CN217113043U

CN217113043U - Energy calibration mechanism

Info

Publication number: CN217113043U
Application number: CN202220141457.4U
Authority: CN
Inventors: 孙省江; 张宇阳; 董昱君; 朱亮; 周黎; 张雷
Original assignee: Yuanna Micro Optics Technology Suzhou Co ltd
Current assignee: Yuanna Micro Optics Technology Suzhou Co ltd
Priority date: 2022-01-19
Filing date: 2022-01-19
Publication date: 2022-08-02
Anticipated expiration: 2032-01-19

Abstract

The utility model provides an energy calibration mechanism, including a plurality of energy sensing units, the energy mounting panel, the mount pad, the driving medium, the driving source, a pedestal, a plurality of energy sensing units set up on the energy mounting panel, the energy mounting panel is connected with the mount pad, the mount pad is fixed in the motion mesa, the energy mounting panel further links to each other with the driving medium, the driving medium links to each other with the driving source, the driving source passes through pedestal connection to motion mesa below, the driving source passes through the driving medium and drives the energy mounting panel and overturn, make the energy mounting panel can expose in one side of motion mesa or retrieve in the motion mesa below. The energy sensing unit is recovered under the motion table surface during the non-working period in a turnover mode, so that the occupied space is reduced, and the collision can be avoided.

Description

Energy calibration mechanism

Technical Field

The utility model belongs to the technical field of direct-write exposure technique and specifically relates to an energy calibration mechanism who is applied to direct-write lithography machine is related to.

Background

Direct-write lithography is a direct imaging technique that utilizes digital light processing technology to form circuit patterns on the surface of a workpiece (such as a wafer, a printed circuit board, etc.) by exposure, and compared with mask-type lithography, the direct-write lithography has the advantages of significantly improved exposure efficiency, obvious cost advantage, and capability of meeting the processing requirements of various products such as chips, semiconductor devices, printed circuit boards, etc.

When a workpiece is exposed, in order to obtain a high-precision exposure pattern, the light-emitting energy of a plurality of exposure lenses needs to be ensured to have high consistency, so that the energy calibration of the plurality of exposure lenses is needed when equipment is debugged and maintained. When energy calibration is performed, the energy sensing device needs to be moved to the lower part of the exposure lens to sense the light energy emitted by the exposure lens, and the whole calibration mechanism generally has two forms: one is that, as disclosed in patent CN106527056B, a moving shaft is added on one side of a motion platform of a direct-write lithography machine, and a calibration module (usually a power meter) is disposed on the moving shaft through a driving module and moves laterally, so as to reach a position below any exposure lens, which obviously complicates the structure of the motion platform, and the additional moving shaft and driving module occupy a large space; secondly, as disclosed in patent CN111273519B, a plurality of light receiving lenses are fixedly mounted on one side of the motion platform, and are connected to the power meter which is also mounted on the motion platform through optical fibers, the light receiving lenses and the power meter also occupy a large space, when the device is operated, interference is easily generated on adjacent stations, and the light receiving lenses and the power meter are always exposed on one side of the table top, and are also easily damaged by collision when the device is subjected to non-calibrated conventional maintenance.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an energy calibration mechanism to compensate above-mentioned prior art not enough. Therefore, the utility model adopts the following technical scheme:

an energy calibration mechanism is used for calibrating the energy of an exposure lens of a direct-write lithography machine, the direct-write lithography machine comprises a moving table board, it is characterized in that the energy calibration mechanism comprises a plurality of energy sensing units, an energy mounting plate, a mounting seat, a transmission piece, a driving source and a base, the plurality of energy sensing units are arranged on the energy mounting plate, the energy mounting plate is connected with the mounting seat, the mounting seat is fixed on the motion table-board, the energy mounting board is further connected with the transmission piece, the transmission piece is connected with the driving source, the driving source is connected to the lower part of the motion table top through the base, the driving source drives the energy mounting plate to turn over through the transmission piece, so that the energy mounting plate can be exposed to one side of the moving table top or recovered below the moving table top.

Preferably, the energy mounting plate comprises an upper mounting plate, a lower support plate and a support connecting member, the plurality of energy sensing units are uniformly mounted on the upper mounting plate, the upper mounting plate is mounted on the lower support plate through the support connecting member, and the lower support plate is connected to the mounting seat.

Preferably, the lower support plate is connected to the transmission member, and the lower support plate can be driven by the transmission member to turn.

Preferably, the mounting seat comprises a rotating block, a first rotating shaft and a mounting block, the energy mounting plate is connected to the rotating block, the rotating block is connected to the mounting block through the first rotating shaft, and the mounting block is detachably fixed below the moving table top.

