CN217351610U - Lifting furnace - Google Patents
Lifting furnace Download PDFInfo
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- CN217351610U CN217351610U CN202220468276.2U CN202220468276U CN217351610U CN 217351610 U CN217351610 U CN 217351610U CN 202220468276 U CN202220468276 U CN 202220468276U CN 217351610 U CN217351610 U CN 217351610U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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Abstract
The utility model provides a lifting furnace. The thermal baffle which is provided with a plurality of air outlet holes is fixed below the upper flange, so that hydrogen which is introduced through the air inlet holes can be divided into a plurality of parts and enters a crystal pulling space (the space formed by the quartz crucible and the upper flange in the quartz tube is the crystal pulling space) from the plurality of air outlet holes, when the monocrystal growth of germanium is carried out, because the entering hydrogen is divided into a plurality of parts and enters a crystal pulling space, therefore, the distribution and flow guiding effects of the heat insulation plate enable the hydrogen to uniformly flow in the crystal pulling space, so that a plurality of parts of hydrogen flow to the quartz crucible in the vertical direction, and is favorable for forming stable temperature field gradient when the hydrogen reaches the germanium material interface of the quartz crucible, thereby ensuring that the low dislocation germanium single crystal with large volume is pulled out, and the heat insulating plate can ensure that when the pulling furnace acts, the method can reduce the risk that the pollutants generated by the shaking of the upper furnace chamber enter the melt germanium through the hydrogen gas flow, and reduce the pollution of the melt germanium.
Description
Technical Field
The utility model relates to a single crystal production field specifically is a carry and draw stove.
Background
The single crystal growth process of germanium is completed in a single crystal pulling furnace, which generally uses hydrogen as a protective gas, uses a quartz crucible to contain a germanium material, a graphite crucible is positioned outside the quartz crucible to absorb radio frequency waves to generate heat to heat the germanium material for melting, and a crucible rod is positioned right below the graphite crucible to control the lifting and rotating movement of the crucible.
However, in order to pull out a large-volume low-dislocation germanium single crystal, a stable temperature field needs to be ensured, however, most single crystal pulling furnaces introduce hydrogen through one pipe, the hydrogen is unevenly distributed in the pulling furnace space, the hydrogen is a gas with high thermal conductivity, and has adverse effects on the formation of a stable temperature gradient, meanwhile, the thermal conductivity of the same body of germanium is low, a large amount of latent heat of fusion is difficult to transfer out in time during growth, dislocation is easy to generate, and therefore, the furnace body needs to be precisely controlled for heat preservation; in order to ensure the cleanliness in the furnace body, a hard rod is required to be used as a seed crystal rod, but the upper furnace chamber part controls the rotation, the lifting and other movements of the crystal, so that the shaking is difficult to avoid, and some pollutants are easy to enter melt germanium along with airflow to cause pollution, so that a reasonable lifting furnace is urgently needed to solve the problems of hydrogen diversion and the avoidance of the pollutants entering the melt germanium.
SUMMERY OF THE UTILITY MODEL
In view of this, the embodiment of the present invention provides a pulling furnace to solve the problem that the distribution of hydrogen in the pulling space is not uniform, which affects the formation of a stable temperature gradient, and the crystal rotation and lifting movement of the upper furnace chamber are controlled to cause the contaminants to enter the solution germanium along with the hydrogen.
In order to achieve the above object, the embodiment of the present invention provides the following technical solutions:
a pulling furnace comprising: the device comprises a pull head, a telescopic pipe, an upper flange, a quartz pipe, a seed rod, a seed chuck, seed crystals, a quartz crucible, a graphite crucible, an induction coil and a heat insulation plate;
the graphite crucible is arranged in the quartz tube and is positioned at the bottom of the quartz tube;
the quartz crucible is arranged in the graphite crucible;
the upper flange is arranged at the top of the quartz tube and is provided with a first through hole and an air inlet hole for introducing hydrogen;
the heat insulation plate is fixed below the upper flange and is provided with a second through hole;
the seed crystal lifting device comprises a lifting head, a seed crystal rod, a seed crystal chuck, a first through hole, a second through hole and a second through hole;
the seed crystal rod is sleeved with the telescopic pipe, one end of the telescopic pipe is connected with the lifting head, and the other end of the telescopic pipe is connected with the upper flange;
the induction coil is wound on the outer side of the quartz tube and is positioned at the lower part of the quartz tube;
the heat insulation plate is provided with a plurality of air outlet holes for hydrogen to pass through.
