CN217276600U - Echo wall mode microbubble probe resonator and pressure sensing system - Google Patents

Abstract

The utility model discloses a whispering gallery mode microbubble probe resonator, which comprises a micro-nano optical fiber and a whispering gallery mode microbubble cavity, wherein the whispering gallery mode microbubble cavity comprises a deformation wall area and a stress wall area, and the stress of the deformation wall area can be deformed and surrounds on the equatorial plane circumference of the whispering gallery mode microbubble cavity; a probe structure is arranged outside the stress wall area, and the axial direction of the probe structure is vertical to the equatorial plane of the whispering gallery mode micro-bubble cavity; the micro-nano optical fiber is coupled to the deformation wall area of the whispering gallery mode micro-bubble cavity. The whispering gallery mode microbubble probe resonator can be in point contact with a measured target, so that the accuracy of single-point pressure measurement of the measured target is improved. The utility model also discloses a pressure sensing system, including above-mentioned echo wall mode microbubble probe syntonizer.

Description

Echo wall mode microbubble probe resonator and pressure sensing system

Technical Field

The utility model relates to a sensing technology especially relates to a whispering gallery mode microbubble probe syntonizer and pressure sensing system.

Background

In the fields of microsystems, material detection, biological sample detection, etc., the measurement of a minute physical quantity is very critical. Particularly, for the measurement of micro force and displacement, the method not only can provide feedback and guidance for a user in actual operation, but also can convert the micro force and the guidance into imaging information to image the surface of an object to be measured. In the fabrication and assembly of microsystems, since the target object is very small and not mechanically strong, it is often necessary to sense the force generated during operation to guide the operator through the operation without damaging the micro device. In material detection, the measurement of the Young modulus of a material is very critical and can be realized by continuously pressing a standard probe. In the detection of the biological sample, the mechanical property of the biological tissue can be obtained by pressing the surface through a standard probe, and the feedback generated by pressing can be converted into the information of the surface morphology, so that the imaging of the surface of the biological sample is realized.

Micro-electromechanical mechanical Sensors (MEMS Force Sensors) are a mature mechanical sensor that can sense and measure forces based on micro-electromechanical systems and electrical principles. The sensor has various types and wide application, and is suitable for engineering application with low precision. However, the electrical nature defines that it necessarily has a certain volume to accommodate the electrical circuit. In order to reduce the size and ensure stable operation of the circuit, such sensors generally have a specially shaped package. In addition, the electrical nature also limits its resistance to electromagnetic interference, chemical corrosion, and its inability to operate in liquid environments containing electrolytes. These deficiencies largely prevent such sensors from operating in certain environments and limit the variety of targets being measured. The poor precision and response time also make the mems sensors unusable in high-precision microsystem assembly, material detection, scientific research, and other scenarios.

Whispering gallery mode microcavity has received much attention as one of the optical microcavities, with high quality factors and extremely small mode volumes. When the external condition changes, the phase matching condition of the optical whispering gallery mode in the microcavity also changes, and the phase matching condition is directly reflected as the shift of the resonance peak on the resonance spectrum. The external measurement is thus converted into an optical signal and read out. The sensing mode has micron-sized dimensions, can achieve extremely high sensitivity and detection lower limit by using optical signals as information media, is very suitable for high-precision sensing scenes, is not interfered by electromagnetism, can work in a corrosive liquid environment containing electrolyte, and has the characteristics of easiness in preparation, low cost and high mechanical strength compared with other mechanical sensors.

