CN216972660U

CN216972660U - Electron beam evaporation ion auxiliary high vacuum film coating machine

Info

Publication number: CN216972660U
Application number: CN202220385058.2U
Authority: CN
Inventors: 刘志国; 陈磊; 刘佰祥
Original assignee: Chengdu Feiaomu Optics Co ltd
Current assignee: Chengdu Feiaomu Optics Co ltd
Priority date: 2022-02-23
Filing date: 2022-02-23
Publication date: 2022-07-15
Anticipated expiration: 2032-02-23

Abstract

The utility model belongs to the technical field of lens coating equipment, and particularly relates to an electron beam evaporation ion assisted high vacuum coating machine which comprises a gear box body, wherein a plurality of driven gears are rotatably arranged on the gear box body, a central shaft is rotatably arranged on the inner walls of the driven gears, clamping grooves are formed in the inner walls of the driven gears, telescopic clips are arranged on the central shaft and can be clamped with the clamping grooves, a contracting brake wheel is arranged at one end of the central shaft and is in butt joint with a contracting brake mechanism, a lens clamp is connected to the lower end of the central shaft, the driven gears are connected with correction blades through connecting rods, and the correction blades are positioned below the lens clamp. The coating machine avoids the condition of waste of coating materials caused by the fact that a certain position is coated with excessive thickness and needs to be corrected through the rotation of the correcting blade and the clamp; the thickness of the film material can be corrected and changed in real time, the uniformity and consistency of the film coating of the product are ensured, and the product quality is ensured.

Description

Electron beam evaporation ion auxiliary high vacuum film coating machine

Technical Field

The utility model belongs to the technical field of lens coating equipment, and particularly relates to an electron beam evaporation ion assisted high vacuum coating machine.

Background

The optical lens is used for correcting vision, eliminating asthenopia, protecting or treating eyes by using lenses, corneal contact lenses, artificial lenses and the like, and needs to be coated with a film in order to reduce specular reflection light, increase light transmittance, prevent ultraviolet rays and the like.

In vacuum coating, the concentration of evaporant is highest directly above an evaporation source (target), resulting in a phenomenon that the thickness of a film on a coated substrate is inconsistent from the middle to the edge. At present, the thin film with uniform thickness is obtained, and is generally solved by a substrate rotating frame and a film thickness correcting plate. A correction plate is arranged between the coating substrate frame and the evaporation source, and the evaporant right above the evaporation source is shielded by the correction plate so as to reduce the thickness of the substrate glass film layer right above the evaporation source. However, the existing film thickness correction plate and the rotating frame are usually driven by different driving mechanisms, so that the whole is complex, the layout occupies larger space, and the correction plate is usually fixedly arranged below the substrate rotating frame and cannot rotate to change the rotating angle of the film thickness correction plate, so that the defects of large waste of coating materials and poor product quality exist.

In addition, the existing film thickness correction plate is usually fixed on a substrate rotating frame, and cannot be controlled in real time, so that the defects of uneven coating and poor product quality exist.

SUMMERY OF THE UTILITY MODEL

Aiming at the technical problems in the background art, the utility model provides an electron beam evaporation ion assisted high vacuum coating machine, which can solve the technical problems of large coating material waste, uneven coating and poor product quality of the existing film thickness correction plate.

In order to realize the purpose, the technical scheme provided by the utility model is as follows:

the utility model provides an electron beam evaporation ion assists high vacuum coating machine, includes the gearbox casing, the last rotatable a plurality of driven gear that is provided with of gearbox casing, the rotatable center pin that is provided with on driven gear's the inner wall, be provided with the draw-in groove on driven gear's the inner wall, be provided with the telescopic checkpost on the center pin, the checkpost can with the draw-in groove joint, the one end of center pin is provided with the band-type brake wheel, band-type brake wheel and band-type brake mechanism butt joint, the lower extreme of center pin is connected with lens anchor clamps, driven gear passes through the connecting rod and revises the leaf and connects, revise the below that the leaf is located lens anchor clamps.

Preferably, the band-type brake mechanism includes band-type brake cylinder and curved band-type brake piece, band-type brake cylinder and band-type brake piece are connected, and band-type brake piece and band-type brake wheel butt joint set up.

Preferably, a plurality of driven gears are in meshed connection with one driving gear, and the driving gear is in transmission connection with the motor.

Preferably, the lens holder comprises a flat holder and a concave holder.

Preferably, the plane clamp and the concave clamp are provided with openings at different radius positions, and the test lenses are placed in the openings.

Preferably, a monitoring probe is arranged below one side of the lens clamp.

Preferably, an ion source is arranged below the box body, a high-refraction material evaporation source and a low-refraction material evaporation source are respectively arranged on two sides of the ion source, and the two evaporation sources are used for evaporating the film material onto the lens in an upward and crossed mode at a fixed angle.

