CN217212242U

CN217212242U - Vertical semiconductor wafer interference testing device

Info

Publication number: CN217212242U
Application number: CN202220328086.0U
Authority: CN
Inventors: 程玉学; 杨雪梅
Original assignee: Sanhe Zhixin Technology Co ltd
Current assignee: Sanhe Zhixin Technology Co ltd
Priority date: 2022-02-11
Filing date: 2022-02-11
Publication date: 2022-08-16
Anticipated expiration: 2032-02-11

Abstract

The utility model provides a vertical semiconductor wafer interference testing device, belonging to the technical field of wafer detection, which solves the problems that the prior wafer interference testing device is inconvenient to effectively fix according to wafers with different sizes and adjust the testing angle and position when in use; comprises a device main body; the top of the device main body is provided with a control device, and the top of the control device is provided with a first clamping mechanism; the top of the device main body is provided with an adjusting mechanism, and the outer side of the adjusting mechanism is provided with a second clamping mechanism; a wafer main body is arranged on the inner side of the second clamping mechanism; the effect of enhancing the stability of the threaded cylinder is achieved by arranging the two groups of positioning rods and the spring part, the purpose that the adjusting rod drives the threaded cylinder to move back and forth is achieved, and the threaded cylinder drives the connecting rod A and the connecting rod B to rotate simultaneously; the array type connecting rods A are matched with the connecting rods B, so that the purpose of simultaneously contracting or expanding a plurality of groups of clamping rods inwards is achieved.

Description

Vertical semiconductor wafer interference testing device

Technical Field

The utility model belongs to the technical field of the wafer detects, more specifically says, in particular to vertical semiconductor wafer interference testing arrangement.

Background

With the rapid development of the whole semiconductor industry, the development trend of the domestic semiconductor industry in recent years is getting hot; the development of the semiconductor industry is not independent of wafers, which are the basis for manufacturing chips; at present, the full parameter testing device for wafer substrates adopts the following two testing methods: the first is interferometric measurement and the second is scanning measurement.

Based on the above, the existing wafer interference testing device is inconvenient to effectively fix wafers with different sizes when in use, so that the wafers are easy to shift during testing, and the accuracy of detection data is reduced; and the existing testing device is not convenient for adjusting the testing angle and position, and the practicability of the testing device is reduced.

Accordingly, the present invention is directed to a vertical semiconductor wafer interference testing apparatus, which is improved in view of the conventional structure and defects, and is intended to achieve the purpose of higher practical value.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides a vertical semiconductor wafer interferes testing arrangement to solve the current wafer that proposes in the above-mentioned background art and interfere testing arrangement and be not convenient for effectively fix according to the wafer of unidimensional when using, and be not convenient for carry out the problem of adjusting to test angle and position.

The utility model relates to a vertical semiconductor wafer interference testing arrangement's purpose and efficiency is reached by following concrete technical means:

a vertical semiconductor wafer interference test device comprises a device main body; the device main body includes: the operating table is characterized in that the operating table main body is of a square structure; the threaded rod is arranged in the operating platform, and a hand wheel is arranged at the top end of the threaded rod; the connecting frame is arranged at the top of the operating platform in a sliding mode through a dovetail groove, and a threaded rod is arranged inside the bottom side of the connecting frame in a threaded connection mode; the rotating shaft is arranged in the connecting frame, and the top end of the rotating shaft is provided with a hand wheel; the connecting gears are fixedly arranged on the outer side of the rotating shaft, the number of the connecting gears is two, and the two groups of the connecting gears are symmetrically arranged; the top of the device main body is provided with a control device, and the top of the control device is provided with a first clamping mechanism; the top of the device main body is provided with an adjusting mechanism, and the outer side of the adjusting mechanism is provided with a second clamping mechanism; and a wafer main body is arranged on the inner side of the second clamping mechanism.

Further, the control device includes: the control frame is arranged at the top of the connecting frame in a sliding manner through a dovetail groove; the racks are fixedly arranged on two sides of the control frame and are meshed with the connecting gear; the control shaft is arranged in the control frame; from locking piece A, from locking piece A fixed setting in the control shaft outside, and from locking piece A top to be provided with teeth of a cogwheel structure.

Further, the control device further includes: the vertical rod is fixedly arranged at the top of the control frame; the self-locking block B is arranged on the outer side of the control shaft in a sliding mode, vertical rods are arranged inside two sides of the self-locking block B in a sliding mode, and spring parts are arranged between the top of the self-locking block B and the top ends of the vertical rods; the bottom of the self-locking block B is provided with a gear tooth structure, and the gear tooth structure at the bottom of the self-locking block B is meshed with the gear tooth structure at the top of the self-locking block A.

Further, the first clamping mechanism includes: the fixing frame is fixedly arranged at the top of the control shaft; the sliding rods are arranged inside the two sides of the fixing frame in a sliding mode, and spring parts are arranged between the rear ends of the sliding rods and the outer side of the fixing frame; the clamping plates are fixedly arranged at the top end of the sliding rod, two groups of clamping plates are arranged, and the two groups of clamping plates are symmetrically arranged; and the interference tester is arranged between the two groups of clamping plates.

Further, the adjustment mechanism includes: the adjusting frame is fixedly arranged at the top of the operating platform; the adjusting rod is arranged in the adjusting frame; the disc is fixedly arranged at the top end of the adjusting rod; the positioning rod is arranged in the adjusting frame in a sliding manner, and a spring part is arranged between the rear end of the positioning rod and the outer side of the adjusting frame; the connecting groove is formed in the disc and is formed in an annular array.

Further, the second clamping mechanism comprises; the threaded cylinder is arranged on the outer side of the adjusting rod through threaded connection, and a positioning rod is fixedly arranged on the rear side of the threaded cylinder; the connecting rod A is rotatably arranged on the outer side of the threaded cylinder; the connecting rod B is rotatably arranged on the outer side of the threaded cylinder and is parallel to the connecting rod A; the clamping rod is rotatably arranged at the top end of the connecting rod A, and the connecting rod B is rotatably arranged outside the clamping rod; the clamping rods are arranged in an annular array and are arranged on the inner side of the connecting groove in a sliding manner; the fixing plate is fixedly arranged on the inner side of the front end of the clamping rod, and the fixing plate body is of an arc-shaped structure; the fixing plates are arranged in an annular array, and a wafer main body is arranged between the fixing plates.

Compared with the prior art, the utility model discloses following beneficial effect has:

1. in the utility model, the effect of enhancing the stability of the threaded cylinder is realized by arranging two groups of positioning rods and spring parts, and the purpose of enabling the adjusting rod to drive the threaded cylinder to move back and forth is achieved, so that the threaded cylinder drives the connecting rod A and the connecting rod B to rotate simultaneously; the array type connecting rod A is matched with the connecting rod B, so that the purpose of simultaneously contracting or expanding a plurality of groups of clamping rods inwards or outwards is achieved, and the wafer main body is effectively fixed according to the actual size of the wafer main body; the phenomenon that the wafer shifts during testing can be avoided more simply and conveniently.

2. In the utility model, the threaded rod is arranged, so that the connecting frame drives the control frame and the interference tester to move back and forth, and the effect of adjusting the distance between the wafer main body and the interference tester according to the test requirement is realized; utilize and connect gear fit rack, realized making the control frame drive the interference tester and remove the effect about, played the effect of adjusting the interference tester position according to the test demand.

3. In the utility model, the self-locking block A is matched with the self-locking block B, the vertical rod and the spring part, so that the effect that the self-locking block A drives the self-locking block B to slide upwards when the control shaft drives the self-locking block A to rotate is achieved; when the control shaft stops rotating, the self-locking block B moves downwards through the spring part to be meshed with the self-locking block A, and the effect of simply and quickly controlling the rotating angle of the control shaft is achieved; the angle of the interference tester can be adjusted according to the test requirement more simply and conveniently; the comprehensiveness of the test data is enhanced.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention.

Fig. 2 is a schematic structural diagram of the adjusting mechanism of the present invention.

Fig. 3 is a schematic structural view of a second clamping mechanism of the present invention.

Fig. 4 is a schematic structural diagram of the control device of the present invention.

Fig. 5 is a schematic structural view of the first clamping mechanism of the present invention.

