CN217121120U

CN217121120U - Plasma cleaning machine

Info

Publication number: CN217121120U
Application number: CN202220123142.7U
Authority: CN
Inventors: 詹登星; 李建华; 刘永兴; 蔡文文; 曾令锐
Original assignee: Dongguan Andong Semiconductor Technology Co ltd
Current assignee: Dongguan Andong Semiconductor Technology Co ltd
Priority date: 2022-01-17
Filing date: 2022-01-17
Publication date: 2022-08-05
Anticipated expiration: 2032-01-17

Abstract

The utility model belongs to the technical field of cleaning equipment, specifically be a plasma cleaning machine, include: the device comprises a machine body, a mounting frame and a control device, wherein the mounting frame is mounted on the machine body; the cleaning mechanism comprises a vacuum pump arranged in the machine body and a vacuum chamber which is arranged on the mounting frame and is connected with the vacuum pump; the material loading mechanism comprises an electrode plate arranged in the vacuum chamber and a material discharging area arranged on the electrode plate; the automatic mechanism comprises a feeding and taking assembly and a left push plate assembly which are arranged on the left side of the vacuum chamber, and a right pushing assembly and a right push plate assembly which are arranged on the right side of the vacuum chamber. The utility model discloses in, through carrying material mechanism, automatic mechanism and elevating system, can realize automatic unloading of getting, it is more convenient to get the material of putting to supplement the product in through constantly to the magazine, possible continuous washing, it is higher to compare traditional clearance mode efficiency, is suitable for the scale to use, and structural design is novel reasonable, convenient to popularize and use.

Description

Plasma cleaning machine

Technical Field

The utility model relates to a cleaning equipment technical field specifically is a plasma cleaning machine.

Background

A plasma cleaning machine is also called as a plasma cleaning machine or a plasma surface treatment instrument, is a brand-new high-technology, utilizes plasma to achieve the effect which cannot be achieved by a conventional cleaning method, the plasma is a state of a substance, is also called as a fourth state of the substance, is not common solid-liquid-gas tri-state, applies enough energy to the gas to enable the gas to be ionized into a plasma state, and the active components of the plasma comprise: ions, electrons, atoms, active groups, excited species (metastable state), photons, etc., and the plasma cleaning machine is used for processing the surface of a sample by utilizing the properties of the active components, thereby achieving the purposes of cleaning, coating, etc.

The existing plasma cleaning machine generally needs to take out products in the material box through the manual work, then the cleaning part is put in, the materials are manually taken out after the cleaning is completed, the cleaning effect is not influenced, the automatic feeding and discharging cannot be realized, the cleaning efficiency is reduced, and the plasma cleaning machine is not convenient to popularize and use.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art or the correlation technique.

Therefore, the utility model discloses the technical scheme who adopts does:

a plasma cleaning machine comprising: the device comprises a machine body, a mounting frame and a control device, wherein the mounting frame is mounted on the machine body; the cleaning mechanism comprises a vacuum pump arranged in the machine body and a vacuum chamber which is arranged on the mounting frame and is connected with the vacuum pump; the material loading mechanism comprises an electrode plate arranged in the vacuum chamber and a material discharging area arranged on the electrode plate; the automatic mechanism comprises a material feeding and taking assembly and a left push plate assembly which are arranged on the machine body and positioned on the left side of the vacuum chamber, and a right material pushing assembly and a right push plate assembly which are arranged on the machine body and positioned on the right side of the vacuum chamber; the lifting mechanism comprises a fixing plate which is assembled on the machine body and is positioned below the right pushing assembly, a driving motor which is installed on the side of the fixing plate, a lifting screw rod which is in transmission connection with the driving end of the driving motor, a lifting plate which is clamped on the fixing plate and is in threaded connection with the lifting screw rod, and a material box which is placed on the lifting plate.

By adopting the technical scheme, automatic feeding and discharging can be realized, the material taking and discharging is more convenient, continuous cleaning can be realized by continuously supplementing products into the material box, the efficiency is higher compared with the traditional cleaning mode, and the automatic feeding and discharging device is suitable for large-scale use.

As a preferred scheme, the left side push pedal subassembly is including installing in horizontal cylinder on the organism, the drive end of horizontal cylinder is equipped with the left side push pedal that is used for pushing out the plate electrode to magazine one side, the right side push pedal subassembly is including installing the back push cylinder on the lifter plate, the drive end of back push cylinder is equipped with and is used for with the right side push pedal that the plate electrode pushed back the normal position.

As an optimal scheme, the material feeding and taking assembly comprises a material feeding and taking slide rail, a material feeding and taking servo motor, a material feeding and taking screw rod and a material feeding and taking mounting plate, wherein the material feeding and taking slide rail is installed on the left side of the vacuum chamber of the machine body, the material feeding and taking servo motor is installed on the side of the material feeding and taking slide rail, the material feeding and taking screw rod is connected to the material feeding and taking servo motor, the material feeding and taking mounting plate is in threaded connection with the material feeding and taking screw rod and clamped on the material feeding and taking slide rail, and clamps for taking and taking materials are arranged on the material feeding and taking mounting plate.

As a preferred scheme, the right material pushing assembly comprises a material pushing slide rail arranged on the machine body and positioned on the right side of the vacuum chamber, a material pushing servo motor arranged on the side of the material pushing slide rail, a material pushing screw rod connected to the material pushing servo motor, and a material pushing mounting plate in threaded connection with the material pushing screw rod and clamped on the material pushing slide rail, wherein a push rod used for pushing materials out of the material box is arranged on the material pushing mounting plate.

As an optimal scheme, the material placing areas on the electrode plates are arranged side by side, the material box placing areas corresponding to the material placing areas are arranged on the lifting plate, a plurality of clips corresponding to the material placing areas are arranged on the material feeding and taking mounting plate, and a plurality of push rods corresponding to the material placing areas are arranged on the material pushing mounting plate.

As a preferable scheme, the machine body is provided with an opening positioned above the lifting plate, and the pushing slide rails in the right pushing assembly are positioned at two sides of the opening.

Preferably, the vacuum chamber is connected to an exhaust gas purifying device mounted on the mounting frame, so that gas generated by cleaning can be purified and filtered, thereby improving safety of a working environment.

As a preferable scheme, a plurality of groups of positioning plates are equidistantly arranged on the electrode plate, and the material discharge area is formed between each group of positioning plates.

As a preferred scheme, the push rod is of a cylindrical structure, and the clamp, the push rod and the material placing area are correspondingly arranged.

Preferably, a vertical cylinder for controlling the opening and closing of the vacuum chamber is provided at a side surface of the mounting frame.

The above technical scheme of the utility model has following profitable technological effect:

the utility model discloses in, through carrying material mechanism, automatic mechanism and elevating system, can realize automatic unloading of going up, it is more convenient to get the material of putting to through the direct change magazine, possible continuous washing is compared traditional clearance mode efficiency and is higher, is suitable for the scale and uses, structural design is novel reasonable, convenient to popularize and use.

Drawings

Fig. 1 is a schematic front side structure diagram of the present invention;

fig. 2 is a schematic view of the back side structure of the present invention;

FIG. 3 is a schematic view of a vacuum chamber of the present invention;

fig. 4 is a schematic view of the lifting mechanism of the present invention;

fig. 5 is a bottom schematic view of the lifting mechanism of the present invention;

fig. 6 is a schematic view of the material feeding and taking assembly of the present invention;

fig. 7 is a schematic view of the right pushing assembly of the present invention.

Reference numerals:

100. a body; 110. a mounting frame; 120. a vertical cylinder;

200. a cleaning mechanism; 210. a vacuum pump; 220. a vacuum chamber;

300. a material loading mechanism; 310. a horizontal cylinder; 320. an electrode plate; 330. a material discharging area;

400. an automatic mechanism; 410. a material feeding and taking assembly; 411. a material feeding and taking slide rail; 412. a material feeding and taking servo motor; 413. feeding and taking screw rods; 414. a feeding and taking mounting plate; 415. a clip; 420. a right pusher assembly; 421. A material pushing slide rail; 422. a material pushing servo motor; 423. pushing a material screw rod; 424. a material pushing mounting plate; 425 a push rod;

500. a lifting mechanism; 510. a fixing plate; 520. a drive motor; 530. a lifting screw rod; 540. a lifting plate; 550. a magazine; 560. and pushing back the cylinder.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings. It should be noted that the embodiments and features of the embodiments of the present invention may be combined with each other without conflict.

It is to be understood that such description is merely exemplary and is not intended to limit the scope of the present invention.

A plasma cleaning machine according to some embodiments of the present invention will be described below with reference to the accompanying drawings.

Referring to fig. 1-7, the present invention provides a plasma cleaning machine, including: the device comprises a machine body 100, wherein a mounting frame 110 is mounted on the machine body 100; a cleaning mechanism 200 including a vacuum pump 210 installed in the body 100 and a vacuum chamber 220 provided in the mounting frame 110 and connected to the vacuum pump 210; the loading mechanism 300 comprises an electrode plate 320 installed in the vacuum chamber 220 and a discharge area 330 arranged on the electrode plate 320; an automatic mechanism 400, which includes a feeding and taking assembly 410 and a left push plate assembly disposed on the machine body 100 and located on the left side of the vacuum chamber 220, and a right pushing assembly 420 and a right push plate assembly disposed on the machine body 100 and located on the right side of the vacuum chamber 220; the lifting mechanism 500 comprises a fixing plate 510 assembled on the machine body 100 and located below the right pushing assembly 420, a driving motor 520 installed on the side of the fixing plate 510, a lifting screw rod 530 connected to the driving end of the driving motor 520 in a transmission manner, a lifting plate 540 clamped on the fixing plate 510 and connected to the lifting screw rod 530 in a threaded manner, and a magazine 550 placed on the lifting plate 540. The magazine 550 is provided with a material groove arranged in a layered manner, and the plate-shaped material is placed in the material groove.

Specifically, the left push plate assembly comprises a horizontal cylinder 310 installed on the machine body 100, a left push plate used for pushing the electrode plate 320 out of one side of the material box 550 is arranged at the driving end of the horizontal cylinder 310, the right push plate assembly comprises a push-back cylinder 560 installed on the lifting plate 540, and a right push plate used for pushing the electrode plate 320 back to the original position is arranged at the driving end of the push-back cylinder 560. Through setting up left side push pedal subassembly to can push out a section distance with electrode plate 320 to magazine 550 one side in advance, make the distance between electrode plate 320 and the magazine 550 more be close, thereby avoid the material to lead to moving the material not smooth and easy condition because of gravity flagging when taking out from magazine 550.

The utility model discloses in, send and get material subassembly 410 including install in organism 100 just is located the left material slide rail 411 of sending of vacuum chamber 220, install in send sending of getting the material slide rail 411 side get material servo motor 412, connect in send sending of getting material servo motor 412 to send and get material lead screw 413 and threaded connection in send and get material lead screw 413 and clamp send and get material mounting panel 414 on getting material slide rail 411, send to be equipped with the clip 415 that is used for getting the material on getting material mounting panel 414. The right side pushes away material assembly 420 including install in organism 100 and be located push away material slide rail 421 on vacuum chamber 220 right side, install in push away material servo motor 422, connect in push away material lead screw 423 and the threaded connection that push away material servo motor 422 push away material lead screw 423 and clamp and be in push away the material mounting panel 424 that pushes away on the material slide rail 421, be equipped with on the material mounting panel 424 and be used for following the push rod 425 that the material was pushed out on magazine 550. An opening is formed in the machine body 100 and located above the lifting plate 540, and the pushing slide rail 421 in the right pushing assembly 420 is located on two sides of the opening.

Specifically, the material placing areas 330 on the electrode plate 320 are arranged side by side, the material box placing areas corresponding to the material placing areas 330 in number are arranged on the lifting plate 540, the material feeding and taking mounting plate 414 is provided with a plurality of clips 415 corresponding to the material placing areas 330 in number, and the material pushing mounting plate 424 is provided with a plurality of push rods 425 corresponding to the material placing areas 330 in number. The electrode plate 320 is provided with a plurality of groups of positioning plates at equal intervals, the material placing area 330 is formed between each group of positioning plates, positioning grooves are formed in the opposite sides of each group of positioning plates, and materials are positioned in the positioning grooves during cleaning, so that the materials are more stable during cleaning. The push rod 425 is a cylindrical structure, and the clamp 415, the push rod 425 and the discharge area 330 are correspondingly arranged. Therefore, a plurality of materials can be cleaned simultaneously, and the working efficiency of the cleaning machine is improved.

The vacuum chamber 220 is connected to an exhaust gas purifying apparatus mounted on the mounting frame 110. The gas generated by cleaning can be purified and filtered, and the safety of the working environment is improved.

The side of the mounting frame 110 is provided with a vertical cylinder 120 for controlling the opening and closing of the vacuum chamber 220. The vertical cylinder 120 can drive the upper cover of the vacuum chamber 220 mounted on the mounting frame 110 to lift, so as to control the opening or closing of the chamber, thereby facilitating the material to be put into or moved out of the vacuum chamber 220.

The utility model discloses a theory of operation and use flow: firstly, manually placing a material box 550 on a lifting plate 540, driving the lifting plate 540 to lift through a driving motor 520, simultaneously pushing an electrode plate 320 to one side of the material box 550 by a horizontal air cylinder 310, moving the material plate to the material box 550 through a right material pushing assembly 420, pushing a part of the material plate in the material box 550 out by a push rod 425, regularly placing the material plate into a material placing area 330 by a clamp 415, then pushing the electrode plate 320 back to the lower part of a vacuum chamber 220 by a back pushing air cylinder 560, driving the vacuum chamber 220 to fall down by a vertical air cylinder 120 to form a seal, cleaning the material plate by generating plasma after the vacuum pump 210 extracts vacuum, discharging the material plate after cleaning, opening the vacuum chamber 220 by the vertical air cylinder 120, then pushing the electrode plate 320 to the material box 550, closing the clamp 415 to push the material plate from the electrode plate 320 to the original slot position of the material box 550, and then lifting the material box 550 by a lifting mechanism 500, and the right material pushing assembly 420 pushes out the next material plate, the clamp 415 is opened to take the next material plate onto the electrode plate 320, and the next material plate is cleaned.

