CN217237065U - Pressure sensor - Google Patents

Abstract

The utility model relates to a sensor technical field, concretely relates to pressure sensor. The pressure sensor includes: the base is provided with a differential pressure hole for the inflow of the pressure medium to be measured; the tube seat is arranged on the base and comprises a bottom plate, a through hole penetrating through the upper surface and the lower surface of the bottom plate is formed in the bottom plate, and a circuit board is arranged on one side, away from the differential pressure hole, of the bottom plate; the pressure chip is arranged on one side of the bottom plate facing the differential pressure hole and covers the through hole, and the pressure chip is electrically connected with the circuit board; the shell is arranged on the base and sleeved outside the tube seat; and the top cover is arranged at the top of the shell and is provided with a pressure guide hole. The utility model discloses a circuit board sets up the one side of keeping away from pressure chip at the bottom plate, and the circuit board can not receive the influence of the pressure medium that awaits measuring, and then makes the difficult emergence of circuit board damage, utilizes pressure sensor in the use under adverse circumstances, and pressure sensor has advantages such as small, light in weight, compressive capacity are strong, high sensitivity, temperature drift are little and stability is good.

Description

Pressure sensor

Technical Field

The utility model relates to a sensor technical field, concretely relates to pressure sensor.

Background

Currently, pressure sensors are instruments consisting of pressure sensitive elements, which use different operating principles to determine the actual pressure applied to the sensor and convert the pressure information into an output signal. Pressure sensors generally applied to various industrial automatic control environments are large in size, low in comprehensive precision and not beneficial to places with narrow spaces; the shell of the common miniature pressure sensor has poor structural strength and pressure resistance, is easy to damage when impacted and collided, and is not beneficial to the use of the sensor in severe environment.

Among the prior art, pressure sensor includes major structure and pressure sensing subassembly, and the pressure sensing subassembly includes signal amplification board and sets up the pressure chip on the signal amplification version, and the signal amplification board bonds in major structure, and when the pressure of the pressure medium that awaits measuring is great, the signal amplification board receives when assaulting, takes place to damage easily, is unfavorable for the use of sensor under adverse circumstances.

SUMMERY OF THE UTILITY MODEL

Therefore, the to-be-solved technical problem of the present invention is to overcome the defect that the signal amplification board of the pressure sensor in the prior art is easily damaged when being impacted, thereby providing a pressure sensor.

In order to solve the above problem, the utility model provides a pressure sensor, include: the base is provided with a differential pressure hole for the inflow of the pressure medium to be measured; the tube seat is arranged on the base and comprises a bottom plate, a through hole penetrating through the upper surface and the lower surface of the bottom plate is formed in the bottom plate, and a circuit board is arranged on one side, away from the differential pressure hole, of the bottom plate; the pressure chip is arranged on one side of the bottom plate facing the differential pressure hole and covers the through hole, and the pressure chip is electrically connected with the circuit board; the shell is arranged on the base and sleeved outside the tube seat; and the top cover is arranged at the top of the shell and is provided with a pressure guide hole.

Optionally, the tube seat further comprises a differential pressure tube, and the lower end of the differential pressure tube is arranged at one end of the through hole facing the top cover.

Optionally, the differential pressure hole includes a first outer hole section, a middle hole section and a first inner hole section, the aperture of the middle hole section is smaller than the apertures of the first outer hole section and the first inner hole section, the bottom plate is fixed on one end of the base facing the top cover, and/or the pressure guiding hole is a stepped hole or a straight hole.

Optionally, the circuit board is sleeved outside the differential pressure pipe, the pressure sensor further comprises a conductive pin, the conductive pin is arranged on the circuit board and the bottom plate in a penetrating mode, and the lower end of the conductive pin is electrically connected with the pressure chip.

Optionally, the pressure sensor further comprises a shielding cable, a through hole for the shielding cable to penetrate through is formed in the top cover, one end of the shielding cable is connected with the conductive pin, and the other end of the shielding cable penetrates out of the through hole.

