CN205645752U - Normal position TEM simulation environment sample rod system - Google Patents
Normal position TEM simulation environment sample rod system Download PDFInfo
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- CN205645752U CN205645752U CN201620505473.1U CN201620505473U CN205645752U CN 205645752 U CN205645752 U CN 205645752U CN 201620505473 U CN201620505473 U CN 201620505473U CN 205645752 U CN205645752 U CN 205645752U
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- sample rod
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Abstract
The utility model relates to a testing of materials technical field specifically is a normal position TEM simulation environment sample rod system. This system includes: airtight circular connector, peripheral equipment, sample rod, computer, sealed cavity, sociable microchip, specifically the structure is as follows: sample rod's one end sets up airtight circular connector, and sample rod's the other end sets up sealed cavity, and sealed chamber sets up sociable microchip, and the peripheral equipment output passes through pipeline, airtight circular connector and sample rod inner chamber and links to sealed cavity, and fanout's circuit passes airtight circular connector and the sample rod inner chamber even extremely seals the cavity. The utility model discloses gu furthest has realized the measurement and the research of broad perspectives ability with gas / liquid / interface reaction mechanism of material in complicated gaseous state / liquid simulation environment, extensively be applicable to and probe into various high temperature, the reaction of low temperature chemical synthesis, material phase transition, electrochemical reaction, cryobiochemistry reaction etc..
Description
Technical field
This utility model relates to Material Testing Technology field, is specially a kind of in situ TEM simulated environment specimen holder system, it is possible to realize the simulated environment of gaseous state, liquid, plasma state in transmission electron microscope, and have the outfield functions such as light, heat, electricity.
Background technology
The developing history of in situ TEM can trace back to the forties in last century, its technological difficulties are not only in that to be needed to be applied in small TEM sample simulated environment and outer field action exactly, be also satisfied a series of exacting terms, such as: the ultrahigh vacuum degree (10 of Electronic Speculum system to be maintained simultaneously-4～10-6Pa) and the high degree of stability of sample stage, it is impossible to imaging optical path is produced interference, it is ensured that reasonably imaging resolution, and total must the compact sample chamber etc. narrow and small to be applicable to TEM.
Nearly ten years, along with the progress of the key technologies such as electron micrology, micro-nano technology and vacuum, two kinds of in situ TEM technology are had just to obtain more ripe development at present.One is that simulated environment (gas phase, liquid phase etc.) and condition of external field are introduced directly into electron microscopic sample room.This needs to carry out common Electron microscope degree of depth improvement, cost and safeguard that use cost is the most much more expensive and be difficult to penetration and promotion.Another kind is that electronic microscope sample rod carries out special design and manufacture, introduces environment wherein and condition of external field realizes in-situ characterization function.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of in situ TEM simulated environment specimen holder system, the in situ TEM specimen holder using simulated environment to seal chamber technology has the strongest compatibility, it is applicable to various types of common Electronic Speculum, different outfield can be loaded according to the needs of research work.
The invention for solving the technical problem is adopted the technical scheme that:
A kind of in situ TEM simulated environment specimen holder system, this system includes: airtight cylindrical connector, ancillary equipment, specimen holder, computer, sealing chamber, outfield microchip, and concrete structure is as follows:
One end of specimen holder arranges airtight cylindrical connector, the other end of specimen holder arranges sealing chamber, annular seal space indoor arrange outfield microchip, ancillary equipment outfan is connected to seal chamber by pipeline, airtight cylindrical connector and specimen holder inner chamber, fanout be routed through airtight cylindrical connector and specimen holder inner chamber is connected to seal chamber.
Described in situ TEM simulated environment specimen holder system, outfield microchip is arranged at the transparent SiN that transmission electron microscope electron beam is correspondingx/SiOxWindow, sample to be analyzed is positioned over SiNx/SiOxOn window.
