CN217060399U - Automatic detection equipment for electrical characteristics of semiconductor chip - Google Patents
Automatic detection equipment for electrical characteristics of semiconductor chip Download PDFInfo
- Publication number
- CN217060399U CN217060399U CN202122700227.5U CN202122700227U CN217060399U CN 217060399 U CN217060399 U CN 217060399U CN 202122700227 U CN202122700227 U CN 202122700227U CN 217060399 U CN217060399 U CN 217060399U
- Authority
- CN
- China
- Prior art keywords
- fixedly connected
- electrical characteristics
- receiving box
- sliding
- control part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The utility model provides an automatic detection device for electrical characteristics of semiconductor chips, which relates to the technical field of semiconductor processing and comprises a slide bar, wherein the inner side of the slide bar is fixedly connected with a lead, the lead is connected with a control part, the bottom end of the slide bar is fixedly connected with a limiting piece, the top end of the limiting piece is fixedly connected with a reset spring, the top end of the reset spring is fixed with the bottom end of a matrix tube, the bottom end of the limiting piece is fixedly connected with a detection probe, after identifying chip circuit contacts below through a left group of identification cameras and a right group of identification cameras, image information is transmitted to the control part, the control part can control the bottom of a workbench to be electrified with the detection probe at the position corresponding to the circuit contacts, the control part controls a vertical electric push rod to run, a telescopic part of the vertical electric push rod to extend downwards to drive the workbench to move downwards, and the detection probe can be moved downwards from the bottom of the matrix tube to be contacted with the circuit contacts of the fixed chip in a horizontal moving way, the problem of current device detect the chip through two probes, detection efficiency is lower is solved.
Description
Technical Field
The utility model belongs to the technical field of the semiconductor processing, more specifically say, in particular to semiconductor chip electrical characteristic automatic check out test set.
Background
The semiconductor chip needs to carry out electrical characteristic detection before encapsulating to detect the circular telegram condition of its circuit contact, be an extremely important step in the semiconductor course of working, the check out test set who uses detects the chip through two probes at present, detection efficiency is lower, and existing equipment can not realize the centre gripping and the rigidity to the chip automatically, and existing device can not prevent that the too big chip deformation damage that causes of centre gripping dynamics.
In view of the foregoing, there is a need for an efficient apparatus for detecting electrical characteristics of semiconductor chips with automatic inspection equipment.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a semiconductor chip electrical characteristics automatic check out test set to solve the lower problem of current device detection efficiency.
The utility model relates to a purpose and efficiency of semiconductor chip electrical characteristic automatic check out test set are reached by following specific technological means:
an automatic detection device for electrical characteristics of a semiconductor chip comprises a receiving box;
the rear end of the bearing box is fixedly connected with a bottom plate, and the bottom of the inner side of the bearing box is fixedly connected with a bottom groove;
a sliding groove vertically penetrates through the top of the bearing box;
the inner side of the bottom groove is fixedly connected with a servo motor, and a transmission gear is coaxially connected at the right end of a rotating shaft of the servo motor;
the top of the bottom plate at the rear end of the receiving box is fixedly connected with a vertical frame, a sliding rail is fixedly connected to the vertical face of the front end of the vertical frame, and a sliding table is arranged on the front side of the sliding rail in a sliding connection mode;
the top of the bearing box is fixedly connected with a bearing table;
the right side of the top of the bottom plate at the rear end of the bearing box is fixedly connected with a control part.
Furthermore, a screw rod A is arranged at the left end of the inner side of the bearing box through hinged connection, and a ball nut seat A is arranged on the outer side of the screw rod A through sliding connection.
Furthermore, a screw rod B is arranged at the right end of the inner side of the bearing box in a hinged connection mode, a ball nut seat B is arranged on the outer side of the screw rod B in a sliding connection mode, and the screw direction of the screw rod B is opposite to that of the screw rod A.
Furthermore, a linkage gear is arranged at the right end of the screw rod A through coaxial connection, the right end of the linkage gear is coaxially connected with the left end of the screw rod B, and the bottom of the linkage gear is meshed with the transmission gear.