Optionally, a crimping terminal is arranged on the outer side of the top cover, the crimping terminal fixes the shielding cable, and/or a threaded hole is formed in the top cover, and the shielding layer of the shielding cable is fixed at the threaded hole through a fastener.

Optionally, the through hole includes a first hole section and a second hole section, the aperture of the first hole section is smaller than the aperture of the second hole section, and the pressure chip covers the first hole section.

Optionally, the base, the shell and the top cover are made of stainless steel, and/or the bottom plate is made of iron-nickel-cobalt alloy.

Optionally, the base and the housing and the top cover are welded together, and/or the base is provided with a plurality of fixing holes located outside the housing.

Optionally, the housing is cylindrical, the top cover is circular, and the bottom surface of the base is rectangular.

The utility model has the advantages of it is following:

pressure medium that awaits measuring flows into pressure sensor through the differential pressure hole, and then the effort is in pressure chip, through drawing the pressure of the pressure medium that awaits measuring that the pressure hole introduced external air pressure or other positions, can measure the pressure difference of the pressure medium that awaits measuring of pressure medium and air or different positions, the circuit board sets up the one side of keeping away from pressure chip at the bottom plate, the circuit board can not receive the influence of pressure medium that awaits measuring, and then make the difficult emergence of circuit board damage, utilize pressure sensor's use under adverse circumstances, and pressure sensor has small, light in weight, the pressure resistance is strong, high sensitivity, the temperature drift is little and stability advantage such as good.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following descriptions are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 shows a schematic perspective view of a pressure sensor according to an embodiment of the present invention;

FIG. 2 shows a schematic cross-sectional view of the pressure sensor of FIG. 1;

FIG. 3 shows an exploded schematic view of the pressure sensor of FIG. 1;

FIG. 4 shows a schematic bottom view of the base of the pressure sensor of FIG. 1;

FIG. 5 shows a schematic cross-sectional view of the base of FIG. 4 from A-A;

FIG. 6 shows a schematic top view of a stem of the pressure sensor of FIG. 1;

FIG. 7 shows a schematic cross-sectional view of the socket of FIG. 6 from the B-B direction;

FIG. 8 shows a schematic top view of the housing of the pressure sensor of FIG. 1;

FIG. 9 shows a schematic cross-sectional view of the housing of FIG. 8 taken along line C-C;

FIG. 10 shows a schematic top view of a top cover of the pressure sensor of FIG. 1;

FIG. 11 shows a schematic cross-sectional view of the top cover of the figure taken along line D-D.

Description of the reference numerals:

10. a base; 11. a differential pressure orifice; 12. a fixing hole; 20. a tube holder; 21. a base plate; 22. a differential pressure tube; 23. a conductive pin; 24. glass; 30. a pressure chip; 40. a housing; 50. a top cover; 51. a pressure guiding hole; 52. a crimp terminal; 53. a threaded hole; 60. a circuit board; 80. the cable is shielded.

Detailed Description

The technical solutions of the present invention will be described more clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Furthermore, the technical features mentioned in the different embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.

As shown in fig. 1 to 3, 5 and 11, the pressure sensor of the present embodiment includes: the pressure measuring device comprises a base 10, a tube seat 20, a pressure chip 30, a shell 40 and a top cover 50, wherein the base 10 is provided with a differential pressure hole 11 for the inflow of a pressure medium to be measured; the tube seat 20 is arranged on the base 10, the tube seat 20 comprises a bottom plate 21, a through hole penetrating through the upper surface and the lower surface of the bottom plate 21 is arranged on the bottom plate 21, and a circuit board 60 is arranged on one side of the bottom plate 21 far away from the differential pressure hole 11; the pressure chip 30 is arranged on one side of the bottom plate 21 facing the differential pressure hole 11 and covers the through hole, and the pressure chip 30 is electrically connected with the circuit board 60; the shell 40 is arranged on the base 10 and sleeved outside the tube seat 20; a top cover 50 is provided on the top of the housing 40, and the top cover 50 has a pressure introduction hole 51.

Use the pressure sensor of this embodiment, the pressure medium that awaits measuring flows into pressure sensor through differential pressure hole 11, and then the effort is in pressure chip 30, introduce external air pressure or the pressure of the pressure medium that awaits measuring of other positions through drawing pressure hole 51, can measure the pressure difference of the pressure medium that awaits measuring of pressure medium and air or the pressure difference of the pressure medium that awaits measuring of different positions, circuit board 60 sets up the one side of keeping away from pressure chip 30 at bottom plate 21, circuit board 60 can not receive the influence of the pressure medium that awaits measuring, and then make circuit board 60 be difficult for taking place to damage, utilize pressure sensor's use under adverse circumstances, and pressure sensor has advantages such as small, light in weight, the pressure resistance is strong, high sensitivity, the temperature drift is little and stability is good.

In the present embodiment, as shown in fig. 3, 6 and 7, the stem 20 further includes a differential pressure pipe 22, and a lower end of the differential pressure pipe 22 is disposed at one end of the through hole toward the top cover 50. The pressure entering through the top cover 50 is guided to the back cavity of the pressure chip 30 along the differential pressure pipe 22, and the arrangement of the differential pressure pipe 22 facilitates the pressure of air or the pressure medium to be measured to act on the back surface of the pressure chip. Preferably, the material of the differential pressure pipe 22 is 316L stainless steel, and the differential pressure pipe 22 is welded to the bottom plate 21 by silver copper. Of course, the differential pressure tube 22 can be welded to the bottom plate 21 by other welding materials

In the present embodiment, as shown in fig. 2 and 5, the differential pressure hole 11 includes a first outer hole section, a middle hole section and a first inner hole section, the diameter of the middle hole section is smaller than the diameter of the first outer hole section and the first inner hole section, and the bottom plate 21 is fixed on one end of the base 10 facing the top cover 50. The pressure is applied to the pressure chip 30 through the first outer hole section and then the middle hole section. Differential pressure hole 11 is the shoulder hole, and the shoulder hole can regard as the attenuator to use, reduces the medium velocity of flow and flow, reduces medium pressure, plays the damping effect, alleviates instantaneous impact force to pressure sensor's destruction. Meanwhile, the stepped hole is used for introducing external pressure and isolating foreign matters from entering the sensor, so that the sensor can work in a more severe environment while the working capacity of the sensor is not influenced, and the service life of the sensor is prolonged.

Specifically, the diameter of the first outer hole section is 2.8mm, the diameter of the middle hole section is 0.5mm, and the pressure is applied to the pressure chip 30 through the 2.8mm hole and then to the 0.5mm pore. Of course, the stepped hole is not limited to a diameter of Φ 2.8mm to Φ 0.5mm, but may be a different diameter of a similar structure.

In the present embodiment, the pressure guiding hole 51 is a stepped hole including a second outer hole section and a second inner hole section, the diameter of the second outer hole section is 0.5mm, and the diameter of the second inner hole section is 2.8 mm. Of course, the pressure guide hole 51 may be a straight hole having a diameter of 0.5mm, and the size of the pressure guide hole 51 is not limited thereto and may be other sizes.

In this embodiment, as shown in fig. 2 and 7, the circuit board 60 is sleeved outside the differential pressure tube 22, the pressure sensor further includes a conductive pin 23, the conductive pin 23 is disposed through the circuit board 60 and the bottom plate 21, and a lower end of the conductive pin 23 is electrically connected to the pressure chip 30. The circuit board 60 conditions the output voltage of the pressure chip 30. The conductive PIN 23 may also be referred to as a PIN. The circuit board 60 is made of epoxy resin glass plate (FR4), which has the advantages of large rigidity, small thermal expansion coefficient, excellent insulation and the like, and compensates the output zero position, zero position temperature drift, sensitivity and sensitivity temperature drift of the pressure sensor on the circuit board 60 to meet the use requirements of the product. Of course, the circuit board 60 is not limited to the FR4 board, and may be made of a ceramic board, an alumina board, or the like.