Preferably, the mounting base further comprises an angle adjusting piece and a limiting block, the angle adjusting piece is mounted on the rotating block or the limiting block, and the limiting block is fixedly mounted or movably mounted on the mounting block.

Preferably, the angle adjusting piece is an angle adjusting bolt, and the position of the angle adjusting bolt is changed through thread adjustment.

Preferably, the installation piece sets up to "L" type, first pivot is located the end of the horizontal limit of "L", the stopper sets up in the middle section of the horizontal limit of "L", the installation piece is fixed in through the perpendicular limit of "L" the below of motion mesa.

Preferably, the driving source is a linear cylinder, one end of the linear cylinder is connected with the transmission member, and the other end of the linear cylinder is connected with the base.

Preferably, the transmission part comprises a transmission block and a rotary joint, the rotary joint can rotate around the transmission block, the transmission block is installed on the energy installation plate, and the rotary joint is connected with the linear cylinder.

Preferably, the base is provided with a connecting plate and two lugs, the connecting plate is installed below the moving table board, the two lugs are arranged on two sides of the connecting plate, a second rotating shaft is arranged in the two lugs, and the linear cylinder is connected with the second rotating shaft.

Preferably, the driving source is a motor fixed below the moving table through the base, the transmission member includes a timing pulley and a transmission shaft, the energy mounting plate is connected to the transmission shaft, and the transmission shaft is connected to the timing pulley.

Compared with the prior art, the calibration mechanism provided by the utility model has the advantages that the energy mounting plate is arranged in a turnover mode, when the calibration is needed, the energy mounting plate rotates to the position exposed at one side of the motion table top, and the energy mounting plate rotates to the position below the motion table top during the non-calibration period, so that the occupied space of the energy calibration mechanism is reduced, and the damage during the non-use period can be avoided; in addition, through the setting of angle adjusting part and stopper, can finely tune the position of energy mounting panel during demarcation, reduce the frock degree of difficulty.

Drawings

FIG. 1 is a side top view of an exemplary indexing mechanism in a first position.

FIG. 2 is a side-down view of an exemplary calibration mechanism in a first position.

FIG. 3 is a side top view of an exemplary calibration mechanism in a second position.

FIG. 4 is a side, lower view of an exemplary calibration mechanism in a second position.

Fig. 5 is an exemplary mount structure view.

Detailed Description

In order to make the technical solution of the present invention more clear, the following describes a specific embodiment of the present invention with reference to the accompanying drawings. It should be understood that the detailed description of the embodiments is intended only to teach one skilled in the art how to practice the invention, and is not intended to be exhaustive of all possible aspects of the invention, nor is it intended to limit the scope of the invention.

It should be noted that the terms "front", "back", "left", "right", "upper", "lower", "middle", and the like in the following embodiments are used for describing the present invention based on the drawings, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed in a specific orientation, be installed and operated, or be moved in a specific direction, and thus, should not be construed as limiting the present invention. In the description of the present embodiment, "a plurality" means two or more unless specifically limited otherwise.

First, taking a direct-write lithography machine based on the prior art as an example, the direct-write lithography machine at least comprises a moving table and an exposure lens. The exposure lenses are arranged in a plurality of numbers, and the exposure lenses can be closely arranged or arranged at equal intervals. The motion table is used for bearing the workpiece and can move at least along XYZ three directions. It should be understood that the direct write lithography machine may also include other modules, which are not described in detail herein. When the exposure lens energy calibration is carried out, an energy sensing unit is required to be arranged under the exposure lens so as to sense the energy and then carry out quantitative adjustment.

As shown in fig. 1-4, the utility model provides an energy calibration mechanism, including a plurality of energy sensing unit 1, energy mounting panel 2, mount pad 3, driving medium 4, driving source 5, base 6, the position evenly distributed that a plurality of energy sensing unit 1 correspond the exposure lens is on energy mounting panel 2, energy mounting panel 2 is connected with mount pad 3, mount pad 3 is fixed in motion mesa 7, energy mounting panel 2 further links to each other with driving medium 4, driving medium 4 links to each other with driving source 5, driving source 5 is connected to motion mesa 7 below through base 6. The driving source 5 can drive the energy mounting plate 2 to turn over through the transmission piece 4, so that the energy mounting plate 2 has two positions, one is exposed to one side of the moving table 7 as shown in fig. 1 and 2, and the other is recovered below the moving table 7 as shown in fig. 3 and 4.