Chinese patent No. CN201910039059.4 discloses an optical sensor based on a double-bottle micro resonant cavity, which includes a double-bottle micro resonant cavity; a laser; micro-nano optical fibers; and an optical detector; one end of the micro-nano optical fiber is connected with the laser, the other end of the micro-nano optical fiber is connected with the optical detector, the micro-nano optical fiber is coupled with the double-bottle-shaped micro resonant cavity, and the coupling point of the micro-nano optical fiber and the double-bottle-shaped micro resonant cavity is located at the position of the joint point of the two whispering gallery mode optical microcavities; wherein: the double-bottle-shaped micro resonant cavity is used for enabling laser entering the double-bottle-shaped micro resonant cavity through coupling between the micro-nano optical fiber and the double-bottle-shaped micro resonant cavity to form echo wall type optical resonance in the two echo wall type optical micro-cavities respectively so as to obtain a resonance spectrum for detection of the optical sensor; the micro-nano optical fiber is used for receiving laser emitted by the laser, enabling the laser to enter the double-bottle-shaped micro resonant cavity through the coupling, obtaining the resonance spectrum through the coupling, and outputting the resonance spectrum to the optical detector. When the optical sensor detects physical quantities such as pressure, displacement, an electric field or a magnetic field, the size of the whispering gallery mode optical microcavity is mainly influenced. Under the action of the physical quantities, the material of the double-bottle-shaped micro resonant cavity is deformed. Resonant wavelength shift satisfies

And deltar is the amount of cavity deformation caused by the probe volume.

However, the double-bottle micro resonant cavity of the optical sensor is suitable for area-type pressure measurement of air pressure, hydraulic pressure and the like because the resonant cavity is in a double-bottle shape and the cavity surface is an arc surface and the deformation amount of the cavity caused by the pressure with the same magnitude is different when the pressure is applied to different positions of the resonant cavity, and when the double-bottle micro resonant cavity is used for single-point pressure measurement of pressure, displacement, target young modulus and the like generated by contact pressing, the measurement accuracy is influenced because of the difference of the stress direction and the stress position.

SUMMERY OF THE UTILITY MODEL

In order to solve the deficiencies of the prior art, the utility model provides a whispering gallery mode microbubble probe syntonizer can realize the point contact with the measured object to the improvement carries out single-point formula pressure measurement's precision to the measured object.

The utility model also provides a pressure sensing system, including above-mentioned whispering gallery mode microbubble probe syntonizer.

The utility model discloses the technical problem that will solve realizes through following technical scheme:

a whispering gallery mode microbubble probe resonator comprises a waveguide, a whispering gallery mode microbubble cavity and a contact probe, wherein the contact probe is arranged outside the whispering gallery mode microbubble cavity and is axially vertical to an equatorial plane of the whispering gallery mode microbubble cavity; the cavity wall of the whispering gallery mode micro-bubble cavity comprises a sensitive area and a non-sensitive area, wherein the sensitive area is deformable under stress and surrounds the circumference of the equatorial plane of the whispering gallery mode micro-bubble cavity; the waveguide is coupled to a sensitive region of the whispering gallery mode microbubble cavity, and the contact probe is located on the non-sensitive region.

Further, the wall thickness of the sensitive region is smaller than the wall thickness of the non-sensitive region.

Further, the wall thickness of the cavity wall of the whispering gallery mode microbubble cavity at the sensitive region is minimal.

Further, the waveguide comprises a micro-nano optical fiber, and the micro-nano optical fiber is coupled with the sensitive area of the whispering gallery mode micro-bubble cavity.

Further, the waveguide further comprises an incident end optical fiber and an emergent end optical fiber, the incident end optical fiber is axially connected to one side of the micro-nano optical fiber, and the emergent end optical fiber is axially connected to the other side of the micro-nano optical fiber.

Further, the micro-nano optical fiber is parallel to the equatorial plane tangential direction of the whispering gallery mode micro-bubble cavity.

Furthermore, the whispering gallery mode microbubble cavity is connected with a thin tube structure at the other end opposite to the contact probe, the thin tube structure is further connected with a capillary cone part at the other end opposite to the whispering gallery mode microbubble cavity, and the capillary cone part is further connected with a quartz capillary tube at the other end opposite to the capillary cone part.

A pressure sensing system comprises a tunable laser, a spectrometer and the whispering gallery mode micro-bubble probe resonator, wherein the tunable laser is connected with an incident end of a waveguide of the whispering gallery mode micro-bubble probe resonator, and the spectrometer is connected with an emergent end of the waveguide of the whispering gallery mode micro-bubble probe resonator.

Further, the device also comprises a control computing device which is respectively in communication connection with the tunable laser and the spectrometer.

Furthermore, the control computing device is a personal computer, an industrial personal computer or a mobile terminal.

The utility model discloses following beneficial effect has: the whispering gallery mode micro-bubble probe resonator is characterized in that a special deformation wall area and a stress wall area are arranged on the cavity wall of the whispering gallery mode micro-bubble cavity, the stress wall area directly acts with pressure through the probe structure, and translates along the pressure direction when stressed, the deformation wall area does not directly act with the pressure but deforms under the translation and extrusion of the stress wall area, so as to cause the radius change of the equatorial plane of the whispering gallery mode micro-bubble cavity, the action position of the pressure is limited on the probe structure, and the action direction of the pressure is limited to the axial direction of the probe structure, so that the difference of the radius change of the equatorial plane caused by the difference of the stress direction and the stress position is avoided, meanwhile, the probe structure can realize point contact with a measured object, and is suitable for single-point pressure measurement such as pressure, displacement, Young modulus of the object and the like generated by contact type pressing, and the axial direction of the probe structure is vertical to the equatorial plane of the whispering gallery mode microbubble cavity, and the maximum change of the radius of the equatorial plane can be caused under the minimum stress, so that the probe structure has a minimum lower measurement limit.

Drawings

Fig. 1 is an axial cross-sectional view of a whispering gallery mode microbubble probe resonator provided by the present invention;

fig. 2 is a cross-sectional view of the equatorial plane of a whispering gallery mode microbubble probe resonator provided by the present invention;

fig. 3 is a schematic diagram of the force applied to the whispering gallery mode microbubble probe resonator provided by the present invention;

fig. 4 is a schematic diagram of a pressure sensing system provided by the present invention;

fig. 5 is a process diagram of the method for manufacturing the whispering gallery mode microbubble probe resonator by using carbon dioxide laser according to the present invention;

fig. 6 is a schematic diagram of a quartz capillary tube in the method for manufacturing a whispering gallery mode microbubble probe resonator by using a carbon dioxide laser according to the present invention;

fig. 7 is a schematic diagram illustrating the formation of a tubule structure in the method for fabricating a whispering gallery mode microbubble probe resonator using a carbon dioxide laser according to the present invention;

fig. 8 is a schematic diagram of forming a whispering gallery mode microbubble cavity in a method of fabricating a whispering gallery mode microbubble probe resonator using a carbon dioxide laser according to the present invention;

fig. 9 is a schematic diagram of the contact probe formed in the method of manufacturing the whispering gallery mode microbubble probe resonator using the carbon dioxide laser according to the present invention.

Detailed Description

The invention is described in detail below with reference to the drawings, wherein examples of the embodiments are shown in the drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, are not to be construed as limiting the invention.

Furthermore, the terms "first", "second", "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," or "third" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and "disposed" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or may be connected through the interconnection of two elements or through the interaction of two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Example one

As shown in fig. 1 and 2, a whispering gallery mode microbubble probe resonator comprises a waveguide 1, a whispering gallery mode microbubble cavity 23, and a contact probe 24, wherein the contact probe 24 is arranged outside the whispering gallery mode microbubble cavity 23 and is axially perpendicular to an equatorial plane of the whispering gallery mode microbubble cavity 23; the cavity wall of the whispering gallery mode micro-bubble cavity 23 comprises a sensitive area 231 and a non-sensitive area 232, wherein the sensitive area 231 can be deformed under stress and surrounds the circumference of the equatorial plane of the whispering gallery mode micro-bubble cavity 23; the waveguide 1 is coupled to the sensitive area 231 of the whispering gallery mode microbubble cavity 23, and the contact probe 24 is located on the non-sensitive area 232.