In this embodiment, the pressure chip 30 and the bottom plate 21 are bonded by using silica gel, the cured silica gel has great elasticity, and the residual stress generated in the chip packaging process is very small, so that the long-term stability of the sensor can be ensured. Of course, the pressure chip 30 and the bottom plate 21 are bonded to each other not only by using a silicone rubber but also by using a die bond rubber or the like.

In this embodiment, as shown in fig. 2, the pressure sensor further includes a shielding cable 80, a through hole for the shielding cable 80 to pass through is formed in the top cover 50, one end of the shielding cable 80 is connected to the conductive pin 23, and the other end of the shielding cable passes through the through hole. Shielded cables 80 are used for voltage input and signal output of the pressure sensor. The shielding cable 80 has a metal mesh braid layer to wrap the signal wire, so as to reduce the influence of an external electromagnetic field on a power supply or a communication line and ensure the accuracy of sensor signal transmission. Specifically, the shielding cable 80 is a four-core shielding cable, and when the four-core shielding cable provides the working voltage for the pressure chip 30, the output voltage of the pressure chip 30 will output a corresponding value along with the change of the pressure after being conditioned by the circuit board 60.

In the present embodiment, as shown in fig. 2, 10 and 11, a crimp terminal 52 is provided on the outer side of the top cover 50, and the crimp terminal 52 fixes the shielded cable 80, that is, the top cover 50 fixes the cable by crimping.

In this embodiment, the top cover 50 is provided with a threaded hole 53, and the shielding layer of the shielding cable 80 is fixed at the threaded hole 53 by a fastener, so that the shielding cable 80 is fixed more firmly and reliably. The threaded hole 53 has dimensions M2 × 2.5. Of course, the size of the threaded hole 53 is not limited to M2 × 2.5, and may be other sizes.

In this embodiment, the through hole includes a first hole section and a second hole section, the aperture of the first hole section is smaller than the aperture of the second hole section, and the pressure chip 30 covers the first hole section. One end of the differential pressure pipe 22 is disposed in the second bore section, facilitating the fixation of the differential pressure pipe 22.

In the present embodiment, as shown in fig. 4 and 5, the base 10 is made of stainless steel, and preferably, the base 10 is made of 316L stainless steel, which has the advantages of good appearance luster, strong corrosion resistance, excellent high-temperature strength, and the like. Of course, the base 10 is not limited to 316L stainless steel, but may be made of titanium alloy or other materials having high structural strength and excellent corrosion resistance.

In the present embodiment, as shown in fig. 8 and 9, the material of the housing 40 is stainless steel, and preferably, the housing 40 is made of 316L stainless steel material, which is used to protect the circuit board and the electronic components inside the sensor from being damaged during use. Of course, the housing 40 is not limited to 316L stainless steel, but may be a titanium alloy or other material having good structural strength and excellent corrosion resistance.

In the present embodiment, as shown in fig. 10 and 11, the top cover 50 is made of stainless steel, and preferably, the top cover 50 is made of stainless steel, which is used to protect the circuit board and electronic components inside the sensor from being damaged during use. Of course, the top cover 50 is not limited to 316L stainless steel, but may be a titanium alloy or other material having good structural strength and excellent corrosion resistance.

In the present embodiment, as shown in fig. 6 and 7, the material of the bottom plate 21 is an iron-nickel-cobalt alloy, preferably, the material used for the bottom plate 21 is an iron-nickel-cobalt alloy 4J29, which has a linear expansion coefficient similar to that of silicon-boron hard glass at 20 ℃ to 450 ℃, a high curie point, and good low-temperature structural stability, and the oxide film of the alloy is dense and can be well infiltrated by glass, and the alloy is a Fe-Ni-Co hard glass sealing alloy, and has stable performance. The bottom plate 21 is fixed 6 PIN needles through glass 24 sintering, the material iron nickel cobalt alloy 4J29 of PIN needle is insulating with bottom plate 21, and the surface gold plating of PIN needle has good electric conductive property.

