CN217139867U - Ethyl orthosilicate tail gas recovery system - Google Patents
Ethyl orthosilicate tail gas recovery system Download PDFInfo
- Publication number
- CN217139867U CN217139867U CN202221098573.9U CN202221098573U CN217139867U CN 217139867 U CN217139867 U CN 217139867U CN 202221098573 U CN202221098573 U CN 202221098573U CN 217139867 U CN217139867 U CN 217139867U
- Authority
- CN
- China
- Prior art keywords
- communicated
- heat exchanger
- inlet
- shallow
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
Landscapes
- Separation By Low-Temperature Treatments (AREA)
Abstract
The utility model discloses an ethyl orthosilicate tail gas recovery system, including the condensation heat exchanger, precooling jar, active carbon adsorption jar, exhaust chimney, condensate tank, the pipeline of delivering outward that communicate with each other in proper order, ethyl orthosilicate tail gas source with the gaseous phase import of condensation heat exchanger is linked together, the gaseous phase export of condensation heat exchanger is linked together with the gaseous phase import in the middle part of the precooling jar, the gaseous phase export in the precooling jar is linked together with the gaseous phase import of active carbon adsorption jar, the gaseous phase export of active carbon adsorption jar is linked together with the gaseous phase import of exhaust chimney; and a condensate outlet of the condensing heat exchanger is communicated with a condensate inlet of the condensate tank, a condensate outlet of the precooling tank is communicated with a condensate inlet of the condensate tank, and a condensate outlet of the condensate tank is communicated with the delivery pipeline. The utility model discloses retrieving high concentration ethyl orthosilicate mixed tail gas through condensation back most, a small amount of materials of not condensing are through adsorbing the processing, and all the other non-condensable gases such as nitrogen class pass through the high altitude and discharge, the effectual polluted environment that prevents.
Description
Technical Field
The utility model relates to a chemistry tail gas recovery technical field has especially related to an ethyl orthosilicate tail gas recovery system.
Background
The method for forming the silicon dioxide oxide layer in the semiconductor process mainly includes thermal oxidation (for semiconductor materials capable of forming self-stabilized oxide layers), Low Pressure Chemical Vapor Deposition (LPCVD), Plasma Enhanced Chemical Vapor Deposition (PECVD), and Atmospheric Pressure Chemical Vapor Deposition (APCVD), etc., wherein most of the semiconductor processes are rarely used at present because the flow rate required by the Atmospheric Pressure Chemical Vapor Deposition (APCVD) is large and the process generates relatively more particles.
When Tetraethoxysilane (TEOS) is used for low-pressure chemical vapor deposition (LPCVD), Tetraethoxysilane (TEOS) is evaporated from liquid to gas, and is decomposed at 700-750 ℃ and 300mTOR pressure to deposit a silicon dioxide film on the surface of a silicon wafer, the deposition rate of the silicon dioxide film can reach 50 a/min, the thickness uniformity of the film is less than 3%, and the excellent process characteristics and the obvious characteristics of the use safety of the Tetraethoxysilane (TEOS) gradually become the mainstream process for depositing the silicon dioxide film.
The deposition of silicon dioxide on the surface of the SiC wafer is realized by applying the tetraethyl orthosilicate (TEOS) low-pressure chemical vapor deposition (LPCVD) technology, and the defects that the SiC oxide layer is too thin and the silicon dioxide layer is too loose by Plasma Enhanced Chemical Vapor Deposition (PECVD) can be overcome to a certain extent. By adopting the reasonable application of the tetraethyl orthosilicate (TEOS) low-pressure chemical vapor deposition (LPCVD) technology and the high-temperature oxidation technology, the compactness of an oxide layer medium and the adhesive capacity with a SiC wafer are ensured, the electrical property and the yield of a device are improved, and the defect of long-time high-temperature oxidation of an oxide layer with a certain thickness is avoided. After the technology is adopted, the direct current yield of the SiC chip is improved, the comparative slide result of the microwave power device shows that the microwave performance is also obviously improved, the power gain is improved by about 1.5dB compared with the original technology, and the power additional efficiency is improved by nearly 10%.
At present, when a tank area and a steel cylinder of a 9N electronic grade tetraethyl orthosilicate (TEOS) production workshop are cleaned, a large amount of organic substances such as tetraethyl orthosilicate, methanol, diethyl ether and the like are volatilized to form high-concentration tetraethyl orthosilicate mixed tail gas, and the tail gas needs to be treated in order to prevent environmental pollution.
