CN217306464U

CN217306464U - Chip turning device

Info

Publication number: CN217306464U
Application number: CN202220402108.3U
Authority: CN
Inventors: 吴仁亮
Original assignee: Aluksen Optoelectronics Co ltd
Current assignee: Aluksen Optoelectronics Co ltd
Priority date: 2022-02-24
Filing date: 2022-02-24
Publication date: 2022-08-26
Anticipated expiration: 2032-02-24

Abstract

The application relates to the technical field of chip manufacturing, and provides a chip turnover device which comprises a turnover plate and two trays, wherein the turnover plate is provided with a limiting hole, and the limiting hole is provided with an opening; the two trays are oppositely stacked, one tray is used for containing a chip, the other tray is covered on the chip, the two trays are located in the limiting holes, the two trays are pressed together through the limiting holes, and the two trays can be separated after the opening slides to the outside of the limiting holes together. The chip turnover device of the embodiment can prevent the chip from falling off in the turnover process.

Description

Chip turning device

Technical Field

The application relates to the technical field of chip manufacturing, in particular to a chip turnover device.

Background

In the field of semiconductor chips, taking silicon technology as an example, an entire circular silicon wafer is generally diced into a large number of minimum units after passing through the process flow, and the minimum units of the silicon wafer are called chips (also called die), while a tray for holding the small chips is also called a tray. Before the chip is shipped, the chip is subjected to a back-chipping, a back-cracking, a back-scratching, or the like due to dicing, and therefore, it is necessary to perform a back-inspection.

For chips with an area of around 1 square millimeter, the back inspection process is extremely cumbersome. The traditional mode is mostly that operating personnel is manual with the stack upset of two trays with the model, carries out the back inspection to the chip again, because can't fix two trays effectively at the in-process of upset, so lead to the chip on the tray to drop easily.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides a chip turnover device to avoid that a chip drops in a turnover process.

The embodiment of the application provides a chip turnover device which comprises a turnover plate and two trays, wherein the turnover plate is provided with a limiting hole, and the limiting hole is provided with an opening; the two trays are oppositely stacked, one tray is used for containing a chip, the other tray is covered on the chip, the two trays are located in the limiting holes, the two trays are pressed together through the limiting holes, and the two trays can be separated after the opening slides to the outside of the limiting holes together.

The chip turning device of this application embodiment, because spacing hole on the returning face plate is in the same place two tray pressfitting, so can effectively fix two trays at the in-process of upset, avoid the chip between two trays to drop, still can separate two trays after the upset is accomplished by the outside that the opening slided to spacing hole to carry out the back inspection to the chip, simple structure, convenient to use.

In some embodiments, the turnover plate is provided with a first pushing port communicated with the limiting hole, and the first pushing port is arranged at one end, far away from the opening, of the limiting hole.

By adopting the scheme, the first pushing port can firstly stretch hands or tools into the limiting holes and then slide the two trays to the outside of the limiting holes through the openings, and the operation is simple, convenient and labor-saving.

In some embodiments, the turnover plate comprises a first plate and a second plate which are stacked, a groove is arranged on the side surface of the first plate close to the second plate, and the limiting hole is formed by surrounding the side surface of the groove and the part of the side surface of the second plate close to the first plate.

By adopting the scheme, the groove can be processed on the side surface of the first plate close to the second plate, and then the first plate and the second plate are assembled together, so that the turnover plate is more convenient to process.

In some embodiments, the first pushing port is disposed on the first plate, and the second pushing port is disposed on the second plate and communicates with the first pushing port.

By adopting the scheme, the space of keeping away that accessible first promotion mouth and second promotion mouth are constituteed stretches into the outside of spacing hole with two trays by the opening slip to spacing hole again after staff or instrument earlier in spacing downthehole portion, and the operation is simpler, convenient, laborsaving.

In some of these embodiments, the first and second panels are removably connected together.

Through adopting above-mentioned scheme, can put two trays on the first board earlier, link together first board and second board again, so that spacing hole is in the same place two tray pressfitting, and slide two trays to the outside in spacing hole by the opening at needs, also can earlier break down first board and second board, take off two trays again, thereby make to put into spacing downthehole and follow spacing downthehole process of taking out of two trays very convenient, laborsaving.

In some embodiments, the first plate is provided with a threaded hole, the second plate is provided with a through hole, and the turnover device further comprises a connecting screw, wherein the connecting screw penetrates through the threaded hole and the through hole.

