CN217349833U

CN217349833U - Ejecting device

Info

Publication number: CN217349833U
Application number: CN202221358522.5U
Authority: CN
Inventors: 陈树斌
Original assignee: Dongguan Attach Point Intelligent Equipment Co ltd
Current assignee: Dongguan Attach Point Intelligent Equipment Co ltd
Priority date: 2022-06-01
Filing date: 2022-06-01
Publication date: 2022-09-02
Anticipated expiration: 2032-06-01

Abstract

The utility model discloses an ejection device, include: the fixing seat is provided with a first sliding chute along a first direction; setting the length direction of the fixed seat as a first direction; the push rod assembly is connected in the first sliding groove in a sliding mode, one end of the push rod assembly is provided with a cam driving assembly used for pushing the push rod assembly to slide along the first sliding groove, and the other end of the push rod assembly is connected with a thimble assembly; the guide wheels are rotatably connected to two sides of the first sliding groove respectively, and the two guide wheels are abutted to two side walls of the push rod assembly respectively. When the wafer separation device works, the cam driving assembly operates to push the push rod assembly to slide along the first sliding groove, so that the ejector pin assembly is driven to move in the vertical direction to pierce the blue membrane, and the wafer is separated from the blue membrane; wherein, the leading wheel plays the guide effect to push rod assembly, avoids rocking about push rod assembly, reduces the wearing and tearing of part, improves life.

Description

Ejecting device

Technical Field

The utility model relates to a wafer processing technology field especially relates to an ejecting device.

Background

After the chips are diced, each chip is completely separated from another chip and is independently adhered to a sticky film, which is generally called a blue film. When the machine station sucks the wafer, the wafer needs to be separated from the blue film, the mechanical arm sucks the wafer from the upper part of the blue film by using a vacuum suction nozzle, and then the wafer is placed at the wafer fixing position after mechanical action.

In the prior art, a thimble module is arranged below a blue film to be matched, the blue film is pushed out of a wafer by the pushing force of a thimble, and the wafer is separated from the blue film so as to be convenient for an upper suction nozzle to suck the wafer; the ejector pin is connected with a push rod, one end of the push rod is provided with an eccentric wheel, and the eccentric wheel pushes the ejector pin to move upwards.

In view of this, it is necessary to improve the ejection device in the prior art to solve the technical problem of abrasion of the push rod due to the lateral force.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an ejecting device solves above technical problem.

To achieve the purpose, the utility model adopts the following technical proposal:

an ejection device, comprising:

the fixing seat is provided with a first sliding chute along a first direction; setting the length direction of the fixed seat as a first direction;

the push rod assembly is connected in the first sliding groove in a sliding mode, one end of the push rod assembly is provided with a cam driving assembly used for pushing the push rod assembly to slide along the first sliding groove, and the other end of the push rod assembly is connected with a thimble assembly;

the guide wheels are rotatably connected to two sides of the first sliding groove respectively, and the two guide wheels are abutted to two side walls of the push rod assembly respectively.

Optionally, one end of the fixing seat is provided with a thimble mounting cylinder, the thimble mounting cylinder is provided with a sliding hole in a penetrating manner along a first direction, and one end of the push rod assembly penetrates through the sliding hole and is connected with the thimble assembly;

an ejector pin cap is arranged at one end, away from the fixed seat, of the ejector pin mounting cylinder, a vacuum cavity is formed in the ejector pin cap, and the ejector pin assembly is accommodated in the vacuum cavity;

and a plurality of connecting holes communicated with the vacuum chamber are formed in one end face, far away from the fixing seat, of the thimble cap.

Optionally, the ejector pin assembly includes an ejector pin connecting block;

thimble connecting block one end with push rod assembly connects, and the other end is equipped with a plurality of thimble body, every thimble body correspondence has one the connecting hole.

Optionally, the thimble mounting cylinder is provided with a gas path through hole, one end of the gas path through hole is communicated with the vacuum chamber, and the other end of the gas path through hole is connected with the vacuum gas path assembly.

Optionally, the putter assembly includes:

the sliding block is connected in the first sliding groove in a sliding manner;

the swinging wheel is arranged at the first end of the sliding block and is abutted with the cam driving component;

the push rod body is arranged at the second end of the sliding block, and one end, far away from the sliding block, of the push rod body is connected with the ejector pin assembly.

Optionally, an induction sheet is arranged on the sliding block, and an inductor is arranged on the fixed seat;

the inductor is provided with an induction space for the induction sheet to pass through.