In the embodiment, as shown in fig. 2, the base 10 and the housing 40 are welded together, and the housing 40 and the top cover 50 are welded together, so that the welding strength is high, and the structure is more stable and reliable. Specifically, the housing 40 and the base 10 and the top cover 50 and the housing 40 are welded by laser, so as to ensure the strength and the air tightness therebetween. Of course, the joints between the housing 40 and the base 10 and between the housing 40 and the top cover 50 are not limited to laser welding, and may be other welding methods such as piezoresistive welding and argon arc welding.

In the embodiment, the tube seat 20 is welded to the base 10 by the energy storage pressure welding, so that the welding strength is ensured, and the air tightness is ensured to meet the requirement. Of course, the connection between the base 20 and the base 10 may be formed by laser welding, argon welding, or other welding methods.

In this embodiment, as shown in fig. 4, a plurality of fixing holes 12 are provided on the base 10 at the outer side of the housing 40, and the fastening members pass through the fixing holes 12 to be fixed to the device to be tested for pressure medium, so that the connection strength can be ensured by the plurality of fastening members. Specifically, the fixing hole 12 is a through hole, and the fastening member is a screw or a bolt. The diameter of the through holes is 2.8mm, and the number of the through holes is four. Of course, the number of the fixing holes is not limited to 4, the diameter of the fixing holes is not limited to Φ 2.8mm, and the fixing holes can be in other sizes or threaded holes matched with the size of the pressure pipeline.

In the embodiment, as shown in fig. 3, the housing 40 is cylindrical, the top cover 50 is circular, and the bottom surface of the base 10 is rectangular, so that the manufacturing process is facilitated, and the manufacturing cost is reduced. It will be appreciated that in other embodiments, the bottom surface of the base 10 is circular, or alternatively, the housing 40 is prismatic and the top cover 50 is rectangular.

The pressure sensor is a micro-MEMS piezoresistive pressure sensor, the tube seat is a TO tube seat, the meaning of Transistor Outline is the TO tube seat, the TO tube seat is called TO for short, the TO tube seat can adopt TO8, TO9 and the like, and the cost is low.

From the above description, it can be seen that the above-mentioned embodiments of the present invention achieve the following technical effects:

1. the micro MEMS piezoresistive pressure sensor comprises a base 10, a tube seat 20, a pressure chip 30, a shell 40, a top cover 50, a circuit board 60 and a shielding cable 80, the whole structure is small in size and light in weight, the sensor is only 60g under the condition that the cable is not considered, the pressure sensor is used for measuring 0-500KPa gauge pressure or absolute pressure or differential pressure, and the micro MEMS piezoresistive pressure sensor is suitable for non-corrosive and non-ionic working fluids, such as clean and dry air, dry gas and the like.

2. Base 10, shell 40, top cap 50 all adopt 316L stainless steel material, and both junctions adopt laser welding, and structural strength is firm, and compressive capacity is strong, and corrosion resisting property is excellent, and the sensor is difficult for receiving external destruction.

3. The shielded cable 80 uses a four-core shielded wire, reduces the influence of an external electromagnetic field on a power supply or a communication line, and ensures the accuracy of sensor signal transmission.

4. The stepped hole on the base 10 is from a hole with phi 2.8mm to a fine hole with phi 0.5mm, and the stepped hole can be used as a damper to reduce the flow velocity and flow of a medium, reduce the pressure of the medium, play a role in damping and relieve the damage of instantaneous impact force to the pressure sensor; meanwhile, the stepped hole is used for introducing external pressure and isolating foreign matters from entering the sensor, the working capacity of the sensor is not influenced, meanwhile, the sensor can work in a more severe environment, and the service life of the sensor is prolonged.

5. The base 10 is provided with 4 phi 2.8mm through holes, and the fastener fixes the pressure sensor to the equipment of the pressure medium to be measured through the through holes, so that the connection strength is ensured.

6. The top cover 50 is provided with a pressure guide hole 51 with phi of 0.5mm and a threaded hole 53 of M2, the pressure guide hole 51 introduces outside air pressure to protect a circuit board and electronic components in the pressure sensor from being damaged in the use process; the shielding layer of the shielding cable 80 is fixed at the position of the threaded hole 53 by the screw of the M2, and the top cover 50 fixes the shielding cable 80 by crimping.

