CN216980532U

CN216980532U - Quartz boat turning device

Info

Publication number: CN216980532U
Application number: CN202123435172.6U
Authority: CN
Inventors: 张宇; 代威; 郭立
Original assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Current assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Priority date: 2021-12-31
Filing date: 2021-12-31
Publication date: 2022-07-15
Anticipated expiration: 2031-12-31

Abstract

The utility model discloses a quartz boat turnover device which comprises a base, a support, a driving assembly, a sliding table, an X-direction positioning assembly, a Y-direction positioning assembly and a Z-direction positioning assembly, wherein the driving assembly is arranged on the base and used for driving the support to turn over, the sliding table is movably arranged on the support and used for mounting a quartz boat, the X-direction positioning assembly is used for driving the quartz boat to move on the sliding table along the X direction so as to realize the positioning of the quartz boat in the X direction, the Y-direction positioning assembly is used for driving the sliding table to move on the support along the Y direction so as to realize the positioning of the quartz boat in the Y direction, and the Z-direction positioning assembly is used for compressing the quartz boat in the Z direction so as to realize the positioning of the quartz boat in the Z direction. This quartz boat turning device through the quartz boat location of multi-direction treating the upset, improves the precision of loading and unloading the piece, can carry out the automation to the quartz boat and overturn, does not need artifical upset, avoids falling the boat and pounding the emergence of accidents such as boat, and degree of automation is high, avoids the silicon chip to hide and splits and the piece, improves the yields of product.

Description

Quartz boat turning device

Technical Field

The utility model relates to the technical field of solar cell processing, in particular to a quartz boat turning device.

Background

The processing of the solar cell needs to go through a plurality of processes, wherein, some processes (such as a diffusion process and a thermal oxidation process) need to load the silicon wafers into a quartz boat and then send the quartz boat into a furnace tube of process equipment for processing. In order to improve the productivity of the equipment, equipment manufacturers generally adopt a mode of enlarging a quartz boat (hereinafter referred to as a big boat) by using a small quartz boat (hereinafter referred to as a small boat) to load wafers, namely, a plurality of small boats are arranged in one big boat, and the small boats are placed in the big boat in a vertical manner or a horizontal manner, so that more silicon wafers can be loaded and processed simultaneously, and the productivity of the equipment can be greatly improved.

Before loading the boat into big boat, need carry and overturn the boat, prior art's shortcoming lies in:

1. in the prior art, when the boat is manually turned, on one hand, the mass of the boat and the silicon wafer can reach several kilograms, and the manual turning mode is laborious and low in efficiency; on the other hand, quartz boats and silicon wafers are fragile products, and the quartz boats and the silicon wafers are easily smashed by manual turning, so that economic loss is caused.

2. The turnover mechanism integrated on the manipulator clamp is adopted in the prior art to carry and overturn a boat, the turnover needs to be completed simultaneously in the carrying process, and the clamp has a very complex structure and lower reliability, so that the boat falling risk exists.

3. The prior art needs to fix the boat firstly when the boat is turned over, then adopts the cylinder to complete turning over, and the mode has impact when turning over, so that the silicon wafer is prone to being hidden and cracked and broken pieces, and the boat cannot be accurately positioned, and after turning over is completed, the boat still needs to be secondarily positioned by adopting an auxiliary positioning mechanism, so that the precision requirement of loading and unloading the wafer can be met.

SUMMERY OF THE UTILITY MODEL

The utility model aims to overcome the defects of the prior art and provide the quartz boat turnover device which has high automation degree and can prevent silicon wafers from being hidden and cracked and broken.

In order to solve the technical problems, the utility model adopts the following technical scheme:

the utility model provides a quartz boat turning device, includes base, support, drive assembly, slip table, X direction locating component, Y direction locating component and Z direction locating component, drive assembly locates be used for the drive on the base the support upset, the mobilizable locating of slip table is used for installing the quartz boat on the support, X direction locating component is used for driving the quartz boat and is in remove in order to realize the location of quartz boat at the X direction along the X direction on the slip table, Y direction locating component is used for driving the slip table is in remove in order to realize the location of quartz boat at the Y direction along the Y direction on the support, Z direction locating component is used for compressing tightly the location of quartz boat in order to realize the quartz boat at the Z direction.

As a further improvement of the above technical solution: the support comprises a transverse plate and a vertical plate arranged on the transverse plate, the transverse plate and the vertical plate are connected with the driving assembly, a guide rail arranged along the Y direction is arranged on the transverse plate, the sliding table is arranged on the guide rail in a sliding mode, and the Y-direction positioning assembly is arranged on the transverse plate.

As a further improvement of the above technical solution: the driving assembly comprises a rotating shaft and a driving motor used for driving the rotating shaft to rotate, two ends of the rotating shaft are arranged on the base through supporting seats, the rotating shaft is connected with the transverse plate through fastening screws, and the rotating shaft is connected with the vertical plate through the fastening screws.

As a further improvement of the above technical solution: the rotation axis is the square shaft, the diaphragm both sides all are equipped with the curb plate, the curb plate with the riser links to each other, be equipped with on the curb plate and be used for dodging the hole of dodging of rotation axis.

As a further improvement of the above technical solution: y direction locating component includes Y direction drive actuating cylinder, Y direction drive actuating cylinder is used for the drive the slip table is followed the guide rail is past one side of riser slides.

As a further improvement of the above technical solution: and a sheet arranging rod is arranged on the vertical plate and used for arranging silicon wafers on the quartz boat.

As a further improvement of the above technical solution: the Z-direction positioning assembly comprises a pressing plate and a Z-direction driving piece used for driving the pressing plate to move along the Z direction, and the Z-direction driving piece is arranged on the vertical plate.

As a further improvement of the above technical solution: the sliding table comprises a sliding table bottom plate, a first end plate and a second end plate are arranged on two sides of the sliding table bottom plate respectively, the Y-direction positioning assembly is connected with the sliding table bottom plate, and the X-direction positioning assembly is arranged on the second end plate.

As a further improvement of the above technical solution: the X-direction positioning assembly comprises a mounting plate, a pushing block and a pushing driving piece used for driving the pushing block to move, the mounting plate is arranged on the second end plate, the pushing driving piece is arranged on the mounting plate, and the pushing block is used for pushing the quartz boat and abutted against the first end plate.

As a further improvement of the above technical solution: and the base is provided with a front cushion block for supporting the bracket before overturning and a rear cushion block for supporting the bracket after overturning.

Compared with the prior art, the utility model has the beneficial effects that:

the quartz boat turnover device disclosed by the utility model is used for placing a quartz boat to be turned over on the sliding table, driving the sliding table to move on the support along the Y direction through the Y direction positioning assembly, enabling the quartz boat to be abutted against the support, realizing the positioning of the quartz boat in the Y direction, driving the quartz boat to move on the sliding table along the X direction through the X direction positioning assembly, enabling the quartz boat to be abutted against one side of the sliding table, realizing the positioning of the quartz boat in the X direction, pressing the quartz boat through the Z direction positioning assembly, realizing the positioning of the quartz boat in the Z direction, driving the support to turn over through the driving assembly, driving the sliding table and the quartz boat to turn over together, finally taking out the turned quartz boat, and carrying out the next procedure. This quartz boat turning device through the quartz boat location of multi-direction treating the upset, improves the precision of loading and unloading the piece, can carry out the automation to the quartz boat and overturn, does not need artifical upset, avoids falling the boat and pounding the emergence of accidents such as boat, and degree of automation is high, avoids the silicon chip to hide and splits and the piece, improves the yields of product.

Drawings

FIG. 1 is a first view angle schematic diagram of the quartz boat turning device of the present invention.