Preferably, the checkpost has the spacing hole of a plurality of along the center pin direction equipartition, the gliding setting of checkpost is in the spout of center pin, be provided with the support column with spacing hole butt joint one by one on the spout, the cover is equipped with the spring in the support column, the other pot head of spring is established in spacing hole, the checkpost sets up to the arc transition face in one side of its direction of rotation.

The utility model has the following advantages and beneficial effects:

according to the utility model, the film thickness correction blade and the lens clamp rotating frame are driven by the same driving mechanism, so that the whole structure is compact, the structure is simple and easy to realize, and the film thickness correction blade and the lens clamp rotating frame are driven by the same driving mechanism and occupy small space.

Secondly, a plurality of driven gears are arranged on the gear box body, and a central shaft is rotatably arranged on the inner walls of the driven gears. After the clamp on the central shaft is clamped with the clamping groove of the driven gear, the central shaft, the driven gear and the correction blade synchronously rotate, the position of the lens can be rotationally adjusted, and the falling point of an evaporation source on the lens is changed. Therefore, the condition that the plating film thickness at a certain position is not excessive and needs to be corrected to cause the waste of the plating film material is avoided. And when the checkpost is relieved the joint after, just the correction leaf is rotatory, and the center pin irrotational, only need through rotatory correction leaf to the evaporation source shelter from can to reduce the thickness of the directly over base plate glass rete of coating by vaporization source, change coating material thickness in real time. Through the rotation of the correcting blade and the clamp, the thickness of the coating film and the uniformity of the coating film are corrected and controlled in two modes, the uniformity and consistency of the coating film of the product are ensured, and the quality of the product is ensured.

And thirdly, arranging an opening above the clamp, arranging a test lens in the opening, and monitoring by using a central polycrystalline control probe. Aiming at the fact that incidence angles of paraxial rays and paraxial rays at different radius positions of a spherical mirror with a certain curvature radius are different, and the transmittance shown by the same film system is different, the film system needs to be optimally designed, and spectral characteristics at different radius positions (different incidence angles) need to be investigated. The lens clamp designed by the utility model is provided with holes at different radius positions, test lenses are placed, the transmittance of the lenses at different positions is respectively tested, the membrane system is adjusted according to the transmittance, and the spectrum uniformity of the whole mirror surface is ensured by means of the rotation of the rotary support and the correction blades.

Drawings

FIG. 1 is a front view of a vacuum coater provided in the present invention;

FIG. 2 is an enlarged view a of a portion of FIG. 1;

FIG. 3 is an enlarged view b of a portion of FIG. 1;

FIG. 4 is an enlarged view c of a portion of FIG. 1;

FIG. 5 is a partial enlarged view d of FIG. 4;

FIG. 6 is a cross-sectional view taken along line A-A of FIG. 5;

icon: 1-box body, 11-fixed rod, 12-gear box body, 121-first bearing, 122-mounting hole, 123-second bearing, 2-ion source, 3-high refractive material evaporation source, 4-low refractive material evaporation source, 5-motor, 51-driving gear, 52-driven gear, 521-clamping groove, 53-third bearing, 54-connecting rod, 55-correction blade, 6-central shaft, 61-sliding groove, 611-supporting column, 612-spring, 62-clamp, 621-limiting hole, 63-rotating bracket, 64-concave clamp, 641-first opening, 642-first monitoring probe, 65-plane clamp, 651-second opening, 652-second monitoring probe, 7-band-type brake cylinder, 71-a contracting brake block, 72-a contracting brake wheel, 8-a first lens and 9-a second lens.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention.

Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Examples

As shown in figures 1-6, an electron beam evaporation ion assisted high vacuum coating machine comprises a gear box body 12, wherein the gear box body 12 is fixed on the inner wall of the upper end of a box body 1 through a plurality of fixing rods 11. A plurality of driven gears 52 are rotatably arranged in the gear box body 12, a central shaft 6 is rotatably arranged on the inner wall of each driven gear 52, and two ends of each central shaft 6 respectively extend out of the gear box body 12. Specifically, the upper end of the central shaft 6 is connected to the gear housing 12 through the first bearing 121, the outer wall of the driven gear 52 is connected to the gear housing 12 through the second bearing 123, and the inner wall of the driven gear 52 is connected to the central shaft 6 through the third bearing 53, so that the driven gear 52 and the central shaft 6 can stably perform rotational motion.