Disclosure of Invention
Not enough to prior art exists, the utility model aims at providing an ethyl orthosilicate tail gas recovery system just provides, through condensation, absorption to the tail gas that produces in the production process, avoids the empty loss of material, influences ecological environment, and the tail gas collection rate is 100% simultaneously, and it is 99% to get rid of efficiency.
In order to achieve the above purpose, the utility model adopts the technical scheme that: a tail gas recovery system of ethyl orthosilicate comprises a condensation heat exchanger, a pre-cooling tank, an active carbon adsorption tank, an exhaust chimney, a condensate tank and an external delivery pipeline which are sequentially communicated, wherein an ethyl orthosilicate tail gas source is communicated with a gas phase inlet of the condensation heat exchanger, a gas phase outlet of the condensation heat exchanger is communicated with a gas phase inlet in the middle of the pre-cooling tank, a gas phase outlet in the pre-cooling tank is communicated with a gas phase inlet of the active carbon adsorption tank, and a gas phase outlet of the active carbon adsorption tank is communicated with a gas phase inlet of the exhaust chimney; and a condensate outlet of the condensing heat exchanger is communicated with a condensate inlet of the condensate tank, a condensate outlet of the precooling tank is communicated with a condensate inlet of the condensate tank, and a condensate outlet of the condensate tank is communicated with the delivery pipeline.
As a preferred scheme, the ethyl orthosilicate tail gas source comprises a steel cylinder cleaning tail gas pipeline and a raw material tank area tail gas pipeline, the steel cylinder cleaning tail gas pipeline is communicated with a gas phase inlet at the lower part of the pre-cooling tank, and a gas phase outlet at the top of the pre-cooling tank is communicated with a gas phase inlet of the condensing heat exchanger; and the tail gas pipeline of the raw material tank area is communicated with a gas-phase inlet of the condensing heat exchanger.
As a preferred scheme, the condensing heat exchanger includes shallow cold district, deep cold district, shallow cold pipeline in the shallow cold district communicates has shallow cold refrigeration unit, deep cold pipeline in the deep cold district is linked together has deep cold refrigeration unit.
As a preferable scheme, the shallow cooling refrigeration unit comprises a shallow cooling refrigeration machine, a shallow cooling oil separator, a shallow cooling finned heat exchanger, a shallow cooling liquid storage device, a shallow cooling filter and a shallow cooling liquid-liquid separator, a gas phase outlet of the shallow cooling refrigerator is communicated with a gas phase inlet at the upper part of the shallow cooling oil separator, a gas phase outlet at the top of the shallow cooling oil separator is communicated with an inlet of the shallow cooling fin heat exchanger, an oil outlet at the bottom of the shallow cooling oil separator is communicated with an oil inlet of the shallow cooling refrigerator, the outlet of the shallow cooling finned heat exchanger is communicated with the inlet of the shallow cooling liquid storage device, the outlet of the shallow cooling liquid storage device is communicated with the inlet of the shallow cooling pipeline, the outlet of the shallow cold pipeline is communicated with the inlet of the shallow cold filter, the outlet of the shallow cold filter is communicated with the inlet of the shallow cold gas-liquid separator, and the gas phase outlet of the shallow cold gas-liquid separator is communicated with the gas phase inlet of the shallow cold refrigerator.
As a preferable scheme, the deep cooling refrigeration unit comprises a deep cooling refrigerator, a deep cooling oil separator, a deep cooling fin heat exchanger, a deep cooling liquid storage device, a deep cooling filter and a deep cooling liquid separator, the gas phase outlet of the cryogenic refrigerator is communicated with the gas phase inlet at the upper part of the cryogenic oil separator, the gas phase outlet at the top part of the cryogenic oil separator is communicated with the inlet of the cryogenic fin heat exchanger, the oil outlet at the bottom part of the cryogenic oil separator is communicated with the oil inlet of the cryogenic refrigerator, the outlet of the deep cooling fin heat exchanger is communicated with the inlet of the deep cooling liquid storage device, the outlet of the deep cooling liquid storage device is communicated with the inlet of the deep cooling pipeline, the export of cryrogenic pipeline is linked together with the import of cryrogenic filter, the export of cryrogenic filter is linked together with the import of deep cold gas-liquid separator, the gaseous phase export of deep cold gas-liquid separator is linked together with the gaseous phase import of cryrogenic refrigerator.