Preferably, the heat-insulating plate is of a circular structure, and the heat-insulating plate is in clearance fit with the quartz tube.
Preferably, the first through hole is formed along the axis of the upper flange, and the second through hole is formed along the axis of the heat insulation plate.
Preferably, the first through hole and the second through hole have the same diameter.
Preferably, the matching mode of the second through hole and the seed rod is clearance fit.
Preferably, the heat insulation plate is fixed to the upper flange by a plurality of fixing bars of a predetermined length.
Preferably, the fixing rod is made of stainless steel.
Preferably, the plurality of air outlets are uniformly distributed on the heat insulation plate.
Preferably, the air outlet is of an upward convex conical structure, and the diameter of the upper part of the air outlet is smaller than that of the lower part of the air outlet.
Preferably, the height of the air outlet holes ranges from 5mm to 10 mm.
Based on the above, the utility model provides a pulling furnace, through the fixed heat insulating board that has seted up a plurality of ventholes in the below of upper flange, make through the leading-in hydrogen of inlet port divide into many and get into downwards from a plurality of ventholes in the crystal pulling space (the space that quartz crucible and upper flange formed in the quartz capsule is the crystal pulling space), when carrying out the single crystal growth of germanium, because the hydrogen that gets into divides into many and gets into in the crystal pulling space, therefore, the distribution water conservancy diversion effect of heat insulating board makes hydrogen evenly flow in the crystal pulling space, make many hydrogen flow to quartz crucible in the vertical direction, and when hydrogen reaches the germanium material interface of quartz crucible, be favorable to forming stable temperature field gradient, and then can guarantee to pull out the low dislocation germanium single crystal of bulky, and the heat insulating board can also when the action of upper furnace room (being the pulling furnace of this application promptly), can reduce the pollutant that the shake of upper furnace room produced and get into the fuse-element germanium through the hydrogen air current, the risk of contamination of the germanium in the melt is reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic structural view of a pulling furnace according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a heat insulation board provided by an embodiment of the present invention.
The device comprises a lifting head 1, an extension tube 2, an upper flange 3, an air inlet 31, a quartz tube 4, a seed rod 5, a seed chuck 6, a seed crystal 7, a crystal 8, a quartz crucible 9, a graphite crucible 10, an induction coil 11, a crucible rod 12, a heat insulation plate 13, a second through hole 131, a fixed rod 132 and an air outlet 133.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The embodiment of the utility model provides a carry and draw stove, see fig. 1 and fig. 2, should carry and draw the stove and include: the device comprises a lifting head 1, an extension tube 2, an upper flange 3, a quartz tube 4, a seed rod 5, a seed chuck 6, seed crystals 7, a quartz crucible 9, a graphite crucible 10, an induction coil 11 and a heat insulation plate 13;
the graphite crucible 10 is arranged in the quartz tube 4 and is positioned at the bottom of the quartz tube 4;
the quartz crucible 9 is arranged in the graphite crucible 10;
the upper flange 3 is arranged at the top of the quartz tube 4, and the upper flange 3 is provided with a first through hole and an air inlet hole 31 for introducing hydrogen;
the heat insulation plate 13 is fixed below the upper flange 3, and the heat insulation plate 13 is provided with a second through hole 131;
the lifting head 1 is arranged above the upper flange 3, one end of the seed crystal rod 5 is fixed below the lifting head 1, the other end of the seed crystal rod 5 sequentially passes through the first through hole and the second through hole 131 to be connected with the seed crystal chuck 6, and the seed crystal 7 is fixed below the seed crystal chuck 6;
the seed crystal rod 5 is sleeved with the telescopic pipe 2, one end of the telescopic pipe 2 is connected with the lifting head 1, and the other end of the telescopic pipe 2 is connected with the upper flange 3;
the induction coil 11 is wound outside the quartz tube 4, and the induction coil 11 is located at the lower part of the quartz tube 4;
the heat shield 13 is opened with a plurality of gas outlet holes 133 for the passage of hydrogen gas.