In the drawings, the corresponding relationship between the component names and the reference numbers is as follows:

1. a device main body; 101. an operation table; 102. a threaded rod; 103. a connecting frame; 104. a rotating shaft; 105. a connecting gear;

2. a control device; 201. a control frame; 202. a rack; 203. a control shaft; 204. a self-locking block A; 205. a vertical rod; 206. a self-locking block B;

3. a first clamping mechanism; 301. a fixed mount; 302. a slide bar; 303. a clamping plate; 304. an interferometric tester;

4. an adjustment mechanism; 401. an adjusting bracket; 402. adjusting a rod; 403. a disc; 404. positioning a rod; 405. connecting grooves;

5. a second clamping mechanism; 501. a threaded barrel; 502. a connecting rod A; 503. a connecting rod B; 504. a clamping rod; 505. a fixing plate;

6. a wafer body.

Detailed Description

The following describes embodiments of the present invention in further detail with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

In the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Example (b):

as shown in figures 1 to 5:

the utility model provides a vertical semiconductor wafer interference testing device, which comprises a device main body 1; the apparatus main body 1 includes: the device comprises an operating table 101, a threaded rod 102, a connecting frame 103, a rotating shaft 104 and a connecting gear 105, wherein the main body of the operating table 101 is of a square structure; a bearing is arranged on the outer side of the threaded rod 102 in a matching manner, and the bearing is arranged inside the operating platform 101 in a matching manner; a hand wheel is arranged at the top end of the threaded rod 102; the connecting frame 103 is arranged at the top of the operating platform 101 in a sliding manner through a dovetail groove, and a threaded rod 102 is arranged inside the bottom side of the connecting frame 103 in a threaded connection manner; a bearing is arranged on the outer side of the rotating shaft 104 in a matching manner, the bearing is arranged in the connecting frame 103 in a matching manner, and a hand wheel is arranged at the top end of the rotating shaft 104; the connecting gears 105 are fixedly arranged on the outer side of the rotating shaft 104, two groups of connecting gears 105 are arranged, and the two groups of connecting gears 105 are symmetrically arranged; the concrete functions are as follows: by arranging the threaded rod 102, the effect that the connecting frame 103 drives the control frame 201 and the interference tester 304 to move back and forth is achieved, and the effect of adjusting the distance between the wafer main body 6 and the interference tester 304 according to the test requirement is achieved; the connecting gear 105 is matched with the rack 202, so that the effect that the control frame 201 drives the interference tester 304 to move left and right is achieved, and the effect of adjusting the position of the interference tester 304 according to the test requirement is achieved; the top of the device main body 1 is provided with a control device 2, and the top of the control device 2 is provided with a first clamping mechanism 3; the control device 2 includes: the control frame 201, the rack 202, the control shaft 203, the self-locking block A204, the vertical rod 205 and the self-locking block B206 are arranged on the top of the connecting frame 103 in a sliding mode through dovetail grooves; the rack 202 is fixedly arranged on two sides of the control frame 201, and the rack 202 is meshed with the connecting gear 105; the number of the racks 202 is two; a bearing is arranged on the outer side of the control shaft 203 in a matching way, and the bearing is arranged in the control frame 201 in a matching way; the self-locking block A204 is fixedly arranged on the outer side of the control shaft 203, and the top of the self-locking block A204 is provided with a gear tooth structure; the vertical rods 205 are fixedly arranged at the top of the control frame 201, and two groups of vertical rods 205 are arranged; the self-locking block B206 is arranged outside the control shaft 203 in a sliding mode, vertical rods 205 are arranged inside two sides of the self-locking block B206 in a sliding mode, and spring pieces are arranged between the top of the self-locking block B206 and the top ends of the vertical rods 205; the bottom of the self-locking block B206 is provided with a gear tooth structure, and the gear tooth structure at the bottom of the self-locking block B206 is meshed with the gear tooth structure at the top of the self-locking block A204; the concrete functions are as follows: the connecting gear 105 is matched with the rack 202, so that the effect that the control frame 201 drives the interference tester 304 to move left and right is achieved, and the effect of adjusting the position of the interference tester 304 according to the test requirement is achieved; the self-locking block A204 is matched with the self-locking block B206, the vertical rod 205 and the spring part, so that when the control shaft 203 drives the self-locking block A204 to rotate, the self-locking block A204 drives the self-locking block B206 to slide upwards; when the control shaft 203 stops rotating, the self-locking block B206 moves downwards through the spring part to be meshed with the self-locking block A204, and the effect of simply and quickly controlling the rotating angle of the control shaft 203 is achieved; the effect of adjusting the angle of the interference tester 304 according to the test requirement can be realized more simply and conveniently; the top of the device main body 1 is provided with an adjusting mechanism 4, and the outer side of the adjusting mechanism 4 is provided with a second clamping mechanism 5; the second clamping mechanism 5 is provided with a wafer body 6 inside.