As an optimal scheme, the cryrogenic secondary heat exchanger concatenates between the export of cryrogenic reservoir and the import of cryrogenic pipeline, the import K1 of cryrogenic secondary heat exchanger is linked together with the export of cryrogenic reservoir, and the export K4 of cryrogenic secondary heat exchanger is linked together with the import of cryrogenic pipeline, and the export K4 of cryrogenic secondary heat exchanger is linked together with the import K3 of cryrogenic secondary heat exchanger, and the export K2 of cryrogenic secondary heat exchanger is linked together with the export of cryrogenic pipeline.
As a preferred scheme, a gas phase outlet at the top of the activated carbon adsorption tank is communicated with a nitrogen access pipeline, a desorption outlet at the lower part of the activated carbon adsorption tank is communicated with a desorption inlet of the condensate tank, and a desorption outlet of the condensate tank is communicated with a gas phase inlet of the condensing heat exchanger.
As a preferred scheme, a gas phase outlet at the top of the activated carbon adsorption tank is communicated with an instrument wind access pipeline, and the instrument wind access pipeline is connected with a nitrogen gas access pipeline in parallel.
As a preferred scheme, a spray pipe is arranged in the activated carbon adsorption tank, and a liquid phase inlet of the spray pipe is communicated with a fire-fighting water pipeline.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses retrieving high concentration ethyl orthosilicate mixed tail gas through condensation back most, a small amount of materials of not condensing are through adsorbing the processing, and all the other non-condensable gases such as nitrogen class pass through the high altitude and discharge, the effectual polluted environment that prevents.
Drawings
Fig. 1 is a schematic structural diagram of the present invention;
fig. 2 is a partially enlarged view of a portion a in fig. 1.
Wherein the figures identify the list: the system comprises a condensation heat exchanger 1, a precooling tank 2, an activated carbon adsorption tank 3, an exhaust chimney 4, a condensate tank 5, an external delivery pipeline 6, an ethyl orthosilicate tail gas source 7, a tail gas fan 8, a condensate delivery pump 9, a steel cylinder cleaning tail gas pipeline 10, a raw material tank area tail gas pipeline 11, a PLC control cabinet 12, a 380V power supply 13, a shallow cooling area 14, a deep cooling area 15, a shallow cooling pipeline 16, a shallow cooling unit 17, a deep cooling pipeline 18, a cryogenic refrigerating unit 19, a shallow cooling refrigerating unit 20, a shallow cooling oil separator 21, a shallow cooling fin heat exchanger 22, a shallow cooling liquid reservoir 23, a shallow cooling filter 24, a shallow cooling liquid separator 25, a hot gas bypass valve 26, a hot gas flushing frost valve 27, a high-low pressure guiding pressure gauge 28, a shallow cooling regulating valve 29, a cryogenic refrigerator 30, a cryogenic oil separator 31, a cryogenic fin heat exchanger 32, a cryogenic liquid reservoir 33, a cryogenic filter 34, a deep cooling liquid separator 35, a cryogenic secondary heat exchanger 36, a deep cooling water cooling heat exchanger, a deep cooling heat exchanger 20, a deep cooling liquid reservoir 16, a deep cooling heat exchanger, a deep cooling unit, a shallow cooling unit 16, a shallow cooling unit 17, a deep cooling unit, a deep cooling unit, a, The system comprises a cryogenic regulating valve 37, a cooling fan 38, a nitrogen gas access pipeline 39, a desorption vacuum pump 40, an instrument wind access pipeline 41, a spray pipe 42, a fire-fighting water pipeline 43, a manual ball valve 44, a pneumatic switch valve 45 and a connector 46.
Detailed Description
The invention will be further described with reference to specific embodiments. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
Example (b):
as shown in fig. 1, an ethyl orthosilicate tail gas recovery system comprises a condensation heat exchanger 1, a pre-cooling tank 2, an active carbon adsorption tank 3, an exhaust chimney 4, a condensate tank 5 and an external delivery pipeline 6 which are sequentially communicated, wherein an ethyl orthosilicate tail gas source 7 is communicated with a gas phase inlet of the condensation heat exchanger 1, a gas phase outlet of the condensation heat exchanger 1 is communicated with a gas phase inlet in the middle of the pre-cooling tank 2, a gas phase outlet in the pre-cooling tank 2 is communicated with a gas phase inlet of the active carbon adsorption tank 3, and a gas phase outlet of the active carbon adsorption tank 3 is communicated with a gas phase inlet of the exhaust chimney 4; the condensate outlet of the condensing heat exchanger 1 is communicated with the condensate inlet of the condensate tank 5, the condensate outlet of the precooling tank 2 is communicated with the condensate inlet of the condensate tank 5, and the condensate outlet of the condensate tank 5 is communicated with the outward conveying pipeline 6.
