CN214782107U - Cavity sealing device of magnetron sputtering equipment - Google Patents
Cavity sealing device of magnetron sputtering equipment Download PDFInfo
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- CN214782107U CN214782107U CN202120805907.0U CN202120805907U CN214782107U CN 214782107 U CN214782107 U CN 214782107U CN 202120805907 U CN202120805907 U CN 202120805907U CN 214782107 U CN214782107 U CN 214782107U
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Abstract
The utility model belongs to the technical field of magnetron sputtering equipment, in particular to a magnetron sputtering equipment cavity sealing device, which comprises a first sealing frame, a second sealing frame and a cavity body, wherein sealing plates are fixedly arranged on the left side and the right side of the upper end surface of the first sealing frame, first magnetic suction edges are fixedly arranged on the front end surface and the rear end surface of the upper end surface of the first sealing frame, a return-shaped groove is arranged on the bottom end surface inside the first sealing frame, an air bag is arranged inside the groove, so that the sealing plate and the sealing clamping groove are sealed through a sealing rubber pad, and the first magnetic suction edge and the second magnetic suction edge are mutually adsorbed and matched to form sealing, so that the joint of the first sealing frame and the second sealing frame forms first sealing, the air bag is inflated through a vent pipe, so that the air bag fills the gap of the groove, and the joint of the groove and the vacuum chamber is enabled to form sealing, thereby form the second and seal, reach the effect of secondary seal, effectual leakproofness has been improved.
Description
Technical Field
The utility model relates to a magnetron sputtering equipment technical field, concretely relates to magnetron sputtering equipment cavity sealing device.
Background
Magnetron sputtering is one of Physical Vapor Deposition (PVD), a general sputtering method can be used for preparing multiple materials such as metals, semiconductors, insulators, and the like, and has the advantages of simple equipment, easy control, large coating area, strong adhesion, and the like, the magnetron sputtering method developed in the last 70 th century realizes high speed, low temperature, and low damage, because high-speed sputtering is performed under low pressure, the ionization rate of gas must be effectively improved, and the magnetron sputtering increases the plasma density by introducing a magnetic field on the surface of a target cathode and utilizing the confinement of the magnetic field to charged particles to increase the sputtering rate.
Because magnetron sputtering is carried out in a vacuum cavity, when a cover plate and a door on a common magnetron sputtering device of the vacuum cavity are frequently used, a gap is formed between the surface of a sealing element and the surface of a matching component, so that the sealing performance of the vacuum cavity is reduced, external dust, gas and the like enter the vacuum cavity, and the quality of vacuum coating is influenced.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem provided in the background art, the utility model provides a magnetron sputtering equipment cavity sealing device, which has the effect of making the junction of the first sealing frame and the second sealing frame form secondary sealing, thereby effectively improving the sealing property.
In order to achieve the above object, the utility model provides a following technical scheme: a cavity sealing device of magnetron sputtering equipment comprises a first sealing frame, a second sealing frame and a cavity body, sealing plates are fixedly arranged on the left side and the right side of the upper end surface of the first sealing frame, first magnetic suction edges are fixedly arranged on the front end surface and the rear end surface of the upper end surface of the first sealing frame, the bottom end surface in the first sealing frame is provided with a return-shaped groove, an air bag is arranged in the groove, the cavity body is positioned between the first sealing frame and the second sealing frame, the left end and the right end of the bottom end surface of the second sealing frame are both provided with a sealing clamping groove, a first vacuum tube penetrates through and is fixedly installed on the left side wall inside the second sealing frame, a vacuum bin is fixedly installed on the rear end face inside the second sealing frame, the left side wall of the interior of the vacuum bin penetrates through and is fixedly provided with a second vacuum tube, and one end, far away from the vacuum bin, of the second vacuum tube penetrates through the second sealing frame and extends to the outside of the second sealing frame.
In order to form sealedly between the closing plate and the seal slot, as the utility model relates to a magnetron sputtering equipment cavity sealing device is preferred, two the closing plate is relative with the position of two seal slots respectively, two the equal fixed mounting in inside of seal slot has the sealing rubber pad that is "U" type form.
Inhale the limit in order to make first magnetism and inhale the limit with the second magnetism and carry out mutual absorption, and then form sealedly, as the utility model relates to a magnetron sputtering equipment cavity sealing device is preferred, the equal fixed mounting in both ends has the second magnetism to inhale the limit around the sealed frame bottom face of second, two the limit is inhaled with two second magnetism respectively to first magnetism the position on limit is relative.
For the convenience of aerating to the gasbag for the breather pipe, conduct the utility model relates to a magnetron sputtering equipment cavity sealing device is preferred, the top intercommunication of gasbag lateral wall has the breather pipe, the other end of breather pipe runs through the rear end face of first sealed frame and extends to the rear of first sealed frame, the pneumatic valve is installed to the lateral wall of breather pipe, the pneumatic valve is located the rear of first sealed frame.
In order to facilitate the bottom end surface of the vacuum chamber to move to the inside of the groove, the cavity sealing device of the magnetron sputtering device is preferred, and the bottom end surface of the vacuum chamber is opposite to the groove.
In order to make the cavity body can install in the inside in vacuum storehouse, as the utility model relates to a magnetron sputtering equipment cavity sealing device is preferred, the width and the length in vacuum storehouse all are greater than the width and the length of cavity body.
Compared with the prior art, the beneficial effects of the utility model are that:
the cavity sealing device of the magnetron sputtering equipment comprises a cavity body arranged in a first sealing frame, a first sealing frame and a second sealing frame which are arranged, two sealing plates are respectively clamped in two sealing clamping grooves by moving the second sealing frame towards the first sealing frame, two sealing rubber pads in the two sealing clamping grooves form sealing between the sealing plates and the sealing clamping grooves, two first magnetic suction edges and two second magnetic suction edges respectively mutually adsorb to form sealing, so that the joint of the first sealing frame and the second sealing frame forms a first sealing, the bottom of a vacuum chamber is moved to the inside of a groove when the first sealing frame and the second sealing frame are arranged together, the cavity body is positioned in the vacuum chamber, an air valve is opened by connecting a vent pipe with an external air pump, the vent pipe is inflated, gas is introduced into the air bag through the vent pipe, the air bag starts to expand, gaps of the grooves are filled, after the air bag is full of gas, the air bag is tightly attached to the surfaces of the grooves and the vacuum bin, so that the joints of the grooves and the vacuum bin are sealed, a second seal is formed, the effect of secondary sealing is achieved, the sealing performance is effectively improved, the first vacuum pipe and the second vacuum pipe are respectively connected with an external vacuum pump, and the air in the second sealing frame and the vacuum bin is conveniently pumped out to be in a vacuum state;
to sum up, this kind of magnetron sputtering equipment cavity sealing device, through sealing rubber pad, it is sealed to make to form between closing plate and the sealing groove, and inhale the limit through first magnetism and inhale the limit with the second magnetism and carry out mutual absorption and cooperate, it is sealed to form, thereby make the junction of first sealed frame and the sealed frame of second form first sealed, aerify to the gasbag through the breather pipe, make the gasbag fill the gap of recess, make the junction in recess and vacuum chamber form sealedly, thereby it is sealed to form the second, reach secondary seal's effect, the effectual leakproofness that has improved.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention.
In the drawings:
FIG. 1 is a split structure diagram of a cavity sealing device of a magnetron sputtering apparatus of the present invention;
fig. 2 is a bottom view of the second sealing frame of fig. 1 according to the present invention;
fig. 3 is a top sectional view of the second sealing frame of fig. 1 according to the present invention;
fig. 4 is a perspective view of the sealing rubber pad of the present invention.
In the figure, 1, a first seal frame; 101. a sealing plate; 102. a first magnetic suction edge; 2. a groove; 201. an air bag; 202. a breather pipe; 203. an air valve; 3. a cavity body; 4. a second seal frame; 401. sealing the clamping groove; 4011. sealing the rubber pad; 402. a first vacuum tube; 5. a second magnetic suction edge; 6. a vacuum bin; 601. a second vacuum tube.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description of the present invention, it is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. In addition, in the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
Referring to fig. 1-4, the present invention provides the following technical solutions: a cavity sealing device of magnetron sputtering equipment comprises a first sealing frame 1, second seal frame 4 and cavity body 3, the equal fixed mounting in the left and right sides of first seal frame 1 up end has closing plate 101, the equal fixed mounting in both ends face has first magnetism to inhale limit 102 around the first seal frame 1 up end, recess 2 of "returning" type has been seted up to the inside bottom face of first seal frame 1, recess 2's internally mounted has gasbag 201, cavity body 3 is located between first seal frame 1 and the second seal frame 4, sealed draw-in groove 401 has all been seted up at both ends about the bottom face of second seal frame 4, the inside left side wall of second seal frame 4 runs through and fixed mounting has first vacuum tube 402, the inside rear end face fixed mounting of second seal frame 4 has vacuum chamber 6, the inside left side wall of vacuum chamber 6 runs through and fixed mounting has second vacuum tube 601, the one end that vacuum chamber 6 was kept away from to second vacuum chamber 601 runs through second seal frame 4 and extends to the outside of second seal frame 4.
In this embodiment: the second sealing frame 4 is moved towards the first sealing frame 1, so that the two sealing plates 101 are respectively clamped into the two sealing clamping grooves 401, the first sealing frame 1 and the second sealing frame 4 are installed, at the moment, the two sealing rubber pads 4011 in the two sealing clamping grooves 401 form sealing between the sealing plates 101 and the sealing clamping grooves 401, at the moment, the two first magnetic suction edges 102 are respectively adsorbed to the two second magnetic suction edges 5 to form sealing, so that the joint of the first sealing frame 1 and the second sealing frame 4 forms a first seal, when the first sealing frame 1 and the second sealing frame 4 are installed together, the bottom of the vacuum chamber 6 is moved to the inside of the groove 2, at the moment, the cavity body 3 is positioned in the vacuum chamber 6, the vent pipe 202 is connected with an external air pump, the air valve 203 is opened, the vent pipe 202 is inflated, and the vent pipe 202 leads gas into the air bag 201, gasbag 201 begins the inflation, fill the gap of recess 2, after gasbag 201 is full of gas, gasbag 201 hugs closely on the surface of recess 2 and vacuum chamber 6, make the junction of recess 2 and vacuum chamber 6 form sealedly, thereby form the second and seal, reach secondary seal's effect, the effectual leakproofness that has improved, through being connected first vacuum tube 402 and second vacuum tube 601 and outside vacuum pump respectively, the air in the sealed frame of second 4 and the vacuum chamber 6 of being convenient for is evacuated, make it be in vacuum state.
As a technical optimization scheme of the utility model, two closing plates 101 are relative with two sealed draw-in groove 401's position respectively, and the equal fixed mounting in inside of two sealed draw-in grooves 401 has the sealing rubber pad 4011 that is "U" type form.
In this embodiment: through setting up two sealing plate 101 respectively with two sealed draw-in groove 401's position all relative, be convenient for go into two sealed draw-in groove 401's inside with two sealing plate 101 card respectively, through setting up sealing rubber pad 4011, can make and form sealedly between sealing plate 101 and the sealed draw-in groove 401.
As a technical optimization scheme of the utility model, the equal fixed mounting in both ends has the second magnetism to inhale limit 5 around the sealed 4 bottom faces of frame of second, and two first magnetism inhale limit 102 respectively with two second magnetism inhale the position relative of limit 5.
In this embodiment: by making the two first magnetic absorption edges 102 respectively opposite to the two second magnetic absorption edges 5, when the first sealing frame 1 is installed on the second sealing frame 4, the two first magnetic absorption edges 102 respectively absorb the two second magnetic absorption edges 5 to each other, thereby forming a seal.
As a technical optimization scheme of the utility model, the top intercommunication of gasbag 201 lateral wall has breather pipe 202, and breather pipe 202's the other end runs through the rear end face of first seal frame 1 and extends to first seal frame 1's rear, and pneumatic valve 203 is installed to breather pipe 202's lateral wall, and pneumatic valve 203 is located first seal frame 1's rear.
In this embodiment: by opening the air valve 203, the vent tube 202 is facilitated to inflate the air bag 201.
As a technical optimization scheme of the utility model, the bottom face in vacuum storehouse 6 is all relative with the position of recess 2.
In this embodiment: the bottom end face through setting up vacuum storehouse 6 is all relative with the position of recess 2, when installing first sealed frame 1 on second sealed frame 4, and the bottom end face of the vacuum storehouse 6 of being convenient for can remove to the inside of recess 2.
As a technical optimization scheme of the utility model, the width and the length of vacuum chamber 6 all are greater than the width and the length of cavity body 3.
In this embodiment: the width and the length of the vacuum chamber 6 are both larger than the width and the length of the cavity body 3, so that the cavity body 3 can be arranged inside the vacuum chamber 6.
The utility model discloses a theory of operation and use flow: firstly, a cavity body 3 is placed in a first sealing frame 1, then the first sealing frame 1 and a second sealing frame 4 are installed, the second sealing frame 4 moves towards the first sealing frame 1, so that two sealing plates 101 are respectively clamped in two sealing clamping grooves 401, at the moment, two sealing rubber pads 4011 in the two sealing clamping grooves 401 form sealing between the sealing plates 101 and the sealing clamping grooves 401, at the moment, two first magnetic suction edges 102 respectively and two second magnetic suction edges 5 mutually adsorb to form sealing, and therefore, a first sealing is formed at the joint of the first sealing frame 1 and the second sealing frame 4, because the first sealing frame 1 and the second sealing frame 4 are installed together, the bottom of a vacuum bin 6 is moved to the inside of a groove 2, at the moment, the cavity body 3 is positioned in the vacuum bin 6, and an air pump 202 is connected with the outside, open pneumatic valve 203, inflate in snorkel 202, snorkel 202 lets in gas to gasbag 201 in, gasbag 201 begins the inflation, fill the gap of recess 2, after gasbag 201 is full of gas, gasbag 201 hugs closely on the surface of recess 2 and vacuum chamber 6, make the junction of recess 2 and vacuum chamber 6 form sealedly, thereby form the second and seal, reach secondary seal's effect, the effectual leakproofness that has improved, through being connected first vacuum tube 402 and second vacuum tube 601 and the outside vacuum pump respectively, be convenient for the air in second seal frame 4 and the vacuum chamber 6 to find time, make it be in vacuum state.
The above description is only exemplary of the present invention and should not be construed as limiting the present invention, and any modifications, equivalents and improvements made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (6)
1. The utility model provides a magnetron sputtering equipment cavity sealing device, includes first sealed frame (1), second sealed frame (4) and cavity body (3), its characterized in that: sealing plates (101) are fixedly mounted on the left side and the right side of the upper end face of the first sealing frame (1), first magnetic suction edges (102) are fixedly mounted on the front end face and the rear end face of the upper end face of the first sealing frame (1), a return-shaped groove (2) is formed in the bottom end face of the inner portion of the first sealing frame (1), an air bag (201) is mounted in the groove (2), the cavity body (3) is located between the first sealing frame (1) and the second sealing frame (4), sealing clamping grooves (401) are formed in the left end face and the right end face of the bottom end face of the second sealing frame (4), a first vacuum tube (402) is penetrated through and fixedly mounted on the left side wall of the inner portion of the second sealing frame (4), a vacuum bin (6) is fixedly mounted on the rear end face of the inner portion of the second sealing frame (4), a second vacuum tube (601) is penetrated through and fixedly mounted on the left side wall of the inner portion of the vacuum bin (6), one end of the second vacuum tube (601), which is far away from the vacuum bin (6), penetrates through the second sealing frame (4) and extends to the outside of the second sealing frame (4).
2. The cavity sealing device of the magnetron sputtering device according to claim 1, wherein: the two sealing plates (101) are opposite to the two sealing clamping grooves (401) respectively, and U-shaped sealing rubber gaskets (4011) are fixedly mounted in the two sealing clamping grooves (401).
3. The cavity sealing device of the magnetron sputtering device according to claim 1, wherein: the front end and the rear end of the bottom end face of the second sealing frame (4) are fixedly provided with second magnetic suction edges (5), and the two first magnetic suction edges (102) are opposite to the two second magnetic suction edges (5) respectively.
4. The cavity sealing device of the magnetron sputtering device according to claim 1, wherein: the top intercommunication of gasbag (201) lateral wall has breather pipe (202), the rear end face that the other end of breather pipe (202) runs through first seal frame (1) extends to the rear of first seal frame (1), pneumatic valve (203) are installed to the lateral wall of breather pipe (202), pneumatic valve (203) are located the rear of first seal frame (1).
5. The cavity sealing device of the magnetron sputtering device according to claim 1, wherein: the bottom end surface of the vacuum bin (6) is opposite to the groove (2).
6. The cavity sealing device of the magnetron sputtering device according to claim 1, wherein: the width and the length of the vacuum bin (6) are both larger than those of the cavity body (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120805907.0U CN214782107U (en) | 2021-04-20 | 2021-04-20 | Cavity sealing device of magnetron sputtering equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120805907.0U CN214782107U (en) | 2021-04-20 | 2021-04-20 | Cavity sealing device of magnetron sputtering equipment |
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| Publication Number | Publication Date |
|---|---|
| CN214782107U true CN214782107U (en) | 2021-11-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120805907.0U Active CN214782107U (en) | 2021-04-20 | 2021-04-20 | Cavity sealing device of magnetron sputtering equipment |
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|---|---|
| CN (1) | CN214782107U (en) |
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- 2021-04-20 CN CN202120805907.0U patent/CN214782107U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211216 Address after: 214000 room 201-23, building 11, Wuxi Zhongguancun Software Park, Xinwu District, Wuxi City, Jiangsu Province Patentee after: Jiangsu Xinhe Microelectronics Co.,Ltd. Address before: 214000 room 2801, unit 26, Lushu County, Langshi Taihu, Huazhuang street, economic development zone, Wuxi City, Jiangsu Province Patentee before: Yang Wu |
|
| TR01 | Transfer of patent right |