7. The tube seat 20 is welded to the base 10 through energy storage pressure welding, so that the welding strength is ensured, and meanwhile, the air tightness of the tube seat can meet the requirement.

8. The differential pressure pipe 22 on the pipe seat 20 is welded on the bottom plate 21 through silver copper, the material of the differential pressure pipe 22 is 316L stainless steel, and the pressure entering through the top cover 50 is led to the back cavity of the pressure chip 30 along the differential pressure pipe 22.

9. The circuit board 60 is made of FR4 board material, and has high rigidity, small thermal expansion coefficient and excellent insulation.

10. The pressure chip 30 and the tube seat 20 are bonded by silica gel, the cured silica gel has great elasticity, the residual stress generated in the chip packaging process is very small, and the long-term stability of the sensor can be ensured.

It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications can be made without departing from the scope of the invention.

Claims (10)

1. A pressure sensor, comprising:

a base (10) having a differential pressure hole (11) into which a pressure medium to be measured flows;

the tube seat (20) is arranged on the base (10), the tube seat (20) comprises a bottom plate (21), a through hole penetrating through the upper surface and the lower surface of the bottom plate (21) is formed in the bottom plate (21), and a circuit board (60) is arranged on one side, far away from the differential pressure hole (11), of the bottom plate (21);

a pressure chip (30) disposed on a side of the bottom plate (21) facing the differential pressure hole (11) and covering the through hole, the pressure chip (30) being electrically connected to the circuit board (60);

the shell (40) is arranged on the base (10) and sleeved on the outer side of the tube seat (20);

a top cover (50) disposed on the top of the housing (40), the top cover (50) having a pressure introduction hole (51).

2. The pressure sensor according to claim 1, wherein the stem (20) further comprises a differential pressure tube (22), a lower end of the differential pressure tube (22) being disposed at an end of the through hole facing the cap (50).

3. Pressure sensor according to claim 1, characterized in that the differential pressure hole (11) comprises a first outer hole section, a middle hole section and a first inner hole section, the middle hole section has a smaller hole diameter than the first outer hole section and the first inner hole section, the bottom plate (21) is fixed on the end of the base (10) facing the top cover (50), and/or the pressure guiding hole (51) is a stepped hole or a straight hole.

4. The pressure sensor according to claim 2, wherein the circuit board (60) is sleeved on the outer side of the differential pressure pipe (22), the pressure sensor further comprises a conductive pin (23), the conductive pin (23) is arranged on the circuit board (60) and the bottom plate (21) in a penetrating manner, and the lower end of the conductive pin (23) is electrically connected with the pressure chip (30).

5. The pressure sensor according to claim 4, further comprising a shielding cable (80), wherein a through hole for the shielding cable (80) to pass through is formed in the top cover (50), one end of the shielding cable (80) is connected with the conductive pin (23), and the other end of the shielding cable passes through the through hole.

6. Pressure sensor according to claim 5, characterized in that a crimp terminal (52) is provided on the outer side of the top cover (50), the crimp terminal (52) fixing the shielding cable (80), and/or in that a threaded hole (53) is provided on the top cover (50), at which threaded hole (53) the shielding layer of the shielding cable (80) is fixed by means of a fastener.

7. A pressure sensor according to any of claims 1 to 6, wherein the through hole comprises a first hole section and a second hole section, the first hole section having a smaller aperture than the second hole section, the pressure chip (30) covering the first hole section.

8. The pressure sensor according to any of claims 1 to 6, wherein the base (10), the housing (40) and the top cover (50) are all made of stainless steel, and/or the bottom plate (21) is made of NiCo.

9. Pressure sensor according to one of claims 1 to 6, characterized in that the base (10) is connected to the housing (40) and the housing (40) is connected to the cover (50) by welding and/or that the base (10) is provided with a plurality of fixing holes (12) on the outside of the housing (40).

10. A pressure sensor according to any of claims 1 to 6, wherein the housing (40) is cylindrical, the cover (50) is circular and the base (10) is rectangular on its underside.

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