CN217265997U - Film feeding device - Google Patents

Abstract

The embodiment of the utility model provides a film walking device, this film walking device includes that first film walking unit and second film walking unit, the first film walking frame of first film walking unit is vertically set up in the vacuum chamber, first unwinding part, a plurality of steering rollers and first winding part have set gradually in the first side of first film walking frame, and second unwinding part, a plurality of steering rollers and second winding part have set gradually in the second side of first film walking frame, first side and second side are in the first direction, the first direction is perpendicular to the vertical direction; the second film walking frame in the second film walking unit is vertically arranged in the vacuum chamber, a plurality of steering rollers are sequentially arranged on the first side and the second side of the second film walking frame, and a plurality of evaporation sources are sequentially arranged on the first side and the second side of the second film walking frame. The utility model discloses a set up two sets of film coating by vaporization parts in evaporation device's first side and second side, can realize coating film many times in limited space, improve coating film efficiency and quality.

Description

Film feeding device

Technical Field

The utility model relates to a vacuum coating device technical field, concretely relates to walk membrane device.

Background

The evaporation is to place the material to be evaporated in a high temperature resistant container such as a crucible, heat the material to be evaporated and melt the material, so that the material to be evaporated is gasified and deposited on the passing film. The existing evaporator is designed to be tiled, occupies a large space and has low space utilization rate. In addition, after finishing a roll of film coating, the current evaporation device needs to open the vacuum cavity to continue unwinding, cannot evaporate multiple rolls of films at one time, cannot evaporate multiple times of double surfaces, and is low in efficiency.

Based on this, the utility model designs a walk membrane device to solve above-mentioned problem.

Disclosure of Invention

In view of this, an object of the present invention is to provide a film feeding device to solve the technical problems of low space utilization and incapability of performing multiple evaporation in the prior art.

To achieve the above object, an embodiment of the present invention provides a film feeding device, which is disposed in a vacuum chamber, and includes:

a first film-running unit, comprising: the film winding device comprises a first film walking frame vertically arranged in the vacuum chamber, a first unwinding part, a plurality of turning rollers and a first winding part which are sequentially arranged on a first side of the first film walking frame from bottom to top, and a second unwinding part, a plurality of turning rollers and a second winding part which are sequentially arranged on a second side of the first film walking frame from bottom to top, wherein the first side and the second side are in a first direction, and the first direction is perpendicular to the vertical direction;

a second film-running unit, comprising: the vacuum chamber comprises a first film walking frame, a plurality of turning rollers and a plurality of evaporation sources, wherein the first film walking frame is vertically arranged in the vacuum chamber and is arranged at intervals with the first film walking frame along a first direction; the distance between each evaporation source and the first film walking frame is smaller than that between each steering roller and the film walking frame, and the second direction is perpendicular to the first direction and the vertical direction.

In some possible embodiments, the plurality of turning rollers in the first film running unit includes: the first steering roller is arranged between the first unwinding part and the first winding part, and the second steering roller is arranged between the second unwinding part and the second winding part;

the plurality of turning rollers in the second film running unit comprise: the third turning roller and the fifth turning roller are arranged on the first side of the second film running frame, and the fourth turning roller and the sixth turning roller are arranged on the second side of the second film running frame;

the plurality of evaporation sources in the second film walking unit comprise: the first evaporation source, the third evaporation source, the fifth evaporation source and the seventh evaporation source are all arranged on the first side of the second film walking frame, and the second evaporation source, the fourth evaporation source, the sixth evaporation source and the eighth evaporation source are all arranged on the second side of the second film walking frame.

In some possible embodiments, the plurality of turning rollers in the first film running unit further includes: the seventh steering roller is arranged between the first steering roller and the first winding part, and the eighth steering roller is arranged between the second steering roller and the second winding part;

the plurality of turning rollers in the second film running unit further comprises: a ninth steering roller disposed between the third steering roller and the fifth steering roller, and a tenth steering roller disposed between the fourth steering roller and the sixth steering roller;

the plurality of evaporation sources in the second film walking unit further comprise: and the ninth evaporation source and the eleventh evaporation source are arranged on the first side of the second film walking frame and are positioned between the fifth evaporation source and the seventh evaporation source, and the tenth evaporation source and the twelfth evaporation source are arranged on the second side of the second film walking frame and are positioned between the sixth evaporation source and the eighth evaporation source.