Furthermore, the tops of the ball nut seat A and the ball nut seat B are fixedly connected with parallel sheets, the inner sides of the parallel sheets are fixedly connected with clamping arcs, vertical grooves A vertically penetrate through the outer sides of the clamping arcs, and pressure sensors are fixedly connected to the vertical faces of the tail ends of the inner sides of the clamping arcs.
Furthermore, a circular through hole is formed in the top of the bearing table, a photosensitive sensor is fixedly connected to the inner side of the circular through hole, and vertical grooves B are vertically penetrated through the left side and the right side of the bearing table.
Further, the front end of the top of the vertical frame is fixedly connected with a vertical electric push rod, the bottom end of a telescopic part of the vertical electric push rod is fixedly connected with a workbench, the workbench is fixedly connected with the front end of the sliding table, and the bottom of the workbench is fixedly connected with a matrix tube.
Furthermore, a sliding rod is arranged on the inner side of the matrix tube through sliding connection, a conducting wire is fixedly connected to the inner side of the sliding rod and is connected with the control portion, a limiting piece is fixedly connected to the bottom end of the sliding rod, a reset spring is fixedly connected to the top end of the limiting piece, the top end of the reset spring is fixed to the bottom end of the matrix tube, a detection probe is fixedly connected to the bottom end of the limiting piece and is connected with the conducting wire on the inner side of the sliding rod, and identification cameras are fixedly connected to the left side and the right side of the workbench.
The utility model discloses at least, include following beneficial effect:
1. the utility model discloses a set up the matrix tube, after discerning the chip circuit contact below through left and right two sets of discernment cameras, transmit image information to the control part, can make the control part control workstation bottom and circuit contact correspond the position detect probe to energize, through the operation of control part control vertical electric push rod, make its pars contractilis downwardly extending drive workstation move down vertically, can make detect probe from the circuit contact of the chip that matrix tube bottom translation contact is fixed, through reset spring elastic compression, can make multiunit detect probe bottom stabilize and contact the chip, can prevent probe bending deformation or cause the puncture destruction to the chip, through detecting probe electricity detection, can detect chip circuit contact circular telegram condition, electrical data can show through the control part display, through multiunit detect to chip surface circuit contact synchronous suitability detection, can improve the detection efficiency
2. The utility model discloses a set up the parallel sheet, through the operation of control portion control servo motor, can make servo motor drive gear wheel and rotate, drive through drive gear wheel and rotate rather than the engaged linkage gear, can make and carry out synchronous rotation with the coaxial lead screw A of linkage gear and lead screw B, lead through the opposite screw thread of two sets of lead screws, can make ball nut seat A and ball nut seat B drive two sets of parallel sheets at its top and carry out opposite direction's translation, it is spacing to carry out the centre gripping to the chip edge to make the inboard centre gripping arc of parallel sheet, can be convenient for visit and dock to it through fixed position, carry out electrical property detection with this.
3. The utility model discloses a set up pressure sensor, after two sets of centre gripping arcs docked, respond to the back through its inboard pressure sensor, with signal conduction to control part, can make control part control servo motor stall, can prevent that the too big chip that causes of centre gripping dynamics warp the damage, can stabilize the centre gripping to the chip.
4. The utility model discloses a set up photosensitive sensor, place the chip behind the accepting table top, respond to the back through photosensitive sensor to top light intensity, can operate through control part circuit signal control servo motor, can realize the centre gripping and the rigidity to the chip automatically.
Drawings
Fig. 1 is a schematic view of the overall overlooking three-dimensional structure of the present invention.
Fig. 2 is a schematic side-sectional three-dimensional structure of the receiving box of the present invention.
Fig. 3 is a schematic view of the overall bottom perspective structure of the present invention.
Fig. 4 is a partially enlarged schematic view of B in fig. 3 according to the present invention.
In the drawings, the corresponding relationship between the component names and the reference numbers is as follows:
1. a receiving box;
101. a bottom recess; 102. a chute; 103. a vertical frame; 1031. a slide rail; 1032. a sliding table;
2. a servo motor;
201. a transmission gear; 202. a linkage gear;
3. a screw mandrel A;
301. a ball nut seat A;
4. a screw mandrel B;
401. a ball nut seat B;
5. a parallel sheet;
501. clamping an arc; 502. a vertical slot A; 503. a pressure sensor;
6. a receiving table;
601. a photosensitive sensor; 602. a vertical groove B;
7. a vertical electric push rod;
701. a work table; 702. a matrix tube; 703. a slide bar; 7031. a limiting sheet; 7032. a return spring; 704. detecting the probe; 705. identifying a camera;
8. a control unit.
Detailed Description
The following describes embodiments of the present invention in further detail with reference to the drawings and examples. The following examples are provided to illustrate the invention but are not intended to limit the scope of the invention.
In the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "coaxial," "bottom," "one end," "top," "middle," "other end," "upper," "side," "top," "inner," "front," "center," "two end," and the like are used in an orientation or positional relationship that is indicated based on the orientation or positional relationship shown in the drawings for ease of description and simplicity of description, rather than to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and is not to be construed as limiting the invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounting," "setting," "connecting," "fixing," "screwing" and the like are to be construed broadly, and may be, for example, a fixed connection, a detachable connection, or an integral part; can be mechanically or electrically connected; they may be directly connected or indirectly connected through an intermediate medium, and may be connected through the inside of two elements or in an interaction relationship between two elements, unless otherwise specifically defined, and the specific meaning of the above terms in the present invention will be understood by those skilled in the art according to specific situations.
The embodiment is as follows:
as shown in figures 1 to 4: the utility model provides an automatic detection device for electrical characteristics of a semiconductor chip, which comprises a receiving box 1; the rear end of the receiving box 1 is fixedly connected with a bottom plate, and the bottom of the inner side of the receiving box 1 is fixedly connected with a bottom groove 101; a chute 102 vertically penetrates through the top of the receiving box 1; the servo motor 2 is fixedly connected to the inner side of the bottom groove 101, and a transmission gear 201 is coaxially connected to the right end of a rotating shaft of the servo motor 2; a vertical frame 103 is fixedly connected to the top of the bottom plate at the rear end of the receiving box 1, a slide rail 1031 is fixedly connected to the front end vertical face of the vertical frame 103, and a sliding table 1032 is arranged on the front side of the slide rail 1031 in a sliding connection manner; the top of the receiving box 1 is fixedly connected with a receiving platform 6; the right side of the top of the bottom plate at the rear end of the receiving box 1 is fixedly connected with a control part 8.
As shown in fig. 2, the left end of the inner side of the receiving box 1 is provided with a screw rod A3 through a hinge, the outer side of the screw rod A3 is provided with a ball nut seat a301 through a sliding connection, the right end of the inner side of the receiving box 1 is provided with a screw rod B4 through a hinge, the outer side of the screw rod B4 is provided with a ball nut seat B401 through a sliding connection, the right end of the screw rod A3 is provided with a linkage gear 202 through a coaxial connection, the right end of the linkage gear 202 is coaxially connected with the left end of the screw rod B4, the bottom of the linkage gear 202 is engaged with the transmission gear 201, a circular chip which is not cut and packaged is placed on the top surface of the receiving platform 6, the servo motor 2 is controlled by the control part 8 to operate, the servo motor 2 can drive the transmission gear 201 to rotate, the linkage gear 202 engaged with the transmission gear 201 to rotate, the screw rod A3 and the screw rod B4 which are coaxial with the linkage gear 202 can synchronously rotate, and guide through two sets of opposite screw rods, can make ball nut seat A301 and ball nut seat B401 drive two sets of parallel sheets 5 at its top and carry out the translation of opposite direction, can make the inboard centre gripping arc 501 of parallel sheet 5 carry out the centre gripping spacing to the chip edge, can be convenient for the probe through fixed position to it docks to this carries out electrical detection.
As shown in fig. 1 and 2, a parallel plate 5 is fixedly connected to the tops of a ball nut seat a301 and a ball nut seat B401, a clamping arc 501 is fixedly connected to the inner side of the parallel plate 5, a vertical groove a502 vertically penetrates through the outer side of the clamping arc 501, and a pressure sensor 503 is fixedly connected to the vertical surface of the inner end of the clamping arc 501.
As shown in fig. 2, circular through-hole has been seted up at the 6 tops of accepting the platform, the inboard fixedly connected with photosensitive sensor 601 of circular through-hole, photosensitive sensor 601 electrical property is connected with the control part 8, 6 left and right sides of accepting the platform run through perpendicularly has vertical slot B602, place the chip behind 6 tops of accepting the platform, after responding to top light intensity through photosensitive sensor 601, can operate through 8 circuit signal control servo motor 2 of control part, can realize automatic centre gripping and the rigidity to the chip.
As shown in fig. 3 and 4, a vertical electric push rod 7 is fixedly connected to the front end of the top of the vertical frame 103, a workbench 701 is fixedly connected to the bottom end of the telescopic portion of the vertical electric push rod 7, the workbench 701 is fixedly connected to the front end of the sliding table 1032, a matrix tube 702 is fixedly connected to the bottom of the workbench 701, a slide rod 703 is slidably connected to the inner side of the matrix tube 702, a conductive wire is fixedly connected to the inner side of the slide rod 703, the conductive wire is connected to the control portion 8, a position-limiting plate 7031 is fixedly connected to the bottom end of the slide rod 703, a return spring 7032 is fixedly connected to the top end of the position-limiting plate 7031, the top end of the return spring 7032 is fixed to the bottom end of the matrix tube 702, a detection probe 704 is fixedly connected to the bottom end of the position-limiting plate 7031, the detection probe 704 is connected to the conductive wire inside the slide rod 703, recognition cameras 705 are fixedly connected to the left and right sides of the workbench 701, after the chip circuit contacts below are recognized by the left and right recognition cameras 705, image information is transmitted to the control part 8, the control part 8 can control the detection probe 704 at the corresponding position at the bottom of the workbench 701 to be electrified, the vertical electric push rod 7 is controlled to operate through the control part 8, the telescopic part of the vertical electric push rod extends downwards to drive the workbench 701 to move downwards vertically, the detection probe 704 can be enabled to move downwards to contact with a circuit contact of a fixed chip in a translation mode, the reset spring 7032 is elastically compressed, the bottom ends of a plurality of groups of detection probes 704 can be enabled to be stably contacted with the chip, the probes can be prevented from being bent and deformed or causing puncture damage to the chip, the detection probe 704 is connected with electricity to detect, the electrifying condition of the circuit contact of the chip can be detected, and electrical data can be displayed through a display of the control part 8.
The pressure sensor 503 (model number J1086) mentioned in the embodiments of the present invention can be obtained through private customization or market purchase.
The specific use mode and function of the embodiment are as follows:
in the utility model, when in use, after the chip is placed on the top of the receiving platform 6, the light intensity at the top is sensed by the photosensitive sensor 601, the servo motor 2 can be controlled by the circuit signal of the control part 8 to operate, the servo motor 2 can drive the transmission gear 201 to rotate, the transmission gear 201 drives the linkage gear 202 engaged with the transmission gear to rotate, the screw A3 and the screw B4 which are coaxial with the linkage gear 202 can synchronously rotate, the guide is carried out by the opposite threads of the two sets of screws, the ball nut seat A301 and the ball nut seat B401 can drive the two sets of parallel sheets 5 at the top to translate in opposite directions, after the two sets of clamping arcs 501 are butted and are sensed by the pressure sensor 503 at the inner side of the clamping arcs, the signal is conducted to the control part 8, the control part 8 can control the servo motor 2 to stop operating, the deformation and the damage of the chip caused by the overlarge clamping force can be prevented, the chip can be stably clamped, the clamping arc 501 on the inner side of the parallel sheet 5 can clamp and limit the edge of the chip, the chip can be conveniently and electrically detected through the fixed position, after the chip circuit contacts below the chip are identified through the left and right groups of identification cameras 705, image information is transmitted to the control part 8, the control part 8 can control the detection probes 704 at the corresponding positions at the bottom of the workbench 701 to be electrified, the vertical electric push rod 7 is controlled by the control part 8 to operate, the telescopic part of the telescopic part extends downwards to drive the workbench 701 to vertically move downwards, the detection probes 704 can move downwards to contact the circuit contacts of the fixed chip in a translation way, the bottom ends of a plurality of groups of detection probes 704 can be stably contacted with the chip through elastic compression of the reset spring 7032, the bottom ends of the detection probes 704 can be prevented from bending and deforming or causing puncture damage to the chip, and the detection probes 704 can be electrically detected, the power-on condition of the chip circuit contact can be detected, and the electrical data can be displayed through a display of the control part 8.
The details of the present invention are not described in detail, but are well known to those skilled in the art.
The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to practitioners skilled in this art. The embodiment was chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.
Claims (8)
1. An automatic detection device for electrical characteristics of a semiconductor chip is characterized in that: comprises a receiving box (1);
the rear end of the receiving box (1) is fixedly connected with a bottom plate, and the bottom of the inner side of the receiving box (1) is fixedly connected with a bottom groove (101);
a sliding groove (102) vertically penetrates through the top of the receiving box (1);
the inner side of the bottom groove (101) is fixedly connected with a servo motor (2), and the right end of a rotating shaft of the servo motor (2) is coaxially connected with a transmission gear (201);
the top of the bottom plate at the rear end of the receiving box (1) is fixedly connected with a vertical frame (103), the front end vertical face of the vertical frame (103) is fixedly connected with a sliding rail (1031), and the front side of the sliding rail (1031) is provided with a sliding table (1032) through sliding connection;
the top of the receiving box (1) is fixedly connected with a receiving platform (6);
the right side of the top of the bottom plate at the rear end of the receiving box (1) is fixedly connected with a control part (8).
2. The automatic detecting equipment for electrical characteristics of semiconductor chips as claimed in claim 1, wherein the left end of the inside of the receiving box (1) is provided with a lead screw a (3) by hinge connection, and the outside of the lead screw a (3) is provided with a ball nut seat a (301) by sliding connection.
3. The automatic detecting equipment for electrical characteristics of semiconductor chips as claimed in claim 1, wherein the right end of the inner side of the receiving box (1) is provided with a lead screw B (4) by hinge connection, the outer side of the lead screw B (4) is provided with a ball nut seat B (401) by sliding connection, and the thread direction of the lead screw B (4) is opposite to that of the lead screw A (3).
4. The automatic detecting equipment for the electrical characteristics of the semiconductor chip as claimed in claim 2, wherein the right end of the screw rod A (3) is provided with a linkage gear (202) through coaxial connection, the right end of the linkage gear (202) is coaxially connected with the left end of the screw rod B (4), and the bottom of the linkage gear (202) is meshed with the transmission gear (201).
5. The automatic detecting equipment for the electrical characteristics of the semiconductor chip as claimed in claim 2, wherein the ball nut seat A (301) and the ball nut seat B (401) are fixedly connected with a parallel plate (5) at the top, a clamping arc (501) is fixedly connected with the inner side of the parallel plate (5), a vertical groove A (502) vertically penetrates through the outer side of the clamping arc (501), and a pressure sensor (503) is fixedly connected with the vertical surface of the tail end of the inner side of the clamping arc (501).
6. The automatic detecting equipment for the electrical characteristics of the semiconductor chip according to claim 1, wherein a circular through hole is formed at the top of the receiving platform (6), a photosensitive sensor (601) is fixedly connected to the inner side of the circular through hole, and vertical slots B (602) vertically penetrate through the left side and the right side of the receiving platform (6).
7. The automatic detecting equipment for the electrical characteristics of the semiconductor chip as claimed in claim 1, wherein a vertical electric pushing rod (7) is fixedly connected to the front end of the top of the vertical frame (103), a workbench (701) is fixedly connected to the bottom end of a telescopic part of the vertical electric pushing rod (7), the workbench (701) is fixedly connected to the front end of the sliding table (1032), and a matrix tube (702) is fixedly connected to the bottom of the workbench (701).
8. The automatic detecting equipment for the electrical characteristics of the semiconductor chip according to claim 7, wherein a sliding rod (703) is arranged inside the matrix tube (702) through a sliding connection, a conducting wire is fixedly connected inside the sliding rod (703), the conducting wire is connected with the control part (8), a limiting piece (7031) is fixedly connected with the bottom end of the sliding rod (703), a reset spring (7032) is fixedly connected with the top end of the limiting piece (7031), the top end of the reset spring (7032) is fixed with the bottom end of the matrix tube (702), a detecting probe (704) is fixedly connected with the bottom end of the limiting piece (7031), the detecting probe (704) is connected with the conducting wire inside the sliding rod (703), and the identifying cameras (705) are fixedly connected with the left side and the right side of the workbench (701).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122700227.5U CN217060399U (en) | 2021-11-05 | 2021-11-05 | Automatic detection equipment for electrical characteristics of semiconductor chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122700227.5U CN217060399U (en) | 2021-11-05 | 2021-11-05 | Automatic detection equipment for electrical characteristics of semiconductor chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217060399U true CN217060399U (en) | 2022-07-26 |
Family
ID=82475626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122700227.5U Active CN217060399U (en) | 2021-11-05 | 2021-11-05 | Automatic detection equipment for electrical characteristics of semiconductor chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217060399U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116148623A (en) * | 2023-03-23 | 2023-05-23 | 深圳市西渥智控科技有限公司 | LED intelligent testing device and testing method thereof |
-
2021
- 2021-11-05 CN CN202122700227.5U patent/CN217060399U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116148623A (en) * | 2023-03-23 | 2023-05-23 | 深圳市西渥智控科技有限公司 | LED intelligent testing device and testing method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN217060399U (en) | Automatic detection equipment for electrical characteristics of semiconductor chip | |
| CN112161558A (en) | Automatic detection system for probe stroke | |
| CN115144732A (en) | Computer chip packaging test equipment | |
| CN109030058A (en) | A kind of intellective dust collector head test equipment | |
| CN117571266B (en) | Projection lens flexible optical detection system and detection method | |
| CN212460081U (en) | Position adjusting mechanism for flash lamp detection device | |
| CN109632271A (en) | A kind of automotive rear-view mirror assembly pressure pulls out automatic detection device | |
| CN220154162U (en) | Flexible line way board fault short-term test device | |
| CN112394554A (en) | Crimping device for LCD glass | |
| CN208140597U (en) | The automatic testing tool of electric automobile power battery | |
| CN115420922A (en) | Copper bar resistance detection equipment | |
| CN211086510U (en) | Automatic detection device is used in controller production | |
| CN2457596Y (en) | Adjustable constant pressure probe drive frame | |
| CN105115710B (en) | Torque wrench life test machine | |
| CN221571366U (en) | Metal sheet assembly quality detection device | |
| CN113176477B (en) | Electronic part insulativity detection device with safety structure | |
| CN220289441U (en) | Appearance defect detector for keyboard | |
| CN103868459A (en) | Product height single-gap detecting device | |
| CN113049938A (en) | Bending performance testing device and method for semi-flexible or flexible circuit board | |
| CN219417196U (en) | Appearance detection equipment for ox horn capacitor | |
| CN215542896U (en) | Motor torque detection device and motor torque detection machine | |
| CN213398746U (en) | Special insertion module for data line testing machine and data line testing machine | |
| CN220437727U (en) | Screw rotation detection device | |
| CN217112456U (en) | Pressure measuring probe device and chip detection system | |
| CN112505389B (en) | NB acquisition terminal automatic checking device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |