CN217062042U - Thimble aligning mechanism - Google Patents
Thimble aligning mechanism Download PDFInfo
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- CN217062042U CN217062042U CN202220598608.9U CN202220598608U CN217062042U CN 217062042 U CN217062042 U CN 217062042U CN 202220598608 U CN202220598608 U CN 202220598608U CN 217062042 U CN217062042 U CN 217062042U
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- eccentric wheel
- thimble
- power source
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Abstract
The utility model discloses a thimble counterpoint mechanism, including Y axle power mechanism, X axle power mechanism and Z axle power mechanism. The Y-axis power mechanism is provided with a Y-axis power source and a Y-axis movable seat which is in driving connection with the Y-axis power source through a first eccentric wheel component; the X-axis power mechanism is arranged on the Y-axis movable seat and is provided with an X-axis power source and an X-axis movable part in driving connection with the X-axis power source; the Z-axis power mechanism is arranged on the X-axis movable part and is provided with a Z-axis power source and an ejector pin mounting support in driving connection with the Z-axis power source through a second eccentric wheel assembly, and an ejector pin is mounted on the ejector pin mounting support. The utility model discloses a correction in position is realized through the adjustment of YZ direction to thimble counterpoint mechanism, ensures to get material thimble center and pick up the arm center and all coincide every time.
Description
Technical Field
The utility model relates to a semiconductor processing equipment, specific saying so relates to a thimble counterpoint mechanism.
Background
In the field of semiconductors, wafer sorting is used as an important link in the production process of semiconductors, the crystal taking efficiency and the yield are particularly important, a single material taking arm or double-arm material taking is adopted in the traditional crystal taking and sorting process, the efficiency of the two material taking modes is low, and the yield of the two material taking modes is low.
Therefore, a thimble aligning mechanism needs to be developed, the defects of the two material taking modes are overcome, and the yield is ensured and the efficiency is improved.
SUMMERY OF THE UTILITY MODEL
Not enough to prior art, the to-be-solved technical problem of the utility model lies in providing a thimble counterpoint mechanism, and the purpose of designing this thimble counterpoint mechanism is to solve traditional wafer and select crystal yield and get the problem that the brilliant inefficiency.
In order to solve the technical problem, the utility model discloses a following scheme realizes: the utility model discloses a thimble counterpoint mechanism, include:
the Y-axis power mechanism is provided with a Y-axis power source and a Y-axis movable seat which is in driving connection with the Y-axis power source through a first eccentric wheel component;
the X-axis power mechanism is arranged on the Y-axis movable seat and is provided with an X-axis power source and an X-axis movable part in driving connection with the X-axis power source;
and the Z-axis power mechanism is arranged on the X-axis movable part and is provided with a Z-axis power source and an ejector pin mounting bracket in driving connection with the Z-axis power source through a second eccentric wheel component, and an ejector pin is mounted on the ejector pin mounting bracket.
Furthermore, the Y-axis power source is a first motor, and the first motor is fixed on a seat plate;
the first eccentric wheel assembly comprises a first eccentric wheel and a Y-axis connecting rod, the first eccentric wheel is mounted on a driving rod of the first motor and is rotatably connected with one end of the Y-axis connecting rod, the other end of the Y-axis connecting rod is rotatably connected with a first connecting block, and the first connecting block is connected with the Y-axis movable seat;
the Y-axis movable seat is connected to a Y-axis guide rail in a sliding mode, and the Y-axis guide rail is fixed to the seat plate.
Furthermore, a first angle sensor used for sensing the rotating angle of the first eccentric wheel is arranged beside the first eccentric wheel.
Furthermore, the Y-axis movable seat is provided with a vertical support, the vertical support is provided with an X-axis guide rail, and the X-axis movable part is connected to the X-axis guide rail in a sliding manner;
the X-axis power source is a linear cylinder which is fixed on the vertical support and is in driving connection with the X-axis movable part and drives the X-axis movable part to move on the X-axis guide rail.
Further, the Z-axis power source is a second motor;
the second eccentric wheel assembly comprises a second eccentric wheel and a Z-axis connecting rod, the second eccentric wheel is installed on a driving rod of the second motor and is rotatably connected with one end of the Z-axis connecting rod, the other end of the Z-axis connecting rod is rotatably connected with a second connecting block, and the second connecting block is connected with the ejector pin mounting support.
Furthermore, the X-axis movable part is provided with two Z-axis guide rails, and the thimble mounting bracket is in sliding connection with the two Z-axis guide rails.
Furthermore, a second angle sensor used for sensing the rotating angle of the second eccentric wheel is arranged beside the second eccentric wheel.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses a thimble counterpoint mechanism passes through the diaxon linkage, makes the thimble can accurate counterpoint. The Y-axis power mechanism and the Z-axis power mechanism are driven by eccentric wheel components, eccentric wheels of the eccentric wheel components drive connecting rods, the connecting rods push the movable parts to move on the guide rails, and the YZ of the actual ejector pins moves. When taking the crystal grain, the linear cylinder extends out, and the thimble is close to the position of the crystal grain; when the crystal grain is not taken out, the thimble retracts and exits.
The utility model discloses a correction in the position is realized through the adjustment of YZ direction to thimble counterpoint mechanism, ensures to get material thimble center and picking arm center and all coincide every time.
Drawings
Fig. 1 is a schematic structural view of a viewing angle of the thimble alignment mechanism of the present invention.
Fig. 2 is a schematic structural view of another view angle of the thimble alignment mechanism of the present invention.
Fig. 3 is a schematic structural view of the orthogonal distribution of the two sets of thimble aligning mechanisms of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, and thus the protection scope of the present invention is more clearly and clearly defined. It should be apparent that the described embodiments of the present invention are only some embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; the two elements may be directly connected or indirectly connected through an intermediate medium, or may be communicated with each other inside the two elements, or may be wirelessly connected or wired connected. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example 1: the utility model discloses a concrete structure as follows:
referring to fig. 1-2, the present invention provides a thimble alignment mechanism, including:
the Y-axis power mechanism is provided with a Y-axis power source 2 and a Y-axis movable seat 11 which is in driving connection with the Y-axis power source 2 through a first eccentric wheel component;
an X-axis power mechanism mounted on the Y-axis movable base 11 and having an X-axis power source 12 and an X-axis movable portion 13 drivingly connected to the X-axis power source 12;
and the Z-axis power mechanism is arranged on the X-axis movable part 13 and is provided with a Z-axis power source 6 and an ejector pin mounting bracket which is in driving connection with the Z-axis power source 6 through a second eccentric wheel component, and the ejector pin 10 is mounted on the ejector pin mounting bracket.
A preferred technical solution of this embodiment: the Y-axis power source 2 is a first motor which is fixed on a seat plate;
the first eccentric wheel assembly comprises a first eccentric wheel 3 and a Y-axis connecting rod 4, the first eccentric wheel 3 is mounted on a driving rod of the first motor, the first eccentric wheel 3 is rotatably connected with one end of the Y-axis connecting rod 4, the other end of the Y-axis connecting rod 4 is rotatably connected with a first connecting block, and the first connecting block is connected with the Y-axis movable seat 11;
the Y-axis movable seat 11 is connected to the Y-axis guide rail 5 in a sliding mode, and the Y-axis guide rail 5 is fixed to the seat plate.
A preferred technical solution of this embodiment: a first angle sensor used for sensing the rotating angle of the first eccentric wheel 3 is arranged beside the first eccentric wheel 3.
A preferred technical solution of this embodiment: the Y-axis movable seat 11 is provided with a vertical bracket which is provided with an X-axis guide rail 14, and the X-axis movable part 13 is connected to the X-axis guide rail 14 in a sliding manner;
the X-axis power source 12 is a linear cylinder which is fixed on the vertical support and is in driving connection with the X-axis movable part 13, and the linear cylinder drives the X-axis movable part 13 to move on the X-axis guide rail.
A preferred technical solution of this embodiment: the Z-axis power source 6 is a second motor;
the second eccentric wheel assembly comprises a second eccentric wheel 7 and a Z-axis connecting rod 8, the second eccentric wheel 7 is installed on a driving rod of the second motor, the second eccentric wheel 7 is rotatably connected with one end of the Z-axis connecting rod 8, the other end of the Z-axis connecting rod 8 is rotatably connected with a second connecting block, and the second connecting block is connected with the ejector pin mounting support.
A preferred technical solution of this embodiment: the X-axis movable part 13 is provided with two Z-axis guide rails 9, and the thimble mounting bracket is in sliding connection with the two Z-axis guide rails 9.
A preferred technical solution of this embodiment: and a second angle sensor for sensing the rotating angle of the second eccentric wheel 7 is arranged beside the second eccentric wheel 7.
Example 2:
the utility model discloses the implementation as follows:
as shown in fig. 3, fig. 3 is a schematic structural diagram of the orthogonal distribution of the two sets of thimble aligning mechanisms according to the present invention. The utility model discloses a thimble counterpoint mechanism is synthetic by the motion of two directions of Y axle and Z axle, and wherein the Y axle drives first eccentric wheel 3 by first motor and rotates, and first eccentric wheel 3 drives the swing of Y axle connecting rod 4 and takes place Y axial displacement, and Y axle connecting rod 4 drives Y axle sliding seat 11 and is Y axial motion to realize the motion of Y axle sliding seat 11 at the high-speed high accuracy of Y axle.
The second motor drives the Z-axis connecting rod 8 to swing through the second eccentric wheel 7, the Z-axis connecting rod 8 is enabled to generate Z-axis axial displacement, and the Z-axis connecting rod 8 drives the second connecting block and the thimble mounting bracket to move along the Z-axis guide rail 9. Therefore, the Z-axis high-speed and high-precision movement of the thimble mounting bracket is realized.