In some possible embodiments, the top tangent of the first unwinding part is on the same horizontal plane as the bottom tangent of the third turning roll;

the top tangent line of the second unwinding part and the bottom tangent line of the fourth steering roller are on the same horizontal plane.

In some possible embodiments, the bottom tangent of the first turning roll and the top tangent of the third turning roll are on the same horizontal plane, and the top tangent of the first turning roll and the bottom tangent of the ninth turning roll are on the same horizontal plane;

the bottom tangent line of the second steering roller and the top tangent line of the fourth steering roller are on the same horizontal plane, and the top tangent line of the second steering roller and the bottom tangent line of the tenth steering roller are on the same horizontal plane.

In some embodiments of the puddle energy, the bottom tangent of the seventh turning roll is in the same horizontal plane as the top tangent of the ninth turning roll, and the top tangent of the seventh turning roll is in the same horizontal plane as the bottom tangent of the fifth turning roll;

the bottom tangent line of the eighth steering roller and the top tangent line of the tenth steering roller are on the same horizontal plane, and the top tangent line of the eighth steering roller and the bottom tangent line of the sixth steering roller are on the same horizontal plane.

In some possible embodiments, the top tangent line of the first wrap is in a horizontal plane with the top tangent line of the fifth turning roll;

the top tangent line of the second winding part and the bottom tangent line of the sixth turning roll are on the same horizontal plane.

In some possible embodiments, a lateral distance between the first unwinding part and the third turning roll, a lateral distance between the third turning roll and the first turning roll, a lateral distance between the first turning roll and the ninth turning roll, a lateral distance between the ninth turning roll and the seventh turning roll, a lateral distance between the seventh turning roll and the fifth turning roll, and a lateral distance between the fifth turning roll and the first winding part are all 50-100 cm.

In some possible embodiments, a transverse distance between the second unwinding part and the fourth turning roll, a transverse distance between the fourth turning roll and the second turning roll, a transverse distance between the second turning roll and the tenth turning roll, a transverse distance between the tenth turning roll and the eighth turning roll, a transverse distance between the eighth turning roll and the sixth turning roll, and a transverse distance between the sixth turning roll and the second winding part are all 50-100 cm. The technical scheme has the following beneficial effects: the embodiment of the utility model provides a film walking device, including first film walking unit and second film walking unit, the first film walking frame of first film walking unit is vertically arranged in the vacuum chamber, the first unwinding part, a plurality of steering rollers and the first winding part that set gradually on the first side of the first film walking frame, and the second unwinding part, a plurality of steering rollers and the second winding part that set gradually on the second side of the first film walking frame; the first side and the second side are in a first direction, and the first direction is perpendicular to the vertical direction; the second of film unit is walked to the second and is walked the inside of membrane frame vertical setting at the vacuum chamber, and walk the setting of membrane frame interval along the second direction with first, walk a plurality of steering rolls that the first side and the second side of membrane frame set gradually at the second, and walk a plurality of coating by vaporization sources that the first side and the second side of membrane frame set gradually at the second, every coating by vaporization source and first distance of walking the membrane frame all are less than every steering roll and the distance of walking the membrane frame, the second direction perpendicular to first direction and vertical direction. The embodiment of the utility model provides a film evaporation equipment many times has contained two sets of film evaporation parts in first side and second side, can realize coating film many times in limited space.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a front view of a film feeding device according to an embodiment of the present invention;

fig. 2 is a schematic overall structural diagram of a first film-moving unit according to an embodiment of the present invention;

fig. 3 is a schematic overall structure diagram of a second film-feeding unit according to an embodiment of the present invention;

fig. 4 is a front view of another film feeding device according to an embodiment of the present invention;

fig. 5 is a schematic overall structure diagram of another first film-feeding unit according to an embodiment of the present invention;

fig. 6 is a schematic overall structure diagram of another second film passing unit according to the embodiment of the present invention;

fig. 7 is a flowchart of a film-feeding method according to an embodiment of the present invention.