In the present application, the term "plurality" means two or more unless expressly defined otherwise. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. The terms "mounted," "connected," "fixed," and the like are to be construed broadly, and for example, "connected" may be a fixed connection, a removable connection, or an integral connection; "coupled" may be direct or indirect through an intermediary. The specific meaning of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.

It will be understood that when an element is referred to as being "mounted to," "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

In the description of the present specification, the description of the terms "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the claims and their equivalents.

Claims

1. A plasma cleaning machine, comprising:

the device comprises a machine body (100), wherein a mounting frame (110) is mounted on the machine body (100);

a cleaning mechanism (200) including a vacuum pump (210) installed in the body (100) and a vacuum chamber (220) provided in the mounting frame (110) and connected to the vacuum pump (210);

the loading mechanism (300) comprises an electrode plate (320) arranged in the vacuum chamber (220) and a discharging area (330) arranged on the electrode plate (320);

the automatic mechanism (400) comprises a material feeding and taking component (410) and a left push plate component which are arranged on the machine body (100) and positioned on the left side of the vacuum chamber (220), and a right material pushing component (420) and a right push plate component which are arranged on the machine body (100) and positioned on the right side of the vacuum chamber (220);

the lifting mechanism (500) comprises a fixing plate (510) assembled on the machine body (100) and positioned below the right pushing assembly (420), a driving motor (520) installed on the side of the fixing plate (510), a lifting screw rod (530) in transmission connection with the driving end of the driving motor (520), a lifting plate (540) clamped on the fixing plate (510) and in threaded connection with the lifting screw rod (530), and a material box (550) placed on the lifting plate (540).

2. The plasma cleaning machine according to claim 1, wherein the left push plate assembly comprises a horizontal cylinder (310) mounted on the machine body (100), the driving end of the horizontal cylinder (310) is provided with a left push plate for pushing the electrode plate (320) out to one side of the magazine (550), the right push plate assembly comprises a push-back cylinder (560) mounted on the lifting plate (540), and the driving end of the push-back cylinder (560) is provided with a right push plate for pushing the electrode plate (320) back to the original position.

3. The plasma cleaning machine according to claim 1 or 2, wherein the material feeding and taking assembly (410) comprises a material feeding and taking slide rail (411) which is installed on the machine body (100) and located on the left side of the vacuum chamber (220), a material feeding and taking servo motor (412) which is installed on the side of the material feeding and taking slide rail (411), a material feeding and taking screw rod (413) which is connected to the material feeding and taking servo motor (412), and a material feeding and taking mounting plate (414) which is in threaded connection with the material feeding and taking screw rod (413) and is clamped on the material feeding and taking slide rail (411), and a clamp (415) for taking and taking materials is arranged on the material feeding and taking mounting plate (414).

4. The plasma cleaning machine according to claim 3, wherein the right pushing assembly (420) comprises a pushing slide rail (421) installed on the machine body (100) and located on the right side of the vacuum chamber (220), a pushing servo motor (422) installed on the pushing slide rail (421), a pushing screw rod (423) connected to the pushing servo motor (422), and a pushing mounting plate (424) in threaded connection with the pushing screw rod (423) and clamped on the pushing slide rail (421), and a push rod (425) for pushing the material out of the material box (550) is arranged on the pushing mounting plate (424).

5. The plasma cleaning machine according to claim 4, wherein a plurality of material placing areas (330) are arranged on the electrode plate (320) side by side, material box placing areas corresponding to the number of the material placing areas (330) are arranged on the lifting plate (540), a plurality of clips (415) corresponding to the number of the material placing areas (330) are arranged on the material feeding and taking mounting plate (414), and a plurality of push rods (425) corresponding to the number of the material placing areas (330) are arranged on the material pushing mounting plate (424).

6. The plasma cleaning machine according to claim 4, wherein the body (100) is provided with an opening above the lifting plate (540), and the pushing slide rails (421) of the right pushing assembly (420) are located on two sides of the opening.

7. The plasma cleaning machine according to claim 1, wherein an exhaust gas purifying apparatus mounted to the mounting frame (110) is connected to the vacuum chamber (220).

8. The plasma cleaning machine according to claim 5, characterized in that a plurality of sets of positioning plates are equidistantly arranged on the electrode plate (320), and the positioning plates of each set form the discharge area (330).

9. The plasma cleaning machine of claim 5, wherein the plunger (425) is of a cylindrical structure, and the clamp (415) and the plunger (425) are arranged correspondingly with the discharge area (330).

10. The plasma cleaning machine according to claim 1, wherein the side of the mounting frame (110) is provided with a vertical cylinder (120) for controlling the opening and closing of the vacuum chamber (220).