CN215005454U

CN215005454U - A device that is used for vacuum system to advance a kind and trade a kind

Info

Publication number: CN215005454U
Application number: CN202121029627.1U
Authority: CN
Inventors: 刘志凌; 林青杨
Original assignee: Shaanxi Normal University
Current assignee: Shanxi Hengcheng Technology Co.,Ltd.
Priority date: 2021-05-14
Filing date: 2021-05-14
Publication date: 2021-12-03
Anticipated expiration: 2031-05-14

Abstract

The utility model relates to the field of vacuum reaction devices, and provides a device for sample introduction and sample changing of a vacuum system; the method comprises the following steps: the sample injection transition pipe, the sample rod, the sealing part and the air exhaust part; in the technical scheme of the utility model, the sample introduction transition pipe is connected with the vacuum cavity and separated by the manual gate valve, after the sample rod is inserted, the sealing part isolates the external environment, the vacuum pump is used for vacuumizing the sample introduction transition pipe, the gate valve is opened after the vacuumizing is finished, and the sample rod is fed into for sample introduction; when the sample is replaced, the front end of the sample rod is pulled to the sample injection transition pipe area, the manual gate valve is closed, and then the sample rod is pulled out to replace the sample. The utility model is used for vacuum system advances kind and trades appearance, has solved and has been advanced kind or the problem of destroying vacuum system's vacuum environment when trading the appearance to vacuum system by atmospheric environment.

Description

A device that is used for vacuum system to advance a kind and trade a kind

Technical Field

The utility model relates to a vacuum apparatus field, in particular to vacuum cavity sampling system.

Background

The metal ion source is indispensable in the fields of metal reaction characteristic research, analysis and detection and the like, the preparation and analysis of metal ions have high requirements on a vacuum environment, and common ion source technologies need to be carried out in the vacuum environment. In the existing vacuum detection or experiment scheme, a metal sample is usually required to be placed at a fixed position in a vacuum cavity, then the cavity is vacuumized, and after the vacuum degree in the cavity reaches the experiment condition, metal ions can be prepared to further achieve the analysis purpose. When the detection or experiment object is replaced, the vacuum cavity needs to be opened again to take out the metal sample, and the cavity is vacuumized again after a new sample is put into the cavity. The experiment mode has huge time and labor cost consumption, and the frequent shutdown of the vacuum equipment is not beneficial to the protection of the equipment.

SUMMERY OF THE UTILITY MODEL

The utility model provides a device for vacuum system advances kind and trades appearance has solved the technical problem who destroys vacuum system's vacuum environment when advancing kind or trade appearance to vacuum system by atmospheric environment.

A device for sample introduction and sample change of a vacuum system comprises a sample introduction transition pipe, wherein a first flange and a second flange are respectively connected to two sides of the sample introduction transition pipe, a hole is formed in the middle of the sample introduction transition pipe, and a third flange is connected to the hole; the first flange is connected with a sealing part; a vacuum cavity is connected to the second flange, and a manual gate valve is arranged between the second flange and the vacuum cavity; the third flange is connected with an air exhaust part for vacuumizing.

Furthermore, the sealing part consists of a sealing convex disc, a sealing concave disc, a rubber sealing ring and a metal backing ring, the sealing convex disc, the sealing concave disc, the rubber sealing ring and the metal backing ring are all provided with round holes which just cover the sample rod, the sealing convex disc is provided with an annular bulge outside the round holes, the sealing concave disc is provided with a round groove outside the round holes, and the annular bulge of the sealing convex disc is just inserted into the round groove of the sealing concave disc; the rubber sealing ring, the large metal backing ring, the other rubber sealing ring and the small metal backing ring are sequentially contained between the sealing convex disc and the sealing concave disc; the rubber seal ring has a bending structure, the bending direction is opposite to the insertion direction of the sample rod, the sealing performance of the device after the sample rod is inserted is guaranteed, and the influence of the movement of the sample rod on the sealing performance is avoided.

