CN212375375U - Vacuum cavity sampling system - Google Patents
Vacuum cavity sampling system Download PDFInfo
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- CN212375375U CN212375375U CN202021644793.8U CN202021644793U CN212375375U CN 212375375 U CN212375375 U CN 212375375U CN 202021644793 U CN202021644793 U CN 202021644793U CN 212375375 U CN212375375 U CN 212375375U
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Abstract
The utility model provides a vacuum cavity sampling system, which is used for solving the technical problems that the vacuum cavity sampling system in the prior art is easy to destroy the vacuum environment of other cavities and cannot realize atmospheric sampling; the method comprises the following steps: a transfer cavity and a vacuum sample storage cavity; the vacuum sample storage cavity comprises a first flange, a sample holding device and a first sample transfer device; the first flange is provided with a first valve; the transfer cavity comprises a second flange, a third flange, a vacuum pump, a sample transfer table and a second sample transfer device; according to the technical scheme of the utility model, the transfer cavity is connected with the vacuum cavity, the vacuum sample storage cavity is arranged, and the transfer cavity, the vacuum sample storage cavity and the external cavity are isolated by the gate valve, so that sample introduction can be completed on the premise of not damaging the vacuum environment of the external cavity; the normal pressure sample introduction door is arranged, so that normal pressure sample introduction can be realized; the vacuum sample storage cavity is connected with the transfer cavity through the CF flange, can be detached, is provided with a portable support, and can realize the transfer and the quick switching of samples.
Description
Technical Field
The utility model relates to a vacuum reaction device field, in particular to vacuum cavity sampling system.
Background
The vacuum cavity has wide application in the fields of chemistry and physics. Among them, in the fields of surface science, semiconductors, aerospace research, and the like. In the prior art, the sampling mode of the vacuum cavity mainly comprises two modes, one mode is direct sampling, but the sampling usually needs to destroy the vacuum environment of the vacuum cavity, and the sample is placed in the reactor and then is vacuumized again. This experimental approach consumes high time and labor costs and is not suitable for air sensitive samples. Secondly, the vacuum cavity with the sample is connected with the reaction cavity for sample injection, but the method has the disadvantages that the vacuum cavity is complex to install, a small part of air remained in the installation process is difficult to avoid entering the vacuum cavity, the sample is troublesome to transfer, and the atmospheric sample injection cannot be realized.
Therefore, a vacuum cavity sample introduction system which is convenient for sample storage and transfer and can realize atmospheric sample introduction and vacuum sample introduction at the same time is needed.
Disclosure of Invention
In order to solve the above technical problem, the utility model discloses a vacuum cavity sampling system, the technical scheme of the utility model is implemented like this:
a vacuum chamber sample introduction system comprising: a transfer cavity and a vacuum sample storage cavity; the vacuum sample storage cavity comprises a first flange, a sample holding device and a first sample transfer device; the first flange is provided with a first valve; the transfer cavity comprises a second flange, a third flange, a vacuum pump, a sample transfer table and a second sample transfer device, and the sample transfer table is fixed to the second sample transfer device; the vacuum pump is communicated with the inside of the vacuum cavity; the third flange is provided with a second valve; the third flange is hermetically fixed to the external reaction chamber; the first flange is detachably fixed to the second flange; the sample holding device is fixed to the first sample transfer device; the first sample transfer device drives the sample holding device to enter the transfer cavity or return to the vacuum sample storage cavity.
Preferably, the vacuum chamber sampling system further comprises a normal pressure sampling door, the transfer chamber further comprises a fourth flange, and the fourth flange is hermetically connected with the normal pressure sampling door.
Preferably, the third flange is detachably fixed to the outer reaction chamber.
Preferably, the first flange and the second flange are CF flanges.
Preferably, the first valve and/or the second valve is a gate valve.
Preferably, the vacuum sample storage cavity is provided with a window flange.
Preferably, the transfer cavity is provided with a window flange.
Preferably, the vacuum cavity sampling system further comprises a portable bracket, and the vacuum sample storage cavity is fixed to the portable bracket.
Preferably, the vacuum cavity sample introduction system further comprises a vacuum gauge, and the vacuum gauge measures the air pressure inside the transfer cavity.
By implementing the technical scheme of the utility model, the technical problems that the vacuum cavity sample introduction system in the prior art is easy to destroy the vacuum environment of other cavities and cannot realize atmospheric sample introduction can be solved; according to the technical scheme of the utility model, the transfer cavity is connected with the vacuum cavity, the vacuum sample storage cavity is arranged, and the transfer cavity, the vacuum sample storage cavity and the external cavity are isolated by the gate valve, so that sample introduction can be completed on the premise of not damaging the vacuum environment of the external cavity; the normal pressure sample introduction door is arranged, so that normal pressure sample introduction can be realized; the vacuum sample storage cavity is connected with the transfer cavity through the CF flange, can be detached, is provided with a portable support, and can realize the transfer and the quick switching of samples.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only one embodiment of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without inventive laboriousness.
FIG. 1 is a schematic structural view of a sample injection system according to an embodiment of the present invention;
fig. 2 is a schematic view of the internal structure of a sample injection system according to a specific embodiment of the present invention.
In the above drawings, the reference numerals denote:
1-a transfer cavity; 2-vacuum sample storage cavity; 3-a first flange; 4-a sample holding device; 5-a first sample transfer device; 6-a first valve; 7-a second flange; 8-a third flange; 9-a vacuum pump; 10-a sample transfer table; 11-a second sample transfer device; 12-a second valve; 13-normal pressure sample injection door; 14-a hand-held stand; 15-vacuum gauge.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
In a specific embodiment of the present invention, a vacuum chamber sampling system, as shown in fig. 1 and fig. 2, includes: a transfer cavity 1 and a vacuum sample storage cavity 2; the vacuum sample storage cavity 2 comprises a first flange 3, a sample holding device 4 and a first sample transfer device 5; the first flange 3 is provided with a first valve 6; the transfer cavity 1 comprises a second flange 7, a third flange 8, a vacuum pump 9, a sample transfer table 10 and a second sample transfer device 11, wherein the sample transfer table 10 is fixed to the second sample transfer device 11; the vacuum pump 9 is communicated with the inside of the vacuum cavity; the third flange 8 is provided with a second valve 12; the third flange 8 is sealingly fixed to the external reaction chamber; the first flange 3 is detachably fixed to the second flange 7; the sample holding means 4 is fixed to the first sample transfer means 5; the first sample transfer device 5 drives the sample holding device 4 into the transfer chamber 1 or back into the vacuum sample storage chamber 2.
In this embodiment, the transfer chamber 1 and the vacuum sample storage chamber 2 are made of stainless steel, which has high strength and can maintain the shape of the device under high pressure difference, and the vacuum pump 9 can be a combination of a molecular pump and a mechanical pump. First pass appearance device 5 can be for the magnet structure that the interior external cooperation of transfer chamber 1 set up, and 1 inside tracks that set up in transfer chamber, the user can be through removing outside magnet, and 1 inside magnet structure that has the manipulator in control transfer chamber removes the sample. The user can hold the sample in the vacuum chamber 2 by the hand, the second transfer device 11 can be constructed similarly to the first transfer device 5, and the transfer stage 10 can be engaged with the end of the second transfer device 11. During the sample loading process, the first flange 3 is first hermetically connected with the second flange 7. Secondly, the transfer cavity 1 is vacuumized by using the vacuum pump 9, and after the vacuum degree of the transfer cavity 1 reaches the standard, the first valve 6 and the second valve 12 are opened to communicate the vacuum sample storage cavity 2, the transfer cavity 1 and the external cavity. Thereafter, the sample is moved to the position of the sample transfer station 10 using the first transfer device 5 and placed on the sample transfer station 10, the sample transfer station 10 is moved to or past the position of the third flange 8 using the second transfer device 11, after which the sample or the transfer device with the sample is moved using the gripping means in the outer cavity. And after the grabbing is finished, closing the second valve 12, and finishing the sample injection. The user can also select a proper sample transfer device according to the parameters of the sample such as the type, the weight and the like.
The operation above reverse going on can be followed the outside reaction cavity and taken out the sample to vacuum and deposit appearance chamber 2, closes first valve 6 and will transfer 1 UNICOM atmospheres in chamber, and the user can pull down vacuum and deposit appearance chamber 2 to realize the access sample under atmospheric environment. Through setting up transfer chamber 1, can avoid vacuum to deposit appearance chamber 2 and outside reaction cavity gassing, be applicable to the sensitive sample of air. Simultaneously, vacuum sample storage cavity 2 can be dismantled, and the user can use a plurality of vacuum sample storage cavities 2 to advance the appearance in proper order, and work efficiency is higher.
In a preferred embodiment, as shown in fig. 1 and 2, the third flange 8 is detachably fixed to the outer reaction chamber for easy removal. The user can select the transfer chamber 1 and the second sample transfer device 11 with proper sizes or types according to the sample types, specifications and other parameters.
In a preferred embodiment, as shown in fig. 1 and 2, the first flange 3 and the second flange 7 are CF flanges, and edges of the CF flanges are provided with knife edges to seal through metal, so that the sealing degree is high, the sample is suitable for a sample which is extremely sensitive to air, the disassembly is convenient, and the assembly and disassembly efficiency is improved.
In a preferred embodiment, as shown in fig. 1 and 2, the first valve 6 and/or the second valve 12 are gate valves. The gate valve is convenient to open and close. The edge of the gate valve can be provided with a knife edge, and after the gate valve is closed, metal is sealed to the cavity, so that the reliability of the device can be improved.
