CN214193435U

CN214193435U - High-efficient vacuum coating system

Info

Publication number: CN214193435U
Application number: CN202120121729.XU
Authority: CN
Inventors: 张楠林; 王静波
Original assignee: Yangming Quantum Technology Shenzhen Co Ltd
Current assignee: Yangming Quantum Technology Shenzhen Co Ltd
Priority date: 2021-01-18
Filing date: 2021-01-18
Publication date: 2021-09-14
Anticipated expiration: 2031-01-18

Abstract

The utility model belongs to the technical field of vacuum coating equipment, concretely relates to high-efficient vacuum coating system, which comprises a workbench, vacuum mechanism, coating mechanism and control mechanism, coating mechanism is including the coating film chamber of locating the workstation upside, coating film chamber upper end is equipped with the bulge loop, the bulge loop is opened there is the annular, the bulge loop articulates there is the chamber lid, chamber lid centre of a circle department is equipped with the threaded rod, the threaded rod is kept away from coating film chamber one end and is equipped with the first in command, the threaded rod other end rotates and is equipped with the closing plate with annular assorted, relative pin joint one side of bulge loop is equipped with the resilience subassembly, the bulge loop is equipped with the C-shaped piece for pin joint one side, the chamber lid be equipped with C-shaped piece assorted J-shaped elasticity fixture block, efficient vacuum coating processing can be carried out to this equipment, the work piece of being convenient for when playing good sealed effect, the interpolation of material.

Description

High-efficient vacuum coating system

Technical Field

The utility model belongs to the technical field of vacuum coating equipment, concretely relates to high-efficient vacuum coating system.

Background

Vacuum coating refers to a method of forming a thin film by heating a metal or non-metal material under high vacuum conditions to evaporate and condense the material on the surface of a workpiece. For example, vacuum aluminum plating, vacuum chromium plating, etc., vacuum plating is an important aspect of vacuum application field, which is a new process for providing a thin film for scientific research and practical production by using a physical or chemical method based on a vacuum technique and absorbing a series of new techniques such as electron beam, molecular beam, ion beam, plasma beam, radio frequency, magnetic control, etc., and simply, a method of evaporating or sputtering a metal, an alloy or a compound in a vacuum to solidify and deposit it on a coated object is called vacuum plating.

When vacuum coating processing is carried out, a vacuum environment is a necessary environment for processing, but the existing equipment has a very complicated opening and closing process for achieving a better sealing effect, and the cavity cover can be opened or closed by a large amount of operation to achieve a high-efficiency vacuum effect, so that the processing efficiency of vacuum coating is influenced.

SUMMERY OF THE UTILITY MODEL

The utility model aims at: the high-efficiency vacuum coating system can meet the high-efficiency coating processing requirement of workpieces, is convenient for opening and closing the cavity cover and has a good sealing effect.

In order to realize the technical purpose, the utility model discloses a technical scheme as follows:

a high-efficiency vacuum coating system comprises a workbench, a vacuum mechanism, a coating mechanism and a control mechanism, wherein the control mechanism is electrically connected with an external power supply, the coating mechanism comprises a coating cavity arranged on the upper side of the workbench, the lower side of the coating cavity is connected with the vacuum mechanism, a film thickness monitoring sensor, an evaporation boat and a plurality of heating binding posts connected with the evaporation boat are arranged in the coating cavity, a sample platform arranged on the upper side of the evaporation boat is arranged in the coating cavity, a convex ring is arranged at the upper end of the coating cavity, the convex ring is provided with a ring groove, the ring groove is provided with a first sealing ring, the convex ring is hinged with a cavity cover, a threaded rod is arranged at the center of the cavity cover, one end of the threaded rod, which is far away from the coating cavity, is provided with a first handle, the other end of the threaded rod is rotatably provided with a sealing plate matched with the ring groove, one end of the sealing plate, which is close to the cavity cover, is provided with a stabilizing rod which is slidably assembled with the cavity cover, the sealing plate lower extreme is equipped with first sealing washer assorted draw-in groove, the relative pin joint one side of bulge loop is equipped with the subassembly of kick-backing, the subassembly of kick-backing is including the step hole, step hole diapire fixedly connected with return spring, the return spring other end is connected with the ejector pad that the section that stretches out the step hole is T shape, the bulge loop is equipped with the C-shaped piece for pin joint one side, be equipped with the inclined plane to coating film chamber lopsidedness from top to bottom in the opening of C-shaped piece, the chamber lid be equipped with C-shaped piece assorted J shape elasticity fixture block, vacuum mechanism and coating film mechanism all with control mechanism electric connection.