The reference numbers indicate:

1. the film winding device comprises a first film running unit, a first film running frame, a first unwinding part, a second unwinding part, a first winding part, a second winding part, a first turning roller, a second turning roller, a first film unwinding unit, a first film unwinding frame, a first unwinding part, a second unwinding part, a first winding part, a second winding part, a first turning roller, a second turning roller and a second turning roller, wherein the first film running unit 10 is arranged on the first film running frame, 111 is arranged on the first unwinding part, 112 is arranged on the second unwinding part, 121 is arranged on the first winding part, and 122 is arranged on the second winding part;

2. second film-running unit, 20, second film-running frame, 211, third turning roll, 212, fourth turning roll, 213, fifth turning roll, 214, sixth turning roll, 133, seventh turning roll, 134, eighth turning roll, 221, first evaporation source, 222, second evaporation source, 223, third evaporation source, 224, fourth evaporation source, 225, fifth evaporation source, 226, sixth evaporation source, 227, seventh evaporation source, 228, eighth evaporation source, 229, ninth evaporation source, 230, tenth evaporation source, 231, eleventh evaporation source, 232, twelfth evaporation source.

Detailed Description

Features and exemplary embodiments of various aspects of the present invention will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the invention by illustrating examples thereof. In the drawings and the following description, at least some well-known structures and techniques have not been shown in detail in order to avoid unnecessarily obscuring the present invention; also, the dimensions of some of the structures may be exaggerated for clarity. Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

Example one

As shown in fig. 1 and 3, an embodiment of the present invention provides a film-feeding device, which can be disposed in a vacuum chamber when in use, and includes: the film feeding device comprises a first film feeding unit 1 and a second film feeding unit 2, wherein the first film feeding unit 1 and the second film feeding unit 2 are arranged side by side at intervals or adjacently, the first film feeding unit 1 comprises a first film feeding frame 10 vertically arranged inside a vacuum chamber, a first unwinding part 111, 1 or more turning rollers (1 turning roller in the embodiment, such as the first turning roller 131) and a first winding part 121 which are sequentially arranged on a first side of the first film feeding frame 10 from bottom to top, and a second unwinding part 112, a plurality of turning rollers (1 turning roller in the embodiment, such as the first turning roller 132) and a second winding part 122 which are sequentially arranged on a second side of the first film feeding frame 10 from bottom to top, wherein the first side and the second side are in a first direction, and the first direction is perpendicular to the vertical direction; the second film walking unit 2 comprises a second film walking frame 20 which is vertically arranged in the vacuum chamber and is arranged at intervals with the first film walking frame along a second direction, a plurality of steering rollers which are sequentially arranged on a first side and a second side of the second film walking frame 20, and a plurality of evaporation sources which are sequentially arranged at intervals on the first side and the second side of the second film walking frame 20 from bottom to top; the distance between each evaporation source and the first film running frame 10 is smaller than the distance between each turning roll on the second film running frame 20 and the film running frame 10, wherein the second direction is perpendicular to the first direction and the vertical direction.

The embodiment of the utility model provides a walk membrane device sets up two sets of films through the first side and the second side walking membrane device and walks the membrane unit, can carry out the coating by vaporization to two rolls of films simultaneously, realizes coating film many times in limited space, improves coating film efficiency and quality.

In some embodiments, the plurality of turning rollers in the first film running unit 1 may include: the number of the first turning roll 131 and the second turning roll 132 may be 1, 2, or 3 or more, depending on the size of the vacuum space and the size of the first evaporation rack, and the like, and the number is not particularly limited herein, the first turning roll 131 is located between the first unwinding part 111 and the first winding part 121, and the second turning roll 132 is located between the second unwinding part 112 and the second winding part 122; the plurality of turning rollers in the second film running unit 2 includes: a third turning roller 211 and a fifth turning roller 213 which are arranged on the first side of the second film running frame 20; a fourth turning roll 212 and a sixth turning roll 214, which are arranged on the second side of the second film running frame 20. Here, a direction perpendicular to the paper surface in fig. 1 is a first side, and a direction perpendicular to the paper surface in fig. 1 is a second side.