It should be noted that, by fixing the heat insulation plate 13 with a plurality of air outlet holes 133 below the upper flange 3, the hydrogen gas introduced through the air inlet hole 31 will be divided into a plurality of parts and enter the crystal pulling space (the space formed by the quartz crucible 9 and the upper flange 3 in the quartz tube 4 is the crystal pulling space) from the plurality of air outlet holes 133, when growing the germanium single crystal, because the entered hydrogen gas is divided into a plurality of parts and enters the crystal pulling space, the distribution and flow guiding function of the heat insulation plate 13 makes the hydrogen gas flow uniformly in the crystal pulling space, makes a plurality of parts of hydrogen gas flow to the quartz crucible 9 in the vertical direction, and when the hydrogen gas reaches the germanium material interface of the quartz crucible 9, it is beneficial to form a stable temperature field, and the heat insulation plate 13 can also reduce the pollutants generated by the shaking of the upper furnace chamber entering the melt germanium through the hydrogen gas flow when the upper furnace chamber (i.e. the pulling furnace of the present application) acts, the risk of contamination of the germanium in the melt is reduced.
It should be noted that hydrogen is a gas with high thermal conductivity, and if the hydrogen flows and is distributed unevenly in the crystal pulling space, the formation of a stable temperature gradient is adversely affected, so that the introduced hydrogen is divided into a plurality of parts by the thermal insulation plate 13 and is respectively introduced into the crystal pulling space from different positions downwards, the hydrogen can flow uniformly in the crystal pulling space, the formation of a stable temperature gradient is facilitated, and the pulling of a large-volume low-dislocation germanium single crystal can be ensured.
Specifically, the thermal baffle 13 is of a circular structure, and the thermal baffle 13 is in clearance fit with the quartz tube 4.
It should be noted that, the heat insulation plate 13 is arranged in a circular structure, and the heat insulation plate 13 is in clearance fit with the quartz tube 4, so that it can be avoided that hydrogen entering from the air inlet 31 of the upper flange 3 flows through the clearance between the heat insulation plate 13 and the quartz tube 4, which causes that the hydrogen cannot uniformly flow to the quartz crucible 9, further, adverse effects on formation of a stable temperature gradient caused by uneven flow distribution of hydrogen in a crystal pulling space are avoided, and it is effectively ensured that a large-volume low-dislocation germanium single crystal can be pulled out.
It should be further noted that the heat insulation plate 13 is arranged to be a circular structure, the heat insulation plate 13 is in clearance fit with the quartz tube 4, pollutants generated by shaking of the upper furnace chamber can be effectively reduced and enter the melt germanium through hydrogen gas flow, and the risk of contamination of the melt germanium is reduced.
Further, a first through hole is formed along the axis of the upper flange 3, and a second through hole 131 is formed along the axis of the heat insulating plate 13.
It should be noted that the first through hole is formed along the axis of the upper flange 3, and the second through hole 131 is formed along the axis of the heat insulation plate 13, so that the first through hole and the second through hole 131 form concentric circles, and the seed rod 5 is convenient to mount.
Specifically, the first through hole and the second through hole 131 have the same diameter.
It should be noted that the diameters of the first through hole and the second through hole 131 may be the same or different, and in the present application, the diameters of the first through hole and the second through hole 131 are preferably the same.
It should be noted that the diameters of the first through hole and the second through hole 131 are larger than the outer diameter of the seed rod 5, so that the seed rod 5 can more conveniently pass through the seed rod.
Specifically, the second through hole 131 is in clearance fit with the seed rod 5.
