CN217207488U - Air-floating micro-vibration prevention platform capable of being automatically adjusted - Google Patents
Air-floating micro-vibration prevention platform capable of being automatically adjusted Download PDFInfo
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- CN217207488U CN217207488U CN202221072998.2U CN202221072998U CN217207488U CN 217207488 U CN217207488 U CN 217207488U CN 202221072998 U CN202221072998 U CN 202221072998U CN 217207488 U CN217207488 U CN 217207488U
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- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 238000002955 isolation Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
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- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
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Abstract
The utility model provides a platform that shakes a little is prevented to air supporting formula that can automatically regulated, including roof, base and cavity, the roof below is connected with the diaphragm, first air chamber is enclosed into with the roof to the diaphragm, first air inlet and outlet of being connected with first air chamber is seted up to roof one side, the rubber of two rows side by side is installed at the base top, the rubber top is connected with the cavity, the inside second air chamber that is of cavity, the gas pocket of being connected with the second air chamber is seted up at the cavity top, the second air inlet and outlet of being connected with the second air chamber is seted up to cavity one side, cavity outer wall connection has the support accessory, install horizontal valve and support valve on the support accessory. The utility model realizes the adjustment of levelness by adjusting the first air chamber through the level valve and realizes the adjustment of vertical height by adjusting the second air chamber through the supporting valve; the utility model discloses an atmospheric pressure can automatic adjustment levelness and height, and vertical and level are lower to natural frequency, and application scope is wide.
Description
Technical Field
The utility model relates to a vibration isolation device technical field specifically is a platform that shakes a little is prevented to air supporting formula that can automatic adjustment.
Background
At present, the semiconductor industry is rapidly developed, the precision requirement of semiconductor production equipment is higher and higher, the requirement of the equipment on environments such as micro-vibration is more and more sensitive, a little micro-vibration can reduce the yield of the equipment, and even the equipment can not work normally, so that the isolation of the micro-vibration becomes more and more important.
The micro-vibration caused by external environment vibration and reaction force in the equipment is one of key factors restricting the measurement precision of an ultra-precise instrument and the manufacturing precision of ultra-precise processing equipment, a high-performance precise micro-vibration isolation technology becomes a key core technology in the fields of precision engineering, ultra-precise manufacturing and the like, and in order to obtain a better vibration isolation effect at a low frequency band of a system, a method for reducing the natural frequency of the system is generally adopted, so that resonance at certain frequencies is avoided. The traditional vibration isolation components such as metal springs, rubber and air springs mainly adopt vertical single-degree-of-freedom vibration isolation, the natural frequency of the traditional vibration isolation components is usually realized by reducing the spring coefficient, the very low natural frequency cannot be reached, the vertical and horizontal automatic adjustment is usually difficult to realize, and the application range is narrow.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a but micro-vibration platform is prevented to air supporting formula that can automatic adjustment to solve the problem that exists among the above-mentioned background art.
The technical scheme of the utility model is realized like this:
the utility model provides a platform that shakes a little is prevented to air supporting formula that can automatically regulated, includes roof, base and cavity, the roof below is connected with the diaphragm, first air chamber is enclosed into with the roof to the diaphragm, first air inlet and outlet of being connected with first air chamber is seted up to roof one side, the rubber of two rows side by side is installed at the base top, the rubber top is connected with the cavity, the inside second air chamber that is of cavity, the gas pocket of being connected with the second air chamber is seted up at the cavity top, the second air inlet and outlet of being connected with the second air chamber is seted up to cavity one side, cavity outer wall connection has the support accessory, install level valve and support valve on the support accessory.
Further, the top plate and the base are both made of stainless steel plates into rectangular structures.
Further, the rubber is a laminated rubber.
Further, the number of each row of the rubber is three.
Furthermore, the horizontal valve comprises an air inlet A and an air outlet A, the top of the horizontal valve is also connected with a position detection device, and the horizontal valve is connected with the first air inlet and the first air outlet.
Further, the support valve comprises an air inlet B and an air outlet B, and the support valve is connected with the second air inlet and the second air outlet.
The beneficial effects of the utility model are that:
the utility model greatly reduces the natural frequency of the system in the vertical direction through the design of the double-layer air chamber in the vertical direction, the vertical natural frequency can be less than 1.5Hz, the natural frequency of the system in the horizontal direction is reduced through the parallel laminated rubber in the horizontal direction, and the natural frequency in the horizontal direction can be less than 1.5 Hz; the first air chamber is adjusted through the horizontal valve to realize adjustment of levelness, and the second air chamber is adjusted through the supporting valve to realize adjustment of vertical height; the utility model discloses an atmospheric pressure can automatic adjustment levelness and height, and vertical and level are lower to natural frequency, and application scope is wide.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a cross-sectional view of the present invention.
