CN217168578U - Manipulator test platform - Google Patents
Manipulator test platform Download PDFInfo
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- CN217168578U CN217168578U CN202220908385.1U CN202220908385U CN217168578U CN 217168578 U CN217168578 U CN 217168578U CN 202220908385 U CN202220908385 U CN 202220908385U CN 217168578 U CN217168578 U CN 217168578U
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- manipulator
- control module
- test
- electrically connected
- cabinet body
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Abstract
The utility model belongs to semiconductor handling equipment field, concretely relates to manipulator test platform, this manipulator test platform includes: the test device comprises a cabinet body, a test device and a test device, wherein a plurality of test stations are arranged on the cabinet body; a control module; wherein the test station comprises: the moving device is electrically connected with the control module, is used for installing the manipulator to be tested and is used for driving the manipulator gripping the heavy object to carry the heavy object between the first placing area and the second placing area in a reciprocating manner; and the counting module is electrically connected with the control module and used for counting the carrying times of the manipulator. The utility model discloses a manipulator test platform's cabinet body is provided with a plurality of test station, and each test station is including the mobile device that is used for installing the manipulator that awaits measuring, can be used for the drive to grab the manipulator that has the heavy object and place the district and place reciprocal transport between the district at first place district and second, and the count module links to each other with the control module electrical property, can be used for counting the transport number of times of manipulator to in carry out fatigue test to the manipulator.
Description
Technical Field
The utility model belongs to semiconductor handling equipment field, concretely relates to manipulator test platform.
Background
In the process of global shift of semiconductor industry to China, localization of semiconductor devices has important strategic significance. With the continuous support of national policies and capital, the demand of domestic equipment is increased year by year, and the manipulator is used as the main component of the machine and has higher and higher requirements on the stability of the machine, so that the manipulator needs to be subjected to fatigue testing before use, thereby improving the stability of the machine and preventing wafers from falling and cracking in the process of carrying.
Therefore, in order to perform a fatigue test on the robot before use, it is necessary to design a robot testing platform.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a manipulator snatchs stability testing arrangement to carry out fatigue test before using to the manipulator.
In order to solve the technical problem, the utility model provides a manipulator test platform, include: the test device comprises a cabinet body, a test device and a test device, wherein a plurality of test stations are arranged on the cabinet body; a control module; wherein the test station comprises: the moving device is electrically connected with the control module, is used for installing the manipulator to be tested and is used for driving the manipulator gripping the heavy object to carry the heavy object between the first placing area and the second placing area in a reciprocating manner; and the counting module is electrically connected with the control module and used for counting the carrying times of the manipulator.
Further, the mobile device includes: the mounting rack is used for mounting the manipulator to be tested; the horizontal driving mechanism is electrically connected with the control module and used for driving the mounting frame to move horizontally; and the lifting mechanism is arranged on the mounting frame, is electrically connected with the control module and is used for driving the manipulator to be tested to lift.
Further, the horizontal driving mechanism includes: the transverse guide rail is arranged on the side face of the cabinet body, and the mounting rack is in sliding fit with the transverse guide rail; a gear track arranged in parallel with the transverse guide rail; and the horizontal driver is installed on the installation frame, is electrically connected with the control module, and is matched with the gear track through a gear.
Further, the lifting mechanism includes: the upper end of the lifting sleeve is used for mounting a manipulator to be tested, and the wall of the lifting sleeve is connected with the mounting frame in a sliding manner; the screw rod is in threaded fit with the lifting sleeve; and the lifting driver is electrically connected with the control module and used for driving the screw rod to rotate so as to drive the lifting sleeve to lift.
Further, a vertical guide rail is arranged on the mounting rack; the outer wall of the lifting sleeve is provided with a mounting seat and is in sliding connection with the vertical guide rail;
furthermore, the manipulator test platform also comprises a human-computer interaction module electrically connected with the control module.
Further, the manipulator test platform further comprises an alarm module electrically connected with the control module.
Further, a movable pulley is arranged below the cabinet body; the cabinet body below sets up rotatory flexible spike.
Further, the weight is a wafer carrier.
The beneficial effects of the utility model are that, the utility model discloses a manipulator test platform's cabinet body is provided with a plurality of test station, and each test station is including the mobile device that is used for installing the manipulator that awaits measuring, can be used for the drive to grab the manipulator that has the heavy object and place the district at the first reciprocal transport between the district of placing and the second, and counting module links to each other with the control module electrical property, can be used for counting the transport number of times of manipulator to in carry out fatigue test to the manipulator.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and drawings.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 and 2 are perspective views of a manipulator test platform according to the present invention;
fig. 3 is a perspective view of the test station of the present invention;
fig. 4 is a perspective view of the mobile device of the present invention;
figure 5 is a rear view of the test station of the present invention.
In the figure:
the device comprises a cabinet body 1, a test station 11, a manipulator 12, a movable pulley 13 and a rotary telescopic supporting leg 14;
the device comprises a moving device 2, a mounting frame 21, a vertical guide rail 211, a lifting mechanism 22, a lifting sleeve 221, a screw rod 222, a lifting driver 223, a horizontal driving mechanism 23, a transverse guide rail 231, a gear track 232 and a horizontal driver 233;
and a human-computer interaction module 3.
Detailed Description
To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Examples
As shown in fig. 1 and 2, the present embodiment provides a manipulator test platform, including: a cabinet 1 comprising a plurality of test stations 11; a control module; wherein the test station 11 comprises: the moving device 2 is electrically connected with the control module, is used for installing the manipulator 12 to be tested, and is used for driving the manipulator 12 gripping the heavy object to carry back and forth between the first placing area and the second placing area; and the counting module is electrically connected with the control module and used for counting the carrying times of the mechanical hand 12.
In this embodiment, the control module may be, but is not limited to, a PLC, and the counting module may be an infrared counter, a radar counter, a pressure counter, or the like; the cabinet body of manipulator test platform is provided with a plurality of test station 11, and each test station 11 is including the mobile device 2 that is used for installing the manipulator 12 that awaits measuring, can be used for the drive to grab manipulator 12 that has the heavy object and place the district at first and place the district with the second between reciprocal transport, and the count module links to each other with the control module electrical property, can be used for counting the transport number of times of manipulator 12 to in order to carry out fatigue test to manipulator 12.
As shown in fig. 3, in the present embodiment, the mobile device 2 includes: the mounting rack 21 is used for mounting the manipulator 12 to be tested; the horizontal driving mechanism 23 is electrically connected with the control module and is used for driving the mounting frame 21 to horizontally move; and the lifting mechanism 22 is installed on the installation frame 21, is electrically connected with the control module, and is used for driving the manipulator 12 to be tested to lift.
In this embodiment, the manipulator 12 to be tested is mounted on the mounting frame 21, and the control module controls the horizontal driving mechanism 23 to horizontally move the mounting frame 21 and controls the lifting mechanism 22 to lift so as to drive the manipulator 12 to lift and horizontally move on the testing station 11; the manipulator 12 can also be electrically connected with the control module, so that the control module controls the manipulator 12 to grab the heavy object.
As shown in fig. 4, in the present embodiment, the horizontal driving mechanism 23 includes: the transverse guide rail 231 is arranged on the side surface of the cabinet body 1, and the mounting frame 21 is in sliding fit with the transverse guide rail 231; a gear rail 232 arranged in parallel with the lateral rail 231; and the horizontal driver 233 is installed on the mounting frame 21, is electrically connected with the control module, and is matched with the gear track 232 through a gear.
In this embodiment, the control module may control the horizontal driver 233 to drive the mounting frame 21 to horizontally slide on the transverse guide rail 231 through the gear transmission matched with the gear rail 232, so as to drive the robot arm 12 to horizontally move.
In the present embodiment, the lifting mechanism 22 includes: the upper end of the lifting sleeve 221 is used for mounting the manipulator 12 to be tested, and the cylinder wall of the lifting sleeve is connected with the mounting frame 21 in a sliding manner; a screw rod 222 in threaded engagement with the lifting sleeve 221; and the lifting driver 223 is electrically connected with the control module and is used for driving the screw rod 222 to rotate so as to drive the lifting sleeve 221 to lift.
In a preferred embodiment of this embodiment, the control module can control the lifting driver 223 to rotate the lead screw 222 synchronously through the timing belt, so as to drive the lifting sleeve 221 to perform a lifting motion, so as to implement a lifting motion of the manipulator 12.
In the present embodiment, the horizontal driver 233 and the elevation driver 223 may be, but not limited to, motors.
In this embodiment, the mounting frame 21 is provided with a vertical guide rail 211; the outer wall of the lifting sleeve 221 is provided with a mounting seat and is in sliding connection with the vertical guide rail 211;
in this embodiment, during the lifting movement of the lifting sleeve 221, the mounting seat slides on the vertical guide rail 211, so as to ensure the precision of the lifting movement.
In this embodiment, the manipulator test platform further includes a human-computer interaction module 3 electrically connected to the control module.
Preferably, the human-computer interaction module 3 may be a touch screen, and is configured to issue a test command to the manipulator test platform and feed back test information.
In this embodiment, the manipulator test platform further comprises an alarm module electrically connected with the control module.
In a preferred implementation manner of this embodiment, the alarm module can give an alarm in time when detecting abnormal information, for example, when detecting that the manipulator 12 catches an abnormality in the test process, send an alarm sound, or transmit an alarm signal to a mobile terminal, such as a mobile phone; as another example, when the test is finished, a prompt message or a prompt tone is sent.