The plurality of evaporation sources in the second film passing unit 2 include: first evaporation source 221, second evaporation source 222, third evaporation source 223, fourth evaporation source 224, fifth evaporation source 225, sixth evaporation source 226, seventh evaporation source 227, and eighth evaporation source 228. Among them, the first vapor deposition source 221, the third vapor deposition source 223, the fifth vapor deposition source 225, and the seventh vapor deposition source 227 are disposed on the first side of the second film frame 20, and the second vapor deposition source 222, the fourth vapor deposition source 224, the sixth vapor deposition source 226, and the eighth vapor deposition source 228 are disposed on the second side of the second film frame 20.

Treat the first volume of film and the second of coating by vaporization and roll up the film through setting up a plurality of turn to the roller and turn to for treat that the first volume of film and the second of coating by vaporization are rolled up the film and can be carried out two-sided coating film.

As shown in fig. 4 to 6, in some embodiments, the plurality of turning rollers in the first film running unit 1 may further include a seventh turning roller 133 and an eighth turning roller 134, the seventh turning roller 133 is disposed between the first turning roller 131 and the first winding portion 121, and the eighth turning roller 134 is disposed between the second turning roller 132 and the second winding portion 122; the plurality of turning rollers in the second film running unit 2 further includes: a ninth steering roller 215 and a tenth steering roller 216, the ninth steering roller 215 being disposed between the third steering roller 211 and the fifth steering roller 213, the tenth steering roller 216 being disposed between the fourth steering roller 212 and the sixth steering roller 214.

The plurality of evaporation sources in the second film running unit 2 may further include a ninth evaporation source 229, a tenth evaporation source 230, an eleventh evaporation source 231, and a twelfth evaporation source 232, the ninth evaporation source 229 and the eleventh evaporation source 231 are disposed on the first side of the second film running rack 20 and located between the fifth evaporation source 225 and the seventh evaporation source 227, and the tenth evaporation source 230 and the twelfth evaporation source 232 are disposed on the second side of the second film running rack 20 and located between the sixth evaporation source 226 and the eighth evaporation source 228.

Through setting up multiunit steering roll and a plurality of coating by vaporization source, can carry out two-sided many times coating by vaporization to first roll of film and second roll of film in limited space, improve coating film efficiency and coating film quality greatly.

In some embodiments, the top tangent of the first unwinding part 111 is on the same horizontal plane as the bottom tangent of the third turning roll 211; the top tangent line of the second unreeling part 112 and the bottom tangent line of the fourth steering roller 212 are on the same horizontal plane, so that a first roll of film to be evaporated becomes a horizontal tape on the first evaporation source 221, the evaporated material can be uniformly evaporated on the first roll of film, and a second roll of film to be evaporated becomes a horizontal tape on the second evaporation source 222, the evaporated material can be uniformly evaporated on the second roll of film, and the quality of the film is improved.

In some embodiments, the bottom tangent of the first turning roll 131 is on the same horizontal plane as the top tangent of the third turning roll 211, and the top tangent of the first turning roll 131 is on the same horizontal plane as the bottom tangent of the ninth turning roll 215; the bottom tangent line of second turning roll 132 and the top tangent line of fourth turning roll 212 are on same horizontal plane, and the top tangent line of second turning roll 132 and the bottom tangent line of tenth turning roll 216 are on same horizontal plane, make the first book film of coating by vaporization become horizontal tape transport on third coating by vaporization source 223 and fifth coating by vaporization source 225, can make the material of coating by vaporization evenly evaporate on first book film, and make the second book film of treating the coating by vaporization become horizontal tape transport on fourth coating by vaporization source 224 and sixth coating by vaporization source 226, can make the material of coating by vaporization evenly evaporate and plate on second book film, the quality of coating film has further been improved.