FIG. 2 is a second perspective view of the quartz boat turning device of the present invention.

Fig. 3 is a schematic structural view of the stand of the present invention.

Fig. 4 is a schematic structural view of the sliding table in the present invention.

Fig. 5 is a schematic structural diagram of the driving assembly of the present invention.

FIG. 6 is a schematic structural diagram of an X-direction positioning assembly according to the present invention.

The reference numerals in the figures denote: 1. a base; 11. a front cushion block; 12. a rear cushion block; 13. a second proximity sensor; 14. a groove-type photoelectric sensor; 2. a support; 21. a transverse plate; 211. a first mounting hole; 22. a vertical plate; 221. a second mounting hole; 23. a guide rail; 24. a side plate; 241. avoiding holes; 25. a whole piece of rod; 26. a rib plate; 3. a drive assembly; 31. a rotating shaft; 311. an induction sheet; 32. a drive motor; 33. a supporting seat; 34. a speed reducer; 35. a coupling; 4. a sliding table; 41. a slipway bottom plate; 411. a cylinder connecting portion; 42. a first end plate; 43. a second end plate; 44. a first diffuse reflectance sensor; 45. a second diffuse reflectance sensor; 46. a first proximity sensor; 5. an X-direction positioning assembly; 51. mounting a plate; 52. a push block; 53. pushing the driving member; 6. a Y-direction positioning assembly; 61. a Y-direction driving cylinder; 7. a Z-direction positioning assembly; 71. pressing a plate; 72. a Z-direction driving member; 8. a quartz boat; 9. and (3) a silicon wafer.

Detailed Description

The utility model is described in further detail below with reference to the figures and specific examples of the specification.

Fig. 1 to 6 show an embodiment of the utility model, the quartz boat turning device of this embodiment includes a base 1, a support 2, a driving assembly 3, a sliding table 4, an X-direction positioning assembly 5, a Y-direction positioning assembly 6, and a Z-direction positioning assembly 7, the driving assembly 3 is disposed on the base 1 and is used for driving the support 2 to turn, the sliding table 4 is movably disposed on the support 2 and is used for mounting a quartz boat 8, the X-direction positioning assembly 5 is used for driving the quartz boat 8 to move on the sliding table 4 along an X direction to realize positioning of the quartz boat 8 in the X direction, the Y-direction positioning assembly 6 is used for driving the sliding table 4 to move on the support 2 along a Y direction to realize positioning of the quartz boat 8 in the Y direction, and the Z-direction positioning assembly 7 is used for pressing the quartz boat 8 in the Z direction to realize positioning of the quartz boat 8 in the Z direction. As shown in fig. 1, the X direction is the left-right direction of the inverting apparatus, the Y direction is the front-back direction of the inverting apparatus, and the Z direction is the up-down direction of the inverting apparatus.

This quartz boat turning device's use does, the quartz boat that will treat the upset is put on slip table 4, move along the Y direction on support 2 through 6 drive slip tables 4 of Y direction locating component, make

quartz boat

8 and 2 butts of support, realize the location of quartz boat 8 in the Y direction, move along the X direction on slip table 4 through 5 drive quartz boat 8 of X direction locating component, make one side butt of quartz boat 8 and slip table 4, realize the location of quartz boat 8 in the X direction, compress tightly quartz boat 8 through Z direction locating component 7, realize the location of quartz boat 8 in the Z direction, drive support 2 upsets through drive assembly 3, drive slip table 4 and quartz boat 8 and overturn together, quartz boat 8 after will overturning at last takes out, carry out one process down. This quartz boat turning device, through the quartz boat 8 location of multi-direction treatment upset, improve the precision of loading and unloading the piece, can carry out automatic upset to quartz boat 8, do not need artifical upset, avoid falling the boat and pound the emergence of accidents such as boat, degree of automation is high, avoids the silicon chip to hide and splits and the piece, improves the yields of product.