Specifically, a tail gas fan 8 is connected in series between the pre-cooling tank 2 and the activated carbon adsorption tank 3. More specifically, a condensate conveying pump 9 is connected in series between a condensate outlet of the condensate tank 5 and the outward conveying pipeline 6.
Preferably, the ethyl orthosilicate tail gas source 7 comprises a steel cylinder cleaning tail gas pipeline 10 and a raw material tank area tail gas pipeline 11, the steel cylinder cleaning tail gas pipeline 10 is communicated with a gas phase inlet at the lower part of the pre-cooling tank 2, and a gas phase outlet at the top of the pre-cooling tank 2 is communicated with a gas phase inlet of the condensation heat exchanger 1; and the tail gas pipeline 11 of the raw material tank area is communicated with a gas-phase inlet of the condensing heat exchanger 1.
Specifically, the utility model discloses a tail gas recovery system is external to have gas chromatograph (not shown in the figure), still includes PLC switch board 12, controls gas chromatograph through PLC switch board 12 and analyzes out the tail gas flow data that ethyl orthosilicate tail gas source 7 relevant component parameter and flowmeter feedback and carry out the temperature regulation and control for tail gas practices thrift the energy consumption when obtaining effective phase transition liquefaction.
More specifically, when the gas chromatograph analyzes relevant component parameters of the tetraethylorthosilicate mixed tail gas in the steel cylinder cleaning tail gas pipeline 10 and tail gas flow data fed back by the flowmeter, when the concentration of the tail gas obtained by analysis meets various emission indexes, the steel cylinder cleaning tail gas pipeline 10 is directly connected with the exhaust chimney 4 and is discharged from the exhaust chimney 4 at high altitude; when the tail gas concentration obtained by analysis does not meet various emission indexes, the steel cylinder cleaning tail gas pipeline 10 conveys tail gas to be subjected to cooling treatment on the tail gas by stages through the pre-cooling tank 2 and the condensation heat exchanger 1, so that most of the tail gas is liquefied by phase change, condensate returns to the condensate tank 5, condensed residual gas enters the activated carbon adsorption tank 3 through the pre-cooling tank 2 again, residual tail gas in the condensed residual gas is intercepted, and the treated tail gas is discharged by the exhaust chimney 4.
Further, in the embodiment, the gas chromatograph adopts Huaai 9560, the PLC control cabinet 12 adopts Siemens, the exhaust flue pipe 4 is up to 15m, and the PLC control cabinet 12 is connected with a 380V power supply 13.
Preferably, the condensation heat exchanger 1 comprises a shallow cooling area 14 and a deep cooling area 15, a shallow cooling pipeline 16 in the shallow cooling area 14 is communicated with a shallow cooling unit 17, and a deep cooling pipeline 18 in the deep cooling area 15 is communicated with a deep cooling unit 19.
Furthermore, a proper condensation temperature is cut according to refrigeration power consumption, and the coexistence of condensation efficiency and economic operation is achieved.
More preferably, as shown in fig. 2, the shallow cooling unit 17 includes a shallow cooling refrigerator 20, a shallow cooling oil separator 21, a shallow cooling fin heat exchanger 22, a shallow cooling reservoir 23, a shallow cooling filter 24, and a shallow cooling gas-liquid separator 25, a gas phase outlet of the shallow cooling refrigerator 20 is communicated with a gas phase inlet at the upper part of the shallow cooling oil separator 21, a gas phase outlet at the top part of the shallow cooling oil separator 21 is communicated with an inlet of the shallow cooling fin heat exchanger 22, an oil outlet at the bottom part of the shallow cooling oil separator 21 is communicated with an oil inlet of the shallow cooling refrigerator 20, an outlet of the shallow cooling fin heat exchanger 22 is communicated with an inlet of the shallow cooling reservoir 23, an outlet of the shallow cooling reservoir 23 is communicated with an inlet of the shallow cooling pipeline 16, an outlet of the shallow cooling pipeline 16 is communicated with an inlet of the shallow cooling filter 24, an outlet of the shallow cooling filter 24 is communicated with an inlet of the shallow cooling liquid-liquid separator 25, and the gas phase outlet of the shallow cold gas-liquid separator 25 is communicated with the gas phase inlet of the shallow cold refrigerator 20.
Specifically, a gas phase outlet at the top of the shallow cold oil separator 21 is communicated with an inlet of the shallow cold pipeline 16, a hot gas bypass valve 26 and a hot gas defrosting valve 27 are connected between the gas phase outlet at the top of the shallow cold oil separator 21 and the inlet of the shallow cold pipeline 16 in series, and the hot gas bypass valve 26 and the hot gas defrosting valve 27 are arranged in parallel. Further, a hot gas bypass valve 26 is provided as a means of energy regulation, hot gas bypass, capable of bypassing high temperature gaseous refrigerant at the high pressure end to the low pressure end of the system; thereby ensuring that the system always operates under a given minimum return air pressure; the hot gas defrosting valve 27 is arranged to keep the temperature of the refrigerant to be higher when the refrigerant enters the condensing heat exchanger 1, so that the refrigerant is used for heat exchange and defrosting, and the refrigerant returns to the shallow cooling refrigerator 20 after defrosting.
More specifically, the gas phase outlet at the top of the shallow cold oil separator 21 is communicated with the outlet of the shallow cold pipeline 16, and a high-low pressure gauge 28 is connected in series between the gas phase outlet at the top of the shallow cold oil separator 21 and the outlet of the shallow cold pipeline 16. Further, a high-low pressure lead pressure gauge 28 is used, H represents high pressure, and L represents low pressure.
More specifically, a shallow cold regulating valve 29 is connected in series between the outlet of the shallow cold reservoir 23 and the inlet of the shallow cold pipeline 16, and is used for shallow cold temperature control.
More preferably, the cryogenic refrigeration unit 19 comprises a cryogenic refrigerator 30, a cryogenic oil separator 31, a cryogenic fin heat exchanger 32, a cryogenic reservoir 33, a cryogenic filter 34, a cryogenic liquid separator 35, the gas phase outlet of the cryogenic refrigerator 30 is communicated with the gas phase inlet at the upper part of the cryogenic oil separator 31, the gas phase outlet at the top part of the cryogenic oil separator 31 is communicated with the inlet of the cryogenic fin heat exchanger 32, the oil outlet at the bottom part of the cryogenic oil separator 31 is communicated with the oil inlet of the cryogenic refrigerator 30, the outlet of the deep cooling fin heat exchanger 32 is communicated with the inlet of the deep cooling liquid storage device 33, the outlet of the deep cooling liquid storage device 33 is communicated with the inlet of the deep cooling pipeline 18, the outlet of the cryogenic pipeline 18 is communicated with the inlet of a cryogenic filter 34, the outlet of the cryogenic filter 34 is communicated with the inlet of a cryogenic liquid separator 35, the gas phase outlet of the deep cold gas-liquid separator 35 is communicated with the gas phase inlet of the deep cooling refrigerator 30.
More specifically, the cryrogenic secondary heat exchanger 36 concatenates between the export of cryrogenic reservoir 33 and the import of cryrogenic pipeline 18, the import K1 of cryrogenic secondary heat exchanger 36 is linked together with the export of cryrogenic reservoir 33, and the export K4 of cryrogenic secondary heat exchanger 36 is linked together with the import of cryrogenic pipeline 18, and the export K4 of cryrogenic secondary heat exchanger 36 is linked together with the import K3 of cryrogenic secondary heat exchanger 36, and the export K2 of cryrogenic secondary heat exchanger 36 is linked together with the export of cryrogenic pipeline 18. Further, a cryogenic regulating valve 37 is connected in series between an outlet K4 of the cryogenic secondary heat exchanger 36 and an inlet K3 of the cryogenic secondary heat exchanger 36 and used for controlling cryogenic temperature.
More specifically, the gas phase outlet at the top of the cryogenic oil separator 31 is communicated with the inlet of the cryogenic filter 34, and the high-low pressure gauge 28 is connected in series between the gas phase outlet at the top of the cryogenic oil separator 31 and the inlet of the cryogenic filter 34. Further, a high-low pressure lead pressure gauge 28 is used, H represents high pressure, and L represents low pressure.
More specifically, the gas phase outlet at the top of the cryogenic oil separator 31 is communicated with the inlet of the cryogenic pipeline 18, and the hot gas defrosting valve 27 is connected in series between the gas phase outlet at the top of the cryogenic oil separator 31 and the inlet of the cryogenic pipeline 18. Further, a hot gas defrosting valve 27 is arranged to keep the temperature of the refrigerant to be higher when the refrigerant enters the condensing heat exchanger 1 for heat exchange and defrosting, and the refrigerant returns to the cryogenic refrigerator 30 after defrosting.