In some embodiments, the bottom tangent line of the seventh steering roller 133 is on the same horizontal plane as the top tangent line of the ninth steering roller 215, and the top tangent line of the seventh steering roller 133 is on the same horizontal plane as the bottom tangent line of the fifth steering roller 213; the bottom tangent line of eighth turning roll 134 and the top tangent line of tenth turning roll 216 are on same horizontal plane, and the top tangent line of eighth turning roll 134 and the bottom tangent line of sixth turning roll 214 are on same horizontal plane, make the first book film that treats the coating by vaporization become horizontal tape transport on ninth coating by vaporization source 229 and eleventh coating by vaporization source 231, can make the material of coating by vaporization evenly on first book film, and make the second book film that treats the coating by vaporization become horizontal tape transport on tenth coating by vaporization source 230 and twelfth coating by vaporization source 232, can make the material of coating by vaporization evenly on the second book film, the quality of coating film has been improved.

In some embodiments, the top tangent of the first wrap 121 is in a horizontal plane with the top tangent of the fifth turning roll 213; the top tangent line of second portion 122 of rolling up is on a horizontal plane with the bottom tangent line of sixth directive roller 214 for the first volume of film that treats the coating by vaporization becomes the level tape transport on seventh coating by vaporization source 227, can make the material of coating by vaporization evenly on first volume of film, and make the second volume of film that treats the coating by vaporization become the level tape transport on eighth coating by vaporization source 228, can make the material of coating by vaporization evenly on the second volume of film, further improved the quality of coating film.

In some embodiments, the transverse distance between the first unwinding part 111 and the third turning roll 211, the transverse distance between the third turning roll 211 and the first turning roll 131, the transverse distance between the first turning roll 131 and the ninth turning roll 225, the transverse distance between the ninth turning roll 225 and the seventh turning roll 133, the transverse distance between the seventh turning roll 133 and the fifth turning roll 213, and the transverse distance between the fifth turning roll 213 and the first winding part 121 are all 50-100 cm, and the tension of the film can be easily adjusted to 120N/m within the distance, so that wrinkles of the film are not easily generated. Preferably 68-70cm, the fold rate of the film can be reduced to the lowest point, and the distance between the first film running unit 1 and the second film running unit 2 is also reduced, so that the occupied space is further reduced, and the space utilization rate is improved.

In some embodiments, the transverse distance between the second unreeling part 112 and the fourth turning roll 212, the transverse distance between the fourth turning roll 212 and the second turning roll 132, the transverse distance between the second turning roll 132 and the tenth turning roll 226, the transverse distance between the tenth turning roll 226 and the eighth turning roll 134, the transverse distance between the eighth turning roll 134 and the sixth turning roll 214, and the transverse distance between the sixth turning roll 214 and the second reeling part 122 are all 50-100 cm, and the tension of the film can be easily adjusted to 120N/m within the distance, so that the film is not easily wrinkled. Preferably 68-70cm, the fold rate of the film can be reduced to the lowest point, and the distance between the first film running unit 1 and the second film running unit 2 is also reduced, so that the occupied space is further reduced, and the space utilization rate is improved.

The technical scheme has the advantages that: the embodiment of the utility model provides a film walking device, including first film walking unit and second film walking unit, the first film walking frame of first film walking unit is vertically arranged in the vacuum chamber, the first unwinding part, a plurality of steering rollers and the first winding part are arranged in sequence on the first side of the first film walking frame, and the second unwinding part, a plurality of steering rollers and the second winding part are arranged in sequence on the second side of the first film walking frame; the second of film unit is walked to the second and is walked the vertical setting of membrane frame in the inside of vacuum chamber, walks a plurality of steering rolls that the first side and the second side of membrane frame set gradually at the second to and walk a plurality of coating by vaporization sources that the first side and the second side of membrane frame set gradually at the second, every coating by vaporization source and first distance of walking the membrane frame all are less than every steering roll and the distance of walking the membrane frame. The embodiment of the utility model provides a film evaporation equipment many times has contained two sets of film evaporation parts in first side and second side, can realize coating film many times in limited space.