By adopting the technical scheme of the utility model, the sealing plate is attached to the cavity cover in the initial state, when vacuum coating processing is carried out, the locking between the J-shaped elastic clamping block and the C-shaped block is firstly released, the J-shaped elastic clamping block is directly pushed during unlocking, and the J-shaped elastic clamping block has elasticity, so that the J-shaped elastic clamping block inclines to one side close to the coating cavity and is released from being clamped with the C-shaped block, and the locking between the cavity cover and the convex ring is released at the moment; when the C-shaped block and the J-shaped elastic clamping block are unlocked, the return spring stretches to push the push block out of the stepped hole, so that the cavity cover is lifted upwards automatically, the inconvenience that the cavity cover is opened due to the fact that the J-shaped elastic clamping block is automatically restored and clamped with the C-shaped block when the cavity cover is not opened is avoided, after the cavity cover is opened, the coating raw material and the workpiece to be coated can be placed into the coating cavity, then the cavity cover is closed, the push block is retracted into the stepped hole under pressure, the J-shaped elastic clamping block is contacted with the inclined surface of the C-shaped block and is extruded and bent until the cavity cover and the convex ring are completely covered, at the moment, the J-shaped elastic clamping block rebounds to be clamped with the C-shaped block again, the cavity cover is fixed, then the first handle is rotated, the sealing plate moves downwards until the sealing plate is attached to the annular groove, the stabilizer bar can enable the movement of the sealing plate to be more stable, the sealing plate is attached to the annular groove to form a first sealing line, and the clamping groove of the sealing plate is matched with the first sealing ring of the annular groove to form a second sealing line, the coating cavity is isolated from the outside through the two sealing lines, and a better vacuum environment can be formed in the coating cavity by matching with a vacuum mechanism, so that the coating is more favorable for coating; when vacuum coating is carried out, the vacuum mechanism pumps out air in the coating cavity to form a vacuum environment, the plurality of heating binding posts rapidly heat the evaporation boat, so that the coating raw material is heated to be rapidly evaporated and finally deposited on a workpiece to complete processing, and the film thickness monitoring sensor can monitor the coating thickness in the coating cavity in real time, thereby being more convenient for processing and observation; the utility model discloses simple structure can carry out vacuum coating processing to the work piece high-efficiently, and the switch in coating film chamber of can being convenient for simultaneously carries out placing of work piece, raw materials and to the clearance in coating film chamber, can make the coating film chamber form good vacuum environment when adding man-hour simultaneously through twice sealing wire, and then makes the processing of work piece more high-efficient.

Further limit, the vacuum mechanism comprises a cold hydrazine interface (5), a diffusion pump (51) and a mechanical pump (52), the diffusion pump (51) is connected with the coating cavity (2), the mechanical pump (52) and the diffusion pump (51) are jointly connected with a pipeline connected with the coating cavity (2), and the cold hydrazine interface is externally connected with the cold hydrazine and matched with the diffusion pump and the mechanical pump, so that the coating cavity can form limited vacuum, and compared with the traditional single mechanical pump for vacuum pumping, the quality of workpiece coating processing can be improved.

Further limiting, a limiting block is arranged at the hinged position of the convex ring and the cavity cover. By the structure, the damage caused by the collision between the excessive opening of the cavity cover and the coating cavity can be prevented, and the cavity cover can be kept open when the coating cavity is cleaned.

Further defined, the cavity cover is provided with a second handle on the side surface. By adopting the structure, the cavity cover can be conveniently opened and closed.