In a preferred embodiment, a vacuum chamber sample injection system, as shown in fig. 1 and fig. 2, further includes an atmospheric pressure sample injection door 13, and the intermediate transfer chamber 1 further includes a fourth flange, and the fourth flange is hermetically connected to the atmospheric pressure sample injection door 13. When the vacuum sample storage cavity 2 is used for sample injection, the normal pressure sample injection door 13 is kept sealed and closed, and the vacuum of the transfer cavity 1 is maintained. When a non-air sensitive sample is injected into the external cavity, a user can open the normal pressure injection door 13, place the sample on the sample transfer table 10 through the normal pressure injection door 13, then close the normal pressure injection door 13 and vacuumize the sample transmission cavity, and then sample injection can be carried out into the external vacuum reaction cavity. Thereby completing the sample injection under normal pressure without damaging the vacuum environment of the external vacuum reaction cavity.
In a preferred embodiment, the vacuum sample storage cavity 2 is provided with a window flange, as shown in fig. 1 and 2, and the transfer cavity 1 is provided with a window flange, so that a user can observe the sample feeding condition conveniently.
In a preferred embodiment, a vacuum chamber sampling system, as shown in fig. 1 and 2, further comprises a portable rack 14, and the vacuum chamber 2 is fixed to the portable rack 14. The hand-held rack 14 may be made of stainless steel material for holding the vacuum loading chamber 2 and may be provided with a handle for facilitating the user to manually replace and transfer the vacuum loading chamber 2.
In a preferred embodiment, a vacuum chamber sample injection system, as shown in fig. 1 and 2, further comprises a vacuum gauge 15, wherein the vacuum gauge 15 measures the air pressure inside the transfer chamber 1. The user can master the atmospheric pressure condition in passing the appearance chamber through vacuometer 15, passes the appearance operation of follow-up biography after atmospheric pressure reaches standard in passing the appearance chamber. The vacuum gauge 15 can use a thin film capacitance gauge, and has high sensitivity and improved reliability.
It should be understood that the above description is only exemplary of the present invention, and is not intended to limit the present invention, and that any modifications, equivalents, improvements, etc. made within the spirit and principle of the present invention should be included within the scope of the present invention.
Claims (9)
1. A vacuum cavity sample introduction system is characterized by comprising: a transfer cavity and a vacuum sample storage cavity;
the vacuum sample storage cavity comprises a first flange, a sample holding device and a first sample transfer device; the first flange is provided with a first valve;
the transfer cavity comprises a second flange, a third flange, a vacuum pump, a sample transfer table and a second sample transfer device, and the sample transfer table is fixed to the second sample transfer device;
the vacuum pump is communicated with the inside of the vacuum cavity; the third flange is provided with a second valve;
the third flange is hermetically fixed to the external reaction chamber;
the first flange is detachably fixed to the second flange;
the sample holding device is fixed to the first sample transfer device; the first sample transfer device drives the sample holding device to enter the transfer cavity or return to the vacuum sample storage cavity.
2. The vacuum chamber sampling system according to claim 1, further comprising an atmospheric sampling gate, wherein the transfer chamber further comprises a fourth flange, and the fourth flange is hermetically connected to the atmospheric sampling gate.
3. The vacuum chamber sampling system according to claim 2, wherein the third flange is detachably fixed to the external reaction chamber.
4. A vacuum chamber sampling system according to claim 3, wherein the first flange and the second flange are CF flanges.
5. The vacuum chamber sampling system according to claim 4, wherein the first valve and/or the second valve is a gate valve.
6. The vacuum chamber sample introduction system according to claim 5, wherein the vacuum sample storage chamber is provided with a window flange.
7. The vacuum chamber sampling system according to claim 6, wherein the transfer chamber is provided with a window flange.
8. The vacuum chamber sampling system according to claim 7, further comprising a hand-held rack, wherein the vacuum sample storage chamber is fixed to the hand-held rack.
9. The vacuum chamber sample introduction system according to claim 8, further comprising a vacuum gauge, wherein the vacuum gauge measures the air pressure inside the transfer chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021644793.8U CN212375375U (en) | 2020-08-10 | 2020-08-10 | Vacuum cavity sampling system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021644793.8U CN212375375U (en) | 2020-08-10 | 2020-08-10 | Vacuum cavity sampling system |
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| CN212375375U true CN212375375U (en) | 2021-01-19 |
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| CN202021644793.8U Active CN212375375U (en) | 2020-08-10 | 2020-08-10 | Vacuum cavity sampling system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111876747A (en) * | 2020-08-10 | 2020-11-03 | 北京大学 | Vacuum cavity sampling system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111876747A (en) * | 2020-08-10 | 2020-11-03 | 北京大学 | Vacuum cavity sampling system |
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