It should be noted that, since the seed rod 5 needs to move up and down smoothly in the second through hole 131, the diameter of the second through hole 131 needs to be set larger than that of the seed rod 5, but when the diameter of the second through hole 131 is too large, the hydrogen gas entering through the gas inlet hole 31 does not enter the crystal pulling space formed between the quartz crucible 9 and the heat insulation plate 13 through the gas outlet hole 133, and therefore, the matching manner of the second through hole 131 and the seed rod 5 needs to be set to be clearance fit, so as to reduce the passage of the hydrogen gas from the clearance formed between the second through hole 131 and the seed rod 5, and further ensure that a large amount of hydrogen gas entering from the gas inlet hole 31 can uniformly flow down to the quartz crucible 9 through the gas outlet hole 133.
Preferably, the thermal shield 13 is made of quartz.
It should be noted that, the thermal insulation plate 13 is made of quartz, which can effectively insulate heat.
It should be noted that the heat insulation plate 13 may be made of quartz stone, and may also be made of other materials with heat insulation performance, so that the heat insulation plate 13 is not limited to be made of quartz stone.
Preferably, the insulation board 13 has a thickness ranging from 10mm to 15 mm.
It should be noted that the thickness of the thermal insulation board 13 may be set to 10mm, may also be set to 15mm, and may also be set to any thickness between 10mm and 15mm, such as 13 mm.
Further, the heat insulation plate 13 is fixed to the upper flange 3 by a plurality of fixing bars 132 of a predetermined length.
It should be noted that, the heat insulation plate 13 is fixed to the upper flange 3 through a plurality of fixing rods 132 with preset lengths, so that a certain gas buffering gap exists between the heat insulation plate 13 and the upper flange 3, and after hydrogen enters the gap between the heat insulation plate 13 and the upper flange 3, the hydrogen is dispersed in the gap between the heat insulation plate 13 and the upper flange 3, and then enters the crystal pulling space through a plurality of first through holes in the heat insulation plate 13.
Preferably, the top of the fixing rod 132 is provided with an external thread, and the upper flange 3 is provided with a threaded hole for matching with the external thread of the fixing rod 132.
It should be noted that the fixing rod 132 is fixed to the upper flange 3 by a screw connection method, so as to stably fix the heat insulation plate 13 and prevent the heat insulation plate 13 from shaking during the operation of the upper furnace chamber.
Specifically, the fixing rod 132 is made of stainless steel.
It should be noted that the fixing rod 132 may be made of stainless steel, or may be made of other materials, and the fixing rod 132 is not limited to be made of stainless steel.
Further, a plurality of air outlet holes 133 are uniformly distributed in the insulation plate 13.
It should be noted that, by uniformly arranging the plurality of gas outlets 133 on the heat insulating plate 13, the hydrogen can uniformly flow into the quartz crucible 9 from the gas outlets 133, so that when the hydrogen reaches the germanium material interface of the quartz crucible 9, a stable temperature field can be formed, and the pulling of the large-volume low-dislocation germanium single crystal can be ensured.
Specifically, the air outlet 133 is a cone-shaped structure protruding upward, and the diameter of the upper portion of the air outlet 133 is smaller than the diameter of the lower portion of the air outlet 133.
It should be noted that the gas outlet 133 is set to be an upward convex conical structure, and the diameter of the upper part of the gas outlet 133 is smaller than the diameter of the lower part of the gas outlet 133, so that hydrogen can flow to the quartz crucible 9 along with the shape of the gas outlet 133 after passing through the gas outlet 133, so that hydrogen can flow to the quartz crucible 9 more uniformly, and a stable temperature field can be further formed, thereby ensuring that a large-volume low-dislocation germanium single crystal is pulled out.
Preferably, the upper portion of the outlet holes 133 has a diameter ranging from 1mm to 2mm, and the lower portion of the outlet holes 133 has a diameter ranging from 2mm to 3 mm.