In one embodiment, the energy installation 2 plate comprises an upper installation plate 21, a lower support plate 22 and a support connecting member 23, the plurality of energy sensing units 1 are uniformly installed on the upper installation plate 21, the upper installation plate 21 is installed on the lower support plate 23 through the support connecting member 22, the lower support plate 22 is connected to the installation base 3, the lower support plate 22 is further connected to the transmission member 4 and can be turned over under the driving of the transmission member 4, so that the energy sensing units 1 located on the upper installation plate 21 can be exposed to one side of the moving table 7 and can also be recycled to the lower side of the moving table 7.

In one embodiment, as shown in fig. 5, the mounting base 3 comprises a rotating block 31, a first rotating shaft 32 and a mounting block 33, the energy mounting plate 2 is connected to the rotating block 31, the rotating block 31 is connected to the mounting block 33 through the first rotating shaft 32, and the mounting block 33 is detachably fixed below the moving table 7. When the transmission member 4 drives the energy installation plate 2 to turn over, the rotating block 31 rotates along with the energy installation plate, and the energy installation plate is supported by the installation block 33. Preferably, the rotation block 31 is connected to the lower support plate 22. Preferably, the mounting base 3 further comprises an angle adjusting piece 34 and a limiting block 35, and the adjustment of the turning angle of the lower support plate 22 can be changed through the position change of the angle adjusting piece 34 and/or the limiting block 35. The configuration of the angle-adjusting piece 34 and the stopper 35 has various forms: in a first configuration, as shown in fig. 5, the angle adjustment member 34 is mounted on the rotation block 31, and the stopper 35 is mounted on the mounting block 33. When the rotating block 31 rotates along with the lower support plate 22, the angle adjusting piece 34 rotates along with the rotating block 31 to abut against the limiting block 35, so that the overturning position of the lower support plate 22 is determined, and the overturning angle of the lower support plate 22 can be adjusted by changing the position of the angle adjusting piece 34. In a second configuration, not shown, the angle adjusting member 34 is mounted on the limiting block 35, the limiting block 35 is mounted on the mounting block 33, and when the rotating block 31 rotates with the lower support plate 22, it will eventually abut against the angle adjusting member 34, and the adjustment of the turning angle of the lower support plate 22 can be changed by changing the position of the angle adjusting member 34. In a third configuration, not shown, the angle adjusting member 34 is mounted on the rotating block 31 or the stopper 35, and the stopper 35 is movably mounted on the mounting block 33, so that the final abutting position of the lower support plate 22 can be changed by changing the position of the stopper 35. Specifically, the angle adjusting piece is an angle adjusting bolt, in a first configuration form, a through threaded hole is formed in the rotating block, and the length of the angle adjusting bolt extending out of the rotating block is adjusted through threads, so that the position of the abutting limiting block is changed; in a second configuration form, a through threaded hole is formed in the limiting block, and the length of the angle adjusting bolt extending out of the limiting block is adjusted through threads; in a third configuration form, the position of the angle adjusting piece can be adjusted, and the position of the limiting block can be adjusted. Further, the mounting block 33 is set to be L-shaped, the first rotating shaft 32 is located at the tail end of the transverse edge of the L, the limiting block 35 is arranged in the middle section of the transverse edge of the L, and the whole mounting block is fixed below the moving table-board 7 through the vertical edge of the L. In addition, only one or a plurality of the mounting seats may be provided. When the installation bases are provided with a plurality of installation bases, the installation bases are evenly and symmetrically installed and connected onto the energy installation plate, and therefore the energy installation plate is supported more evenly. While two mounting seats are shown in fig. 1-4 as being symmetrically disposed on opposite sides of the lower support plate, it should be understood that the number and location of the mounting seats may be configured as desired in practice.

In one embodiment, the driving source 5 is a linear cylinder, one end of which is connected to the driving member 4 and the other end of which is connected to the base 6. As shown in fig. 4, the base 6 is in the form of a suspension loop and is provided with a connecting plate 61 and two suspension loops 62, the connecting plate 61 is installed below the moving table 7, and a second rotating shaft 63 is arranged in the two suspension loops 62. As shown in fig. 2, the transmission member 4 includes a rotary joint 41 and a transmission block 42, the rotary joint 41 is connected to the linear cylinder, the transmission block 42 is mounted on the energy installation plate 2, and the rotary joint 41 can rotate around the transmission block 42. When the linear cylinder is pushed out and driven, the rotating joint 41 pushes the transmission block 42 to rotate, so that the energy mounting plate 2 is driven to rotate towards one side of the moving table top 7 until the energy mounting plate 2 is parallel to the moving table top 7; when the linear cylinder retracts, the rotating joint 41 pulls the transmission block 42 to rotate, so that the energy mounting plate 2 is driven to rotate towards the lower part of the moving table top 7 until the energy mounting plate 2 is wholly or partially recovered below the moving table top. During the pushing and retracting process, the linear cylinder will also rotate around the second rotation shaft 63. Alternatively, the driving source may be a motor, the motor is fixed below the moving table through the base, the transmission member includes a synchronous pulley and a transmission shaft, the energy mounting plate is connected to the transmission shaft, the transmission shaft is connected to the synchronous pulley, the motor transmits the rotational motion to the transmission shaft through the synchronous pulley, and the transmission shaft drives the energy mounting plate to rotate.

When the energy calibration mechanism is used for calibrating the energy of the exposure lens, the driving source is driven in the forward direction to drive the transmission part to act, so that the energy mounting plate is overturned to one side of the moving table board, and the energy of the exposure lens is sensed by the energy sensing unit to be calibrated. After the calibration is finished, the energy mounting plate is rotated to the lower part of the moving table top through the reverse driving of the driving source. Not only reduces the space occupied by the calibration mechanism, but also can avoid the collision and damage during the non-calibration use period.

Finally, it should be pointed out that the above-described embodiments are only illustrative and not exhaustive due to the limited nature of the words of expression, and that the present invention is not limited to the embodiments disclosed, but that several modifications and variations can be made by those skilled in the art without departing from the scope and spirit of the above-described embodiments, which modifications and variations are to be regarded as the scope of the invention. Therefore, the protection scope of the present invention should be subject to the claims.

Claims

1. An energy calibration mechanism is used for calibrating the energy of an exposure lens of a direct-write lithography machine, the direct-write lithography machine comprises a moving table board, it is characterized in that the energy calibration mechanism comprises a plurality of energy sensing units, an energy mounting plate, a mounting seat, a transmission piece, a driving source and a base, the plurality of energy sensing units are arranged on the energy mounting plate, the energy mounting plate is connected with the mounting seat, the mounting seat is fixed on the motion table-board, the energy mounting board is further connected with the transmission piece, the transmission piece is connected with the driving source, the driving source is connected to the lower part of the motion table top through the base, the driving source drives the energy mounting plate to turn over through the transmission piece, so that the energy mounting plate can be exposed to one side of the moving table top or recovered below the moving table top.

2. The energy calibration mechanism of claim 1, wherein: the energy mounting panel includes mounting panel, bottom suspension fagging and supporting connection spare, a plurality of energy sensing units evenly install in go up the mounting panel, go up the mounting panel through supporting connection spare install in the bottom suspension fagging, the bottom suspension fagging is connected to the mount pad.

3. The energy calibration mechanism of claim 2, wherein: the lower supporting plate is connected to the transmission part, and the lower supporting plate can be driven by the transmission part to turn over.

4. The energy calibration mechanism of claim 1, wherein: the mounting base comprises a rotating block, a first rotating shaft and a mounting block, the energy mounting plate is connected to the rotating block, the rotating block is connected to the mounting block through the first rotating shaft, and the mounting block is detachably fixed below the moving table board.

5. The energy calibration mechanism of claim 4, wherein: the mounting seat further comprises an angle adjusting piece and a limiting block, the angle adjusting piece is installed on the rotating block or the limiting block, and the limiting block is fixedly installed or movably installed on the mounting block.

6. The energy calibration mechanism of claim 5, wherein: the angle adjusting piece is an angle adjusting bolt, and the position of the angle adjusting bolt is adjusted and changed through threads.

7. The energy calibration mechanism of claim 5, wherein: the installation piece sets up to "L" type, first pivot is located the end on the horizontal limit of "L", the stopper sets up in the middle section on the horizontal limit of "L", the installation piece is fixed in through the perpendicular limit of "L" the below of motion mesa.

8. The energy calibration mechanism of claim 1, wherein: the driving source is a linear cylinder, one end of the linear cylinder is connected with the transmission part, and the other end of the linear cylinder is connected with the base.

9. The energy calibration mechanism of claim 8, wherein: the transmission part comprises a transmission block and a rotary joint, the rotary joint can wind the transmission block to rotate, the transmission block is installed on the energy installation plate, and the rotary joint is connected with the linear cylinder.

10. The energy calibration mechanism of claim 9, wherein: the base is provided with a connecting plate and two hanging lugs, the connecting plate is installed below the moving table board, the two hanging lugs are arranged on two sides of the connecting plate, a second rotating shaft is arranged in the two hanging lugs, and the linear cylinder is connected with the second rotating shaft.

11. The energy calibration mechanism of claim 1, wherein: the driving source is a motor, the motor is fixed on the lower portion of the motion table board through the base, the transmission part comprises a synchronous pulley and a transmission shaft, the energy mounting plate is connected to the transmission shaft, and the transmission shaft is connected to the synchronous pulley.