Further, the air exhaust part comprises a flange adapter, a gas regulating valve and a vacuum pump, the flange adapter is connected with the gas regulating valve through a metal pipe, and the gas regulating valve is connected with the vacuum pump through the metal pipe. The air exhaust part only independently vacuumizes the sample introduction transition pipe, so that the sample introduction transition pipe can rapidly reach a vacuum condition.

A manual gate valve is closed before sample introduction, and a vacuum cavity is in a vacuum state. Fixing the sample at the front end of the sample rod, and inserting the sample rod to the front end of the sample rod to be positioned in the area in the sample introduction transition pipe. The sealing part isolates the sample introduction transition pipe from the external environment. And opening the gas regulating valve during sample introduction, and pumping air in the sample introduction transition pipe by using a vacuum pump. And after the air exhaust is finished, closing the gas regulating valve. And opening the gate valve, and continuously pushing the sample rod into the vacuum cavity to finish sample introduction. When the sample is replaced, the sample rod is pulled out to the front end of the sample to be positioned in the sample introduction transition pipe area, and the manual gate valve is closed. At the moment, the sample introduction transition pipe and the vacuum cavity are independently separated again. And continuously and completely pulling out the sample rod, replacing the sample and repeating the sample introduction operation.

The technical scheme of the utility model in, device simple structure, the flexible operation is convenient, accomplishes the sample and gets into vacuum environment's operation process, labour saving and time saving by atmospheric environment under the experiment requirement that does not destroy vacuum chamber inner vacuum condition. The method can be widely applied to vacuum equipment for preparing, analyzing and detecting the metal ion source.

Drawings

Fig. 1 is a structural diagram of a device for sample introduction and changing of a vacuum system according to the present invention;

FIG. 2 is a cross-sectional view of the device for sampling and changing samples in a vacuum system according to the present invention when the manual gate valve is closed and the sample does not enter the vacuum chamber;

FIG. 3 is a cross-sectional view of the device for sampling and changing samples in a vacuum system according to the present invention when the manual gate valve is opened and the sample enters the vacuum chamber;

fig. 4 is a sectional view showing a disassembled structure of the sealing portion.

In the above drawings, the respective symbols represent:

1-sample introduction transition tube; 2-a first flange; 3-a second flange; 4-a third flange; 5-a sealing part; 6-flange adapter; 7-gas regulating valve; 8-a vacuum pump; 9-sample rod; 10-sample; 11-manual gate valve; 12-a vacuum chamber; 13-sealing convex disc; 14-sealing concave disc; 15-sealing rubber ring; 16-large metal backing ring; 17-small metal backing ring.

Detailed Description

Referring to fig. 1 and 4, a device for sample introduction and changing of a vacuum system is provided, wherein a first flange 2 is welded on the left side of a vacuum transition pipe 1; a second flange 3 is welded on the right side of the vacuum transition pipe 1; the middle of the sample injection transition pipe 1 is provided with an opening, and a third flange 4 is welded at the opening; the first flange 2 is connected with the sealing part 5 through bolts, the second flange 3 is connected with the vacuum cavity 12 through bolts, and a manual gate valve 11 is arranged between the second flange 3 and the vacuum cavity 12; an air exhaust part for vacuumizing is connected above the third flange 4 through a bolt. The sealing part 5 is by sealed protruding dish 13, sealed concave dish 14, double-deck rubber seal 15 and two

metal backing rings

16, 17 constitute jointly, sealed protruding dish 13, sealed concave dish 14, rubber seal 15 and

metal backing ring

16, 17 all is equipped with the round hole of cladding sample pole just, sealed protruding dish 13 is processed at the round hole outside and is had annular protrusion, the sealed concave dish 14 of sealing part 5 is processed and is had the great first recess of diameter and the less second recess of diameter, sealed protruding dish 13 annular protrusion part external diameter equals the first recess diameter of sealed concave dish 14, equal 15 outside diameters of rubber seal, equal 16 outside diameters of big metal backing ring. The rubber seal ring 15 is processed with a bending structure, and the bending direction faces one side of the seal convex disc 13. The diameter of the bent part of the rubber sealing ring is equal to that of the bent part of the large metal backing ring 16, equal to that of the outer side of the small metal backing ring 17 and equal to that of the second groove of the sealing concave disc 14. The sealing convex disc 13 and the sealing concave disc 14 are connected through bolts, the rubber sealing ring 15, the large metal backing ring 16, the other rubber sealing ring 15 and the small metal backing ring 17 are sequentially contained between the sealing convex disc 13 and the sealing concave disc 14, the air exhaust part comprises a flange adapter 6, a gas regulating valve 7 and a vacuum pump 8, the flange adapter 6 is connected with the gas regulating valve 7 through a metal pipe, and the gas regulating valve 7 is connected with the vacuum pump 8 through a metal pipe.