In this embodiment, the support 2 includes the diaphragm 21 and locates the riser 22 on the diaphragm 21, diaphragm 21 and riser 22 all link to each other with drive assembly 3, be equipped with the guide rail 23 of arranging along the Y direction on the diaphragm 21, the slip table 4 cunning is located on the guide rail 23, Y direction locating component 6 is located on the diaphragm 21, Y direction locating component 6 includes that the Y direction drives actuating cylinder 61, the Y direction drives actuating cylinder 61 and is used for driving slip table 4 and slides along one side of guide rail 23 toward riser 22. Specifically, Y direction drive actuating cylinder 61 links to each other with slip table 4, drives actuating cylinder 61 through Y direction and drives slip table 4 and slide along guide rail 23 toward one side of riser 22, makes quartz boat 8 and riser 22 butt to realize quartz boat 8 in the location of Y direction, simple structure, stability is high.

In this embodiment, the driving assembly 3 includes a rotating shaft 31 and a driving motor 32 for driving the rotating shaft 31 to rotate, two ends of the rotating shaft 31 are disposed on the base 1 through a supporting seat 33, the rotating shaft 31 is preferably a square shaft, the rotating shaft 31 is connected to the horizontal plate 21 through a fastening screw, and the rotating shaft 31 is connected to the vertical plate 22 through a fastening screw. Both sides of the transverse plate 21 are provided with side plates 24, the side plates 24 are connected with the vertical plate 22, and the side plates 24 are provided with avoidance holes 241 for avoiding the rotating shaft 31. The vertical plate 22 is provided with a sheet arranging rod 25, and the sheet arranging rod 25 is used for arranging the silicon wafers 9 on the quartz boat 8. Specifically, the back of riser 22 is equipped with gusset 26, consolidate being connected of riser 22 and diaphragm 21 through curb plate 24 and gusset 26, be equipped with first mounting hole 211 on the diaphragm 21, be equipped with second mounting hole 221 on the riser 22, the rotation axis 31 links to each other with the first mounting hole 211 of diaphragm 21 through fastening screw, the rotation axis 31 links to each other with the second mounting hole 221 of riser 22 through fastening screw, connect reliably, avoid rotation axis 31 through dodging hole 241, driving motor 32 is preferred servo motor, be equipped with speed reducer 34 and shaft coupling 35 between servo motor and the rotation axis 31 in proper order, it is rotatory to drive rotation axis 31 through servo motor, realize the holistic upset of support 2, and is rational in infrastructure. The piece pole 25 is preferred to be equipped with two, and two piece poles 25 interval arrangements are on riser 22, and when the Y direction drove actuating cylinder 61 drive slip table 4 and slide, quartz boat 8 was close to piece pole 25, made the inboard of quartz boat 8 paste piece pole 25 tightly, and piece pole 25 is supplementary to be fixed a position quartz boat 8 to push back convex silicon chip 9, arrange silicon chip 9 in order, the precision when further guaranteeing the loading and unloading piece reduces the piece.

In this embodiment, the Z-direction positioning assembly 7 includes a pressing plate 71 and a Z-direction driving member 72 for driving the pressing plate 71 to move along the Z-direction, and the Z-direction driving member 72 is disposed on the vertical plate 22. Specifically, the Z-direction driving member 72 is an air cylinder, the air cylinder is disposed on the vertical plate 22, and the pressing plate 71 is driven by the air cylinder to press the quartz boat 8 downwards, so as to position the quartz boat 8 in the Z-direction.

In this embodiment, the sliding table 4 includes a sliding table bottom plate 41, a first end plate 42 and a second end plate 43 are respectively disposed on two sides of the sliding table bottom plate 41, the Y-direction positioning assembly 6 is connected to the sliding table bottom plate 41, and the X-direction positioning assembly 5 is disposed on the second end plate 43. Specifically, the bottom of the slide table bottom plate 41 is provided with a cylinder connection portion 411, and the Y-direction drive cylinder 61 is connected to the cylinder connection portion 411. Move quartz boat 8 toward first end plate 42 department through X direction locating component 5, make quartz boat 8 and first end plate 42 butt, realize the location to quartz boat 8 in the X direction, be equipped with on first end plate 42 and be used for detecting the quartz boat whether have the first diffuse reflection sensor 44 of silicon chip, be used for detecting whether have the second diffuse reflection sensor 45 of quartz boat in the slip table 4 and be used for detecting the first proximity sensor 46 that the quartz boat whether with first end plate 42 butt. When using, when first diffuse reflection sensor 44 and second diffuse reflection sensor 45 detected that slip table 4 is gone up to have quartz boat 8 and silicon chip 9, X direction locating component 5 pushed quartz boat 8 to first end plate 42 department, detect quartz boat 8 and first end plate 42 butt through first proximity sensor 46, X direction locating component 5 stop work, realize quartz boat 8's preliminary location, then drive slip table 4 through the Y direction and slide, make the inboard of quartz boat 8 paste whole piece pole 25 tightly, realize quartz boat 8's location in the Y direction, last X direction locating component 5 pushes quartz boat 8 tightly, accomplish quartz boat 8 at the final location of X direction.

In this embodiment, the X-direction positioning assembly 5 includes a mounting plate 51, a pushing block 52 and a pushing driving member 53 for driving the pushing block 52 to move, the mounting plate 51 is disposed on the second end plate 43, the pushing driving member 53 is disposed on the mounting plate 51, and the pushing block 52 is used for pushing the quartz boat 8 to abut against the first end plate 42. Specifically, the pushing driving member 53 is preferably a cylinder, and the pushing block 52 is pushed by the cylinder to move, so as to push the quartz boat 8 to abut against the first end plate 42.

In this embodiment, the base 1 is provided with a front cushion block 11 for supporting the bracket 2 before turning and a rear cushion block 12 for supporting the bracket 2 after turning. Specifically, the base 1 is provided with a second proximity sensor 13 for detecting whether the bracket 2 is at an initial position and a groove-shaped photoelectric sensor 14 for detecting whether the bracket 2 is turned over in place, and the rotating shaft 31 is provided with a sensing piece 311 used in cooperation with the groove-shaped photoelectric sensor 14. Before the upset, support diaphragm 21 through preceding cushion 11, after the upset, support riser 22 through back cushion 12.

The use method of the quartz boat turnover device comprises the following steps:

s1, placing a quartz boat 8: placing the quartz boat 8 to be overturned on the sliding table 4;

s2, positioning the quartz boat 8: the cylinder of the X-direction positioning assembly 5 drives the pushing block 52 to move, so that the quartz boat 8 is abutted to the first end plate 42, the preliminary positioning of the quartz boat 8 in the X direction is realized, the Y-direction driving cylinder 61 drives the sliding table 4 to slide on the support 2, the quartz boat 8 is abutted to the sheet-arranging rod 25, the silicon wafers 9 are tidily arranged, the positioning of the quartz boat 8 in the Y direction is realized, the cylinder of the X-direction positioning assembly 5 works again, the quartz boat 8 is pushed tightly to the first end plate 42, the final positioning of the quartz boat 8 in the X direction is realized, the Z-direction driving piece 72 drives the pressing plate 71 to downwards press the quartz boat 8, and the positioning of the quartz boat 8 in the Z direction is realized;

s3, overturning the quartz boat 8: the driving motor 32 drives the rotating shaft 31 to rotate 90 degrees, so that the support 2 is turned over on the base 1 by 90 degrees, and the quartz boat 8 is turned over;

s4, taking out the quartz boat 8: and taking out the quartz boat 8 after overturning, and carrying out the next process.

Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make numerous possible variations and modifications to the present invention, or modify equivalent embodiments to equivalent variations, without departing from the scope of the utility model, using the teachings disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention shall fall within the protection scope of the technical solution of the present invention, unless the technical essence of the present invention departs from the content of the technical solution of the present invention.