As shown in fig. 5, in the present embodiment, a moving pulley 13 is disposed below the cabinet 1; a rotary telescopic supporting leg 14 is arranged below the cabinet body 1.
In this embodiment, the movable pulley 13 facilitates the movement of the manipulator test platform, and the rotary telescopic supporting foot 14 is suitable for screwing out the supporting foot when the manipulator test platform needs to be fixed, and retracting the supporting foot when the manipulator test platform needs to be moved; so as to pack up when there is no fatigue test requirement, reduce the occupation factory building space.
In this embodiment, the weight is a wafer carrier.
In summary, the manipulator test platform provided in this embodiment can implement fatigue test on the manipulator 12 before installation, so as to ensure the grabbing stability of the manipulator 12 in the actual working process; when abnormal information is detected, alarm feedback can be timely carried out; the movable pulley 13 and the rotary telescopic supporting leg 14 ensure the mobility of the manipulator test platform, and when no fatigue test is required, the manipulator test platform is convenient to pack up, and the occupied plant space is reduced.
The components selected for use in the present application (components not illustrated for specific structures) are all common standard components or components known to those skilled in the art, and the structure and principle thereof can be known to those skilled in the art through technical manuals or through routine experimentation.
In the description of the embodiments of the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other ways. The above-described embodiments of the apparatus are merely illustrative, and for example, the division of the units is merely a logical division, and there may be other divisions in actual implementation, and for example, a plurality of units or mechanisms may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection of devices or units through some communication interfaces, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one position, or may be distributed on multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit.
In light of the foregoing, it will be apparent to those skilled in the art from this disclosure that various changes and modifications can be made without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (9)
1. A manipulator test platform, comprising:
the test cabinet comprises a cabinet body (1) provided with a plurality of test stations (11);
a control module; wherein
The test station (11) comprises:
the moving device (2) is electrically connected with the control module, is used for installing the manipulator (12) to be tested and is used for driving the manipulator (12) gripping the heavy object to carry in a reciprocating manner between the first placing area and the second placing area; and
and the counting module is electrically connected with the control module and used for counting the carrying times of the manipulator (12).
2. The robot testing platform of claim 1,
the mobile device (2) comprises:
the mounting rack (21) is used for mounting the manipulator (12) to be tested;
the horizontal driving mechanism (23) is electrically connected with the control module and is used for driving the mounting rack (21) to horizontally move;
and the lifting mechanism (22) is arranged on the mounting rack (21), is electrically connected with the control module and is used for driving the mechanical arm (12) to be tested to lift.
3. The robot testing platform of claim 2,
the horizontal drive mechanism (23) includes:
the transverse guide rail (231) is arranged on the side surface of the cabinet body (1), and the mounting frame (21) is in sliding fit with the transverse guide rail (231);
a gear rail (232) arranged in parallel with the transverse rail (231);
and the horizontal driver (233) is arranged on the mounting frame (21), is electrically connected with the control module and is matched with the gear track (232) through a gear.
4. The robot testing platform of claim 2,
the lifting mechanism (22) comprises:
the upper end of the lifting sleeve (221) is used for mounting the manipulator (12) to be tested, and the cylinder wall of the lifting sleeve is connected with the mounting rack (21) in a sliding manner;
a screw rod (222) in threaded engagement with the lifting sleeve (221);
and the lifting driver (223) is electrically connected with the control module and is used for driving the screw rod (222) to rotate so as to drive the lifting sleeve (221) to lift.
5. The robot testing platform of claim 4,
a vertical guide rail (211) is arranged on the mounting rack (21);
the outer wall of the lifting sleeve (221) is provided with a mounting seat and is in sliding connection with the vertical guide rail (211).
6. The robot testing platform of claim 1,
the manipulator test platform further comprises a man-machine interaction module (3) electrically connected with the control module.
7. The robot testing platform of claim 1,
the manipulator test platform further comprises an alarm module which is electrically connected with the control module.
8. The robot testing platform of claim 1,
a movable pulley (13) is arranged below the cabinet body (1);
the lower part of the cabinet body (1) is provided with a rotary telescopic supporting leg (14).
9. The robot testing platform of claim 1,
the weight is a wafer carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220908385.1U CN217168578U (en) | 2022-04-19 | 2022-04-19 | Manipulator test platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220908385.1U CN217168578U (en) | 2022-04-19 | 2022-04-19 | Manipulator test platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217168578U true CN217168578U (en) | 2022-08-12 |
Family
ID=82708699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220908385.1U Active CN217168578U (en) | 2022-04-19 | 2022-04-19 | Manipulator test platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217168578U (en) |
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2022
- 2022-04-19 CN CN202220908385.1U patent/CN217168578U/en active Active
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