Specifically, in this embodiment, the temperature of the shallow cooling zone 14 reaches-15 ℃, and the temperature of the cryogenic cooling zone 15 reaches-35 ℃, so that the tail gas is cooled by stages, and most of the tail gas is liquefied by phase change.
More specifically, the shallow cooling fin heat exchanger 22 and the deep cooling fin heat exchanger 32 are both provided with a cooling fan 38.
Preferably, a gas phase outlet at the top of the activated carbon adsorption tank 3 is communicated with a nitrogen gas access pipeline 39, a desorption outlet at the lower part of the activated carbon adsorption tank 3 is communicated with a desorption inlet of the condensate tank 5, and a desorption outlet of the condensate tank 5 is communicated with a gas phase inlet of the condensing heat exchanger 1.
More specifically, a desorption vacuum pump 40 is connected in series between a desorption outlet at the lower part of the activated carbon adsorption tank 3 and a desorption inlet of the condensate tank 5.
Furthermore, the activated carbon in the activated carbon adsorption tank 3 can reach a saturated state after being adsorbed for a long time, the adsorption efficiency is reduced or the activated carbon adsorption tank no longer has adsorption capacity, the activated carbon is resolved by introducing nitrogen and purging the activated carbon through pressure swing, the activated carbon is reused, and the desorbed high-concentration organic waste gas returns to the gas phase inlet of the condensation heat exchanger 1 for cyclic treatment. Furthermore, when the equipment in the embodiment needs to be overhauled, the material in the system is replaced by accessing nitrogen.
Preferably, a gas phase outlet at the top of the activated carbon adsorption tank 3 is communicated with an instrument wind access pipeline 41, and the instrument wind access pipeline 41 is connected with the nitrogen gas access pipeline 39 in parallel.
Further, the instrument wind access pipeline 41 is a standby pipeline, and when a nitrogen source of the nitrogen access pipeline 39 is in a problem, the instrument wind is used for accessing compressed pressurized air for emergency.
Preferably, a spray pipe 42 is arranged in the activated carbon adsorption tank 3, and a liquid phase inlet of the spray pipe 42 is communicated with a fire-fighting water pipeline 43.
Further, because the material is inflammable, through connecting fire water pipeline 43, be used for emergent fire extinguishing, wherein the water that fire water pipeline 43 carried sprays in to activated carbon adsorption tank 3 through shower 42, flows through the desorption export of 3 lower parts of activated carbon adsorption tank, and then gets into condensate tank 5 from the desorption import of condensate tank 5, flows to delivering outside pipeline 6 and discharges from the condensate outlet of condensate tank 5 at last.
In the embodiment, the activated carbon adsorption tank 3 adopts a two-way pipeline, and one is used and the other is prepared; the pipeline communicated among all the devices is provided with a manual ball valve 44, a pneumatic switch valve 45 and a connector 46, as shown in fig. 1, which are not described in detail herein.
The utility model adopts the low temperature condensation recovery and active carbon adsorption to recover tail gas, the low temperature condensation recovery principle is that various physical properties are utilized to be different, the condensation point suitable for organic substances is selected, three-level condensation temperature is adopted, namely, the precooling temperature of the precooling tank 2 is reduced from 50 ℃ to 5 ℃, the temperature of the shallow cold area 14 of the condensing heat exchanger 1 reaches-15 ℃, the temperature of the deep cold area 15 of the condensing heat exchanger 1 reaches-35 ℃, tail gas environment temperature is changed by stages to carry out cooling treatment, so that gas-liquid phase change is generated, the tail gas is separated from nitrogen or air, the condensation temperatures of different organic substances are all different, the condensed low-concentration tail gas is treated by active carbon adsorption, the tail gas concentration after condensation and adsorption is extremely low, and is discharged from the upper air of the exhaust chimney 4, and meets all discharge indexes in the emission standard (DB323151-2016) of the local chemical industry volatile organic substances in Jiangsu province, the activated carbon can reach a saturated state after being adsorbed for a long time, the adsorption efficiency is reduced or the activated carbon does not have adsorption capacity any more, the activated carbon is resolved through pressure swing purging desorption, the activated carbon reaches a reuse state, and the desorbed high-concentration organic waste gas returns to a condensation inlet for cyclic treatment.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be considered as the protection scope of the present invention.