Different positions of the crystal taking arms are corresponded by setting different position parameters, so that high-speed and high-precision thimble alignment corresponding to different arms is realized.
Aiming at different material taking arms, the ejector pin aligning machine realizes position correction through YZ direction adjustment, and ensures that the center of the material taking ejector pin and the center of the material taking arm coincide every time.
When taking the crystal grain, the linear cylinder extends out, and the thimble 10 is close to the position of the crystal grain; when the crystal grain is not taken out, the thimble 10 retracts and exits.
To sum up, the utility model discloses a thimble counterpoint mechanism makes the thimble can accurate counterpoint through the diaxon linkage. The Y-axis power mechanism and the Z-axis power mechanism are driven by eccentric wheel components, eccentric wheels of the eccentric wheel components drive connecting rods, the connecting rods push the movable parts to move on the guide rails, and the YZ of the actual ejector pins moves. When taking the crystal grain, the linear cylinder extends out, and the thimble is close to the position of the crystal grain; when the crystal grain is not taken, the thimble retracts and exits. The utility model discloses a correction in the position is realized through the adjustment of YZ direction to thimble counterpoint mechanism, ensures to get material thimble center and picking arm center and all coincide every time.
The above description is only the preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all the equivalent structures or equivalent processes that are used in the specification and drawings of the present invention can be directly or indirectly applied to other related technical fields, and all the same principles are included in the scope of the present invention.
Claims (7)
1. The utility model provides a thimble aligning gear which characterized in that includes:
the Y-axis power mechanism is provided with a Y-axis power source (2) and a Y-axis movable seat (11) which is in driving connection with the Y-axis power source (2) through a first eccentric wheel component;
the X-axis power mechanism is arranged on the Y-axis movable seat (11) and is provided with an X-axis power source (12) and an X-axis movable part (13) in driving connection with the X-axis power source (12);
and the Z-axis power mechanism is arranged on the X-axis movable part (13), and is provided with a Z-axis power source (6) and a thimble mounting bracket which is in driving connection with the Z-axis power source (6) through a second eccentric wheel component, and the thimble mounting bracket is provided with a thimble (10).
2. A pin aligning mechanism according to claim 1, wherein said Y-axis power source (2) is a first motor fixed to a base plate;
the first eccentric wheel assembly comprises a first eccentric wheel (3) and a Y-axis connecting rod (4), the first eccentric wheel (3) is mounted on a driving rod of the first motor, the first eccentric wheel (3) is rotatably connected with one end of the Y-axis connecting rod (4), the other end of the Y-axis connecting rod (4) is rotatably connected with a first connecting block, and the first connecting block is connected with a Y-axis movable seat (11);
the Y-axis movable seat (11) is connected to a Y-axis guide rail (5) in a sliding mode, and the Y-axis guide rail (5) is fixed on the seat plate.
3. A pin aligning mechanism according to claim 1, wherein a first angle sensor for sensing a rotation angle of the first eccentric wheel (3) is disposed beside the first eccentric wheel (3).
4. A thimble aligning mechanism according to claim 1, wherein said Y-axis movable seat (11) has a vertical frame provided with an X-axis guide rail (14), said X-axis movable portion (13) being slidably connected to the X-axis guide rail (14);
the X-axis power source (12) is a linear cylinder which is fixed on the vertical support and is in driving connection with the X-axis movable part (13), and the linear cylinder drives the X-axis movable part (13) to move on the X-axis guide rail.
5. A pin aligning mechanism according to claim 1, wherein the Z-axis power source (6) is a second motor;
the second eccentric wheel assembly comprises a second eccentric wheel (7) and a Z-axis connecting rod (8), the second eccentric wheel (7) is installed on a driving rod of the second motor, the second eccentric wheel (7) is rotatably connected with one end of the Z-axis connecting rod (8), the other end of the Z-axis connecting rod (8) is rotatably connected with a second connecting block, and the second connecting block is connected with the ejector pin mounting support.
6. A thimble alignment mechanism according to claim 5, wherein said X-axis movable portion (13) has two Z-axis guides (9), said thimble mounting bracket being slidably engaged with said two Z-axis guides (9).
7. A thimble alignment mechanism according to claim 5, characterized in that a second angle sensor for sensing the rotation angle of said second eccentric (7) is arranged beside said second eccentric (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220598608.9U CN217062042U (en) | 2022-03-18 | 2022-03-18 | Thimble aligning mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220598608.9U CN217062042U (en) | 2022-03-18 | 2022-03-18 | Thimble aligning mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217062042U true CN217062042U (en) | 2022-07-26 |
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ID=82490367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220598608.9U Active CN217062042U (en) | 2022-03-18 | 2022-03-18 | Thimble aligning mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217062042U (en) |
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2022
- 2022-03-18 CN CN202220598608.9U patent/CN217062042U/en active Active
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