CN217068280U - Tail gas adsorption device - Google Patents

Abstract

The utility model discloses a tail gas adsorption device belongs to tail gas treatment technical field, including gas chromatograph, gas chromatograph's air inlet is connected carrier gas transmission pipeline, and gas chromatograph's each way gas vent all is connected with one and adsorbs the bucket, and the air inlet and the gas vent that adsorb the bucket are connected for the cutting ferrule, and the intussuseption of adsorption bucket is filled with and adsorbs the filler. The utility model connects each path of exhaust port of the gas chromatograph with an adsorption barrel, the adsorption barrel is filled with adsorption filler to adsorb toxic gas, when the blockage occurs, the blockage which occurs in the path can be judged by directly measuring the flow rate from the outlet of the adsorption barrel by using an electronic flow meter, and the method is simple, accurate and rapid; the multichannel is separately discharged and can not cause short-time jam, and the adsorption barrel is small in size and can be directly hung on the back of the panel, so that the adsorption barrel is small in size, light in weight and convenient to move.

Description

Tail gas adsorption device

Technical Field

The utility model belongs to the technical field of the tail gas treatment, concretely relates to tail gas adsorption equipment.

Background

Different from the traditional bulk industrial gas, the electronic gas has small dosage and high purity, generally requires 99.999 percent or more of purity, and is developed along with the electronic material and semiconductor industry. The electronic gas and the application used in the common semiconductor process flow, wherein hydrogen, nitrogen, helium, argon and the like are mostly used for carrier gas, purge gas, diluent gas, inert environment or reducing environment and the like; HF. HCl and HBr are used for a thermal etching process of polysilicon, and fluorocarbon is used for plasma etching, cavity cleaning and the like; the silicon source gas is prepared according to different processes such as polycrystalline silicon growth, silicon nitride and other semiconductors as shown in the following table; while the most important electron source and hole source for the growth process of P-N junction are mainly focused on the phosphane and arsane of the fifth main group, and BF3, B2H6 and the like of the third main group; germane is mainly used for epitaxial growth of silicon germanium semiconductors. Due to the special photoelectric properties, high-purity phosphane, arsane, germane, diborane and the like are important source materials of core devices and are the basis of the development of key technologies of integrated circuits, chips, LED devices, solar cells and the like. Meanwhile, semiconductor lasers such as gallium arsenide and indium phosphide and the like prepared by taking high-purity arsine and phosphine as raw materials play an important role in the development of sensitive technologies such as aerospace and satellite remote sensing.

Impurities in the electron gas can cause the concentration of carriers to change, thereby affecting the optical and electrical properties of the device, and the luminous efficiency is reduced sharply, so that the high-purity electron gas has strict regulations on the content of the impurities, generally less than 100 ppb. The analysis of impurities in highly toxic gases in electronic gases uses a gas chromatograph using the helium ion detector principle, which has the characteristics of high sensitivity, wide linear range, small sample usage and the like. But because the particularity of electron gas can take place chemical reaction in instrument pipeline inside, if adsorb on the pipeline inner wall to form and block up, when forming and block up at instrument tail gas export, but traditional detecting instrument is when the pipeline is inside to take place to block up, can't investigate and maintain, and light then influences the instrument and detects the limit, will lead to the instrument paralysis unable to use when serious. In addition, the traditional detection instrument is large in size, tail gas treatment needs to be carried out at a fixed position, and the use flexibility is not enough.

SUMMERY OF THE UTILITY MODEL

The utility model discloses the technical problem that will solve lies in how simple swift inside pipeline that takes place to block up of investigation, guarantees the instrument safe handling.

The utility model discloses a following technical means realizes solving above-mentioned technical problem:

the utility model provides a tail gas adsorption device, the device includes gas chromatograph, gas chromatograph's air inlet is connected carrier gas transmission pipeline, gas chromatograph's each way gas vent all is connected with one and adsorbs the bucket, the air inlet and the gas vent that adsorb the bucket are connected for the cutting ferrule, it is filled with the absorption filler to adsorb the bucket intussuseption.

