CN217324251U

CN217324251U - Coating processing equipment with airtightness detection function

Info

Publication number: CN217324251U
Application number: CN202220285130.4U
Authority: CN
Inventors: 胡冀; 占兵; 周家维
Original assignee: HUANGJINWU VACUUM SCIENCE AND
Current assignee: HUANGJINWU VACUUM SCIENCE AND
Priority date: 2022-02-11
Filing date: 2022-02-11
Publication date: 2022-08-30
Anticipated expiration: 2032-02-11

Abstract

The application discloses coating processing equipment who possesses airtight function that detects relates to the coating equipment field, including the coating machine main part, anterior one side activity hinge of coating machine main part has a body, the first connecting block of the anterior fixedly connected with of coating machine main part, the equal fixed mounting in both sides of first connecting block has a plurality of cylinders, the output fixedly connected with stand pipe of cylinder wears to establish and fixedly connected with guide post in the stand pipe, one side fixedly connected with that the guide post is close to the door body presses the briquetting. This application is through with the closed back of the door body, to the one side slip guide post that is close to the door body, drive actuating cylinder shrink, cylinder accessible stand pipe and guide post drive press the both sides of pressing the briquetting to the second connecting block to press, and then compress tightly the door body in the coating machine main part, effectively solved the most artifical form that uses hasp or fastener of the vacuum coating machine door body and closed, the closed dynamics that appears the door body easily is not enough and leads to the poor problem of gas tightness.

Description

Coating processing equipment with airtightness detection function

Technical Field

The application relates to the field of coating equipment, in particular to coating processing equipment with an air tightness detection function.

Background

The coating processing equipment uses a physical or chemical method and a series of new technologies of absorbing electron beams, molecular beams, ion beams, plasma beams, radio frequency, magnetic control and the like to evaporate or sputter metals, alloys or compounds in vacuum so as to solidify and deposit the metals, the alloys or the compounds on a coated object, and further forms a thin film.

Vacuum coating machine need be with the air extraction of inside when the operation, makes inside be the state of nearly vacuum, and the most form of using hasp or fastener of the manual use of current vacuum coating machine door body is closed, appears easily that the closed dynamics of the door body is not enough and lead to the poor condition of gas tightness.

SUMMERY OF THE UTILITY MODEL

In order to solve the most artifical form that uses hasp or fastener of using of the vacuum coating machine door body and close, the closed dynamics that appears the door body easily is not enough and leads to the poor problem of gas tightness, this application provides a coating film processing equipment who possesses airtight detection function.

The application provides a coating processing equipment that possesses airtight detection function adopts following technical scheme: the utility model provides a coating film processing equipment that possesses airtight detection function, includes the coating machine main part, anterior one side activity hinge of coating machine main part has a body, the first connecting block of anterior fixedly connected with of coating machine main part, the equal fixed mounting in both sides of first connecting block has a plurality of cylinders, the output fixedly connected with stand pipe of cylinder, wear to establish and fixedly connected with guide post in the stand pipe, one side fixedly connected with that the guide post is close to the door body presses the briquetting, one side fixedly connected with second connecting block that is close to the coating machine main part of the door body.

Through adopting above-mentioned technical scheme, with the closed back of the door body, to the one side slip guide post that is close to the door body for two press the briquetting just right with the second connecting block respectively, drive actuating cylinder shrink, cylinder accessible stand pipe and guide post drive press the briquetting and press the both sides of second connecting block to press, and then compress tightly the door body in the coating machine main part.

Optionally, a first sealing ring is fixedly connected to a surface of one side, close to the first sealing ring, of the first connecting block, and a second sealing ring is fixedly connected to a surface of one side, close to the first connecting block, of the second connecting block.

By adopting the technical scheme, when the door body is closed on the coating machine main body, the first sealing ring on the first connecting block and the second sealing ring on the second connecting block are sufficiently compressed and attached, so that the sealing effect can be achieved.