As shown in fig. 4 and 5, the first clamping mechanism 3 includes: the device comprises a fixed frame 301, a sliding rod 302, a clamping plate 303 and an interference tester 304, wherein the fixed frame 301 is fixedly arranged at the top of a control shaft 203, and the main body of the fixed frame 301 is of a U-shaped structure; the sliding rod 302 is arranged inside two sides of the fixing frame 301 in a sliding manner, and a spring part is arranged between the rear end of the sliding rod 302 and the outer side of the fixing frame 301; four groups of sliding rods 302 are arranged, and the two groups of sliding rods 302 are symmetrically arranged; the clamping plates 303 are fixedly arranged at the top end of the sliding rod 302, two groups of clamping plates 303 are arranged in number, and the two groups of clamping plates 303 are symmetrically arranged; the interference tester 304 is arranged between the two groups of clamping plates 303, and the interference tester 304 is electrically connected with the display screen; the concrete functions are as follows: through being provided with slide bar 302 and spring part and grip block 303, realized easily convenient effect of fixing interference tester 304.

As shown in fig. 2 and 3, the adjustment mechanism 4 includes: the adjusting device comprises an adjusting frame 401, an adjusting rod 402, a disc 403, a positioning rod 404 and a connecting groove 405, wherein the adjusting frame 401 is fixedly arranged at the top of the operating platform 101; a bearing is arranged outside the adjusting rod 402 in a matching way, and the bearing is arranged inside the adjusting frame 401 in a matching way; the disc 403 is fixedly arranged at the top end of the adjusting rod 402; the positioning rods 404 are slidably arranged in the adjusting frame 401, the number of the positioning rods 404 is two, and a spring part is arranged between the rear end of each positioning rod 404 and the outer side of the adjusting frame 401; the connecting groove 405 is formed in the disc 403, and the connecting groove 405 is formed in an annular array; the concrete functions are as follows: by arranging the two groups of positioning rods 404 and the spring piece, the effect of enhancing the stability of the threaded cylinder 501 is achieved, the purpose that the adjusting rod 402 drives the threaded cylinder 501 to move back and forth is achieved, and the threaded cylinder 501 drives the connecting rod A502 and the connecting rod B503 to rotate simultaneously; the array type connecting rod A502 is matched with the connecting rod B503, so that the purpose of simultaneously contracting or expanding a plurality of groups of clamping rods 504 inwards or outwards is achieved, and the wafer main body 6 is effectively fixed according to the actual size of the wafer main body; the phenomenon that the wafer shifts during testing can be avoided more simply and conveniently.

As shown in fig. 2 and 3, the second clamping mechanism 5 includes; the clamping device comprises a threaded cylinder 501, a connecting rod A502, a connecting rod B503, a clamping rod 504 and a fixing plate 505, wherein the threaded cylinder 501 is arranged outside the adjusting rod 402 through threaded connection, and a positioning rod 404 is fixedly arranged on the rear side of the threaded cylinder 501; the connecting rods A502 are rotatably arranged on the outer side of the threaded cylinder 501, and the connecting rods A502 are arranged in an annular array; the connecting rod B503 is rotatably arranged outside the threaded cylinder 501, the connecting rods B503 are arranged in an annular array, and the connecting rods B503 and the connecting rod A502 are arranged in parallel; the clamping rod 504 is rotatably arranged at the top end of the connecting rod A502, and the outer side of the clamping rod 504 is rotatably provided with a connecting rod B503; the clamping rods 504 are arranged in an annular array, and the clamping rods 504 are slidably arranged inside the connecting groove 405; the fixing plate 505 is fixedly arranged on the inner side of the front end of the clamping rod 504, and the main body of the fixing plate 505 is arranged into an arc-shaped structure; the fixing plates 505 are arranged in a circular array, and the wafer body 6 is arranged between the fixing plates 505; the concrete functions are as follows: by arranging the two groups of positioning rods 404 and the spring piece, the effect of enhancing the stability of the threaded cylinder 501 is achieved, the purpose that the adjusting rod 402 drives the threaded cylinder 501 to move back and forth is achieved, and the threaded cylinder 501 drives the connecting rod A502 and the connecting rod B503 to rotate simultaneously; the array type connecting rods A502 are matched with the connecting rods B503, so that the purpose of simultaneously contracting or expanding the plurality of groups of clamping rods 504 inwards or outwards is achieved, and the wafer main bodies 6 are effectively fixed according to the actual sizes of the wafer main bodies; the phenomenon that the wafer shifts during testing can be avoided more simply and conveniently.

