CN217059905U

CN217059905U - Quick detection equipment for appearance defects of wafers

Info

Publication number: CN217059905U
Application number: CN202220716969.9U
Authority: CN
Inventors: 洪亚德; 陈松岩; 潘书万; 林中龙
Original assignee: Xiamen G First Oeic Co ltd
Current assignee: Xiamen G First Oeic Co ltd
Priority date: 2022-03-29
Filing date: 2022-03-29
Publication date: 2022-07-26
Anticipated expiration: 2032-03-29

Abstract

The utility model discloses a quick check out test set of wafer appearance imperfections, which comprises a frame, frame and wafer seat, the frame is equipped with a light trough and control panel, be equipped with the LED banks in the light trough, frame and wafer seat are installed respectively on the frame, be equipped with detection camera lens and XY loose axle in the frame, detection camera lens is installed on the XY loose axle, the wafer seat sets up in LED banks top and detection camera lens below, the wafer seat is equipped with the slide rail, even seat and cassette, the slide rail has two and sets up on the frame on light trough both sides, even the seat has two and connects two slide rails, the cassette has two and sets up respectively and is used for fixed brilliant plectane on two even seats, be equipped with on the wafer board and wait to detect the wafer, control panel respectively with the LED banks, detection camera lens and loose axle link to each other. The utility model discloses set up the wafer seat of fixed wafer, replaced people's eye through detecting the camera lens, can carry out short-term test to the outward appearance of wafer, when having improved detection efficiency, the protection wafer is not fragile.

Description

Quick check out test set of wafer appearance imperfections

Technical Field

The utility model relates to a wafer detects technical field, especially relates to a quick check out test set of wafer appearance imperfections.

Background

Wafer refers to a silicon wafer used for making silicon semiconductor circuits, the starting material of which is silicon. And dissolving the high-purity polycrystalline silicon, doping the dissolved high-purity polycrystalline silicon into silicon crystal seed crystals, and slowly pulling out the silicon crystal seed crystals to form cylindrical monocrystalline silicon. After the silicon crystal bar is ground, polished and sliced, a silicon wafer, namely a wafer, is formed. Domestic wafer production lines are dominated by 8 inches and 12 inches.

Wafer in process of production, often can produce the wafer of bad product, the wafer need detect in process of production, mainly carries out preliminary screening to its outward appearance and whether takes place the crackle, and the detection mode is mostly people's eye discernment, but people's eye discernment accuracy is not high, efficiency is lower, and when artificially detecting the chip, need place it in the check out test set bottom, check out test set lacks corresponding wafer fixing device, fragile wafer.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a quick check out test set of wafer appearance imperfections has set up the wafer seat of fixed wafer, replaces people's eye through the detection camera lens, can carry out short-term test to the outward appearance of wafer, when having improved detection efficiency, the protection wafer is not fragile.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the quick detection equipment for the appearance defects of the wafers comprises a machine base, a machine frame and a wafer base, wherein the machine base is provided with a lamp trough and a control panel, an LED lamp group is arranged in the lamp trough, the machine frame and the wafer base are respectively installed on the machine base, a detection lens and an XY movable shaft are arranged on the machine frame, the detection lens is installed on the XY movable shaft, the wafer base is arranged above the LED lamp group and below the detection lens, the wafer base is provided with two sliding rails, connecting bases and clamping bases, the sliding rails are provided with two parts and are arranged on the machine base on two sides of the lamp trough, the connecting bases are provided with two sliding rails and connected with the two sliding rails, the clamping bases are provided with two parts which are respectively arranged on the two connecting bases and used for fixing wafer plates, wafers to be detected are arranged on the wafer plates, and the control panel is respectively connected with the LED lamp group, the detection lens and the XY movable shaft.

Furthermore, the wafer seat is provided with an adjusting screw rod, the two connecting seats are provided with adjusting holes opposite to each other, the adjusting screw rod is arranged in the adjusting holes of the two connecting seats and used for adjusting the distance between the two connecting seats, and the adjusting holes are provided with thread structures matched with the adjusting screw rod.

Furthermore, the adjusting screw rod is provided with a rotating cap for adjusting, and the rotating cap is provided with anti-skidding lines.

Furthermore, a control mainboard connected with a control panel is arranged in the machine base, and the control mainboard is connected with a display screen.

Furthermore, the XY movable shaft comprises an X movable shaft and a Y movable shaft, both the X movable shaft and the Y movable shaft are provided with racks, the Y movable shaft is movably mounted on the racks of the X movable shaft through a first motor and a first gear, and the detection lens is movably mounted on the racks of the Y movable shaft through a second motor and a second gear and is arranged downwards.

Furthermore, a detachable magnifier is further arranged on the rack, and the magnifier and the detection lens are mounted on the Y movable shaft in a replaceable manner.

Furthermore, the clamping seats are provided with C-shaped clamping interfaces which are used for being clamped and matched with the wafer plates, and the C-shaped clamping interfaces of the two clamping seats are arranged oppositely.

After the technical scheme is adopted, compared with the background art, the utility model, have following advantage:

1. the utility model has the advantages of simple overall structure, the structure is ingenious, has set up the wafer seat of fixed wafer, utilizes the brilliant plectane of cassette installation on the wafer seat, and two are even set up on two slide rails, and even a slidable mounting can replace people's eye through the measuring camera lens according to demand adjusting position on the slide rail, can carry out short-term test to the outward appearance of wafer, when having improved detection efficiency, the protection wafer is not fragile.

2. The utility model discloses be equipped with the accommodate the lead screw that is used for adjusting its interval between even the seat, through adjusting its interval in order to match not unidimensional brilliant plectane and wafer, the flexibility is high, easy operation, accommodate the lead screw are equipped with the regulation cap, and the person of facilitating the use operates.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is a side view of the present invention;

fig. 3 is a bottom view of the present invention;

fig. 4 is a rear side view of the present invention.

Description of the reference numerals:

the LED lamp comprises a base.1, a frame.2, a wafer seat.3, a lamp groove.11, a control panel.12, an LED lamp group.13, a detection lens.21, an XY movable shaft.22, a slide rail.31, a connecting seat.32, a clamping seat.33, a C-shaped clamping interface.34, an adjusting screw rod.35 and a rotating cap.36.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

In the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are all based on the orientation or position relationship shown in the drawings, and are only for convenience of description, but not for indication or suggestion that the device or element of the present invention must have a specific orientation, and thus cannot be understood as a limitation of the present invention.

Examples

As shown in FIGS. 1 to 4, the utility model discloses a wafer appearance defect rapid detection device, which comprises a frame 1, a frame 2 and a wafer seat 3, wherein the frame 1 is provided with a lamp trough 11 and a control panel 12, an LED lamp group 13 is arranged in the lamp trough 11, the frame 2 and the wafer seat 3 are respectively arranged on the frame 1, the frame 2 is provided with a detection lens 21 and an XY movable shaft 22, the detection lens 21 is arranged on the XY movable shaft 22, the wafer seat 3 is arranged above the LED lamp group 13 and below the detection lens 21, the wafer seat 3 is provided with a slide rail 31, the lamp holder comprises a connecting seat 32 and a clamping seat 33, the slide rails 31 are provided with two and are arranged on the machine base 1 at two sides of the lamp groove 11, the connecting seat 32 is provided with two and is connected with the two slide rails 31, the clamping seat 33 is provided with two and is respectively arranged on the two connecting seats 32 and is used for fixing a wafer plate, a wafer to be detected is arranged on the wafer plate, and the control panel 12 is respectively connected with the LED lamp group 13, the detection lens 21 and the XY movable 22 shaft.

The cassette 33 is provided with a C-shaped card interface 34 for matching with the wafer plate in a clamping manner, and the C-shaped card interfaces 34 of the two cassettes 33 are arranged oppositely.

The LED lamp group 13 irradiates the wafer from bottom to top, so that cracks of the wafer are more obvious, and the wafer can be conveniently captured by the detection lens.

The wafer seat 3 is provided with an adjusting screw rod 35, the two connected seats 32 are provided with adjusting holes opposite to each other, the adjusting screw rod 35 is arranged in the adjusting holes of the two connected seats 32 and used for adjusting the distance between the two connected seats 32, and the adjusting holes are provided with thread structures matched with the adjusting screw rod 35.

The adjusting screw rod 35 is provided with a rotating cap 36 for adjustment, and the rotating cap 36 is provided with anti-skid grains.

The adjusting screw rods 35 used for adjusting the distance between the connecting seats 32 are arranged between the connecting seats, the distance between the connecting seats is adjusted to match with wafer plates and wafers of different sizes, the flexibility is high, the operation is easy, and the adjusting screw rods 35 are provided with the adjusting caps 36, so that the operation of a user is facilitated.

A control mainboard connected with a control panel 12 is arranged in the machine base 1, the control mainboard is connected with a display screen, and the current detection state and the detection result can be obtained through the display screen.

The XY movable shaft 22 comprises an X movable shaft and a Y movable shaft, both the X movable shaft and the Y movable shaft are provided with racks, the Y movable shaft is movably mounted on the rack of the X movable shaft through a first motor and a first gear, the detection lens is movably mounted on the rack of the Y movable shaft through a second motor and a second gear and is arranged downwards, and the appearance defect of the wafer below is captured through the detection lens.

The rack 2 is also provided with a detachable magnifier, and the magnifier and the detection lens are installed on the Y movable shaft in a replaceable manner.

The detection lens can also be detached by detection personnel, the magnifying lens is utilized to identify and detect human eyes, the detection mode is flexible and various, and various requirements are met.

This embodiment overall structure is simple, and the structure is ingenious, has set up the wafer seat 3 of fixed wafer, utilizes cassette 33 installation wafer board on the wafer seat 3, and two even seats 32 set up on two slide rails 31, even seat 32 slidable mounting on slide rail 31, can be according to demand adjusting position, through detecting camera lens 21 replacement people's eye, can carry out short-term test to the outward appearance of wafer, when having improved detection efficiency, the protection wafer is not fragile.

The above description is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention should be covered by the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. The utility model provides a wafer appearance imperfections short-term test equipment which characterized in that: the wafer fixing device comprises a machine base, a machine frame and a wafer seat, wherein the machine base is provided with a lamp groove and a control panel, an LED lamp group is arranged in the lamp groove, the machine frame and the wafer seat are respectively installed on the machine base, a detection lens and an XY movable shaft are arranged on the machine frame, the detection lens is installed on the XY movable shaft, the wafer seat is arranged above the LED lamp group and below the detection lens, the wafer seat is provided with two slide rails, a connecting seat and a clamping seat, the slide rails are provided with two parts and arranged on the machine base on two sides of the lamp groove, the connecting seat is provided with two parts and connected with the two slide rails, the clamping seat is provided with two parts and respectively arranged on the two connecting seats to fix a wafer plate, a wafer to be detected is arranged on the wafer plate, and the control panel is respectively connected with the LED lamp group, the detection lens and the XY movable shaft.

2. The apparatus of claim 1, wherein: the wafer seat is provided with an adjusting screw rod, the two connecting seats are provided with adjusting holes opposite to each other, the adjusting screw rod is arranged in the adjusting holes of the two connecting seats and used for adjusting the distance between the two connecting seats, and the adjusting holes are provided with thread structures matched with the adjusting screw rod.

3. The rapid inspection apparatus for defects in wafer appearance of claim 2, wherein: the adjusting screw rod is provided with a rotating cap for adjusting, and the rotating cap is provided with anti-skidding lines.

4. The rapid inspection apparatus for defects in wafer appearance of claim 1, wherein: the frame is internally provided with a control mainboard connected with a control panel, and the control mainboard is connected with a display screen.

5. The apparatus of claim 1, wherein: the XY movable shaft comprises an X movable shaft and a Y movable shaft, both the X movable shaft and the Y movable shaft are provided with racks, the Y movable shaft is movably arranged on the rack of the X movable shaft through a first motor and a first gear, and the detection lens is movably arranged on the rack of the Y movable shaft through a second motor and a second gear and is arranged downwards.

6. The apparatus for rapidly inspecting the appearance defect of a wafer as claimed in claim 5, wherein: the machine frame is further provided with a detachable magnifier, and the magnifier and the detection lens are mounted on the Y movable shaft in a replacement mode.

7. The apparatus of claim 1, wherein: the clamping seats are provided with C-shaped clamping interfaces matched with the wafer plates in a clamping mode, and the C-shaped clamping interfaces of the two clamping seats are arranged oppositely.