The utility model is different from the traditional single tail gas treatment device, the traditional single tail gas treatment device collects all tail gas into a total outlet for discharging, when a certain branch of the gas chromatograph is blocked, all branches need to be separately disassembled for investigation; meanwhile, the multi-channel carrier gas exhausts simultaneously, so that transient congestion can be caused in the use process; in addition, the equipment for collecting the multiple carrier gases is bulky and can only be fixed at a certain position for use. In the scheme, each path of exhaust port of the gas chromatograph is connected with an adsorption barrel, adsorption filler is filled in the adsorption barrel to adsorb toxic gas, and when blockage occurs, the blockage of the path can be judged by directly measuring the flow from the outlet of the adsorption barrel by using an electronic flowmeter, so that the method is simple and rapid; the multichannel is separately discharged and can not cause short-time jam, and the adsorption barrel is small in size and can be directly hung on the back of the panel, so that the adsorption barrel is small in size, light in weight and convenient to move.

Furthermore, filter screens are uniformly arranged at the air inlet and the air outlet of the adsorption barrel.

Furthermore, gaskets are respectively arranged at the air inlet and the air outlet of the adsorption barrel.

Furthermore, a sealing tube is arranged at the air outlet of the adsorption barrel, and a color-changeable indicator is filled in the sealing tube.

Further, the ferrule employs a NPT transition 1/8 ferrule interface.

Further, the adsorption filler adopts activated carbon.

Further, the adsorption barrel is a T33 barrel.

The utility model has the advantages that:

(1) the utility model is different from the traditional single tail gas treatment device, the traditional single tail gas treatment device collects all tail gas into a total outlet for discharging, when a certain branch of the gas chromatograph is blocked, all branches need to be separately disassembled for investigation; meanwhile, the multi-channel carrier gas exhausts simultaneously, so that transient congestion can be caused in the use process; in addition, the equipment for collecting the multiple carrier gases is large in size and can only be fixed at a certain position for use. In the scheme, each path of exhaust port of the gas chromatograph is connected with an adsorption barrel, adsorption filler is filled in the adsorption barrel to adsorb toxic gas, and when blockage occurs, the blockage of the path can be judged by directly measuring the flow from the outlet of the adsorption barrel by using an electronic flowmeter, so that the method is simple and rapid; the multichannel is separately discharged and can not cause short-time jam, and the adsorption barrel is small in size and can be directly hung on the back of the panel, so that the adsorption barrel is small in size, light in weight and convenient to move.

(2) Two interfaces in the adsorption barrel are provided with filter screens to prevent adsorption fillers from scattering.

(3) Set up the packing ring at two knecks of absorption bucket to reinforcing leakproofness prevents that tail gas from revealing.

(4) Set up the sealed tube in the absorption bucket exit, but be equipped with the color changing indicator in the sealed tube, when the indicator becomes black grey by blue, explain promptly that the inside filler of absorption bucket needs to be changed, ensure that absorption bucket normally uses.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

FIG. 1 is a schematic view of tail gas adsorption of a conventional tail gas adsorption unit;

fig. 2 is a tail gas adsorption schematic diagram of the middle tail gas adsorption device of the present invention.

Detailed Description

To make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the embodiments of the present invention are combined to clearly and completely describe the technical solution in the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without making creative efforts belong to the protection scope of the present invention.

Referring to fig. 2, the present embodiment provides a tail gas adsorption device, the device includes a gas chromatograph 20, a carrier gas transmission pipeline is connected to an air inlet of the gas chromatograph 20, each path of air outlet of the gas chromatograph 20 is connected with an adsorption bucket 10, the air inlet and the air outlet of the adsorption bucket 10 are connected by a ferrule, and the adsorption bucket 10 is filled with an adsorption filler.

It should be noted that, the tail gas treatment principle of the traditional single tail gas treatment device refers to fig. 1, which summarizes all tail gases into one path of total outlet for discharge, and when a certain branch of the gas chromatograph is blocked, all branches need to be separately disassembled for investigation; meanwhile, the multi-channel carrier gas exhausts simultaneously, so that transient congestion can be caused in the use process; in addition, the equipment for collecting the multiple carrier gases is large in size and can only be fixed at a certain position for use.

In the embodiment, each path of exhaust port of the gas chromatograph 20 is connected with an adsorption barrel 10, the adsorption barrel 10 is filled with adsorption filler to adsorb toxic gas, and when blockage occurs, the blockage of the path can be judged by directly measuring the flow from the outlet of the adsorption barrel 10 by using an electronic flow meter, so that the method is simple, accurate and rapid; multipath separated discharge can not cause transient congestion, and the adsorption barrel 10 is small in size, can be directly hung on the back of the panel, is small in size, light in weight and convenient to move.