In another embodiment, as shown in fig. 4, an elastic rubber member is disposed between the rear end of the sliding rod 302 and the outer side of the fixing frame 301, and under the action of the elastic rubber member, the effect of easily and conveniently detaching and installing the interferometer 304 is achieved.

The specific use mode and function of the embodiment are as follows:

in the utility model, the device is supported by the operation platform 101 when in use; the positioning rod 404 is matched with the spring part, so that the effect of enhancing the stability of the threaded cylinder 501 is achieved, and the purpose of preventing the threaded cylinder 501 from rotating along with the adjusting rod 402 is achieved; the adjusting rod 402 is rotated, the adjusting rod 402 drives the threaded cylinder 501 to move back and forth, so that the threaded cylinder 501 drives the clamping rod 504 to contract inwards or expand outwards through the connecting rod a502 and the connecting rod B503, the inner side of the fixing plate 505 is attached to the outer side of the wafer main body 6, and the wafer main body 6 is effectively fixed; the wafer main body 6 is effectively fixed according to the actual size of the wafer main body; the phenomenon that the wafer shifts during testing can be avoided more simply and conveniently; placing the interference tester 304 between the two groups of clamping plates 303, wherein the clamping plates 303 slide inwards by matching the spring part with the sliding rods 302, so that the inner sides of the clamping plates 303 are attached to the outer sides of the interference tester 304, and the interference tester 304 is effectively fixed; rotating the threaded rod 102 to enable the threaded rod 102 to drive the control frame 201 to move back and forth; the distance between the wafer main body 6 and the interference tester 304 is adjusted according to the test requirement; the rotating shaft 104 is rotated, the rotating shaft 104 drives the two groups of connecting gears 105 to rotate, and the connecting gears 105 drive the control frame 201 to move left and right through the racks 202; the position of the interference tester 304 is adjusted according to the test requirement; the fixing frame 301 is rotated, the fixing frame 301 drives the control shaft 203 and the self-locking block A204 to rotate, and the self-locking block A204 drives the self-locking block B206 to slide upwards through the matching of the top gear structure and the bottom gear structure of the self-locking block B206; when the control shaft 203 stops rotating, the self-locking block B206 slides downwards through the vertical rod 205 in cooperation with the spring piece, so that the gear tooth structure at the bottom of the self-locking block B206 is meshed with the gear tooth structure at the top of the self-locking block A204; thereby the control shaft 203 is fixed with the fixing frame 301; the function of simply and quickly controlling the rotation angle of the control shaft 203 is achieved; the effect of adjusting the angle of the interference tester 304 according to the test requirement can be realized more simply and conveniently; the comprehensiveness of the test data is enhanced.

The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiment was chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.

Claims

1. A vertical semiconductor wafer interference test device, comprising: a device main body (1); the device body (1) includes: the operating table (101), the main body of the operating table (101) is set to be a square structure; the threaded rod (102), the threaded rod (102) is installed inside the operating platform (101), and a hand wheel is installed at the top end of the threaded rod (102); the connecting frame (103) is arranged at the top of the operating platform (101) in a sliding mode through a dovetail groove, and a threaded rod (102) is arranged inside the bottom side of the connecting frame (103) in a threaded connection mode; the rotating shaft (104) is installed inside the connecting frame (103), and a hand wheel is installed at the top end of the rotating shaft (104); the connecting gears (105), the connecting gears (105) are fixedly arranged on the outer side of the rotating shaft (104), the number of the connecting gears (105) is two, and the two groups of the connecting gears (105) are symmetrically arranged; the top of the device main body (1) is provided with a control device (2), and the top of the control device (2) is provided with a first clamping mechanism (3); the top of the device main body (1) is provided with an adjusting mechanism (4), and the outer side of the adjusting mechanism (4) is provided with a second clamping mechanism (5); the inner side of the second clamping mechanism (5) is provided with a wafer main body (6).

2. The vertical semiconductor wafer interference testing device of claim 1, wherein: the control device (2) comprises: the control frame (201), the control frame (201) is arranged on the top of the connecting frame (103) in a sliding mode through a dovetail groove; the rack (202), the rack (202) is fixedly arranged on both sides of the control frame (201), and the rack (202) is meshed with the connecting gear (105); the control shaft (203), the control shaft (203) is installed in the control frame (201); from locking piece A (204), from locking piece A (204) fixed the setting in the control shaft (203) outside, and from locking piece A (204) top to be provided with the teeth of a cogwheel structure.

3. The vertical semiconductor wafer interference testing device of claim 2, wherein: the control device (2) further comprises: the vertical rod (205), the vertical rod (205) is fixedly arranged on the top of the control frame (201); the self-locking block B (206), the self-locking block B (206) is arranged on the outer side of the control shaft (203) in a sliding mode, vertical rods (205) are arranged inside two sides of the self-locking block B (206) in a sliding mode, and spring pieces are arranged between the top of the self-locking block B (206) and the top ends of the vertical rods (205); the bottom of the self-locking block B (206) is provided with a gear tooth structure, and the gear tooth structure at the bottom of the self-locking block B (206) is meshed with the gear tooth structure at the top of the self-locking block A (204).

4. The vertical semiconductor wafer interference testing device of claim 1, wherein: the first clamping mechanism (3) comprises: the fixing frame (301), the fixing frame (301) is fixedly arranged on the top of the control shaft (203); the sliding rod (302) is arranged inside two sides of the fixing frame (301) in a sliding mode, and a spring part is arranged between the rear end of the sliding rod (302) and the outer side of the fixing frame (301); the clamping plates (303) are fixedly arranged at the top ends of the sliding rods (302), two groups of clamping plates (303) are arranged in number, and the two groups of clamping plates (303) are symmetrically arranged; and the interference tester (304), wherein the interference tester (304) is arranged between the two groups of clamping plates (303).

5. The vertical semiconductor wafer interference testing device of claim 1, wherein: the adjusting mechanism (4) comprises: the adjusting frame (401), the adjusting frame (401) is fixedly arranged on the top of the operating platform (101); the adjusting rod (402), the adjusting rod (402) is installed inside the adjusting frame (401); the disc (403), the disc (403) is fixedly arranged at the top end of the adjusting rod (402); the positioning rod (404), the positioning rod (404) is arranged in the adjusting frame (401) in a sliding mode, and a spring part is arranged between the rear end of the positioning rod (404) and the outer side of the adjusting frame (401); the connecting grooves (405) are formed in the disc (403), and the connecting grooves (405) are formed in an annular array.

6. The vertical semiconductor wafer interference testing device of claim 1, wherein: the second clamping mechanism (5) comprises; the threaded cylinder (501), the threaded cylinder (501) is arranged outside the adjusting rod (402) through threaded connection, and a positioning rod (404) is fixedly arranged on the rear side of the threaded cylinder (501); the connecting rod A (502), the connecting rod A (502) is rotatably arranged on the outer side of the threaded cylinder (501); the connecting rod B (503) is rotatably arranged on the outer side of the threaded cylinder (501), and the connecting rod B (503) and the connecting rod A (502) are arranged in parallel; the clamping rod (504) is rotatably arranged at the top end of the connecting rod A (502), and the connecting rod B (503) is rotatably arranged at the outer side of the clamping rod (504); the clamping rods (504) are arranged in an annular array, and the clamping rods (504) are arranged on the inner side of the connecting groove (405) in a sliding mode; the fixing plate (505), the fixing plate (505) is fixedly arranged on the inner side of the front end of the clamping rod (504), and the main body of the fixing plate (505) is arranged into a circular arc structure; the fixing plates (505) are arranged in an annular array, and a wafer main body (6) is arranged between the fixing plates (505).