Further limit, the side surface of the sealing plate is provided with a second sealing ring matched with the ring groove. With this configuration, the sealing performance between the seal plate and the ring groove can be further improved.

Further inject, the workstation evenly is equipped with a plurality of universal wheels, and is a plurality of the universal wheel all is equipped with brake mechanism. Such structure for the device can carry in a flexible way when needs, and brake mechanism can be fixed after the position adjustment is suitable and prevent the displacement.

The utility model discloses have following advantage with prior art relative ratio:

the utility model discloses simple structure can carry out vacuum coating processing to the work piece high-efficiently, and the switch in coating film chamber of can being convenient for simultaneously carries out placing of work piece, raw materials and to the clearance in coating film chamber, can make the coating film chamber form good vacuum environment when adding man-hour simultaneously through twice sealing wire, and then makes the processing of work piece more high-efficient.

Drawings

The present invention can be further illustrated by the non-limiting examples given in the accompanying drawings;

FIG. 1 is a first schematic structural diagram of an embodiment of a high-efficiency vacuum coating system of the present invention;

FIG. 2 is a schematic structural diagram of an embodiment of a high-efficiency vacuum coating system of the present invention;

FIG. 3 is a cross-sectional view of the high-efficiency vacuum coating system according to an embodiment of the present invention;

FIG. 4 is an enlarged schematic view at A in FIG. 3;

the main element symbols are as follows:

the device comprises a workbench 1, a control mechanism 11, a universal wheel 12, a coating cavity 2, a film thickness monitoring sensor 21, an evaporation boat 22, a heating binding post 23, a sample table 24, a convex ring 3, a ring groove 31, a first sealing ring 32, a cavity cover 33, a threaded rod 34, a first handle 35, a sealing plate 36, a stabilizing rod 361, a clamping groove 362, a limiting block 37, a second handle 38, a stepped hole 4, a return spring 41, a pushing block 42, a C-shaped block 43, an inclined surface 431, a J-shaped elastic clamping block 44, a cold trap interface 5, a diffusion pump 51 and a mechanical pump 52.

Detailed Description

In order to make the present invention better understood by those skilled in the art, the technical solutions of the present invention are further described below with reference to the accompanying drawings and examples.

As shown in fig. 1-4, a high-efficiency vacuum coating system comprises a worktable 1, a vacuum mechanism, a coating mechanism and a control mechanism 11, wherein the control mechanism 11 is electrically connected with an external power supply, the coating mechanism comprises a coating cavity 2 arranged on the upper side of the worktable 1, the lower side of the coating cavity 2 is connected with the vacuum mechanism, a film thickness monitoring sensor 21, an evaporation boat 22 and a plurality of heating binding posts 23 connected with the evaporation boat 22 are arranged in the coating cavity 2, a sample stage 24 arranged on the upper side of the evaporation boat 22 is arranged in the coating cavity 2, a convex ring 3 is arranged at the upper end of the coating cavity 2, a ring groove 31 is arranged on the convex ring 3, a first sealing ring 32 is arranged on the ring groove 31, the convex ring 3 is hinged with a cavity cover 33, a threaded rod 34 is arranged at the center of the cavity cover 33, a first handle 35 is arranged at one end of the threaded rod 34 far away from the coating cavity 2, a sealing plate 36 matched with the ring groove 31 is rotatably arranged at the other end of the threaded rod 34, a stabilizing rod 361 assembled with the cavity cover 33 in a sliding manner, the lower end of the sealing plate 36 is provided with a clamping groove 362 matched with the first sealing ring 32, one side of a relative hinged point of the convex ring 3 is provided with a rebounding assembly, the rebounding assembly comprises a step hole 4, the bottom wall of the step hole 4 is fixedly connected with a return spring 41, the other end of the return spring 41 is connected with a pushing block 42, the section of the pushing block extends out of the step hole 4 is in a T shape, the convex ring 3 is provided with a C-shaped block 43 relative to one side of the hinged point, an inclined plane 431 inclined towards one side of the film coating cavity 2 from top to bottom is arranged in an opening of the C-shaped block 43, the cavity cover 33 is provided with a J-shaped elastic clamping block 44 matched with the C-shaped block 43, and the vacuum mechanism and the film coating mechanism are both electrically connected with the control mechanism 11.