It should be noted that the diameter of the upper portion of the air outlet 133 may be 1mm, 2mm, or any value between 1mm and 2mm, such as 1.2 mm.
The diameter of the lower portion of the air outlet 133 may be 2mm, 3mm, or any value between 2mm and 3mm, such as 2.6 mm.
It should be noted that, when the diameter of the upper portion of the air outlet 133 is 2mm, the diameter of the lower portion of the air outlet 133 is larger than 2 mm.
Further, the height of the air outlet 133 ranges from 5mm to 10 mm.
It should be noted that the height of the air outlet 133 may be 5mm, 10mm, or any value between 5mm and 10mm, such as 8 mm.
Preferably, the pulling furnace further comprises a crucible rod 12 for controlling the elevating and rotating movements of the graphite crucible 10 and the quartz crucible 9.
To facilitate understanding of the above solution, the solution is further described below with reference to fig. 1 and 2.
A pull furnace comprising: the device comprises a lifting head, a telescopic pipe, an upper flange, a quartz pipe, a seed rod, a quartz crucible, a graphite crucible, an induction coil, a crucible rod and a heat insulation plate;
the pulling head is arranged at the top of the pulling furnace and controls the lifting and the rotation of the seed crystal rod so as to control the movement of the crystal;
the seed crystal rod is a hard rod, the lower end of the seed crystal rod is also provided with a seed crystal chuck, the seed crystal chuck is used for clamping seed crystals, the seed crystals are single crystal germanium with a certain crystal orientation, and the single crystals are pulled through the direct contact of the seed crystals and the melt;
the telescopic pipe is arranged between the pulling head and the upper flange, and is telescopic along with the lifting of the seed rod, so that the whole seed rod is ensured to be in the furnace environment;
the quartz tube is an internal place for single crystal pulling, the upper flange is used for sealing the quartz tube, the upper flange is also provided with an air inlet pipe, the air inlet pipe is a hydrogen inlet, and hydrogen is used as protective gas for single crystal pulling;
the quartz crucible contains germanium materials, the graphite crucible is positioned outside the quartz crucible to absorb radio frequency waves generated by the induction coil so as to generate heat to heat and melt the germanium materials, and the crucible rod is positioned right below the graphite crucible to control the lifting and rotating movement of the crucible; the quartz crucible, the graphite crucible and the crucible rod are all positioned in the quartz tube; the induction coil is positioned outside the quartz tube;
the thermal baffle is positioned in the upper space in the quartz tube and comprises a body, and an air outlet hole, a fixed rod and a seed crystal rod hole (namely a second through hole 131) which are arranged on the thermal baffle;
the heat insulation plate is a high-purity quartz disc, the thickness of the heat insulation plate is 10-15mm, disc-shaped protrusions with the thickness of 5-10mm are arranged on the outer edge and the inner edge (a second through hole) of the heat insulation plate in the vertical direction, the outer diameter of the heat insulation plate is slightly smaller than the inner diameter of the quartz tube, the seed crystal rod hole is a seed crystal rod lifting channel, and the diameter of the seed crystal rod hole is slightly larger than the outer diameter of the seed crystal rod;
the fixing rod is made of high-purity stainless steel and is used for fixing the heat insulation disc on the upper flange; the lower part of the fixed rod is connected with the heat insulation plate in a threaded manner, and the upper part of the fixed rod is connected with the flange by adopting two inner hexagonal screws, so that the fixed rod is convenient to disassemble; the fixed rods are symmetrically arranged;
the gas outlet that evenly sets up on the heat shield is the passageway at gas flow direction germanium material interface, and it is handstand little conical structure, and gas pocket upper end is apart from the heat shield 5-10mm in the vertical direction, goes up the gas pocket diameter and is: 1-2mm, the diameter of the lower air hole is as follows: 2-3 mm.
Has the advantages that:
1. the heat insulation plate can reduce heat loss and ensure the stability of a thermal field.
2. Evenly set up the venthole on the heat insulating board, control air current direction: the gas entering the quartz tube through the gas inlet is guided by the distribution of the gas outlet, and the flow rate of the hydrogen is controlled to be 100 plus 300L/h, so that the hydrogen uniformly and rapidly flows to the crucible in the vertical direction and reaches the interface of the germanium material in the crucible, and a stable temperature field is favorably formed.
3. The outer edge and the inner edge (seed crystal rod hole) of the heat insulation plate are both provided with 5-10mm of disc-shaped bulges in the vertical direction, the heat insulation plate is uniformly provided with air outlets which are in an inverted small conical structure, the upper ends of the air outlets are 5-10mm away from the heat insulation plate in the vertical direction, and the air outlets are small in top and large in bottom, so that some pollutants generated by shaking of the upper furnace chamber part are difficult to enter melt germanium through air flow of the air outlets, and pollution is avoided.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A pulling furnace, comprising: the device comprises a pull head, a telescopic pipe, an upper flange, a quartz pipe, a seed rod, a seed chuck, seed crystals, a quartz crucible, a graphite crucible, an induction coil and a heat insulation plate;
the graphite crucible is arranged in the quartz tube and is positioned at the bottom of the quartz tube;
the quartz crucible is arranged in the graphite crucible;
the upper flange is arranged at the top of the quartz tube and is provided with a first through hole and an air inlet hole for introducing hydrogen;
the heat insulation plate is fixed below the upper flange and is provided with a second through hole;
the pulling head is arranged above the upper flange, one end of the seed rod is fixed below the pulling head, the other end of the seed rod sequentially penetrates through the first through hole and the second through hole to be connected with a seed crystal chuck, and the seed crystal is fixed below the seed crystal chuck;
the seed crystal rod is sleeved with the telescopic pipe, one end of the telescopic pipe is connected with the lifting head, and the other end of the telescopic pipe is connected with the upper flange;
the induction coil is wound on the outer side of the quartz tube and is positioned at the lower part of the quartz tube;
the heat insulation plate is provided with a plurality of air outlet holes for hydrogen to pass through.
2. The pulling furnace of claim 1, wherein the heat shield is of circular configuration and is a clearance fit with the quartz tube.
3. The pulling furnace of claim 2, wherein the first through-hole is formed along an axis of the upper flange and the second through-hole is formed along an axis of the heat shield.
4. The pull furnace of claim 1, wherein the first through-hole is the same diameter as the second through-hole.
5. The pulling furnace according to claim 4, wherein the second through hole is in clearance fit with the seed rod.
6. The pulling furnace of claim 1, wherein the heat shield is secured to the upper flange by a plurality of fixed rods of a predetermined length.
7. The furnace of claim 6, wherein the retaining bars are made of stainless steel.
8. The pulling furnace of claim 1, wherein the plurality of gas outlets are evenly distributed in the heat shield.
9. The pulling furnace according to claim 1, wherein the gas outlet is an upwardly convex conical structure, and the upper diameter of the gas outlet is smaller than the lower diameter of the gas outlet.
10. The pulling furnace of claim 9, wherein the height of the gas outlet holes ranges from 5mm to 10 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220468276.2U CN217351610U (en) | 2022-03-04 | 2022-03-04 | Lifting furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220468276.2U CN217351610U (en) | 2022-03-04 | 2022-03-04 | Lifting furnace |
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| Publication Number | Publication Date |
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| CN217351610U true CN217351610U (en) | 2022-09-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202220468276.2U Active CN217351610U (en) | 2022-03-04 | 2022-03-04 | Lifting furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117248274A (en) * | 2023-11-15 | 2023-12-19 | 常州臻晶半导体有限公司 | Crystal growth control system and working method thereof |
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2022
- 2022-03-04 CN CN202220468276.2U patent/CN217351610U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117248274A (en) * | 2023-11-15 | 2023-12-19 | 常州臻晶半导体有限公司 | Crystal growth control system and working method thereof |
| CN117248274B (en) * | 2023-11-15 | 2024-01-26 | 常州臻晶半导体有限公司 | Crystal growth control system and working method thereof |
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