Optionally, a plurality of concave rings are arranged on the surface of one side of the first sealing ring, the size of the plurality of concave rings is gradually reduced from outside to inside, a convex ring matched with the concave rings is fixedly connected to the surface of one side of the second sealing ring, and the convex ring is movably inserted into the concave ring.

Through adopting above-mentioned technical scheme, with the closed back of the door body, the bulge loop on the second sealing ring can block in the concave ring on the first sealing ring, can reach outstanding sealed effect through the cooperation of a plurality of concave rings and bulge loop.

Optionally, a plurality of mounting seats corresponding to the air cylinders are fixedly connected to two sides of the first connecting block, and the air cylinders are arranged in the mounting seats in a penetrating manner and are fixedly connected.

Through adopting above-mentioned technical scheme, the mount pad can be installed the cylinder for the cylinder is stable firm when the operation.

Optionally, the back fixedly connected with sand grip of pressing the briquetting, the concave strip with sand grip looks adaptation is seted up to one side surface that first connecting block was kept away from to the second connecting block.

Through adopting above-mentioned technical scheme, when the drive was pressed the second connecting block according to the briquetting, make in the sand grip card goes into concave strip, concave strip can carry on spacingly to pressing the briquetting, hinders to press the in-process to appear the condition of relative slip according to briquetting and second connecting block.

Optionally, the top and the bottom of the pressing block are respectively close to the top and the bottom of the main body of the film plating machine.

Through adopting above-mentioned technical scheme for press the both sides that the piece can fully press the second connecting block according to the pressure, make the door body can fully compress tightly in the coating machine main part.

Optionally, a boss is fixedly connected to one side of the guide column, which is far away from the pressing block, and the diameter of the boss is located in the aperture of the guide tube.

Through adopting above-mentioned technical scheme, the boss can play spacing effect, hinders guide post and stand pipe and breaks away from mutually.

Optionally, a vacuum pressure gauge is fixedly connected to the top of the coating machine main body, and a detection end of the vacuum pressure gauge is communicated with an inner cavity of the coating machine main body.

By adopting the technical scheme, the arranged vacuum pressure gauge can detect the air pressure inside the coating machine main body, and further the purpose of detecting the air tightness of the coating machine main body is achieved.

To sum up, the present application includes the following beneficial effects:

the coating machine adopts the mutual matching of the coating machine main body, the door body, the air cylinder, the pressing block, the vacuum pressure gauge and the guide post, after the door body is closed, the guide post slides to one side close to the door body, the two pressing blocks are respectively opposite to the second connecting block, the cylinder is driven to contract, the convex strips are clamped in the concave strips, the cylinder can drive the pressing blocks to press the two sides of the second connecting block through the guide pipe and the guide post, further pressing the door body on the coating machine main body, effectively solving the problem that the door body of the vacuum coating machine is mostly closed by manually using a lock catch or a fastener, so that the door body is easy to have poor air tightness caused by insufficient closing force, the convex ring on the second sealing ring can be clamped into the concave ring on the first sealing ring, can reach outstanding sealed effect through the cooperation of a plurality of concave rings and bulge loop, can conveniently detect the inside gas tightness of coating machine main part through vacuum pressure gauge.

Drawings

FIG. 1 is a side view of the overall structure of the present application;

FIG. 2 is a schematic structural view of a coating machine main body and a door body of the application;

FIG. 3 is an enlarged view at A of FIG. 2 of the present application;

fig. 4 is an enlarged view at B in fig. 2 of the present application.

Description of reference numerals:

1. a film plating machine main body; 11. a first connection block; 12. a first seal ring; 121. a concave ring; 2. a door body; 21. a second connecting block; 211. concave strips; 22. a second seal ring; 221. a convex ring; 3. a cylinder; 31. a guide tube; 32. a mounting seat; 4. a pressing block; 41. a convex strip; 5. a vacuum pressure gauge; 6. a guide post; 61. a boss.