In one embodiment, the air inlet and the air outlet of the adsorption bucket 10 are both provided with a filter screen.

It should be noted that, the filter screens are arranged at the two interfaces in the adsorption barrel 10 to prevent the adsorption packing from scattering.

In one embodiment, gaskets are disposed at the air inlet and the air outlet of the adsorption bucket 10.

It should be noted that, gaskets are disposed at two interfaces of the adsorption barrel 10 to enhance the sealing performance and prevent the leakage of the exhaust gas.

It is understood that the gasket used may be a plastic gasket, etc., and the present embodiment is not particularly limited.

In one embodiment, a sealed tube is provided at the air outlet of the adsorption bucket 10, and the sealed tube is filled with a color-changeable indicator.

When the indicator changes from blue to black and gray, the analysis of the sample is stopped for 2 hours, the adsorption device is removed with the protective mask, the filler in the adsorption barrel 10 is replaced, and the indicator can be used normally after the replacement is finished.

In one embodiment, the ferrule employs an NPT transition 1/8 ferrule interface.

It should be noted that, in this embodiment, an 1/8316 stainless steel pipeline is connected to the outlet of the gas chromatograph 20 and the air inlet of the adsorption barrel 10 by a ferrule; 1/16 clamp sleeves are adopted to fixedly connect the exhaust ports and the exhaust pipes in the gas chromatograph 20, wherein each path of carrier gas in the gas chromatograph 20 has different functions. The gas detector is provided with protective gas, purge gas and carrier gas which push sample gas to enter the detector, wherein some carrier gas channels need gas to pass through a No. 1 valve and a No. 2 valve inside the detector.

In one embodiment, the adsorptive filler is activated carbon.

It should be noted that the filler used in this embodiment is activated carbon, which is suitable for analyzing the sample gas of phosphane arsine, and those skilled in the art may also select one or more other fillers to be loaded into the adsorption bucket 10 according to the sample gas actually analyzed.

In one embodiment, the adsorbent cartridge 10 is a T33 cartridge.

The working process of the tail gas adsorption device in the embodiment is as follows:

(1) turning on the gas chromatograph 20: and (3) turning on a power supply of the gas chromatograph 20, starting temperature control, stabilizing the helium ion detector after the helium ion detector is subjected to high voltage application for half an hour, observing that the detector can be normally used after a baseline is stabilized, and if the detector signal is suddenly high or suddenly low or continuously high after the high voltage application is not performed, checking whether the connecting pipeline is congested or not.

(2) Replacing the adsorption filler: when the indicator is changed from blue to black and gray, the analysis of the sample is stopped for 2 hours, the adsorption device is disassembled with the protective mask, the internal filler is replaced, and the indicator can be normally used after the replacement is finished.

The tail gas adsorption equipment that this embodiment provided can regard as the portable tail gas device of single type, can distinguish simultaneously with inside all exhalations (contain tail gas) of a platform instrument, so can protect the instrument inside to exhaust unblocked, easy investigation when the problem appears, easy maintenance to it can have the function that tail gas adsorbs the processing simultaneously concurrently to adsorb the intussuseption and be filled with the filler in the bucket 10.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

Although embodiments of the present invention have been shown and described, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art without departing from the scope of the present invention.

Claims (7)

1. The utility model provides a tail gas adsorption equipment, its characterized in that, the device includes gas chromatograph, gas chromatograph's air inlet is connected the carrier gas and is transmitted the pipeline, each way gas vent of gas chromatograph all is connected with an adsorption bucket, the air inlet and the gas vent of adsorption bucket are cutting ferrule and are connected, the intussuseption of adsorption bucket is filled with the adsorption filler.

2. The tail gas adsorption device of claim 1, wherein the air inlet and the air outlet of the adsorption barrel are both provided with a filter screen.

3. The tail gas adsorption device of claim 1, wherein gaskets are disposed at the gas inlet and the gas outlet of the adsorption barrel.

4. The exhaust gas adsorption device according to claim 1, wherein a sealing tube is disposed at the gas outlet of the adsorption barrel, and a color-changeable indicator is filled in the sealing tube.

5. The exhaust gas adsorption device of claim 1, wherein the ferrule employs an NPT transition 1/8 ferrule interface.

6. The exhaust gas adsorption device of claim 1, wherein the adsorbent packing is activated carbon.

7. The tail gas adsorption device of claim 1, wherein the adsorption barrel is a T33 barrel.

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