Optionally, the cam driving assembly includes a first driving member, a driving end of the first driving member is connected to the cam, and the first driving member is configured to drive the cam to rotate;

the cam is installed in the first sliding groove, and the cam is abutted to the push rod assembly.

Optionally, a limiting boss is arranged on a rotation path of the cam in the first sliding groove, and the limiting boss is used for limiting the cam.

Optionally, the device further comprises a base assembly, wherein the base assembly comprises a bottom plate, and an X-axis linear module is arranged on the bottom plate; the X-axis linear module is connected with a Y-axis linear module in a driving manner and used for driving the Y-axis linear module to move along the X-axis direction;

the driving end of the Y-axis linear module is connected with a Z-axis lifting module, and the Y-axis linear module is used for driving the Z-axis lifting module to linearly move along the Y-axis direction;

the driving end of the Z-axis lifting module is connected with the fixed seat, and the Z-axis lifting module is used for driving the fixed seat to linearly move along the Z-axis direction.

Compared with the prior art, the utility model discloses following beneficial effect has: when the device works, the cam driving assembly operates to push the push rod assembly to slide along the first sliding groove, so that the ejector pin assembly is driven to move along the vertical direction to pierce the blue membrane, and the wafer is separated from the blue membrane; the guide wheel plays a role in guiding the push rod assembly, the left and right shaking of the push rod assembly is avoided, the abrasion of parts is reduced, and the service life is prolonged.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without inventive exercise.

The structure, ratio, size and the like shown in the drawings of the present specification are only used for matching with the content disclosed in the specification, so as to be known and read by people familiar with the technology, and are not used for limiting the limit conditions which can be implemented by the present invention, so that the present invention does not have the substantial significance in the technology, and any structure modification, ratio relationship change or size adjustment should still fall within the scope which can be covered by the technical content disclosed by the present invention without affecting the efficacy which can be produced by the present invention and the achievable purpose.

Fig. 1 is a schematic overall structure diagram of the ejection device;

FIG. 2 is a schematic front view of a thimble portion of the ejector;

FIG. 3 is a schematic structural view of a thimble portion of the ejector device;

FIG. 4 is a schematic cross-sectional view of the ejector pin portion of the ejector device;

fig. 5 is a schematic structural view of a cam and a limit bump of a thimble of the ejector device.

Illustration of the drawings: the ejector pin type vacuum ejector comprises a fixed seat 1, a first sliding groove 2, a push rod component 3, a cam driving component 4, an ejector pin component 5, a guide wheel 6, an ejector pin mounting cylinder 7, a sliding hole 8, an ejector pin cap 9, a vacuum cavity 10, a connecting hole 11, an ejector pin connecting block 12, an ejector pin body 13, a vacuum air circuit component 14, a sliding block 15, a swinging wheel 16, a push rod body 17, an induction sheet 18, an inductor 19, a first driving piece 20, a cam 21, a limiting boss 22, a base component 23, a bottom plate 24, an X-axis linear module 25, a Y-axis linear module 26 and a Z-axis lifting module 27.

Detailed Description

In order to make the objects, features and advantages of the present invention more obvious and understandable, the drawings in the embodiments of the present invention are combined below to clearly and completely describe the technical solutions in the embodiments of the present invention, and obviously, the embodiments described below are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention. It should be noted that when one component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present.

The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.

Combine fig. 1 to fig. 5 to show to the length direction of bottom plate 24 is the X axle, and vertical direction is the Z axle, establishes space rectangular coordinate system, the embodiment of the utility model provides an ejecting device, include:

the fixing seat 1 is provided with a first sliding chute 2 along a first direction; setting the length direction of the fixed seat 1 as a first direction;

the push rod assembly 3 is connected in the first sliding groove 2 in a sliding mode, one end of the push rod assembly 3 is provided with a cam driving assembly 4 used for pushing the push rod assembly 3 to slide along the first sliding groove 2, and the other end of the push rod assembly 3 is connected with a thimble assembly 5;

the guide wheel 6, the both sides of first spout 2 are rotated respectively and are connected with one the guide wheel 6, two guide wheels 6 respectively with the both sides wall of push rod assembly 3 offsets.

The utility model discloses a theory of operation does: when the wafer separation device works, the cam driving assembly 4 operates to push the push rod assembly 3 to slide along the first sliding groove 2, so that the ejector pin assembly 5 is driven to move along the vertical direction to pierce the blue film, and the wafer is separated from the blue film; wherein, leading wheel 6 plays right push rod assembly 3's guide effect avoids rocking about push rod assembly 3, reduces the wearing and tearing of part, improves life.