The whispering gallery mode micro-bubble probe resonator has a high quality factor and a small mode volume of the whispering gallery mode micro-bubble cavity 23, when an optical signal with a specific wavelength is coupled into the cavity of the whispering gallery mode micro-bubble cavity 23 from the equatorial plane by the waveguide 1, if the optical signal meets a phase matching condition, that is, the optical path is equal to an integral multiple of the wavelength, the optical signal will be continuously totally reflected on the equatorial plane of the whispering gallery mode micro-bubble cavity 23 and then reejected out of the whispering gallery mode micro-bubble cavity 23 from the coupling point, the resonant spectrum of the optical signal in the whispering gallery mode micro-bubble cavity 23 is related to the equatorial plane radius of the whispering gallery mode micro-bubble cavity 23, as shown in fig. 3, when the whispering gallery mode micro-bubble cavity 23 is compressed by a force, the equatorial plane radius of the whispering gallery mode micro-bubble cavity 23 will also change, and the resonant spectrum will shift, the shift degree is related to the variation quantity Δ R of the equatorial plane radius of the whispering gallery mode micro-bubble cavity 23, the variation quantity Δ R of the equatorial plane radius of the whispering gallery mode micro-bubble cavity 23 is related to the compression degree of the whispering gallery mode micro-bubble cavity 23, and the compression degree of the whispering gallery mode micro-bubble cavity 23 is related to the magnitude of the pressure F, so the magnitude of the pressure F applied to the whispering gallery mode micro-bubble cavity 23 can be calculated through the shift degree of the resonance spectrum.

The whispering gallery mode micro-bubble probe resonator is provided with a contact probe 24, the contact probe 24 is in contact stress with a single point on a measured object, pressure measurement of the single point such as pressure, displacement and target Young modulus generated by contact pressing can be realized, the action position of the pressure is limited on the contact probe 24, the action direction of the pressure is limited to the axial direction of the contact probe 24, the difference of the change of the equatorial plane radius of the whispering gallery mode micro-bubble cavity 23 caused by different stress directions and stress positions is avoided, the axial direction of the contact probe 24 is perpendicular to the equatorial plane of the whispering gallery mode micro-bubble cavity 23, the largest change of the equatorial plane radius can be caused under the smallest stress, and the lowest measurement limit is provided; meanwhile, the wall of the whispering gallery mode micro-bubble cavity 23 is provided with a special sensitive area 231 and a non-sensitive area 232, the non-sensitive area 232 directly acts with pressure through the contact probe 24 and translates along the pressure direction when stressed, the sensitive area 231 does not directly act with the pressure but deforms under the translation and extrusion of the non-sensitive area 232, and accordingly the radius of the equatorial plane of the whispering gallery mode micro-bubble cavity 23 changes.

The non-sensitive region 2321 is deformed by a certain amount or is not deformed when being stressed, and depending on the wall thickness of the non-sensitive region 232, the larger the wall thickness of the non-sensitive region 232 is, the smaller the deformation amount of the non-sensitive region 232 is; when the contact probe 24 is applied with pressure, part of the pressure causes deformation of the non-sensitive area 232, the remaining part is conducted to the sensitive area 231, causing deformation of the sensitive area 231, the deformation of the non-sensitive area 232 is much smaller than that of the sensitive area 231, so that it is negligible, and the sensitive area 231 is considered to be subjected to all the pressure.

The wall thickness of the sensitive region 231 is smaller than that of the non-sensitive region 232, so that when the contact probe 24 is pressed by a measured object, the non-sensitive region 232 deforms as little as possible or does not deform when being stressed, and translates towards the sensitive region 231 along the stressed direction, and the sensitive region 231 deforms when being pressed by the non-sensitive region 232.

Preferably, the wall thickness of the cavity wall of the whispering gallery mode microbubble cavity 23 at the sensitive region 231 is minimal.

The waveguide 1 comprises a micro-nano optical fiber 12, the micro-nano optical fiber 12 is coupled with a sensitive region 231 of the whispering gallery mode micro-bubble cavity 23, so that an optical signal in the micro-nano optical fiber 12 can be coupled into the whispering gallery mode micro-bubble cavity 23, and an optical signal in the whispering gallery mode micro-bubble cavity 23 can be coupled into the micro-nano optical fiber 12.

The waveguide 1 further comprises an incident end optical fiber 11 and an emergent end optical fiber 13, wherein the incident end optical fiber 11 is axially connected to one side of the micro-nano optical fiber 12, and the emergent end optical fiber 13 is axially connected to the other side of the micro-nano optical fiber 12.

The incident end optical fiber 11, the micro-nano optical fiber 12 and the exit end optical fiber 13 respectively comprise a fiber core and a cladding, the cladding is coated on the outer peripheral wall of the fiber core, the cladding is sequentially connected with the cladding, and the fiber core is also sequentially connected with the fiber core; the fiber cores and the cladding have different refractive indexes, so that optical signals can be totally reflected at the interface between the fiber cores and the cladding, and further can be axially transmitted in the fiber cores of the incident end optical fiber 11, the micro-nano optical fiber 12 and the emergent end optical fiber 13.

The micro-nano optical fiber 12 is parallel to the equatorial plane tangential direction of the whispering gallery mode micro-bubble cavity 23.

The other end of the whispering gallery mode micro-bubble cavity 23 opposite to the contact probe 24 is connected with a thin tube structure 22, the other end of the thin tube structure 22 opposite to the whispering gallery mode micro-bubble cavity 23 is also connected with a capillary cone part 21, and the other end of the capillary cone part 21 opposite to the capillary cone part 21 is also connected with a quartz capillary tube 22; the capillary cone 21, the capillary structure 22, the whispering gallery mode microbubble cavity 23, and the contact probe 24 are all formed from the quartz capillary 2, coaxially.

Example two

As shown in FIG. 4, a pressure sensing system includes a whispering gallery mode microbubble probe resonator as described in the first embodiment, and

a tunable laser for emitting an optical signal into a waveguide of the whispering gallery mode microbubble probe resonator;

the spectrometer is used for collecting an optical signal emitted from the waveguide of the whispering gallery mode micro-bubble probe resonator and converting the collected optical signal into a resonance spectrum of the whispering gallery mode micro-bubble probe resonator;

and the control calculation device is used for controlling the tunable laser to emit a light signal into the waveguide 1 of the whispering gallery mode micro-bubble probe resonator, controlling the spectrometer to collect a light signal emitted from the waveguide 1 of the whispering gallery mode micro-bubble probe resonator, and calculating the pressure according to the resonance spectrum analysis of the whispering gallery mode micro-bubble probe resonator converted by the spectrometer.

Specifically, when measuring the pressure F, the tunable laser firstly emits an optical signal into the optical fiber 11 at the incident end of the waveguide 1, the optical signal is coupled into the cavity of the whispering gallery mode micro-bubble cavity 23 through the micro-nano optical fiber 12 of the waveguide 1, then the wavelength of the optical signal is modulated to meet the phase matching condition of the whispering gallery mode micro-bubble cavity 23, the modulated optical signal is continuously and totally reflected on the equatorial plane of the whispering gallery mode micro-bubble cavity 23 to cause whispering gallery mode resonance to be coupled into the micro-nano optical fiber 12 of the waveguide 1 again, and finally the spectrometer collects the optical signal emitted from the optical fiber 13 at the exit end of the waveguide 1 and analyzes the optical signal to obtain the resonance spectrum of the whispering gallery mode micro-bubble cavity 23; the contact probe 24 is pressed in contact with a plurality of points on a standard object to cause the equatorial plane radius of the whispering gallery mode micro-bubble cavity 23 to change to different degrees, so as to obtain a plurality of resonance spectrums with different shift degrees, and a relation curve of the shift degree of the resonance spectrums and the magnitude of the pressure F is calculated; and (3) contacting and pressing the contact probe 24 with a single point on the measured object to obtain a resonance spectrum on the point of the measured object, and finally calculating the pressure F of the point on the measured object according to the shift degree of the resonance spectrum on the point and a relation curve of the shift degree of the resonance spectrum and the pressure F.

The tunable laser is connected with an incident end optical fiber 11 of the waveguide 1, the spectrometer is connected with an emergent end optical fiber 13 of the waveguide 1, and the control and calculation device is respectively in communication connection with the tunable laser and the spectrometer.

EXAMPLE III

As shown in fig. 5, a method for manufacturing a whispering gallery mode microbubble probe resonator according to the first embodiment by using a carbon dioxide laser includes the following steps:

s100: the spot position of the carbon dioxide laser is adjusted to be positioned at a first predetermined position of a quartz capillary tube 2 as shown in fig. 6.

In this step S100, the quartz capillary 2 has a tube cavity 31 with both ends open.

The position of the first pre-positioning on the quartz capillary tube 2 can be determined according to the overall length of the whispering gallery mode micro-bubble probe resonator, the spot position of the carbon dioxide laser is adjusted firstly, the spot position of the carbon dioxide laser is positioned on the quartz capillary tube 2, and then the spot position of the carbon dioxide laser is moved along the axial direction of the quartz capillary tube 2, so that the spot position of the carbon dioxide laser is positioned on the first pre-positioning of the quartz capillary tube 2.

S200: and adjusting the spot power of the carbon dioxide laser to heat and soften the first preset position of the quartz capillary tube 2 by the spot of the carbon dioxide laser.

In step S200, the carbon dioxide laser is emitted by a laser light source, and the spot power of the carbon dioxide laser is adjusted by controlling the operating power of the laser light source, or an attenuation unit is disposed on an output path of the carbon dioxide laser, and the carbon dioxide laser is attenuated by controlling the attenuation unit, so as to adjust the spot power of the carbon dioxide laser.

S300: and driving the two ends of the quartz capillary tube 2 to respectively and reversely translate along the axial direction so as to attenuate the first predetermined position of the quartz capillary tube 2, so that the carbon dioxide laser is turned off after the first predetermined position of the quartz capillary tube 2 forms a thin tube structure 22 as shown in fig. 7.

In step S300, after the first predetermined position of the quartz capillary tube 2 is heated and softened by the carbon dioxide laser, in the process that the two ends of the quartz capillary tube 2 respectively translate back and forth along the axial direction, the tube wall of the first predetermined position will gradually become thinner and gather toward the center of the tube cavity 31 of the quartz capillary tube 2, so as to form the tubule structure 22. The inner diameter and the outer diameter of the thin tube structure 22 are smaller than those of the quartz capillary tube 2, and two sides of the thin tube structure are respectively connected with the quartz capillary tubes 2 on two sides through a section of capillary cone part 21.

400: and filling gas into the quartz capillary tube 2, adjusting the position of the light spot of the carbon dioxide laser, and positioning the light spot of the carbon dioxide laser on a second preset position of the thin tube structure 22.

In this step 400, a gas is pumped into the lumen 31 of the quartz capillary 2 from an end face of the quartz capillary 2 by an air pump, and the spot position of the carbon dioxide laser is moved from the first predetermined position to the second predetermined position of the capillary structure 22.

Wherein the distance between the second predetermined position and the two ends of the capillary structure 22 depends on the required cavity length of the whispering gallery mode microbubble cavity 23.

Therefore, before step 400, the following steps are also included:

and connecting one end face of the quartz capillary tube 2 into an air pump.

Wherein, connecting one end face of the quartz capillary tube 2 to an air pump can be executed in any step before step 400.

In this embodiment, the air pump is connected to an end surface of the quartz capillary tube 2 before the light spot position of the carbon dioxide laser is adjusted to the first predetermined position of the quartz capillary tube 2 in step S100.

S500: and restarting the carbon dioxide laser to heat and soften the second predetermined position of the tubule structure 22, and simultaneously enabling the gas at the second predetermined position to be heated and expanded, so that the tubule structure 22 forms an echo wall mode microbubble cavity 23 shown in fig. 8 at the second predetermined position, and then closing the carbon dioxide laser.

In this step S500, after the gas is pumped from the quartz capillary 2 connected to the end surface of one side of the gas pump, the gas flows out from the quartz capillary 2 on the end surface of the other side through the thin tube structure 22, when the gas at the second predetermined position expands due to heating, because the inner diameter of the thin tube structure 22 is small, the speed of the gas flowing out from the quartz capillary 2 on the end surface of the other side through the thin tube structure 22 is limited, so that the gas pressure at the second predetermined position is rapidly increased and much greater than the external gas pressure, and the thin tube structure 22 or the quartz capillary 2 near the end surface of one side where the gas is filled is expanded at the second predetermined position to form the whispering-gallery mode micro-bubble cavity 23.

The wall of the quartz capillary tube 2 forms the wall of the whispering gallery mode microcavity 23, and the lumen of the quartz capillary tube 2 forms the resonant cavity of the whispering gallery mode microcavity 23; meanwhile, the stress generated when the gas expands decreases from the middle of the second predetermined position to both sides, so that the cavity wall of the whispering gallery mode micro-bubble cavity 23 becomes thinner gradually from the equatorial plane to both sides to form a sensitive area 231 as shown in fig. 1 and 2 around the circumference of the equatorial plane of the whispering gallery mode micro-bubble cavity 23, and non-sensitive areas 232 at both sides of the whispering gallery mode micro-bubble cavity 23, wherein the sensitive area 231 is deformable by force, and the non-sensitive areas 232 are not deformed or are less deformed by force and can be ignored compared with the deformation of the sensitive area 231.

S600: and adjusting the spot position of the carbon dioxide laser, positioning the spot of the carbon dioxide laser on a third predetermined point of the capillary structure 22, wherein the third predetermined point is positioned on one side of the whispering gallery mode micro-bubble cavity 23, and simultaneously releasing the gas in the quartz capillary 2.

In this step S600, the spot position of the carbon dioxide laser is moved from the waveguide 1 and the whispering gallery mode micro-bubble cavity 23 axially forward or backward to one side of the whispering gallery mode micro-bubble cavity 23, and then the gas in the quartz capillary 2 is released by the gas pump.

Wherein the distance between the third predetermined point and the whispering gallery mode microbubble cavity 23 may depend on the desired length of the contact probe.

S700: the carbon dioxide laser is turned back on to heat soften the third predetermined point of the tubule structure 22.

S800: and driving the two ends of the quartz capillary tube 2 to respectively and oppositely translate along the axial direction so as to break the third predetermined point of the tubule structure 22, so that the broken tubule structure 22 forms a contact probe 24 on the whispering gallery mode microbubble cavity 23 as shown in fig. 9.

In step S800, after the capillary structure 22 is heated and softened by the carbon dioxide laser, in the process that the two ends of the quartz capillary tube 2 respectively move back and forth along the axial direction, the tube wall of the capillary structure 22 becomes thinner gradually, and meanwhile, the tube wall is gathered to the center of the tube cavity 31 inside the capillary structure, and finally, the contact probe 24 is formed by breaking the tube wall.

The contact probe 24 is located on a non-sensitive region 232 of the whispering gallery mode microbubble cavity 23 with its axis perpendicular to the equatorial plane of the whispering gallery mode microbubble cavity 23.

After the contact probe 24 is manufactured, the air pump on one end face of the quartz capillary 2 can be removed.

S900: a waveguide 1 is circumferentially coupled to the equatorial plane of the whispering gallery mode microcavity 23.

In step S900, the waveguide 1 includes a micro-nano fiber 12, and the micro-nano fiber 12 is coupled to the sensitive region 231 on the equatorial plane of the whispering gallery mode micro-bubble cavity 23, so that the optical signal in the micro-nano fiber 12 can be coupled into the whispering gallery mode micro-bubble cavity 23, and the optical signal in the whispering gallery mode micro-bubble cavity 23 can be coupled into the micro-nano fiber 12.

The waveguide 1 further comprises an incident end optical fiber 11 and an emergent end optical fiber 13, wherein the incident end optical fiber 11 is axially connected to one side of the micro-nano optical fiber 12, and the emergent end optical fiber 13 is axially connected to the other side of the micro-nano optical fiber 12.

The incident end optical fiber 11, the micro-nano optical fiber 12 and the emergent end optical fiber 13 respectively comprise a fiber core and a cladding, the cladding is coated on the outer peripheral wall of the fiber core, the cladding is sequentially connected with the cladding, and the fiber core is also sequentially connected with the fiber core; the fiber cores and the cladding have different refractive indexes, so that optical signals can be totally reflected at the interface between the fiber cores and the cladding, and further can be axially transmitted in the fiber cores of the incident end optical fiber 11, the micro-nano optical fiber 12 and the emergent end optical fiber 13.

The micro-nano optical fiber 12 is parallel to the equatorial plane tangential direction of the whispering gallery mode micro-bubble cavity 23.

Before step S100, the method further includes the following steps:

and correcting the focusing degree of the carbon dioxide laser, so that the light spot of the carbon dioxide laser can uniformly cover the circumference of the tube wall at the same position of the quartz capillary tube 2, and meanwhile, arranging two ends of the quartz capillary tube 2 on a first three-dimensional displacement platform and a second three-dimensional displacement platform respectively.

When the light spots of the carbon dioxide laser can uniformly cover the circumference of the tube wall at the same position of the quartz capillary tube 2, the carbon dioxide laser can uniformly heat the whole tube wall at the same position of the quartz capillary tube 2.

In steps S100, 400, and 600, the two ends of the quartz capillary tube 2 are driven by the first three-dimensional displacement platform and the second three-dimensional displacement platform to translate in the same direction to move relative to the light spot position of the carbon dioxide laser, so as to adjust the action point of the light spot position of the carbon dioxide laser on the quartz capillary tube 2, and in steps S300 and S800, the two ends of the quartz capillary tube 2 are driven by the first three-dimensional displacement platform and the second three-dimensional displacement platform to move back and forth in the axial direction, so as to form pulling forces that are back and forth in the axial direction.

It should be finally noted that the above embodiments are only used for illustrating the technical solutions of the embodiments of the present invention and not for limiting the same, and although the embodiments of the present invention are described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the embodiments of the present invention can still be modified or replaced with equivalents, and these modifications or equivalent replacements cannot make the modified technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. A whispering gallery mode microbubble probe resonator comprises a waveguide and a whispering gallery mode microbubble cavity, and is characterized by further comprising a contact probe, wherein the contact probe is arranged outside the whispering gallery mode microbubble cavity and is axially vertical to an equatorial plane of the whispering gallery mode microbubble cavity; the cavity wall of the whispering gallery mode micro-bubble cavity comprises a sensitive area and a non-sensitive area, wherein the sensitive area is deformable under stress and surrounds the circumference of the equatorial plane of the whispering gallery mode micro-bubble cavity; the waveguide is coupled to a sensitive region of the whispering gallery mode microbubble cavity, and the contact probe is located on the non-sensitive region.

2. The whispering gallery mode microbubble probe resonator of claim 1, wherein the wall thickness of the sensitive region is less than the wall thickness of the non-sensitive region.

3. The whispering gallery mode microbubble probe resonator of claim 2, wherein a wall thickness of a cavity wall of the whispering gallery mode microbubble cavity at the sensitive region is minimal.

4. The whispering gallery mode microbubble probe resonator of claim 1, wherein the waveguide comprises a micro-nanofiber coupled to a sensitive region of the whispering gallery mode microbubble cavity.

5. The whispering gallery mode microbubble probe resonator of claim 4, wherein the waveguide further comprises an incident end fiber and an exit end fiber, the incident end fiber is axially connected to one side of the micro-nano fiber, and the exit end fiber is axially connected to the other side of the micro-nano fiber.

6. The whispering gallery mode microbubble probe resonator of claim 4, wherein the micro-nano optical fiber is parallel to an equatorial plane tangential direction of the whispering gallery mode microbubble cavity.

7. The whispering gallery mode microbubble probe resonator of claim 1, wherein the whispering gallery mode microbubble cavity is connected to a thin tube structure at the other end opposite to the contact probe, the thin tube structure is further connected to a capillary cone portion at the other end opposite to the whispering gallery mode microbubble cavity, and the capillary cone portion is further connected to a quartz capillary tube at the other end opposite to the capillary cone portion.

8. A pressure sensing system comprising a tunable laser connected to an input end of a waveguide of a whispering gallery mode microbubble probe resonator, a spectrometer connected to an output end of the waveguide of the whispering gallery mode microbubble probe resonator, and the whispering gallery mode microbubble probe resonator of any of claims 1-7.

9. The pressure sensing system of claim 8, further comprising a control computing device in communication with the tunable laser and spectrometer, respectively.

10. The pressure sensing system of claim 9, wherein the control computing device is a personal computer, an industrial control host, or a mobile terminal.

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