By adopting the technical scheme of the utility model, the sealing plate 36 is attached to the cavity cover 33 in the initial state, when vacuum coating processing is carried out, the locking between the J-shaped elastic clamping block 44 and the C-shaped block 43 is firstly released, the J-shaped elastic clamping block 44 is directly pushed during unlocking, and the J-shaped elastic clamping block 44 has elasticity, so that the J-shaped elastic clamping block 44 inclines to one side close to the coating cavity 2 and is released from clamping with the C-shaped block 43, and the locking between the cavity cover 33 and the convex ring 3 is released at the moment; when the C-shaped block 43 and the J-shaped elastic clamping block 44 are unlocked, the return spring 41 stretches to push the push block 42 out of the stepped hole 4, so that the cavity cover 33 is automatically jacked upwards, the inconvenience that the cavity cover 33 is opened due to the fact that the J-shaped elastic clamping block 44 automatically recovers and is clamped with the C-shaped block 43 when the cavity cover 33 is not opened is avoided, after the cavity cover 33 is opened, the coating raw material and the workpiece to be coated can be placed into the coating cavity 2, then the cavity cover 33 is closed, the push block 42 retracts into the stepped hole 4 under the pressure, the J-shaped elastic clamping block 44 is in contact with the inclined surface 431 of the C-shaped block 43 and is extruded and bent until the cavity cover 33 and the convex ring 3 are completely covered, at the moment, the J-shaped elastic clamping block 44 rebounds to be clamped with the C-shaped block 43 again, namely, the cavity cover 33 is fixed, then the first handle 35 is rotated, so that the sealing plate 36 moves downwards until the sealing plate is attached to, the sealing plate 36 is attached to the annular groove 31 to form a first sealing line, and the clamping groove 362 of the sealing plate 36 is matched with the first sealing ring 32 of the annular groove 31 to form a second sealing line, so that the coating cavity 2 is isolated from the outside through the two sealing lines, and a better vacuum environment can be formed in the coating cavity 2 by matching with a vacuum mechanism, and coating is facilitated; when vacuum coating is carried out, the vacuum mechanism pumps out air in the coating cavity 2 to form a vacuum environment, the heating binding posts 23 quickly heat the evaporation boat 22, so that the coating raw materials are quickly evaporated by heating and finally deposited on a workpiece to finish processing, and the film thickness monitoring sensor 21 can monitor the coating thickness in the coating cavity 2 in real time, thereby being more convenient for processing and observation; the utility model discloses simple structure can carry out vacuum coating processing to the work piece high-efficiently, and the switch in coating film chamber 2 of can being convenient for simultaneously carries out placing of work piece, raw materials and to the clearance of coating film intracavity, can make coating film chamber 2 add the good vacuum environment of formation man-hour simultaneously through twice sealing wire, and then makes the processing of work piece more high-efficient.

Preferably, the vacuum mechanism comprises a cold trap connector 5, a diffusion pump 51 and a mechanical pump 52, wherein the diffusion pump 51 is connected with the coating cavity 2, and the mechanical pump 52 and the diffusion pump 51 are jointly connected with a pipeline connected with the coating cavity 2. With the structure, the cold hydrazine is arranged outside the cold hydrazine interface 5 and is matched with the diffusion pump 51 and the mechanical pump 52, so that the coating cavity 2 can form ultimate vacuum, and compared with the traditional method of vacuumizing by using the single mechanical pump 52, the coating processing quality of a workpiece can be improved. In fact, other combinations of structures may be used depending on the circumstances, and the vacuum environment for plating can be generated more efficiently.

Preferably, the hinge joint of the convex ring 3 and the cavity cover 33 is provided with a limit block 37. With the structure, the damage caused by the collision between the excessively opened cavity cover 33 and the coating cavity 2 can be prevented, and the cavity cover 33 can be kept opened when the coating cavity 2 is cleaned. In fact, other structures can be considered according to specific situations, so that the cavity cover 33 can be more conveniently limited.