In this embodiment, one end of the fixed seat 1 is provided with an ejector pin mounting cylinder 7, the ejector pin mounting cylinder 7 is provided with a sliding hole 8 penetrating along a first direction, and one end of the push rod assembly 3 penetrates through the sliding hole 8 and is connected with the ejector pin assembly 5;

an ejector pin cap 9 is arranged at one end, away from the fixed seat 1, of the ejector pin mounting cylinder 7, a vacuum chamber 10 is formed in the ejector pin cap 9, and the ejector pin assembly 5 is accommodated in the vacuum chamber 10;

one end face of the thimble cap 9, which is far away from the fixed seat 1, is provided with a plurality of connecting holes 11 communicated with the vacuum chamber 10.

Specifically, the thimble assembly 5 comprises a thimble connection block 12;

one end of the thimble connecting block 12 is connected with the push rod component 3, the other end of the thimble connecting block is provided with a plurality of thimble bodies 13, and each thimble body 13 corresponds to one connecting hole 11.

Further, the thimble mounting tube 7 is provided with a gas path through hole, one end of the gas path through hole is communicated with the vacuum chamber 10, and the other end is connected with a vacuum gas path assembly 14. The vacuum air path assembly 14 operates to provide a vacuum negative pressure effect to the vacuum chamber 10 through the air path through hole, and the connecting hole 11 is communicated with the vacuum chamber 10, so as to generate an adsorption force to suck the wafer;

it should be noted that, in conjunction with fig. 3, in operation, the thimble cap 9 abuts against the blue film carrying the wafer, and the vacuum gas circuit assembly 14 operates to suck the wafer; meanwhile, the cam driving component 4 operates to push the push rod component 3 to slide upwards, the push rod component 3 slides along the sliding hole 8, one end of the ejector pin body 13 is pushed to extend out along the connecting hole 11, and the ejector pin body 13 punctures the blue membrane, so that the blue membrane is separated from the wafer;

specifically, the push rod assembly 3 includes:

the sliding block 15 is connected in the first sliding chute 2 in a sliding manner;

the swinging wheel 16 is arranged at the first end of the sliding block 15, and the swinging wheel 16 is abutted with the cam driving component 4;

the push rod body 17 is arranged at the second end of the sliding block 15, and one end, far away from the sliding block 15, of the push rod body 17 is connected with the ejector pin component 5.

As shown in fig. 4, when the cam driving assembly 4 operates, the swinging wheel 16 is pushed to rotate, and the swinging wheel 16 drives the sliding block 15 to slide along the first sliding chute 2, so as to drive the push rod body 17 to push the thimble assembly 5.

Further, an induction sheet 18 is arranged on the sliding block 15, and an inductor 19 is arranged on the fixed seat 1;

the inductor 19 is provided with an induction space for the induction sheet 18 to pass through. When the sliding block 15 slides along the first sliding groove 2, the sensing piece 18 is driven to slide along the sensing space, and the sensor 19 senses the position of the sensing piece 18, so that the ejection height of the ejector pin assembly 5 is judged, and the control by a user is facilitated.

In this embodiment, the cam driving assembly 4 includes a first driving member 20, a driving end of the first driving member 20 is connected to a cam 21, and the first driving member 20 is configured to drive the cam 21 to rotate;

the cam 21 is installed in the first sliding groove 2, and the cam 21 is abutted to the push rod assembly 3.

Further, a limiting boss 22 is arranged in the first sliding groove 2 along the rotation path of the cam 21, and the limiting boss 22 is used for limiting the cam 21.

Referring to fig. 5, the operation of the first driving member 20 can drive the cam 21 to rotate around the shaft, the cam 21 rotates to push the push rod assembly 3 to swing up and down, and the limiting boss 22 plays a role in limiting the rotation angle of the cam 21, so that the operation stability of the push rod assembly 3 is improved.

In this embodiment, the device further includes a base assembly 23, where the base assembly 23 includes a bottom plate 24, and an X-axis linear module 25 is disposed on the bottom plate 24; the X-axis linear module 25 is connected with a Y-axis linear module 26 in a driving manner, and the X-axis linear module 25 is used for driving the Y-axis linear module 26 to move along the X-axis direction;

the driving end of the Y-axis linear module 26 is connected with a Z-axis lifting module 27, and the Y-axis linear module 26 is used for driving the Z-axis lifting module 27 to linearly move along the Y-axis direction;

the driving end of the Z-axis lifting module 27 is connected to the fixed base 1, and the Z-axis lifting module 27 is configured to drive the fixed base 1 to move linearly along the Z-axis direction.

Referring to fig. 1, in the present embodiment, the spatial positions of the thimble cap 9 and the thimble assembly 5 are adjusted to correspond to the position of the wafer by the X-axis linear module 25, the Y-axis linear module 26 and the Z-axis lifting module 27;

after the completion is ejecting to a wafer, the position of adjustable thimble cap 9 and thimble assembly 5 to next wafer below accomplishes the ejecting work of a plurality of wafers automatically, improves production efficiency.

The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims

1. An ejection device, comprising:

the fixing seat (1) is provided with a first sliding chute (2) along a first direction; setting the length direction of the fixed seat (1) as a first direction;

the push rod assembly (3) is connected in the first sliding groove (2) in a sliding mode, one end of the push rod assembly (3) is provided with a cam driving assembly (4) used for pushing the push rod assembly (3) to slide along the first sliding groove (2), and the other end of the push rod assembly is connected with a thimble assembly (5);

the guide wheel (6), the both sides of first spout (2) are rotated respectively and are connected with one guide wheel (6), two guide wheels (6) respectively with the both sides wall of push rod subassembly (3) offsets.

2. The ejection device according to claim 1, wherein one end of the fixed seat (1) is provided with an ejector pin mounting cylinder (7), a sliding hole (8) is formed in the ejector pin mounting cylinder (7) in a penetrating manner along a first direction, and one end of the push rod assembly (3) penetrates through the sliding hole (8) and is connected with the ejector pin assembly (5);

an ejector pin cap (9) is arranged at one end, away from the fixed seat (1), of the ejector pin mounting cylinder (7), a vacuum chamber (10) is formed in the ejector pin cap (9), and the ejector pin assembly (5) is accommodated in the vacuum chamber (10);

and a plurality of connecting holes (11) communicated with the vacuum chamber (10) are formed in one end face, far away from the fixed seat (1), of the thimble cap (9).

3. Ejection device according to claim 2, wherein said ejection pin assembly (5) comprises an ejection pin connection block (12);

thimble connecting block (12) one end with push rod subassembly (3) is connected, and the other end is equipped with a plurality of thimble body (13), every thimble body (13) correspond one connecting hole (11).

4. The ejection device as claimed in claim 2, wherein the thimble mounting cylinder (7) is provided with a gas passage hole, one end of the gas passage hole is communicated with the vacuum chamber (10), and the other end is connected with a vacuum gas passage component (14).

5. Ejection device according to claim 1, characterized in that said push rod assembly (3) comprises:

the sliding block (15), the sliding block (15) is connected in the first sliding chute (2) in a sliding manner;

the swinging wheel (16) is arranged at the first end of the sliding block (15), and the swinging wheel (16) is abutted with the cam driving component (4);

the push rod body (17) is arranged at the second end of the sliding block (15), and one end, far away from the sliding block (15), of the push rod body (17) is connected with the ejector pin assembly (5).

6. The ejection device according to claim 5, characterized in that the slider (15) is provided with an induction sheet (18), and the fixed seat (1) is provided with an inductor (19);

the inductor (19) is provided with an induction space for the induction sheet (18) to pass through.

7. The ejection device according to claim 1, characterized in that the cam drive assembly (4) comprises a first drive member (20), the drive end of the first drive member (20) being connected to a cam (21), the first drive member (20) being adapted to drive the cam (21) in rotation;

the cam (21) is installed in the first sliding groove (2), and the cam (21) is abutted to the push rod assembly (3).

8. The ejection device according to claim 7, characterized in that a limit boss (22) is provided in the first chute (2) along the rotational path of the cam (21), the limit boss (22) being for limiting the cam (21).

9. The ejection device according to claim 1, further comprising a base assembly (23), wherein the base assembly (23) comprises a bottom plate (24), and an X-axis linear module (25) is arranged on the bottom plate (24); the X-axis linear module (25) is connected with a Y-axis linear module (26) in a driving mode, and the X-axis linear module (25) is used for driving the Y-axis linear module (26) to move along the X-axis direction;

the driving end of the Y-axis linear module (26) is connected with a Z-axis lifting module (27), and the Y-axis linear module (26) is used for driving the Z-axis lifting module (27) to linearly move along the Y-axis direction;

the driving end of the Z-axis lifting module (27) is connected with the fixed seat (1), and the Z-axis lifting module (27) is used for driving the fixed seat (1) to linearly move along the Z-axis direction.