By adopting the scheme, the connection mode of the first plate and the second plate is simpler, and the first plate and the second plate are more convenient to process.

In some embodiments, the first plate is provided with an elastic claw, the second plate is provided with a clamping groove, the claw is arranged in the clamping groove in a penetrating manner, and one end, far away from the first plate, of the claw is clamped on one surface, far away from the first plate, of the second plate.

By adopting the scheme, the connection and the disassembly processes of the first plate and the second plate are very convenient and fast.

In some of these embodiments, the first plate and the second plate are magnetically attracted together.

By adopting the scheme, the connection and the disassembly processes of the first plate and the second plate can be very convenient and fast.

In some of these embodiments, the shape of the limiting hole is adapted to the shape of the tray.

Through adopting above-mentioned scheme, can be so that spacing pore pair two trays carry out spacing better to ensure that two trays can not take place the dislocation.

In some of these embodiments, the sides of the opening are provided with chamfers or fillets.

Through adopting above-mentioned scheme, conveniently insert spacing downthehole with two trays by the opening.

The chip turning device that this application embodiment provided, beneficial effect lies in: because spacing hole on the returning face plate is in the same place two tray pressfitting, so can effectively fix two trays at the in-process of upset, avoid the chip between two trays to drop, still can separate two trays after the upset is accomplished by the outside that the opening slided spacing hole jointly to carry out the back inspection to the chip, simple structure, convenient to use.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.

FIG. 1 is a schematic diagram of a chip flipping device according to an embodiment of the present disclosure;

FIG. 2 is a schematic diagram of another view of the chip flipping apparatus shown in FIG. 1;

FIG. 3 is an exploded view of the chip flipping mechanism shown in FIG. 2;

FIG. 4 is a schematic diagram of a chip flipping mechanism according to another embodiment of the present disclosure;

fig. 5 is an exploded view of the chip flipping unit shown in fig. 4.

The designations in the figures mean:

100. a chip turning device; 10. a turnover plate; 11. a limiting hole; 12. an opening; 13. a first push port; 14. a first plate; 141. a groove; 142. a threaded hole; 143. a claw; 144. lightening holes; 15. a second plate; 151. a second push port; 152. a through hole; 153. a card slot; 20. a tray; 30. and connecting screws.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be described in further detail below with reference to the accompanying drawings, which are examples. It should be understood that the specific embodiments described herein are merely illustrative of and not restrictive on the broad application.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.

In order to explain the technical solution of the present application, the following description is made with reference to the specific drawings and examples.

Referring to fig. 1, an embodiment of the present application provides a chip flipping apparatus 100, which includes a flipping board 10 and two trays 20, wherein the flipping board 10 is provided with a limiting hole 11, and the limiting hole 11 is provided with an opening 12.

Two trays 20 are relative and stack the setting, one of them tray 20 is used for holding the chip, another tray 20 lid is established on the chip, it is spacing to the chip, two trays 20 all are located spacing downthehole 11 and spacing hole 11 is in the same place two trays 20 pressfitting, thereby can effectively fix two trays 20 at the in-process of follow-up upset, avoid the chip between two trays 20 to drop, two trays 20 can be separated to spacing hole 11 outside back by opening 12 slides jointly, so that carry out the back inspection to the chip.

When the chip turnover device 100 provided by the embodiment of the application is used, a chip is firstly placed on one tray 20, and then the other tray 20 is covered on the chip to limit the chip; then, the two trays 20 are inserted into the limiting hole 11 through the opening 12, and the two trays 20 are pressed together through the limiting hole 11 so as to effectively fix the two trays 20 and prevent chips between the two trays 20 from falling off in the subsequent overturning process; then the turnover plate 10 and the two trays 20 are turned over integrally, the positions of the two trays 20 are exchanged, at the moment, the chips fall into the lower tray 20 from the upper tray 20, the turnover is realized, and the turnover plate 10 can be slightly knocked after the turnover is finished; and finally, sliding the two trays 20 from the opening 12 to the outside of the limiting hole 11, and taking down the tray 20 above to inspect the back of the chip.

The chip turning device 100 that this application embodiment provided, because spacing hole 11 on the returning face plate 10 is in the same place two trays 20 pressfitting, so can effectively fix two trays 20 at the in-process of upset, avoid the chip between two trays 20 to drop, still can separate two trays 20 after the upset is accomplished by opening 12 slides to spacing hole 11's outside jointly after, in order to carry out the back inspection to the chip, simple structure, convenient to use.

Referring to fig. 2 and 3, in some embodiments, the flipping board 10 is provided with a first pushing opening 13 communicating with the limiting hole 11, and the first pushing opening 13 is disposed at an end of the limiting hole 11 away from the opening 12.

By adopting the above scheme, the first pushing port 13 can be used for firstly extending hands or tools into the limiting hole 11 and then sliding the two trays 20 from the opening 12 to the outside of the limiting hole 11, so that the operation is simple, convenient and labor-saving.

Referring to fig. 2 and 3 again, in some embodiments, the flipping panel 10 includes a first panel 14 and a second panel 15 stacked together, a groove 141 is disposed on a side of the first panel 14 close to the second panel 15, and the limiting hole 11 is surrounded by a side of the groove 141 and a portion of a side of the second panel 15 close to the first panel 14. By adopting the scheme, the groove 141 can be machined on the side surface of the first plate 14 close to the second plate 15, and then the first plate 14 and the second plate 15 are assembled together, so that the turnover plate 10 is more convenient to machine.

Further, the lightening holes 144 are formed in the first plate 14, so that the weight of the first plate 14 can be reduced, and the subsequent overturning process is more labor-saving.

Referring to fig. 1, 2 and 3, in some embodiments, the first pushing port 13 is disposed on the first plate 14, and the second plate 15 is disposed with a second pushing port 151 communicating with the first pushing port 13.

By adopting the above scheme, the space of keeping away that accessible first promotion mouth 13 and second promotion mouth 151 are constituteed will two trays 20 slide to the outside of spacing hole 11 by opening 12 after staff or instrument stretch into spacing hole 11 inside earlier, and the operation is simpler, convenient, laborsaving.

In some of these embodiments, the first plate 14 and the second plate 15 are removably connected together.

Through adopting above-mentioned scheme, can put two trays 20 on first board 14 earlier, link together first board 14 and second board 15 again, so that spacing hole 11 is in the same place two tray 20 pressfitting, and slide two tray 20 to spacing hole 11 outside by opening 12 in needs, also can dismantle first board 14 and second board 15 earlier and open, take off two tray 20 again, thereby make and put into spacing hole 11 with two tray 20 and all very convenient, laborsaving from the process of taking out in spacing hole 11.

Referring to fig. 2 and 3, in some embodiments, the first plate 14 is provided with a threaded hole 142, the second plate 15 is provided with a through hole 152, the turnover device further includes a connection screw 30, and the connection screw 30 is inserted into the threaded hole 142 and the through hole 152.

Through adopting above-mentioned scheme for the connected mode of first board 14 and second board 15 is comparatively simple, and first board 14 and second board 15 make things convenient for processing more.

Further, the threaded holes 142, the through holes 152 and the connecting screws 30 are distributed in a rectangular shape, so that the connecting tightness of the first plate 14 and the second plate 15 is improved, and the two trays 20 are tightly pressed together through the limiting holes 11.

Alternatively, the through hole 152 may be provided as a countersunk hole so that the connection screw 30 does not protrude above the side of the second plate 15 away from the first plate 14.

Referring to fig. 4 and fig. 5, in another embodiment, the first plate 14 is provided with a resilient claw 143, the second plate 15 is provided with a slot 153, the claw 143 is inserted into the slot 153, and an end of the claw 143 away from the first plate 14 is clamped on a surface of the second plate 15 away from the first plate 14.

By adopting the scheme, the connection and the disassembly processes of the first plate 14 and the second plate 15 are very convenient and fast.

It can be understood that, the jaws 143 are arranged at a gap from the clamping grooves 153, and when the first plate 14 and the second plate 15 need to be separated, the jaws 143 are only required to be shifted in the clamping grooves 153, so that one ends of the jaws 143 far away from the first plate 14 are separated from one surfaces of the second plate 15 far away from the first plate 14, and the jaws 143 can be taken out of the clamping grooves 153, so that the first plate 14 and the second plate 15 are separated.

Further, four claws 143 and four catching grooves 153 are arranged in a rectangular distribution.

In yet another embodiment, the first plate 14 and the second plate 15 are magnetically attracted together.

By adopting the scheme, the connection and the disassembly processes of the first plate 14 and the second plate 15 can be very convenient and fast.

Alternatively, magnets having opposite polarities may be provided on the first plate 14 and the second plate 15, respectively, or the first plate 14 may be provided with magnets and the second plate 15 may be made of a metal that can be attracted to the magnets.

Referring to fig. 2 and 3, in some embodiments, the shape of the limiting hole 11 is adapted to the shape of the tray 20.

By adopting the scheme, the two trays 20 can be better limited by the limiting holes 11, so that the two trays 20 cannot be dislocated.

In the illustrated embodiment, the shape of the limiting hole 11 and the shape of the tray 20 are both rectangular parallelepiped.

It is understood that the shape of the limiting hole 11 and the shape of the tray 20 may be other shapes.

Referring to fig. 3, in some embodiments, the sides of the opening 12 are chamfered or rounded.

By adopting the scheme, the two trays 20 can be conveniently inserted into the limiting hole 11 from the opening 12.

Referring to fig. 1 and 2, the embodiment of the present application provides a chip flipping apparatus 100, which includes a flipping plate 10, two trays 20, and a connection screw 30.

The turning plate 10 is provided with a rectangular parallelepiped limiting hole 11, and the limiting hole 11 is provided with an opening 12.

The turning plate 10 comprises a first plate 14 and a second plate 15 which are arranged in a stacked manner, and the limiting hole 11 comprises a groove 141 arranged on the side surface of the first plate 14 close to the second plate 15 and a part of the side surface of the second plate 15 close to the first plate 14.

The first plate 14 is provided with a first pushing port 13, the first pushing port 13 is arranged at one end of the limiting hole 11 far away from the opening 12, and the second plate 15 is provided with a second pushing port 151 communicated with the first pushing port 13.

The first plate 14 is provided with a threaded hole 142, the second plate 15 is provided with a through hole 152, and the connecting screw 30 is inserted into the threaded hole 142 and the through hole 152.

Two trays 20 are relative and stack the setting, and one of them tray 20 is used for holding the chip, and another tray 20 lid is established on the chip, and the shape of spacing hole 11 and the shape adaptation of tray 20, two trays 20 all are located spacing hole 11 and spacing hole 11 with two trays 20 pressfitting together, and two trays 20 can be separated after sliding to spacing hole 11's outside jointly by opening 12.

The chip turnover device 100 of the embodiment of the application, because the spacing hole 11 on the turnover plate 10 is in the same place with two trays 20 pressfitting, so can effectively fix two trays 20 at the in-process of upset, avoid the chip between two trays 20 to drop, still can separate two trays 20 after the upset is accomplished by opening 12 slides to spacing hole 11's outside jointly after, in order to carry out the back inspection to the chip, simple structure, convenient to use.

The above embodiments are only used to illustrate the technical solutions of the present application, and not to limit the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not substantially depart from the spirit and scope of the embodiments of the present application and are intended to be included within the scope of the present application.

Claims

1. A chip turnover device is characterized by comprising a turnover plate and two trays, wherein the turnover plate is provided with a limiting hole, and the limiting hole is provided with an opening; the two trays are oppositely stacked, one tray is used for containing a chip, the other tray is covered on the chip, the two trays are located in the limiting holes, the two trays are pressed together through the limiting holes, and the two trays can be separated after the opening slides to the outside of the limiting holes together.

2. The turnover device of claim 1, wherein the turnover plate is provided with a first pushing port communicated with the limiting hole, and the first pushing port is arranged at one end of the limiting hole far away from the opening.

3. The turnover device of claim 2, wherein the turnover plate comprises a first plate and a second plate which are stacked, a groove is arranged on the side surface of the first plate close to the second plate, and the limiting hole is formed by surrounding the side surface of the groove and the partial side surface of the second plate close to the first plate.

4. The flipping device of claim 3, wherein the first pushing port is provided on the first plate, and the second plate is provided with a second pushing port in communication with the first pushing port.

5. The flipping mechanism of claim 3, wherein the first and second panels are removably coupled together.

6. The turnover device of claim 5, wherein the first plate is provided with a threaded hole, the second plate is provided with a through hole, and the turnover device further comprises a connecting screw, and the connecting screw is arranged in the threaded hole and the through hole in a penetrating manner.

7. The turnover device of claim 5, wherein the first plate is provided with a resilient claw, the second plate is provided with a slot, the claw is inserted into the slot, and one end of the claw, which is far away from the first plate, is clamped on one surface of the second plate, which is far away from the first plate.

8. The flipping mechanism of claim 5, wherein the first plate and the second plate are magnetically attracted together.

9. The turnover device of any one of claims 1 to 8, wherein the shape of the limiting hole is adapted to the shape of the tray.

10. The turnover device of any one of claims 1 to 8, wherein the limiting hole is provided with a chamfer or a fillet at the side of the opening.