Claims

1. The utility model provides a quartz boat turning device which characterized in that: comprises a base (1), a bracket (2), a driving component (3), a sliding table (4), an X-direction positioning component (5), a Y-direction positioning component (6) and a Z-direction positioning component (7), the driving component (3) is arranged on the base (1) and is used for driving the bracket (2) to turn over, the sliding table (4) is movably arranged on the bracket (2) and is used for mounting a quartz boat (8), the X-direction positioning assembly (5) is used for driving the quartz boat (8) to move on the sliding table (4) along the X direction so as to realize the positioning of the quartz boat (8) in the X direction, the Y-direction positioning assembly (6) is used for driving the sliding table (4) to move on the support (2) along the Y direction so as to realize the positioning of the quartz boat (8) in the Y direction, the Z-direction positioning assembly (7) is used for pressing the quartz boat (8) in the Z direction to realize the positioning of the quartz boat (8) in the Z direction.

2. The quartz boat turning apparatus of claim 1, wherein: support (2) include diaphragm (21) and locate riser (22) on diaphragm (21), diaphragm (21) with riser (22) all with drive assembly (3) link to each other, be equipped with guide rail (23) of arranging along the Y direction on diaphragm (21), slip table (4) cunning is located on guide rail (23), Y direction locating component (6) are located on diaphragm (21).

3. The quartz boat turning apparatus of claim 2, wherein: the driving assembly (3) comprises a rotating shaft (31) and a driving motor (32) used for driving the rotating shaft (31) to rotate, two ends of the rotating shaft (31) are arranged on the base (1) through supporting seats (33), the rotating shaft (31) is connected with the transverse plate (21) through fastening screws, and the rotating shaft (31) is connected with the vertical plate (22) through the fastening screws.

4. The quartz boat turning apparatus of claim 3, wherein: the rotating shaft (31) is a square shaft, lateral plates (24) are arranged on two sides of the transverse plate (21), the lateral plates (24) are connected with the vertical plate (22), and avoidance holes (241) for avoiding the rotating shaft (31) are formed in the lateral plates (24).

5. The quartz boat turnover device according to claim 2, wherein: y direction locating component (6) include Y direction drive actuating cylinder (61), Y direction drive actuating cylinder (61) are used for driving slip table (4) are followed guide rail (23) toward one side of riser (22) slides.

6. The quartz boat turning apparatus of claim 5, wherein: the vertical plate (22) is provided with a sheet arranging rod (25), and the sheet arranging rod (25) is used for arranging silicon wafers (9) on the quartz boat (8).

7. The quartz boat turning apparatus of claim 2, wherein: the Z-direction positioning assembly (7) comprises a pressing plate (71) and a Z-direction driving piece (72) used for driving the pressing plate (71) to move along the Z direction, and the Z-direction driving piece (72) is arranged on the vertical plate (22).

8. The quartz boat turnover device of any one of claims 1 to 7, wherein: slip table (4) are including slip table bottom plate (41), the both sides of slip table bottom plate (41) are equipped with first end plate (42) and second end plate (43) respectively, Y direction locating component (6) with slip table bottom plate (41) link to each other, X direction locating component (5) are located on second end plate (43).

9. The quartz boat turning apparatus of claim 8, wherein: x direction locating component (5) are including mounting panel (51), ejector pad (52) and be used for driving push driving piece (53) of ejector pad (52) motion, mounting panel (51) are located on second end plate (43), push driving piece (53) are located on mounting panel (51), ejector pad (52) be used for promoting quartz boat (8) with first end plate (42) butt.

10. The quartz boat turnover device according to any one of claims 1 to 7, wherein: the base (1) is provided with a front cushion block (11) used for supporting the bracket (2) before turning and a rear cushion block (12) used for supporting the bracket (2) after turning.