Claims (9)
1. The utility model provides an ethyl orthosilicate tail gas recovery system which characterized in that: the tail gas source of the tetraethoxysilane tail gas is communicated with a gas phase inlet of the condensation heat exchanger, a gas phase outlet of the condensation heat exchanger is communicated with a gas phase inlet in the middle of the precooling tank, a gas phase outlet in the precooling tank is communicated with a gas phase inlet of the activated carbon adsorption tank, and a gas phase outlet of the activated carbon adsorption tank is communicated with a gas phase inlet of the exhaust chimney; and a condensate outlet of the condensing heat exchanger is communicated with a condensate inlet of the condensate tank, a condensate outlet of the precooling tank is communicated with a condensate inlet of the condensate tank, and a condensate outlet of the condensate tank is communicated with the delivery pipeline.
2. The tetraethoxysilane tail gas recovery system according to claim 1, characterized in that: the tail gas source of the ethyl orthosilicate comprises a steel cylinder cleaning tail gas pipeline and a tail gas pipeline of a raw material tank area, the steel cylinder cleaning tail gas pipeline is communicated with a gas phase inlet at the lower part of the precooling tank, and a gas phase outlet at the top of the precooling tank is communicated with a gas phase inlet of the condensing heat exchanger; and the tail gas pipeline of the raw material tank area is communicated with a gas-phase inlet of the condensing heat exchanger.
3. The tetraethoxysilane tail gas recovery system according to claim 1, characterized in that: the condensing heat exchanger comprises a shallow cooling area and a deep cooling area, wherein shallow cooling pipelines in the shallow cooling area are communicated with a shallow cooling unit, and deep cooling pipelines in the deep cooling area are communicated with a deep cooling unit.
4. The tetraethoxysilane tail gas recovery system according to claim 3, characterized in that: the shallow cooling refrigeration unit comprises a shallow cooling refrigeration machine, a shallow cooling oil separator, a shallow cooling fin heat exchanger, a shallow cooling reservoir, a shallow cooling filter and a shallow cooling gas-liquid separator, the gas phase outlet of the shallow cooling refrigerator is communicated with the gas phase inlet at the upper part of the shallow cooling oil separator, the gas phase outlet at the top part of the shallow cooling oil separator is communicated with the inlet of the shallow cooling finned heat exchanger, the oil outlet at the bottom part of the shallow cooling oil separator is communicated with the oil inlet of the shallow cooling refrigerator, the outlet of the shallow cooling finned heat exchanger is communicated with the inlet of the shallow cooling liquid storage device, the outlet of the shallow cooling liquid storage device is communicated with the inlet of the shallow cooling pipeline, the outlet of the shallow cold pipeline is communicated with the inlet of the shallow cold filter, the outlet of the shallow cold filter is communicated with the inlet of the shallow cold gas-liquid separator, and the gas phase outlet of the shallow cold gas-liquid separator is communicated with the gas phase inlet of the shallow cold refrigerator.
5. The tetraethoxysilane tail gas recovery system according to claim 3, characterized in that: the deep cooling refrigeration unit comprises a deep cooling refrigerator, a deep cooling oil separator, a deep cooling fin heat exchanger, a deep cooling liquid storage device, a deep cooling filter and a deep cooling liquid separator, the gas phase outlet of the cryogenic refrigerator is communicated with the gas phase inlet at the upper part of the cryogenic oil separator, the gas phase outlet at the top part of the cryogenic oil separator is communicated with the inlet of the cryogenic fin heat exchanger, the oil outlet at the bottom part of the cryogenic oil separator is communicated with the oil inlet of the cryogenic refrigerator, the outlet of the deep cooling fin heat exchanger is communicated with the inlet of the deep cooling liquid storage device, the outlet of the deep cooling liquid storage device is communicated with the inlet of the deep cooling pipeline, the export of cryrogenic pipeline is linked together with the import of cryrogenic filter, the export of cryrogenic filter is linked together with the import of deep cold gas-liquid separator, the gaseous phase export of deep cold gas-liquid separator is linked together with the gaseous phase import of cryrogenic refrigerator.
6. The tetraethoxysilane tail gas recovery system according to claim 5, characterized in that: the export of cryrogenic reservoir and the import of cryrogenic pipeline concatenate cryrogenic secondary heat exchanger between, the import K1 of cryrogenic secondary heat exchanger is linked together with the export of cryrogenic reservoir, and the export K4 of cryrogenic secondary heat exchanger is linked together with the import of cryrogenic pipeline, and the export K4 of cryrogenic secondary heat exchanger is linked together with the import K3 of cryrogenic secondary heat exchanger, and the export K2 of cryrogenic secondary heat exchanger is linked together with the export of cryrogenic pipeline.
7. The tetraethoxysilane tail gas recovery system according to claim 1, characterized in that: the gas phase outlet at the top of the activated carbon adsorption tank is communicated with a nitrogen access pipeline, the desorption outlet at the lower part of the activated carbon adsorption tank is communicated with the desorption inlet of the condensate tank, and the desorption outlet of the condensate tank is communicated with the gas phase inlet of the condensing heat exchanger.
8. The ethyl orthosilicate tail gas recovery system according to claim 7, wherein: and a gas phase outlet at the top of the activated carbon adsorption tank is communicated with an instrument wind access pipeline, and the instrument wind access pipeline is connected with the nitrogen access pipeline in parallel.
9. The tetraethoxysilane tail gas recovery system according to claim 1, characterized in that: and a spraying pipe is arranged in the activated carbon adsorption tank, and a liquid phase inlet of the spraying pipe is communicated with a fire-fighting water pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221098573.9U CN217139867U (en) | 2022-05-09 | 2022-05-09 | Ethyl orthosilicate tail gas recovery system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221098573.9U CN217139867U (en) | 2022-05-09 | 2022-05-09 | Ethyl orthosilicate tail gas recovery system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217139867U true CN217139867U (en) | 2022-08-09 |
Family
ID=82666238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221098573.9U Active CN217139867U (en) | 2022-05-09 | 2022-05-09 | Ethyl orthosilicate tail gas recovery system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217139867U (en) |
-
2022
- 2022-05-09 CN CN202221098573.9U patent/CN217139867U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3277340B2 (en) | Method and apparatus for producing various gases for semiconductor manufacturing plants | |
| CN106178807A (en) | A kind of gas recovery system for oil of " double condensation adsorption " integrated technology | |
| JP7461679B2 (en) | System and method for VOCs recovery that integrates absorption, desorption and recovery | |
| CN205933758U (en) | Condensing vapor recovery system equipment | |
| CN210495768U (en) | Device for recycling dichloromethane of diaphragm of lithium battery by wet process through compression condensation membrane separation technology | |
| CN207413083U (en) | Gas recovery system for oil | |
| CN206577551U (en) | Petroleum vapor recovery integration apparatus | |
| CN111575043A (en) | Oil-gas separation and recovery system and recovery method | |
| CN111171867A (en) | Oil gas recovery method | |
| CN101402001A (en) | Oil gas recycling and processing apparatus, condensation adsorption method thereof | |
| CN217139867U (en) | Ethyl orthosilicate tail gas recovery system | |
| CN114392632A (en) | Nitrogen-protected organic waste gas condensation and recovery treatment method for degreasing process | |
| CN106669355B (en) | Integrated oil gas recovery device based on image identification defrosting technology | |
| CN112221327A (en) | Carbon dioxide ammonia capture and low-temperature liquefaction system and method for coal-fired power plant | |
| CN204952335U (en) | Vapor recovery system integrated system | |
| CN111171868A (en) | Oil gas recovery device | |
| CN111036040A (en) | Condensation-adsorption integrated VOCs recycling system and recycling process | |
| CN113908663B (en) | Pressurized multistage 'absorption, condensation and adsorption' module combined organic waste gas recovery method | |
| CN115155237A (en) | Waste gas treatment system for treating waste gas in chemical reservoir area and treatment method thereof | |
| CN213238140U (en) | Air separation system | |
| CN115089992A (en) | Method for recycling VOCs (volatile organic compounds) gas through shallow cold adsorption desorption | |
| CN205825584U (en) | A kind of intelligentized petroleum benzin conversion equipment | |
| CN101462689A (en) | Variable frequency oil gas recycling method for petrol station absorption condensation and adsorption | |
| CN113440886A (en) | High-pressure cryogenic combined type VOCs gas recovery device and recovery method | |
| CN207342491U (en) | A kind of cold nebulization cleaning equipment of organic composite gas |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 215152 Anmin Road, Panyang Industrial Park, Huangdai Town, Xiangcheng District, Suzhou City, Jiangsu Province Patentee after: Jinhong Gas Co.,Ltd. Address before: 215152 No. 6 Anmin Road, Panyang Industrial Park, Huangdi Town, Xiangcheng District, Suzhou City, Jiangsu Province Patentee before: SUZHOU JINHONG GAS Co.,Ltd. |
|
| CP03 | Change of name, title or address |