Example two

As shown in fig. 7, an embodiment of the present invention provides a film-moving method, which is based on any one of the foregoing film-moving devices, and the film-moving method includes the following steps:

s71, mounting a first roll of film to be vapor-deposited on the first unwinding part 111, and mounting a second roll of film to be vapor-deposited on the second unwinding part 112;

s72, guiding a first roll of film through a plurality of turning rollers on a first side, performing double-sided evaporation for multiple times when the first roll of film passes above a plurality of evaporation sources on the first side, guiding a second roll of film through a plurality of turning rollers on a second side, and performing double-sided evaporation for multiple times when the second roll of film passes above a plurality of evaporation sources on the second side;

s73, the first winding unit 121 winds the first film after vapor deposition, and the second winding unit 122 winds the second film after vapor deposition.

In some embodiments, a first roll of film to be evaporated and a second roll of film to be evaporated are respectively loaded into the first unwinding part 111 and the second unwinding part 112, the first roll of film sequentially turns through the third turning roll 211, the first turning roll 131 and the fifth turning roll 213, so that the first roll of film sequentially passes through the first evaporation source 221, the third evaporation source 223, the fifth evaporation source 225 and the seventh evaporation source 227, the first evaporation source 221, the third evaporation source 223, the fifth evaporation source 225 and the seventh evaporation source 227 are respectively provided with a material to be evaporated, the material to be evaporated is melted into gaseous atoms or atomic groups under the action of high temperature, and the gaseous atoms or atomic groups are deposited on the passing film to coat two surfaces of the first roll of film; specifically, first vapor deposition unit 221 performs vapor deposition on a first surface of a first roll of film, third vapor deposition source 223 performs vapor deposition on a second surface of the first roll of film, fifth vapor deposition source 225 performs second vapor deposition on the first surface of the first roll of film, and seventh vapor deposition source 227 performs second vapor deposition on the second surface of the first roll of film.

The second roll of film is turned by the fourth turning roll 212, the second turning roll 132 and the sixth turning roll 214, so that the second roll of film sequentially passes through the second evaporation source 222, the fourth evaporation source 224, the sixth evaporation source 226 and the eighth evaporation source 227, materials to be evaporated are placed in the second evaporation source 222, the fourth evaporation source 224, the sixth evaporation source 226 and the eighth evaporation source 227 respectively, the materials to be evaporated are melted into gaseous atoms or atomic groups under the action of high temperature, and the gaseous atoms or the atomic groups are deposited on the passing film to coat two surfaces of the second roll of film. Specifically, the second vapor deposition source 222 performs a first vapor deposition on a first surface of the second roll of film, the fourth vapor deposition source 224 performs a first vapor deposition on a second surface of the second roll of film, the sixth vapor deposition source 226 performs a second vapor deposition on a first surface of the second roll of film, and the eighth vapor deposition source 227 performs a second vapor deposition on a second surface of the second roll of film.

In some embodiments, a first roll of film to be evaporated and a second roll of film to be evaporated are respectively loaded into the first unwinding section 111 and the second unwinding section 112, the first roll of film is turned by the third turning roller 211, the first turning roller 131, the ninth turning roller 215, the seventh turning roller 133, and the fifth turning roller 213, so that the first roll of film sequentially passes through the first evaporation source 221, the third evaporation source 223, the fifth evaporation source 225, the ninth evaporation source 229, the eleventh evaporation source 231, and the seventh evaporation source 227, and the first evaporation source 221, the third evaporation source 223, the fifth evaporation source 225, the seventh evaporation source 227, the ninth evaporation source 229, and the eleventh evaporation source 231 are respectively provided with a material to be evaporated, and the material to be evaporated melts into gaseous atoms or atom groups under a high temperature, and deposits on two sides of the passing film to coat the two sides of the first roll of film for multiple times; specifically, a first evaporation source 221 is used for performing first film coating on a first surface of a first roll of film, a third evaporation source 223 is used for performing first film coating on a second surface of the first roll of film, a fifth evaporation source 225 is used for performing second film coating on the first surface of the first roll of film, a ninth evaporation source 229 is used for performing second film coating on the second surface of the first roll of film, an eleventh evaporation source 231 is used for performing third film coating on the first surface of the first roll of film, and a seventh evaporation source 227 is used for performing third film coating on the second surface of the first roll of film.