Preferably, the chamber cover 33 is provided at a side thereof with a second handle 38. With this structure, opening and closing of the chamber cover 33 can be facilitated. In fact, other configurations are contemplated as the case may be, which may facilitate opening of the chamber cover 33.

The side of the sealing plate 36 is preferably provided with a second sealing ring matching the ring groove 31. With this configuration, the sealing performance between the seal plate 36 and the ring groove 31 can be further improved. In fact, other structures can be considered according to specific situations, so that the sealing performance between the sealing plate 36 and the ring groove 31 is better.

Preferably, the workbench 1 is uniformly provided with a plurality of universal wheels 12, and the plurality of universal wheels 12 are provided with brake mechanisms. Such structure for the device can carry in a flexible way when needs, and brake mechanism can be fixed after the position adjustment is suitable and prevent the displacement. In fact, other configurations may be used depending on the particular situation, which may facilitate handling of the device.

The above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims

1. The utility model provides a high-efficient vacuum coating system, including workstation (1), vacuum mechanism, coating mechanism and control mechanism (11), control mechanism (11) and external power electric connection, its characterized in that: the coating mechanism comprises a coating cavity (2) arranged on the upper side of a workbench (1), the lower side of the coating cavity (2) is connected with a vacuum mechanism, a film thickness monitoring sensor (21), an evaporation boat (22) and a plurality of heating binding posts (23) connected with the evaporation boat (22) are arranged in the coating cavity (2), a sample platform (24) arranged on the upper side of the evaporation boat (22) is arranged in the coating cavity (2), a convex ring (3) is arranged at the upper end of the coating cavity (2), an annular groove (31) is formed in the convex ring (3), a first sealing ring (32) is arranged on the annular groove (31), a cavity cover (33) is hinged to the convex ring (3), a threaded rod (34) is arranged at the circle center of the cavity cover (33), a first handle (35) is arranged at one end of the threaded rod (34) far away from the coating cavity (2), a sealing plate (36) matched with the annular groove (31) is assembled at the other end of the threaded rod (34), one end of the sealing plate (36) close to the cavity cover (33) is provided with a stabilizing rod (361) which is assembled with the cavity cover (33) in a sliding way, the lower end of the sealing plate (36) is provided with a clamping groove (362) matched with the first sealing ring (32), a rebound component is arranged on one side of the convex ring (3) opposite to the hinge point, the rebound component comprises a step hole (4), a return spring (41) is fixedly connected with the bottom wall of the step hole (4), the other end of the return spring (41) is connected with a push block (42) which extends out of the step hole (4) and has a T-shaped section, a C-shaped block (43) is arranged on one side of the convex ring (3) opposite to the hinged point, an inclined plane (431) which is inclined towards one side of the film coating cavity (2) from top to bottom is arranged in an opening of the C-shaped block (43), the cavity cover (33) is provided with a J-shaped elastic clamping block (44) matched with the C-shaped block (43), and the vacuum mechanism and the film coating mechanism are both electrically connected with the control mechanism (11).

2. The high-efficiency vacuum coating system according to claim 1, wherein: the vacuum mechanism comprises a cold hydrazine interface (5), a diffusion pump (51) and a mechanical pump (52), wherein the diffusion pump (51) is connected with the film coating cavity (2), and the mechanical pump (52) and the diffusion pump (51) are jointly connected with a pipeline connected with the film coating cavity (2).

3. The high-efficiency vacuum coating system according to claim 1, wherein: and a limiting block (37) is arranged at the hinged position of the convex ring (3) and the cavity cover (33).

4. The high-efficiency vacuum coating system according to claim 1, wherein: and a second handle (38) is arranged on the side surface of the cavity cover (33).

5. The high-efficiency vacuum coating system according to claim 1, wherein: and a second sealing ring matched with the annular groove (31) is arranged on the side surface of the sealing plate (36).

6. The high-efficiency vacuum coating system according to claim 1, wherein: the workbench (1) is uniformly provided with a plurality of universal wheels (12), and the universal wheels (12) are provided with brake mechanisms.