In the figure, 1-a top plate, 101-a first air chamber, 102-a first air inlet and outlet, 2-a base, 3-a cavity, 301-a second air chamber, 302-an air hole, 303-a second air inlet and outlet, 4-rubber, 5-a diaphragm, 6-a horizontal valve, 601-an air inlet A, 602-an air outlet A, 603-a position detection device, 7-a support valve, 701-an air inlet B, 702-an air outlet B, 8-a support fitting.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1-2, an air-floating micro-vibration prevention platform capable of being automatically adjusted comprises a top plate 1, a base 2 and a cavity 3, wherein a diaphragm 5 is connected below the top plate 1, the diaphragm 5 and the top plate 1 enclose a first air chamber 101, a first air inlet and outlet 102 connected with the first air chamber 101 is formed in one side of the top plate 1, two rows of rubber 4 are arranged at the top of the base 2, the top of the rubber 4 is connected with the cavity 3, a second air chamber 301 is arranged inside the cavity 3, an air hole 302 connected with the second air chamber 301 is formed in the top of the cavity 3, a second air inlet and outlet 303 connected with the second air chamber 301 is formed in one side of the cavity 3, a support fitting 8 is connected to the outer wall of the cavity 3, and a horizontal valve 6 and a support valve 7 are installed on the support fitting 8.
The top plate 1 and the base 2 are both made of stainless steel plates into rectangular structures.
The rubber 4 is a laminated rubber.
The number of each row of the rubber 4 is three.
The horizontal valve 6 comprises an air inlet A601 and an air outlet A602, the top of the horizontal valve 6 is also connected with a position detection device 603, and the horizontal valve 6 is connected with the first air inlet and outlet 102.
The support valve 7 includes an air inlet B701 and an air outlet B702, and the support valve 7 is connected to the second air inlet/outlet 303.
When the device works, a precision instrument is arranged on the top plate 1, air enters and exits from the air inlet B701 and the air outlet B702 of the support valve 7 in a vertical direction to adjust the height of the platform through pressure adjustment, the levelness of the platform is detected through the position detection device 603 in a horizontal direction, and the air enters and exits from the air inlet A601 and the air outlet A602 of the horizontal valve 6 to adjust the levelness of the platform; vertical micro-vibration prevention is achieved through the first air chamber 101 and the second air chamber 301 in the vertical direction, vertical anti-vibration capability of lowest 1.5Hz low-frequency vibration can be achieved, micro-vibration prevention is achieved horizontally through the parallel rubber 4, and horizontal anti-vibration capability of lowest 1.5Hz low-frequency vibration can be achieved.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The utility model provides a platform that shakes a little is prevented to air supporting formula that can automatically regulated, includes roof, base and cavity, its characterized in that, the roof below is connected with the diaphragm, first air chamber is enclosed into with the roof to the diaphragm, first air inlet and outlet of being connected with first air chamber is seted up to roof one side, the rubber of two rows side by side is installed at the base top, the rubber top is connected with the cavity, the inside second air chamber that is of cavity, the gas pocket of being connected with the second air chamber is seted up at the cavity top, the second air inlet and outlet of being connected with the second air chamber is seted up to cavity one side, cavity outer wall connection has the support accessory, install horizontal valve and support valve on the support accessory.
2. The self-adjusting air-floating micro-vibration prevention platform as claimed in claim 1, wherein the top plate and the base are made of stainless steel plates into a rectangular structure.
3. The self-adjusting air-floating microvibration prevention platform of claim 1, wherein the rubber is a laminated rubber.
4. The self-adjusting air-floating microvibration prevention platform of claim 1, wherein the number of each row of rubber is three.
5. The automatically adjustable air-floating micro-vibration prevention platform as claimed in claim 1, wherein the level valve comprises an air inlet A and an air outlet A, a position detection device is further connected to the top of the level valve, and the level valve is connected to the first air inlet and outlet.
6. The self-adjusting air-floating micro-vibration prevention platform as claimed in claim 1, wherein the support valve comprises an air inlet B and an air outlet B, and the support valve is connected to the second air inlet/outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221072998.2U CN217207488U (en) | 2022-05-07 | 2022-05-07 | Air-floating micro-vibration prevention platform capable of being automatically adjusted |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221072998.2U CN217207488U (en) | 2022-05-07 | 2022-05-07 | Air-floating micro-vibration prevention platform capable of being automatically adjusted |
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| Publication Number | Publication Date |
|---|---|
| CN217207488U true CN217207488U (en) | 2022-08-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221072998.2U Active CN217207488U (en) | 2022-05-07 | 2022-05-07 | Air-floating micro-vibration prevention platform capable of being automatically adjusted |
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| CN (1) | CN217207488U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116292740A (en) * | 2023-03-24 | 2023-06-23 | 大连地拓电子工程技术有限公司 | Quasi-zero rigidity three-degree-of-freedom active anti-micro-vibration platform |
-
2022
- 2022-05-07 CN CN202221072998.2U patent/CN217207488U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116292740A (en) * | 2023-03-24 | 2023-06-23 | 大连地拓电子工程技术有限公司 | Quasi-zero rigidity three-degree-of-freedom active anti-micro-vibration platform |
| CN116292740B (en) * | 2023-03-24 | 2023-09-05 | 大连地拓电子工程技术有限公司 | Quasi-zero rigidity three-degree-of-freedom active anti-micro-vibration platform |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230310 Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Electronic Engineering Technology Co.,Ltd. Address before: 116000 16 Zhenxing street, Haiwan Industrial Zone, Pulandian District, Dalian, Liaoning Province Patentee before: DALIAN DEETOP HEAVY INDUSTRY Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |