CN217212258U

CN217212258U - Vacuum testing device

Info

Publication number: CN217212258U
Application number: CN202123344828.3U
Authority: CN
Inventors: 于海涛
Original assignee: Shanghai Maizhen Electronic Technology Co ltd
Current assignee: Shanghai Maizhen Electronic Technology Co ltd
Priority date: 2021-12-28
Filing date: 2021-12-28
Publication date: 2022-08-16
Anticipated expiration: 2031-12-28

Abstract

The application provides a vacuum test device relates to the measuring instrument field, and this vacuum test device includes: the circuit board is arranged in the main cavity, and the upper end of the main cavity is an open end; the cover plate covers the open end of the main cavity and is provided with an opening; the observation window is embedded in the opening; the vacuum sealing connector is arranged on the first side of the main cavity, and a first connecting end of the vacuum sealing connector is connected with the circuit board. The utility model arranges the observation window on the cover plate of the test cavity, so that the resonance type micro-cantilever beam sensing chip can be used together with optical analysis equipment such as a microscope, a Raman spectrometer and the like, and the real-time observation and analysis of the material change on the resonance type micro-cantilever beam sensing chip can be realized in the test process; and simultaneously, the vacuum sealing connector can be adopted to realize high vacuum supply in the test cavity.

Description

Vacuum testing device

Technical Field

The utility model relates to a measuring instrument field, in particular to vacuum test device.

Background

In recent years, a series of analytical testing methods and tools are developed based on a resonant micro-cantilever sensor chip, for example, the resonant micro-cantilever sensor chip is used for measuring thermodynamic parameters of functional materials; a thermogravimetric analyzer prepared by utilizing a resonant micro-cantilever sensor chip and the like. In these applications, the resonant micro-cantilever sensor chip is placed in a sealed test chamber made of glass or teflon, and the chip is located substantially at the center of the test chamber.

In the related art, the analysis and test method and the tool cannot be used together with optical analysis equipment such as a microscope, a raman spectrometer and the like, so that real-time observation and analysis of material changes on the resonant micro-cantilever sensor chip in the test process cannot be realized, and high vacuum cannot be realized inside the test cavity.

SUMMERY OF THE UTILITY MODEL

In view of the above drawbacks of the prior art, an object of the present application is to provide a vacuum testing apparatus, which is used to solve the problems that in the prior art, a resonant micro-cantilever sensor chip cannot be used in conjunction with optical analysis equipment such as a microscope and a raman spectrometer, and high vacuum cannot be realized inside a testing cavity.

In order to solve the above technical problem, the present application discloses a vacuum test device, includes:

the circuit board is arranged in the main cavity, and the upper end of the main cavity is an open end;

the cover plate is covered on the open end of the main cavity and provided with an opening;

the observation window is embedded in the opening;

the vacuum sealing connector is arranged on the first side of the main cavity, and a first connecting end of the vacuum sealing connector is connected with the circuit board.

Preferably, the open end of the main cavity is provided with an annular groove, and the annular groove is nested with a sealing ring.

Preferably, the material of the viewing window comprises quartz glass.

Preferably, the cover plate further comprises a first gasket and a second gasket, wherein the first gasket, the quartz glass and the second gasket are sequentially overlapped from bottom to top and are embedded in the opening of the cover plate.

Preferably, a resonant micro-cantilever sensor chip is arranged in the main cavity and is located right below the observation window.

Preferably, the device further comprises a shelf which is arranged at the bottom of the main cavity.

Preferably, the clamping device further comprises a pressing ring arranged on the upper surface of the cover plate, and the pressing ring is fixedly arranged on the outer edge of the opening through a plurality of fasteners.

Preferably, the gas pipe joint is arranged on the second side of the main cavity and used for connecting a gas supply device.

Preferably, the second connection end of the vacuum-tight connector is exposed to the outside of the main cavity for connection to an external circuit.

Preferably, the viewing window is located at the very center of the cover plate.

Adopt above-mentioned technical scheme, the utility model discloses following beneficial effect has:

the utility model arranges the observation window on the cover plate of the test cavity, so that the resonance type micro-cantilever beam sensing chip can be used together with optical analysis equipment such as a microscope, a Raman spectrometer and the like, and the real-time observation and analysis of the material change on the resonance type micro-cantilever beam sensing chip can be realized in the test process; meanwhile, the vacuum sealing connector is adopted, and high vacuum can be provided in the test cavity.

Other features and advantages of the present invention will be described in detail in the detailed description which follows.

Drawings

In order to more clearly illustrate the technical solution in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced, and it is apparent that the drawings in the description are only some embodiments of the present invention, wherein the same reference numerals generally represent the same parts. For a person skilled in the art, without inventive effort, further figures can be obtained from these figures.

FIG. 1 is a schematic structural diagram of a vacuum test apparatus according to an embodiment of the present disclosure;

fig. 2 is a schematic perspective view of a vacuum testing apparatus according to an embodiment of the present disclosure;

FIG. 3 is a graph of the results of a thermogravimetric test of molybdenum disulfide in an alternative embodiment of the present application;

figure 4 is a raman spectrum of a thermogravimetric test of molybdenum disulfide in an alternative embodiment of the present application, in combination with a raman spectrometer.

The following is a supplementary description of the drawings:

1. a main chamber; 2. a cover plate; 3. an observation window; 4. a vacuum tight connector; 5. a circuit board; 6. a seal ring; 7. quartz glass; 8. a first gasket; 9. a second gasket; 10. a shelf; 11. pressing a ring; 12. a fastener; 13. a gas pipe joint.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the embodiments described are only some embodiments of the invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with at least one implementation of the invention is included. In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be construed as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Moreover, the terms "first," "second," and the like are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or otherwise described herein.

Referring to fig. 1, the utility model provides a vacuum test device, include:

the circuit board comprises a main cavity 1, wherein a circuit board 5 is arranged in the main cavity 1, and the upper end of the main cavity 1 is an open end;

the cover plate 2 covers the open end of the main cavity, and the cover plate 2 is provided with an opening;

the observation window 3 is embedded in the opening;

and the vacuum sealing connector 4 is arranged on the first side of the main cavity 1, and a first connecting end of the vacuum sealing connector 4 is connected with the circuit board 5.

Specifically, the utility model discloses a vacuum test device can use the test chamber in the thermogravimetric test analysis experiment based on resonant micro cantilever beam sensing chip, and wherein, main cavity body 1 all adopts the metal material with apron 2, and main part chamber 1 is sealed through O type sealing washer, and apron 2 lid fits main part chamber 1 and fixed through the fastener, forms the test chamber wholly, and the size of cavity can be according to actual conditions reasonable settlement. The cover plate 2 is provided with an observation window 3, so that the test chamber can be used together with optical analysis equipment such as a microscope, a Raman spectrometer and the like, the change condition of a sample to be tested in the chamber can be observed by placing the test chamber under the lens of the optical analysis equipment, and in a feasible implementation method, the position and the size of the chamber of the sample to be tested can be adjusted, so that the sample can be normally observed and used under an objective lens of 50 times. In addition, the vacuum sealing connector 4 is adopted to realize the connection of the circuit board 5 in the test cavity and an external circuit, supply power to the test cavity and simultaneously ensure that the whole cavity reaches a high-vacuum environment.

In an alternative embodiment, the open end of the main chamber 1 is provided with an annular groove in which a sealing ring 6 is nested.

Specifically, the direction of placing upwards along main part chamber 1 is established to open end, and the edge of open end is equipped with the ring channel, and sealing washer 6 nests into the ring channel, closes 2 lids of apron simultaneously and contacts with sealing washer 6, strengthens the sealed effect in whole test chamber, further reaches vacuum environment.

In an alternative embodiment, the material of the observation window 3 comprises quartz glass 7.

Specifically, the observation window 3 is made of visible optical glass, preferably quartz glass 7, and the quartz glass 7 is made of silica as a main component, and has advantages of high temperature resistance, low expansion coefficient, high mechanical strength, stable chemical properties, and the like, and the permeability of the quartz glass 7 is relatively good, so the quartz glass 7 is used as a material of the observation window 3 in the present embodiment.

In an alternative embodiment, the cover plate further comprises a first gasket 8 and a second gasket 9, wherein the first gasket 8, the quartz glass 7 and the second gasket 9 are sequentially stacked from bottom to top and embedded in the opening of the cover plate 2.

Specifically, the gasket can be made of rubber, and the first gasket 8 and the second gasket 9 are respectively arranged on the upper surface and the lower surface of the quartz glass 7 to wrap the quartz glass 7, so that the sealing performance of the observation window 3 is enhanced.

In an alternative embodiment, a resonant micro-cantilever sensor chip is arranged in the main cavity 1, and the resonant micro-cantilever sensor chip is located right below the observation window 3.

In an alternative embodiment, it further comprises a shelf 10, the shelf 10 being placed at the bottom of the main chamber 1.

In an alternative embodiment, the pressing ring 11 is further included and is disposed on the upper surface of the cover plate 2, and the pressing ring 11 is fixedly disposed at the outer edge of the opening through a plurality of fasteners 12.

Specifically, first gasket 8, quartz glass 7 and second gasket 9 superpose in proper order and inlay in locating the opening of apron from the bottom up, form observation window 3, and clamping ring 11 sets firmly in the top outer fringe of observation window 3, forms the effect of consolidating the protection to observation window 3.

In an alternative embodiment, a gas pipe joint 13 is further included, which is disposed on the second side of the main chamber 1, and is used for connecting a gas supply device or a vacuum pump.

Specifically, the side of the main cavity is provided with a plurality of air pipe joints 13, the air pipe joints 13 can be arranged on different sides of the main cavity 1 according to actual conditions and are connected with an external gas supply device, the gas atmosphere of the test cavity comprises an inert atmosphere, an oxidizing atmosphere or a reducing atmosphere, and the air pipe joints 13 can be connected with different gas supply devices according to requirements; or a vacuum pump is connected to form a vacuum state for the cavity through pumping.

In an alternative embodiment, the second connection end of the vacuum-tight connector 4 is exposed outside the main cavity 1 for connection to an external circuit.

Specifically, the test device needs to be powered when performing analysis and test, and the internal and external circuits of the test cavity are electrically connected through the vacuum sealing connector 4.

In an alternative embodiment, the viewing window 3 is located in the very center of the cover plate 2.

Specifically, the observation window 3 is arranged in the center of the cover plate 2, and the resonant micro-cantilever sensor chip is located right below the observation window 3, so that a sample to be tested is basically located in the center of the test cavity, and the observation angle is good.

Example (b):

with reference to fig. 2, an alternative embodiment is now provided for the application of the vacuum test apparatus: thermogravimetry and Raman spectroscopy of the molybdenum disulfide material in air are combined for analysis and test.

The selected sample to be detected is molybdenum disulfide, and the operation steps are as follows:

(1) coating a molybdenum disulfide material on an integrated resonant cantilever beam with a temperature control function, and installing the integrated resonant cantilever beam in the vacuum testing device;

(2) the vacuum testing device is arranged below a lens of the Raman spectrometer, and the focal length is adjusted to clearly display the molybdenum disulfide material on the cantilever beam;

(3) after a specific measurement position is selected, starting a Raman spectrum test function, and adjusting proper laser power;

(4) carrying out temperature programming on the cantilever beam, and starting a thermogravimetric test;

(5) in the temperature rise process, the Raman spectrum of the material is measured near a plurality of key temperatures (such as 200 ℃, 400 ℃, 500 ℃ and 600 ℃), and the thermogravimetric and Raman combined analysis test result of the molybdenum disulfide material shown in figures 3 and 4 is finally obtained.

According to theoretical analysis, molybdenum disulfide is heated and decomposed into molybdenum trioxide and sulfur dioxide gas, molybdenum disulfide starts to be oxidized at about 200 ℃, starts to be gradually decomposed at about 315 ℃, and is completely decomposed into molybdenum trioxide and sulfur dioxide gas at 600 ℃. As can be seen from fig. 3, the mass percentage of the substance in the test chamber is greater than 90% at 205 degrees celsius, indicating that the molybdenum disulfide is only slightly oxidized; the mass percentage of the substances in the test cavity at 386 ℃ is about 90 percent, which indicates that the molybdenum disulfide starts to be gradually decomposed; the mass percent of the substances in the test cavity at 600 ℃ tends to 0 percent, which shows that the molybdenum disulfide is completely decomposed into molybdenum trioxide and sulfur dioxide gas. Simultaneously the utility model provides a vacuum test device and raman spectroscopy ally oneself with usefulness, obtain molybdenum disulfide and molybdenum trioxide's raman spectrogram, see figure 4, the raman peak that records molybdenum disulfide is 400cm ^-1 The Raman peak of molybdenum trioxide is 800cm ^-1 Control, coincide with theoretical basic, that is to say the utility model provides a vacuum test device has better ground enforceability, and can ally oneself with optical analysis equipment such as raman spectroscopy, has expanded the thermodynamic experiment range based on resonant mode micro cantilever beam sensing chip.

The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims

1. A vacuum testing apparatus, comprising:

the circuit board comprises a main cavity (1), wherein a circuit board (5) is arranged in the main cavity (1), and the upper end of the main cavity (1) is an open end;

the cover plate (2) is covered on the open end of the main cavity (1), and the cover plate (2) is provided with an opening;

the observation window (3) is embedded in the opening;

the vacuum sealing connector (4) is arranged on the first side of the main cavity (1), and a first connecting end of the vacuum sealing connector (4) is connected with the circuit board (5).

2. Vacuum testing device according to claim 1, characterized in that the open end of the main chamber (1) is provided with an annular groove, which is nested with a sealing ring (6).

3. Vacuum testing device according to claim 1, characterized in that the material of the viewing window (3) comprises quartz glass (7).

4. The vacuum testing device according to claim 3, further comprising a first gasket (8) and a second gasket (9), wherein the first gasket (8), the quartz glass (7) and the second gasket (9) are sequentially stacked from bottom to top and embedded in the opening of the cover plate (2).

5. The vacuum test device according to claim 1, wherein a resonant micro-cantilever sensor chip is arranged in the main cavity, and the resonant micro-cantilever sensor chip is positioned right below the observation window (3).

6. The vacuum testing apparatus according to claim 1, further comprising a shelf (10), said shelf (10) being placed at the bottom of said main chamber (1).

7. The vacuum testing device according to claim 1, further comprising a press ring (11) disposed on an upper surface of the cover plate (2), wherein the press ring (11) is fixedly disposed at an outer edge of the opening via a plurality of fasteners (12).

8. The vacuum testing apparatus according to claim 1, further comprising a gas line connector (13) provided on a second side of the main chamber (1) for connecting a gas supply or a vacuum pump.

9. Vacuum testing device according to claim 1, characterized in that the second connection end of the vacuum tight connector (4) is exposed to the outside of the main cavity (1) for connection of an external circuit.

10. Vacuum testing device according to claim 1, characterized in that the viewing window (3) is located in the exact center of the cover plate (2).