the same number as the screw holes.
3. A nanoimprint work mold station as defined in claim 2, characterized in that: set up a plurality of electro-magnets (34) on work mould frock (3), when shifting work mould, the arm in nanometer impression equipment (2) passes through electro-magnet (34) to be fixed, then drives work mould frock (3) and work mould (4) and shifts.
4. A nanoimprint work mold station as defined in claim 2, characterized in that: the working mould (4) comprises a nano structure (41) in the middle and through holes (42) formed at four corners.
5. A nanoimprinting work mold station as defined in claim 1, characterized by: one side of the working mold workstation (1) is provided with a transparent observation window (12) for workers to observe the state inside the working mold.
6. A nanoimprinting working mold station as defined in claim 5, characterized in that: the number of the observation windows (12) is not less than five, and the number of the observation windows (12) is the same as that of the material taking windows (15).
7. The nanoimprint work mold station of claim 6, characterized in that: an inspection window (13) is arranged right below the lowest observation window (12), and a handle (131) is arranged on a door body of the inspection window (13).
8. A nanoimprinting work mold station as defined in claim 1, characterized by: the bottom of the working mould workstation (1) is provided with universal wheels (14).
9. A nanoimprinting work mold station as defined in claim 8, characterized by: the number of the universal wheels (14) is at least four, and the four universal wheels (14) are distributed at four corners of the bottom surface of the working mold workstation (1).
10. A nanoimprint work mold station as defined in claim 1, characterized by: the bottom of the working mold working station (1) is provided with a temperature and humidity controller (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220655827.6U CN217360548U (en) | 2022-03-24 | 2022-03-24 | Nano-imprinting working mold workstation |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220655827.6U CN217360548U (en) | 2022-03-24 | 2022-03-24 | Nano-imprinting working mold workstation |
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| CN217360548U true CN217360548U (en) | 2022-09-02 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115933311A (en) * | 2022-12-30 | 2023-04-07 | 青岛天仁微纳科技有限责任公司 | A feed mechanism for nanometer impression equipment |
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2022
- 2022-03-24 CN CN202220655827.6U patent/CN217360548U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115933311A (en) * | 2022-12-30 | 2023-04-07 | 青岛天仁微纳科技有限责任公司 | A feed mechanism for nanometer impression equipment |
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