Detailed Description

The present application is described in further detail below with reference to figures 1-4.

Referring to fig. 1-3, the application discloses a coating processing equipment with an air tightness detection function, which comprises a coating machine main body 1, wherein a door body 2 is movably hinged to one side of the front portion of the coating machine main body 1, a first connecting block 11 is fixedly connected to the front portion of the coating machine main body 1, a plurality of air cylinders 3 perpendicular to the plane where the first connecting block 11 is located are fixedly installed on the two sides of the first connecting block 11, a plurality of installing seats 32 corresponding to the air cylinders 3 are fixedly connected to the two sides of the first connecting block 11, and the air cylinders 3 are arranged in the installing seats 32 in a penetrating mode and are fixedly connected to the installing seats. The mounting seat 32 can mount the cylinder 3, so that the cylinder 3 is stable and firm during operation.

Referring to fig. 3, the output end of the cylinder 3 is fixedly connected with a guide tube 31, and a guide post 6 perpendicular to the cylinder 3 is fixedly connected to the guide tube 31. One side of the guide post 6 close to the door body 2 is fixedly connected with a pressing block 4, and one side of the door body 2 close to the film plating machine main body 1 is fixedly connected with a second connecting block 21. After the door body 2 is closed, the guide post 6 slides to one side close to the door body 2, so that the two pressing blocks 4 are just opposite to the second connecting block 21 respectively, the driving cylinder 3 contracts, the air cylinder 3 can drive the pressing blocks 4 to press the two sides of the second connecting block 21 through the guide pipe 31 and the guide post 6, and the door body 2 is further pressed on the film coating machine main body 1. The side of the guide post 6 far away from the pressing block 4 is fixedly connected with a boss 61, and the diameter of the boss 61 is the bore diameter of the guide tube 31. The boss 61 can play a role of limiting and prevent the guide post 6 from being separated from the guide tube 31.

Referring to fig. 1-3, the top and bottom of the pressing block 4 are respectively close to the top and bottom of the coater body 1. So that the pressing blocks 4 can fully press the two sides of the second connecting block 21, and the door body 2 can fully press the film plating machine main body 1. The back of the pressing block 4 is fixedly connected with a convex strip 41, and the surface of one side of the second connecting block 21, which is far away from the first connecting block 11, is provided with a concave strip 211 matched with the convex strip 41. When the drive is pressed the second connecting block 21 according to the pressing block 4, make in the sand grip 41 card goes into concave strip 211, concave strip 211 can carry on spacingly to pressing the pressing block 4, hinders to press the in-process and presses the condition that relative slip appears in pressing block 4 and second connecting block 21.

Referring to fig. 2 and 4, a first sealing ring 12 is fixedly connected to a surface of the first connecting block 11 close to the first sealing ring 12, and a second sealing ring 22 is fixedly connected to a surface of the second connecting block 21 close to the first connecting block 11. When the door body 2 is closed on the coating machine main body 1, the first sealing ring 12 on the first connecting block 11 and the second sealing ring 22 on the second connecting block 21 are sufficiently pressed and attached, so that a sealing effect can be achieved. A plurality of concave rings 121 are formed on the surface of one side of the first sealing ring 12, the size of the concave rings 121 is gradually reduced from outside to inside, a convex ring 221 matched with the concave rings 121 is fixedly connected to the surface of one side of the second sealing ring 22, and the convex ring 221 is movably inserted into the concave rings 121. The protruding ring 221 of the second sealing ring 22 can be snapped into the recessed ring 121 of the first sealing ring 12, and a good sealing effect can be achieved by the cooperation of the plurality of recessed rings 121 and the protruding ring 221.