Referring to fig. 2 and 3, before sample introduction, the manual gate valve 11 is in a closed state, and the vacuum chamber 12 is evacuated by using the vacuum pump, i.e., the vacuum chamber is in a vacuum state. The sample introduction transition pipe 1 is communicated with the outside. During sample introduction, a sample 10 is fixed at a groove at the right end of the sample rod 9, the sample rod 9 is inserted from the round hole of the sealing part 5, and the sample is positioned in the inner area of the sample introduction transition pipe at the front end. Under the action of the sealing part 5, the sample introduction transition pipe is isolated from the external environment. And during sample injection, opening the gas regulating valve 7, and pumping air in the sample injection transition pipe 1 by using the vacuum pump 8. After the evacuation is completed, the gas regulating valve 7 is closed. And opening the gate valve 11, and continuously pushing the sample rod 9 into the vacuum cavity to finish sample injection. When the sample is replaced, on the contrary, the sample rod 9 is pulled out to the front end where the sample is positioned in the sample introduction transition pipe area, and the manual gate valve is closed. At this time, the sample introduction transition pipe 1 and the vacuum cavity 12 are separated again. And continuously pulling out the sample rod 9 completely, replacing the sample and repeating the sample introduction operation.

In this scheme, advance the design of appearance transition pipe 1 and guaranteed the space of the smooth business turn over and the berth of sealing and the connection of portion of bleeding, sample pole, inside does not have unnecessary volume outside this, has greatly reduced advance appearance and opened the gate valve when changing a kind the operation around, advance the influence of the interior vacuum condition of appearance transition pipe to vacuum cavity vacuum environment.

In the scheme, in the connection process of the sealing part 5, the stress of the bent rubber sealing ring in the horizontal direction can extend the sealing ring made of rubber materials towards the vertical direction, so that the sealing performance is enhanced. The bending direction of the rubber sealing ring is opposite to the inserting direction of the sample rod, so that the sealing effect of the sample rod in the movement process is ensured.

In the scheme, the manual gate valve 11 with the model number of CC-40B is used, so that the gate valve is convenient to open and close. The interface flange of the manual gate valve is a CF flange, so that the reliability of the device is improved.

The foregoing is merely an example of the present invention and common general knowledge of known specific structures and features of the embodiments is not described herein in any greater detail. It should be noted that, for those skilled in the art, without departing from the structure of the present invention, several changes and modifications can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the implementation of the present invention and the practicability of the patent.

Claims

1. A device for sample introduction and changing of a vacuum system is characterized by comprising a sample introduction transition pipe, wherein a first flange and a second flange are respectively connected to two sides of the sample introduction transition pipe; the first flange is connected with a sealing part; a vacuum cavity is connected to the second flange, and a manual gate valve is arranged between the second flange and the vacuum cavity; the third flange is connected with an air exhaust part for vacuumizing.

2. The device for vacuum system sample introduction and exchange according to claim 1, wherein the sealing portion comprises a sealing convex disc, a sealing concave disc, a rubber sealing ring and a metal gasket ring, and the double-layer rubber sealing ring and the metal gasket ring are both located between the sealing convex disc and the sealing concave disc.

3. The device for sample injection and exchange of the vacuum system as claimed in claim 1, wherein the air exhaust part comprises a flange adapter, a gas regulating valve and a vacuum pump, the flange adapter is connected with the gas regulating valve through a metal pipe, and the gas regulating valve is connected with the vacuum pump through a metal pipe.