A clamping groove 521 is arranged on the inner wall of the driven gear 52, and a telescopic clamp 62 is arranged on the central shaft 6. When the driven gear 52 rotates, the clamping groove 521 also rotates, and when the clamping groove 521 rotates to be in butt joint with the clip 62, the clip 62 can extend out and be clamped into the clamping groove 521, so that the central shaft 6 and the driven gear 52 are connected and rotate synchronously. One end of the central shaft 6 is provided with a contracting brake wheel 72, the contracting brake wheel 72 is arranged in a mounting hole 122 of the gear box body 12, the contracting brake wheel 72 is in butt joint with a contracting brake mechanism on the outer side of the gear box body 12, the lower end of the central shaft 6 is connected with a lens clamp, and a lens is clamped on the lens clamp; the driven gear 52 is connected to a correction blade 55 through a link 54, and the correction blade 55 is located below the lens holder.

In the utility model, there are two correction modes:

the first method comprises the following steps: band-type brake mechanism holds tightly band-type brake wheel 72, the unable rotary motion of center pin 6, driven gear 52 independent rotary motion drives correction leaf 55 and is rotary motion around the lens, shelters from the evaporant of evaporation coating source top through correcting leaf 55 to reduce the thickness of evaporation coating source top lens rete, change coating film thickness in real time, and then avoid certain position coating film thickness too thick, lead to the thick uneven problem of lens coating film each position department membrane.

And the second method comprises the following steps: through telescopic checkpost 62, in checkpost 62 joint income draw-in groove 521, realize the connection of center pin 6 and driven gear 52, then band-type brake mechanism cancels and holds tightly, driven gear 52 is rotatory to drive center pin 6 synchronous revolution this moment, through the synchronous revolution of correction leaf 55 and lens, can be real-time the position of change lens, change the falling point of evaporation source, like this, just can not lead to a certain position to plate the excessive membrane thickness in earlier stage, and need revise, lead to the extravagant condition of coating material, adjust the membrane thickness of lens in real time, guarantee the homogeneity, the uniformity of coating film.

The utility model corrects and controls the coating thickness and the coating uniformity by two groups of modes through the rotation of the correcting blade 55 and the clamp, ensures the coating uniformity and consistency of the product and ensures the product quality.

In the utility model, the whole structure is compact, the structure is simple and easy to realize, and the film thickness correction blade 55 and the lens clamp rotating machine support 63 are driven by the same driving mechanism and occupy small space.

As shown in fig. 4, in the utility model, the band-type brake mechanism comprises a band-type brake cylinder 7 and an arc-shaped band-type brake block 71, wherein the telescopic end of the band-type brake cylinder 7 is connected with the band-type brake block 71 to ensure that the cylinder is fixed at the upper end of the gearbox body 12, and the band-type brake block 71 is in butt joint with a band-type brake wheel 72. When the cylinder is ensured to be extended, the contracting brake block 71 can be pressed tightly against the contracting brake wheel 72, thereby limiting the rotation movement of the central shaft 6.

As a preferred connection mode of the present invention, a plurality of driven gears 52 are engaged with one driving gear 51, and the driving gear 51 is connected with the motor 5 for transmission, that is, one motor 5 drives a plurality of driven gears 52 to rotate, and further drives the correction blade 55 and the lens to rotate. Of course, each driven gear 52 may also be driven by a separate drive motor 5.

Further, the lens holder includes a flat holder 65 and a concave holder 64. The flat fixture 65 holds the first lens 8 and the concave fixture 64 holds the second lens 9. The plane fixture 65 means that the clamping surface is a plane, and can clamp the lens with the upper end being a plane; the concave clamp 64 means that the clamping surface is a cambered surface, and can clamp a lens with a curved surface at the upper end.

As shown in fig. 2 and 3, the concave fixture 64 is provided with a plurality of first openings 641, the first openings 641 are respectively provided with test lenses, the convex fixture is provided with a plurality of second openings 651, and the second openings 651 are respectively provided with test lenses. A first monitor probe 642 and a second monitor probe 652 are disposed below the rotating bracket 63.

Aiming at the fact that incidence angles of paraxial rays and paraxial rays at different radius positions of a spherical mirror with a certain curvature radius are different, and the transmittance shown by the same film system is different, the film system needs to be optimally designed, and spectral characteristics at different radius positions (different incidence angles) need to be investigated. And further feeding back and guiding the optimization of the film system, wherein the plane clamp 65 and the concave clamp 64 are provided with openings at different radius positions, test lenses are placed in the openings, and the transmittance of the lenses at different positions is respectively tested to adjust the film system. Meanwhile, the film thickness is adjusted by means of the monitoring probe, the monitoring of the monitoring probe is matched with the detection of the transmittance of the upper test lens, the correction blade 55 and the rotating bracket 63 are matched for correction, the uniformity of the film coating is ensured, and the spectrum uniformity of the whole mirror surface is ensured.