Referring to fig. 1, a vacuum pressure gauge 5 is fixedly connected to the top of the main body 1 of the film plating machine, and a detection end of the vacuum pressure gauge 5 is communicated with an inner cavity of the main body 1 of the film plating machine. The vacuum pressure gauge 5 can detect the air pressure inside the film coating machine main body 1, and further the purpose of detecting the air tightness of the film coating machine main body 1 is achieved.

The application principle of a coating processing equipment who possesses airtight detection function of this application is: after the door body 2 is closed, to one side sliding guide post 6 that is close to the door body 2, make two press according to briquetting 4 just right with second connecting block 21 respectively, drive actuating cylinder 3 shrink, make in the concave strip 211 is gone into to the sand grip 41 card, cylinder 3 accessible stand guide 31 and guide post 6 drive press briquetting 4 to press the both sides of second connecting block 21 to press, and then compress tightly the door body 2 on coating machine main part 1, first sealing ring 12 on the first connecting block 11 and second sealing ring 22 on the second connecting block 21 fully compress tightly and laminate, protruding ring 221 on the second sealing ring 22 can be gone into in the concave ring 121 on the first sealing ring 12, cooperation through a plurality of concave rings 121 and protruding ring 221 can reach outstanding sealed effect, can detect the inside gas tightness of coating machine main part 1 through vacuum pressure gauge 5.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. The utility model provides a coating film processing equipment that possesses airtight detection function, includes coating machine main part (1), the anterior one side activity of coating machine main part (1) articulates there is a body (2), its characterized in that: the utility model discloses a film plating machine, including the anterior fixedly connected with of film plating machine main part (1) first connecting block (11), the equal fixed mounting in both sides of first connecting block (11) has a plurality of cylinders (3), the output end fixedly connected with guide tube (31) of cylinder (3), wear to establish and fixedly connected with guide post (6) in guide tube (31), one side fixedly connected with press block (4) that guide post (6) are close to the door body (2), one side fixedly connected with second connecting block (21) of the door body (2) that are close to film plating machine main part (1).

2. The coating processing apparatus with the airtightness detection function according to claim 1, wherein: first connecting block (11) are close to one side fixed surface of first sealing ring (12) and are connected with first sealing ring (12), one side fixed surface that second connecting block (21) are close to first connecting block (11) is connected with second sealing ring (22).

3. The coating processing apparatus with the airtightness detection function according to claim 2, wherein: a plurality of concave rings (121) are arranged on the surface of one side of the first sealing ring (12), the size of the plurality of concave rings (121) is gradually reduced from outside to inside, a convex ring (221) matched with the concave rings (121) is fixedly connected to the surface of one side of the second sealing ring (22), and the convex ring (221) is movably inserted into the concave rings (121).

4. The coating processing apparatus with the airtightness detection function according to claim 1, wherein: the two sides of the first connecting block (11) are fixedly connected with a plurality of mounting seats (32) corresponding to the air cylinders (3), and the air cylinders (3) are arranged in the mounting seats (32) in a penetrating mode and are fixedly connected.

5. The coating processing apparatus with the airtightness detection function according to claim 1, wherein: the back fixedly connected with sand grip (41) of pressing block (4), concave strip (211) with sand grip (41) looks adaptation is seted up to one side surface that first connecting block (11) was kept away from in second connecting block (21).

6. The coating processing apparatus with the airtightness detection function according to claim 1, wherein: the top and the bottom of the pressing block (4) are respectively close to the top and the bottom of the film plating machine main body (1).

7. The coating processing apparatus with the airtightness detection function according to claim 1, wherein: a boss (61) is fixedly connected to one side, away from the pressing block (4), of the guide column (6), and the diameter of the boss (61) is located in the aperture of the guide pipe (31).

8. The coating processing apparatus with the airtightness detection function according to claim 1, wherein: the top of the film plating machine main body (1) is fixedly connected with a vacuum pressure gauge (5), and the detection end of the vacuum pressure gauge (5) is communicated with the inner cavity of the film plating machine main body (1).