Described in situ TEM simulated environment specimen holder system, pipeline uses the micro-channel supporting with airtight cylindrical connector, and micro-channel is circuit, light path, gas circuit or fluid path.
Advantage of the present utility model and providing the benefit that:
1, this utility model in the front end of specimen holder a built-in environmental sealing chamber (" Environmental Cell "), TEM sample is placed in the inside sealing chamber, completely cut off with external environment, sealing the upper and lower both sides of chamber has two windows to electron beam " transparent " to be used for observing sample, seals the window of chamber and can bear～105The pressure of Pa.So, one seals chamber is exactly a minisize reaction chamber, various fluids (gas, liquid, plasma) can be directly entered sealing chamber by micro-channel, and without destroying the vacuum state of Electronic Speculum, this will become the Main way of current in situ TEM technology development.
2, the outfield function such as the light in this utility model transmission electron microscope in situ simulated environment specimen holder system, heat, electricity, can be loaded directly in sealing chamber or be realized by built-in miniature chip.
3, this utility model achieves the measurement and research that the macro property of material is machine-processed with gas liquid solid interfacial reaction in complicated gaseous state/liquid simulated environment to greatest extent, is widely used in probing into various high temperature, cryochemistry synthetic reaction, material phase transformation, electrochemical reaction, cryobiochemistry reaction etc..
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
In figure: 1 airtight cylindrical connector；2 micro-channel；3 ancillary equipment；4 specimen holders；5 computers；6 seal chamber；7 outfield microchips.
Detailed description of the invention
Below, in conjunction with the accompanying drawings and embodiments the detailed description of the invention of utility model is described in further detail.Detailed description for these embodiments, it is construed as those skilled in the art to be put into practice by this utility model, and can be by using other embodiments, in the case of without departing from the spirit of appended claims and this utility model category, shown example is modified and/or changes.Although additionally, disclose special characteristic of the present utility model in an embodiment, but this special characteristic can suitably be modified, it is achieved function of the present utility model.
As shown in Figure 1, this utility model in situ TEM simulated environment specimen holder system, be applicable to the simulated environment that can realize gaseous state, liquid, plasma state transmission electron microscope, and there is the outfield functions such as light, heat, electricity, this system specifically includes that airtight cylindrical connector 1, micro-channel 2, ancillary equipment 3, specimen holder 4, computer 5, seals chamber 6, outfield microchip 7 etc., and concrete structure is as follows:
One end of specimen holder 4 arranges airtight cylindrical connector 1, and the other end of specimen holder 4 arranges sealing chamber 6, arranges outfield microchip 7, outfield microchip 7 is arranged at the transparent SiN that transmission electron microscope electron beam is corresponding in sealing chamber 6x/SiOxWindow, sample to be analyzed is positioned over SiNx/SiOxOn window 7, ancillary equipment 3 outfan is connected to seal chamber 6 by micro-channel 2 (circuit, light path, gas circuit, fluid path), airtight cylindrical connector 1 and specimen holder 4 inner chamber, computer 5 outfan be routed through airtight cylindrical connector 1 and specimen holder 4 inner chamber is connected to seal chamber 6.
Wherein, the effect of airtight cylindrical connector 1 is to make micro-channel 2 pass through and completely cut off ultra-high vacuum environment and the atmosphere outside of transmission electron microscope, the effect of outfield microchip 7 is to apply outfield simulated conditions, outfield microchip 7 and the SiN therein such as heat, electricity, lightx/SiOxWindow is to be prepared by photoetching, quasiconductor dry method, wet etching and physical vapour deposition (PVD).SiNx/SiOxWindow uses SiNxWith SiOxLaminated construction, SiOxFor Si oxide (x=1～2), SiNxFor silicon nitride (x=1～2).
As it is shown in figure 1, the using method of this utility model in situ TEM simulated environment specimen holder system, detailed process is as follows:
Seal chamber 6 as a minisize reaction cavity, various fluid media (medium)s (gas, liquid, plasma) can be from ancillary equipment 3, form simulated environment in being directly entered sealing chamber 6 by micro-channel 2, airtight cylindrical connector 1 and specimen holder 4 inner chamber, then apply the outer field signals such as light, heat, electricity by being integrated in the outfield microchip 7 sealed in chamber 6.Computer 5 is utilized finely to monitor various simulated environment medium parameter and condition of external field, and real time record.Owing to sample to be analyzed is positioned in outfield microchip 7 SiN to electron beam " transparent "x/SiOxOn window 7, thus realize the structure and composition when nanoscale real-time monitored material generation physical-chemical reaction and develop.Completely cut off the main cavity of simulated environment and transmission electron microscope owing to sealing chamber 6, the ultra-high vacuum state of Electronic Speculum will not have been destroyed.
Embodiment result shows, this utility model achieves the simulated environment realizing gaseous state, liquid, plasma state in transmission electron microscope, and has the outfield functions such as light, heat, electricity.
Above in conjunction with accompanying drawing, embodiment of the present utility model is described; but this utility model is not limited to above-mentioned detailed description of the invention; above-mentioned specific embodiment is only schematically; rather than it is restrictive; those of ordinary skill in the art is under enlightenment of the present utility model; in the case of without departing from this utility model objective and scope of the claimed protection, it is also possible to make a lot of form, within these all belong to protection of the present utility model.
Claims (3)
1. an in situ TEM simulated environment specimen holder system, it is characterised in that this system includes: airtight cylindrical connector, ancillary equipment, specimen holder, computer, sealing chamber, outfield microchip, and concrete structure is as follows:
One end of specimen holder arranges airtight cylindrical connector, the other end of specimen holder arranges sealing chamber, annular seal space indoor arrange outfield microchip, ancillary equipment outfan is connected to seal chamber by pipeline, airtight cylindrical connector and specimen holder inner chamber, fanout be routed through airtight cylindrical connector and specimen holder inner chamber is connected to seal chamber.
2. according to the in situ TEM simulated environment specimen holder system described in claim 1, it is characterised in that be arranged at the transparent SiN that transmission electron microscope electron beam is corresponding on the microchip of outfieldx/SiOxWindow, sample to be analyzed is positioned over SiNx/SiOxOn window.
3. according to the in situ TEM simulated environment specimen holder system described in claim 1, it is characterised in that pipeline uses the micro-channel supporting with airtight cylindrical connector, and micro-channel is circuit, light path, gas circuit or fluid path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620505473.1U CN205645752U (en) | 2016-05-30 | 2016-05-30 | Normal position TEM simulation environment sample rod system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620505473.1U CN205645752U (en) | 2016-05-30 | 2016-05-30 | Normal position TEM simulation environment sample rod system |
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| CN205645752U true CN205645752U (en) | 2016-10-12 |
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| CN201620505473.1U Active CN205645752U (en) | 2016-05-30 | 2016-05-30 | Normal position TEM simulation environment sample rod system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105223215A (en) * | 2015-11-16 | 2016-01-06 | 南京大学 | A kind of gas electronic diffraction instrument installed in environment transmission electron microscope |
| CN113345784A (en) * | 2020-02-18 | 2021-09-03 | 中国科学院物理研究所 | Low-temperature in-situ sample rod |
-
2016
- 2016-05-30 CN CN201620505473.1U patent/CN205645752U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105223215A (en) * | 2015-11-16 | 2016-01-06 | 南京大学 | A kind of gas electronic diffraction instrument installed in environment transmission electron microscope |
| CN113345784A (en) * | 2020-02-18 | 2021-09-03 | 中国科学院物理研究所 | Low-temperature in-situ sample rod |
| CN113345784B (en) * | 2020-02-18 | 2023-06-02 | 中国科学院物理研究所 | Low-temperature in-situ sample rod |
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