In the utility model, a gear set is arranged in a box body 1, an ion source 2 is arranged below the box body 1, a high-refraction material evaporation source 3 and a low-refraction material evaporation source 4 are respectively arranged at two sides of the ion source 2, and the two evaporation sources are upwards crossed to evaporate a film material onto a lens at a fixed angle (as shown in figure 1). The high refractive material evaporation source 3 evaporates the H material onto the two lenses above, and the low refractive material evaporation source 4 evaporates the L material onto the two lenses above, the two materials being evaporated crosswise upward at a fixed angle and deposited on the lens surfaces.

As shown in fig. 5 and 6, further, a plurality of limiting holes 621 are uniformly distributed in the clip 62 along the direction of the central shaft 6, the clip 62 is slidably disposed in the sliding groove 61 of the central shaft 6, the sliding groove 61 is provided with supporting columns 611 in one-to-one butt joint with the limiting holes 621, a spring 612 is sleeved in the supporting column 611, the other end of the spring 612 is sleeved in the limiting hole 621, and one side of the clip 62 in the rotation direction is provided with an arc-shaped transition surface.

As shown in fig. 5, the clip 62 is ejected and locked into the slot 521 by the spring 612, and the driven gear 52 has two sets of rotation modes in this state.

Specifically, as shown in fig. 6, if only the correcting blade 55 needs to perform a rotational motion and the central shaft 6 does not rotate, the contracting brake cylinder 7 drives the contracting brake block 71 to contract the contracting brake wheel 72, and then the driven gear 52 rotates clockwise while the central shaft 6 does not rotate, the clip 62 is compressed and pressed into the sliding slot 61 because of the arc transition surface, the fixation between the clip 62 and the clamping slot 521 is released, and the driven gear 52 can perform a single rotational motion.

If the correcting blade 55 and the lens clamp need to rotate synchronously, the cylinder is guaranteed to release the clasping of the band-type brake wheel 72, the driven gear 52 is driven to rotate anticlockwise, the central shaft 6 can be driven to rotate synchronously, and the synchronous rotation of the correcting blade 55 and the lens is achieved.

The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The electron beam evaporation ion assisted high vacuum film coating machine comprises a gear box body (12), wherein a plurality of driven gears (52) are rotatably arranged on the gear box body (12), and the electron beam evaporation ion assisted high vacuum film coating machine is characterized in that a central shaft (6) is rotatably arranged on the inner wall of each driven gear (52), a clamping groove (521) is formed in the inner wall of each driven gear (52), a telescopic clamp (62) is arranged on each central shaft (6), each clamp (62) can be clamped with the corresponding clamping groove (521), a brake wheel (72) is arranged at one end of each central shaft (6), the brake wheels (72) are in butt joint with a brake mechanism, a lens clamp is connected to the lower end of each central shaft (6), each driven gear (52) is connected with a correction blade (55) through a connecting rod (54), and each correction blade (55) is located below the lens clamp.

2. The electron beam evaporation ion assisted high vacuum coater of claim 1, wherein: the band-type brake mechanism comprises a band-type brake cylinder (7) and an arc-shaped band-type brake block (71), the band-type brake cylinder (7) is connected with the band-type brake block (71), and the band-type brake block (71) is in butt joint with a band-type brake wheel (72).

3. The electron beam evaporation ion assisted high vacuum coater of claim 1, wherein: a plurality of driven gears (52) are meshed with one driving gear (51), and the driving gear (51) is connected with the motor (5) for transmission.

4. The electron beam evaporation ion assisted high vacuum coater of claim 1, wherein: the lens holder includes a flat holder (65) and a concave holder (64).

5. The electron beam evaporation ion assisted high vacuum coater of claim 4, wherein: the plane clamp (65) and the concave clamp (64) are provided with openings at different radius positions, and test lenses are placed in the openings.

6. The electron beam evaporation ion assisted high vacuum coater of claim 4, wherein: and a monitoring probe is arranged below one side of the lens clamp.

7. The electron beam evaporation ion assisted high vacuum coater of claim 1, wherein: an ion source (2) is arranged below the inner portion of the box body (1), a high-refraction material evaporation source (3) and a low-refraction material evaporation source (4) are respectively arranged on two sides of the ion source (2), and the two evaporation sources are used for evaporating film materials onto the lens in an upward crossed mode at a fixed angle.

8. The electron beam evaporation ion assisted high vacuum coater of claim 1, wherein: checkpost (62) have spacing hole of a plurality of (621) along center pin (6) direction equipartition, the gliding setting of checkpost (62) is in spout (61) of center pin (6), be provided with on spout (61) with support column (611) of spacing hole (621) butt joint one by one, the cover is equipped with spring (612) in support column (611), the other end cover of spring (612) is established in spacing hole (621), checkpost (62) sets up to the arc transition face in one side of its direction of rotation.