The second roll of film is turned by the fourth turning roll 212, the second turning roll 132, the tenth turning roll 216, the eighth turning roll 134 and the sixth turning roll 214, so that the second roll of film passes through the second evaporation source 222, the fourth evaporation source 224, the sixth evaporation source 226, the tenth evaporation source 230, the twelfth evaporation source 232 and the eighth evaporation source 227 in sequence, the second evaporation source 222, the fourth evaporation source 224, the sixth evaporation source 226, the eighth evaporation source 228, the tenth evaporation source 230 and the twelfth evaporation source 232 are respectively provided with a material to be evaporated, the material to be evaporated is melted into gaseous atoms or atomic groups under the action of high temperature, and the gaseous atoms or atomic groups are deposited on the passing film to coat the two sides of the second roll of film. Specifically, the first surface of the first roll of film is first coated by the second evaporation source 222, the second surface of the first roll of film is first coated by the fourth evaporation source 224, the second surface of the first roll of film is second coated by the sixth evaporation source 226, the second surface of the first roll of film is second coated by the tenth evaporation source 230, the third surface of the first roll of film is third coated by the twelfth evaporation source 232, and the third surface of the first roll of film is third coated by the eighth evaporation source 228.

The embodiment of the utility model provides a method of film coating by vaporization many times not only can two rolls of films of coating by vaporization simultaneously, but also can make full use of vacuum space, can carry out a lot of coating by vaporization simultaneously to two rolls of films in limited vacuum space, great improvement coating film efficiency and coating film quality.

It should be noted that, the number of the evaporation sources and the number of the turning rolls can be adjusted arbitrarily according to the size of the vacuum space and the film moving unit, and the utility model discloses do not do the restriction. The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

In the description of the embodiments of the present invention, it should be noted that the terms "upper, lower, inner and outer" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention. Furthermore, the terms first, second, or third are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the embodiments of the present invention, unless explicitly stated or limited otherwise, the terms "mounted, connected" or "connected" should be interpreted broadly, for example: can be fixedly connected, detachably connected or integrally connected; they may be mechanically, electrically, or directly connected, or indirectly connected through intervening media, or may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

While the invention has been described with reference to a preferred embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, the technical features mentioned in the embodiments can be combined in any way as long as there is no structural conflict. The present invention is not limited to the particular embodiments disclosed herein, but encompasses all technical solutions falling within the scope of the claims.

Claims (9)

1. A film running device, which is arranged in a vacuum chamber, comprises:

a first film-running unit (1) comprising: the film winding device comprises a first film walking frame (10) vertically arranged in the vacuum chamber, a first unwinding part (111), a plurality of turning rollers and a first winding part (121) which are sequentially arranged on a first side of the first film walking frame (10) from bottom to top, and a second unwinding part (112), a plurality of turning rollers and a second winding part (122) which are sequentially arranged on a second side of the first film walking frame (10) from bottom to top; the first side and the second side are in a first direction, the first direction being perpendicular to a vertical direction;

a second film-feeding unit (2) comprising: the second film walking frame (20) is vertically arranged in the vacuum chamber and is arranged at an interval with the first film walking frame (10) along a second direction, a plurality of steering rollers are sequentially arranged on the first side and the second side of the second film walking frame (20) from bottom to top respectively, and a plurality of evaporation sources are sequentially arranged on the first side and the second side of the second film walking frame (20) from bottom to top respectively; the distance between each evaporation source and the first film running frame (10) is smaller than the distance between each steering roller on the second film running frame (20) and the first film running frame (10); the second direction is perpendicular to the first direction and the vertical direction.

2. The film running device of claim 1,

the plurality of turning rollers in the first film running unit (1) comprises: a first steering roller (131) provided between the first unwinding section (111) and the first winding section (121); and a second steering roller (132) provided between the second unwinding section (112) and the second winding section (122);

the plurality of turning rollers in the second film running unit (2) comprise: a third turning roller (211) and a fifth turning roller (213) which are arranged on the first side of the second film running frame (20); and a fourth turning roll (212) and a sixth turning roll (214) which are arranged on the second side of the second film running frame (20);

the plurality of evaporation sources in the second film walking unit (2) comprise: the first evaporation source (221), the third evaporation source (223), the fifth evaporation source (225) and the seventh evaporation source (227) are all arranged on the first side of the second film walking frame (20); and a second evaporation source (222), a fourth evaporation source (224), a sixth evaporation source (226) and an eighth evaporation source (228) which are all arranged on the second side of the second film walking frame (20).

3. A film running device according to claim 2,

the plurality of turning rolls in the first film feeding unit (1) further comprises: a seventh steering roller (133) provided between the first steering roller (131) and the first winding section (121); and an eighth steering roller (134) provided between the second steering roller (132) and the second winding portion (122);

the plurality of turning rollers in the second film running unit (2) further comprises: a ninth steering roller (215) disposed between the third steering roller (211) and the fifth steering roller (213); and a tenth steering roller (216) provided between the fourth steering roller (212) and the sixth steering roller (214);

the plurality of evaporation sources in the second film walking unit (2) further comprise: a ninth evaporation source (229) and an eleventh evaporation source (231) which are arranged on the first side of the second film walking frame (20) and are positioned between the fifth evaporation source (225) and the seventh evaporation source (227); and a tenth evaporation source (230) and a twelfth evaporation source (232) which are arranged on the second side of the second film walking frame (20) and are positioned between the sixth evaporation source (226) and the eighth evaporation source (228).

4. A film feeding device according to claim 3, wherein the top tangent of the first unwinding part (111) and the bottom tangent of the third turning roll (211) are on a horizontal plane;

the top tangent of the second unreeling part (112) and the bottom tangent of the fourth turning roll (212) are on the same horizontal plane.

5. A film feeding device according to claim 4, characterized in that the bottom tangent of the first turning roll (131) and the top tangent of the third turning roll (211) are on the same horizontal plane, and the top tangent of the first turning roll (131) and the bottom tangent of the ninth turning roll (215) are on the same horizontal plane;

the bottom tangent line of the second steering roller (132) and the top tangent line of the fourth steering roller (212) are on the same horizontal plane, and the top tangent line of the second steering roller (132) and the bottom tangent line of the tenth steering roller (216) are on the same horizontal plane.

6. A film running device according to claim 5, characterized in that the bottom tangent of the seventh turning roll (133) and the top tangent of the ninth turning roll (215) are on the same horizontal plane, and the top tangent of the seventh turning roll (133) and the bottom tangent of the fifth turning roll (213) are on the same horizontal plane;

the bottom tangent of the eighth turning roll (134) and the top tangent of the tenth turning roll (216) are on the same horizontal plane, and the top tangent of the eighth turning roll (134) and the bottom tangent of the sixth turning roll (214) are on the same horizontal plane.

7. A film running device according to claim 6, characterized in that the top tangent of the first winding part (121) and the top tangent of the fifth turning roll (213) are on the same horizontal plane;

the top tangent of the second winding part (122) and the bottom tangent of the sixth turning roll (214) are on the same horizontal plane.

8. A film running device according to claim 7, characterized in that the transverse distance between the first unwinding part (111) and the third turning roll (211), the transverse distance between the third turning roll (211) and the first turning roll (131), the transverse distance between the first turning roll (131) and the ninth turning roll (215), the transverse distance between the ninth turning roll (215) and the seventh turning roll (133), the transverse distance between the seventh turning roll (133) and the fifth turning roll (213) and the transverse distance between the fifth turning roll (213) and the first winding part (121) are all 50-100 cm.

9. A film running device according to claim 8, wherein the transverse distance between the second unreeling part (112) and the fourth turning roll (212), the transverse distance between the fourth turning roll (212) and the second turning roll (132), the transverse distance between the second turning roll (132) and the tenth turning roll (216), the transverse distance between the tenth turning roll (216) and the eighth turning roll (134), the transverse distance between the eighth turning roll (134) and the sixth turning roll (214), and the transverse distance between the sixth turning roll (214) and the second reeling part (122) are all 50-100 cm.

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