CN209417440U - Light supply apparatus for the vertical assembling & adjusting system of X-ray focusing mirror - Google Patents
Light supply apparatus for the vertical assembling & adjusting system of X-ray focusing mirror Download PDFInfo
- Publication number
- CN209417440U CN209417440U CN201920122059.6U CN201920122059U CN209417440U CN 209417440 U CN209417440 U CN 209417440U CN 201920122059 U CN201920122059 U CN 201920122059U CN 209417440 U CN209417440 U CN 209417440U
- Authority
- CN
- China
- Prior art keywords
- pentaprism
- adjusting bracket
- light
- laser
- adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Abstract
In order to meet in the vertical assembling & adjusting system of focus lamp the needs of to light source, guarantee higher adjustment precision, the utility model provides a kind of light supply apparatus for the vertical assembling & adjusting system of X-ray focusing mirror.Device includes laser, laser adjusting bracket, optical platform, turntable, the first displacement adjusting bracket, second displacement adjusting bracket, center pentaprism group, adjustment pentaprism group and refers to pentaprism group;Optical platform is placed in above laser;Turntable is located above optical platform;First displacement adjusting bracket, second displacement adjusting bracket are each attached on turntable, and center pentaprism group includes center pentaprism and the first pentaprism adjusting bracket, and the first pentaprism adjusting bracket is fixed on turntable;Adjustment pentaprism group includes adjustment pentaprism and the second pentaprism adjusting bracket, and the setting of the second pentaprism adjusting bracket is on the first displacement adjusting bracket;It include referring to pentaprism and third pentaprism adjusting bracket with reference to pentaprism group, third pentaprism adjusting bracket is arranged on second displacement adjusting bracket.
Description
Technical field
The utility model relates to X-ray optical fields, and in particular to a kind of for the vertical assembling & adjusting system of X-ray focusing mirror
Light supply apparatus.
Background technique
X-ray focusing mirror is a kind of based on X-ray glancing incidence principle, using multi-layer nested structure to x-ray photon into
Line focusing and a kind of optical device detected, ultra-thin, ultra-smooth eyeglass accurate adjustment are always X-ray focusing mirror manufacture neck
The bottleneck in domain.The vertical assembling & adjusting system of X-ray deforms during adjustment because that can effectively reduce this ultra-thin, ultra-smooth eyeglass, subtracts
Few focus lamp angular resolution loses with effective area and is taken seriously.
In recent years, from the point of view of X-ray focusing mirror overall development trend, heavy caliber, multilayer number have become under X-ray focusing mirror
The main direction of development in one stage, the following problem is light source problem, in vertical assembling & adjusting system, bore
Focus lamp then needSource of parallel light, but because parallel light tube can only be horizontally arranged, so needing to use heavy caliberPlane mirror horizontal parallel light is converted into vertical parallel light.But because manufacturing cost is high, manufacture week
The features such as phase is long, heavy caliber parallel light tube and heavy-calibre planar reflecting mirror have become the vertical maximum limitation of assembling & adjusting system of focus lamp
One of factor.
Utility model content
In order to meet in the vertical assembling & adjusting system of focus lamp the needs of to light source, and guarantee higher adjustment precision, this is practical
It is novel to propose a kind of light supply apparatus for the vertical assembling & adjusting system of X-ray focusing mirror.
The technical solution of the utility model is:
A kind of light supply apparatus for the vertical assembling & adjusting system of X-ray focusing mirror, including laser, laser adjusting bracket, light
It learns platform, turntable, the first displacement adjusting bracket, second displacement adjusting bracket, center pentaprism group, adjustment pentaprism group and refers to five ribs
Microscope group;The laser is fixed on laser adjusting bracket, and emergent light is vertically upward;The optical platform is placed on laser
Side, and optical platform is equipped with intermediate aperture;The turntable is located above optical platform, and is provided with light hole;Described first
Displacement adjusting bracket, second displacement adjusting bracket are fixed on turntable, the center pentaprism group include center pentaprism and
First pentaprism adjusting bracket, the center pentaprism are arranged on the first pentaprism adjusting bracket, the first pentaprism adjusting bracket
It is fixed on turntable;The adjustment pentaprism group includes adjustment pentaprism and the second pentaprism adjusting bracket, the adjustment five
Prism is arranged on the second pentaprism adjusting bracket, and the second pentaprism adjusting bracket setting is on the first displacement adjusting bracket;It is described
It include referring to pentaprism and third pentaprism adjusting bracket with reference to pentaprism group, it is described to be arranged with reference to pentaprism in third pentaprism tune
It saves on frame, the third pentaprism adjusting bracket is arranged on second displacement adjusting bracket;The emergent light of the laser passes through centre
Aperture and light hole are divided into two bundles horizon light after being incident to center pentaprism, wherein a branch of horizon light is incident to adjustment pentaprism
Vertical light is converted to, another beam horizon light, which is incident to, is converted to vertical light with reference to pentaprism.
Further, the center pentaprism includes the first compensating glass from top to bottom set gradually, the first pentaprism,
The plane of incidence of two compensating glass, the second pentaprism, first pentaprism and the second pentaprism is arranged in parallel, first compensation
Mirror, the first pentaprism cemented surface on be coated with the first spectro-film, is coated on second compensating glass, the second pentaprism cemented surface
Two spectro-films.
Further, the material of first spectro-film and the second spectro-film is specially silver Ag.
Further, aperture and laser positions relationship are concentric, light hole and laser position among the optical platform
It is concentric for setting relationship also.
Further, the laser adjusting bracket is fixed on standard bread board.
Further, the first displacement adjusting bracket, second displacement adjusting bracket are symmetrical arranged about center pentaprism group.
The utility model compared with prior art, has following technical effect that
1. provided by the utility model be based on pentaprism incident light for the vertical assembling & adjusting system light supply apparatus of X-ray focusing mirror
The characteristic vertical with emergent light uses laser for point light source, and pentaprism is light beam steering device, converts incident light into two beams and hangs down
Direct light, respectively focus lamp reference mirror and focus lamp adjustment mirror provide incident light source, then to focusing by way of rotary scanning
The entire mirror surface of mirror completes irradiation, to avoid the manufacturing cost generated using heavy caliber parallel light tube and heavy-calibre planar reflecting mirror
High, the problems such as manufacturing cycle is long.
2. the utility model light supply apparatus is the X-ray focusing mirror adjustment for meeting different bores, using displacement adjusting bracket pair
The radial position of adjustment pentaprism and reference pentaprism is adjusted.
3. the pentaprism scheme that the utility model uses is turned back performance using the optical path of pentaprism, light source shooting angle is not
Change with pentaprism posture and change, to can guarantee higher light source precision in turntable rotation process.
4. the utility model prism adjusting bracket has the function of to adjust pentaprism posture in real time, it is ensured that pentaprism is in different works
Attitude regulation under condition, to meet the adjustment demand of focus lamp.
Detailed description of the invention
Fig. 1 the utility model is used for the light supply apparatus structure chart of the vertical assembling & adjusting system of X-ray focusing mirror;
Fig. 2 the utility model is used for the light supply apparatus top view of the vertical assembling & adjusting system of X-ray focusing mirror;
Fig. 3 the utility model is used for the light path principle figure of the vertical assembling & adjusting system of X-ray focusing mirror;
Fig. 4 the utility model center pentaprism and compensating glass gluing conceptual scheme;
Fig. 5 the utility model adjustment pentaprism group and the first displacement adjusting bracket connection schematic diagram;
Fig. 6 the utility model center pentaprism group structural schematic diagram;
Fig. 7 the utility model adjustment pentaprism group structural schematic diagram;
Fig. 8 the utility model refers to pentaprism group structural schematic diagram.
Appended drawing reference, 1- laser, 2- laser adjusting bracket, 3- optical platform, 4- turntable, 5- first are displaced adjusting bracket,
The center 6- pentaprism group, 7- adjustment pentaprism group, 8- refer to pentaprism group, 10- second displacement adjusting bracket, 11- standard bread board,
The second spectro-film of 41-, the first spectro-film of 42-, the second compensating glass of 61-, the second pentaprism of 62-, the first compensating glass of 63-, 64- first
Pentaprism, 65- the first pentaprism adjusting bracket, 71- adjustment pentaprism, 72- the second pentaprism adjusting bracket, 81- refer to pentaprism,
82- third pentaprism adjusting bracket.
Specific embodiment
It is described in further detail below in conjunction with content of the drawings and specific embodiments to the utility model.
In order to meet in the vertical assembling & adjusting system of focus lamp the needs of to light source, and guarantee higher adjustment precision, this is practical
It is novel to propose a kind of light supply apparatus for the vertical assembling & adjusting system of X-ray focusing mirror.
Light supply apparatus for the vertical assembling & adjusting system of X-ray focusing mirror as shown in Figure 1 to Figure 3, including laser 1, swash
Light device adjusting bracket 2, optical platform 3, turntable 4, first are displaced adjusting bracket 5, second displacement adjusting bracket 10, center pentaprism group 6, dress
It adjusts pentaprism group 7 and refers to pentaprism group 8;Laser 1 is fixed on laser adjusting bracket 2, and laser adjusting bracket 2 is fixed on mark
On quasi- bread board 11, emergent light is vertically upward.Optical platform 3 is placed in the top of laser 1, and is equipped on optical platform 3
Between aperture rotate and light passing in order to turntable 4, the positional relationship of intermediate aperture and laser 1 is concentric;Turntable 4 is flat positioned at optics
Above platform 3 (ADR360-A150 can be used in model), there are light hole, light hole and 11 positional relationships of laser among turntable 4
It is concentric.First displacement adjusting bracket 5, second displacement adjusting bracket 10 are fixed on turntable 4 by screw, and about center
Pentaprism group 6 is symmetrical arranged.The emergent light of laser 1 passes through intermediate aperture and light hole, is divided into after being incident to center pentaprism
Two beam horizon lights, wherein a branch of horizon light, which is incident to adjustment pentaprism 71, is converted to vertical light, another beam horizon light is incident to ginseng
It examines pentaprism 81 and is converted to vertical light.
As shown in figs. 4 and 6, center pentaprism group 6 is located at 4 top of turntable, including center pentaprism and the first pentaprism tune
Frame 65 is saved, center pentaprism is arranged on the first pentaprism adjusting bracket 65, and the first pentaprism adjusting bracket 65 is set by screw fixation
It sets on turntable 4, and pentaprism group is made to be in the center of other component.Center pentaprism includes from top to bottom setting gradually
The first compensating glass 63, the first pentaprism 64, the second compensating glass 61, the second pentaprism 62, the first pentaprism 64 and the two or five rib
The plane of incidence of mirror 62 is arranged in parallel, the first compensating glass 63, the first pentaprism 64 cemented surface on be coated with the first spectro-film 42, second
The second spectro-film 41 is coated on compensating glass 61,62 cemented surface of the second pentaprism, light splitting membrane material is specially silver Ag, thus by a branch of
Incident light is converted to two beam emergent lights.
As shown in Figure 5, Figure 7, adjustment pentaprism group 7 includes adjustment pentaprism 71 and the second pentaprism adjusting bracket 72, adjustment
Pentaprism 71 is arranged on the second pentaprism adjusting bracket 72, and the setting of the second pentaprism adjusting bracket 72 is on the first displacement adjusting bracket 5;
Adjustment pentaprism 71 can be by the first displacement 5 adjustment pentaprism 71 of adjusting bracket at a distance from 4 center of circle of turntable, to meet different mouths
The adjustment demand of diameter X-ray focusing mirror.
As shown in figure 8, including referring to pentaprism 81 and third pentaprism adjusting bracket 82 with reference to pentaprism group 8, with reference to five ribs
Mirror 81 is arranged on third pentaprism adjusting bracket 82, and third pentaprism adjusting bracket 82 is arranged on second displacement adjusting bracket 10.
First pentaprism adjusting bracket 65, the second pentaprism adjusting bracket 72 and third pentaprism adjusting bracket 82 all have sextuple tune
Function is saved, the regulatory demand of different postures can be met.6 DOF adjusts the linear displacement including three directions and adjusts and three directions
Angular adjustment, be made of TASB-405, GOHT-40A60B, KSP-406FP tri- kinds of adjusting brackets assembling.
As shown in Fig. 2, laser is converted into horizontal exit light, five rib of center by vertical incidence light by center pentaprism group 6
There are the light holes of diameter 20mm below mirror pedestal, and then, glancing incidence light is by adjustment pentaprism 71 and refers to pentaprism 81
It is converted into vertical exit light, laser emitting direction is not influenced by pentaprism sharping degree and remains vertical.When turntable 4 rotates
When, adjustment pentaprism 71 and the emergent light with reference to pentaprism 81 will form scanning light source, to provide adjustment for entire focus lamp
Light source.
Meanwhile the utility model also provides a kind of side of building for the vertical assembling & adjusting system light supply apparatus of X-ray focusing mirror
Method, comprising the following steps:
1) laser 1 is fixed on laser adjusting bracket 2 by fixture, and by screw by laser adjusting bracket 2 with
Standard bread board 11 connects;
2) the intermediate aperture of optical platform 3 is adjusted concentric with laser 1, and optical platform 3 is fixed on ground;
3) turntable 4 is fixed on optical platform 3 by screw, and will be among the light hole of turntable 4 and optical platform 3
Aperture adjusts concentric;
4) adjusting bracket 5, second displacement adjusting bracket 10 are displaced by first and 4 top of turntable is fixed on by tooling, be in center pair
Title mode arranges;
5) center pentaprism group is fixed on 4 top tooling of turntable by screw, and is in adjustment pentaprism 71
At system light hole;
6) the first displacement adjusting bracket 5 is individually fixed in by adjustment pentaprism 71 and with reference to pentaprism 81, second displacement is adjusted
On frame 10, and its posture is adjusted by pentaprism adjusting bracket 9;
7) laser 1 is opened, revolving-turret 4 provides scanning light source for focus lamp assembling & adjusting system.
The laser light source of vertical exit is converted into can be used by the utility model by the turnover of pentaprism group and beam splitting function
In the adjustment light and reference light of the vertical adjustment of focus lamp, and the first the displacement adjusting bracket, second transposition for passing through pentaprism bottom
It saves frame and radiai adjustment is realized to pentaprism, thus the optical adjustment of the X-ray focusing for meeting different bores.During adjustment,
Pentaprism and displacement adjusting bracket to complete spot scan to entire focus lamp mirror surface, then are passed through by 360 ° of rotations of the realization of turntable 4
Image superposition, processing complete the vertical adjustment of focus lamp and develop task.
Claims (6)
1. a kind of light supply apparatus for the vertical assembling & adjusting system of X-ray focusing mirror, it is characterised in that: including laser (1), laser
Device adjusting bracket (2), optical platform (3), turntable (4), the first displacement adjusting bracket (5), second displacement adjusting bracket (10), five rib of center
Microscope group (6), adjustment pentaprism group (7) and reference pentaprism group (8);
The laser (1) is fixed on laser adjusting bracket (2), and emergent light is vertically upward;
The optical platform (3) is placed in above laser (1), and optical platform (3) is equipped with intermediate aperture;
The turntable (4) is located above optical platform (3), and is provided with light hole;
First displacement adjusting bracket (5), second displacement adjusting bracket (10) are fixed on turntable (4);
The center pentaprism group (6) includes center pentaprism and the first pentaprism adjusting bracket (65), and the center pentaprism is set
It sets on the first pentaprism adjusting bracket (65), the first pentaprism adjusting bracket (65) is fixed on turntable (4);
The adjustment pentaprism group (7) includes adjustment pentaprism (71) and the second pentaprism adjusting bracket (72), five rib of adjustment
Mirror (71) is arranged on the second pentaprism adjusting bracket (72), and the second pentaprism adjusting bracket (72) setting is adjusted in the first displacement
On frame (5);
Reference pentaprism group (8) includes referring to pentaprism (81) and third pentaprism adjusting bracket (82), described to refer to five ribs
Mirror (81) is arranged on third pentaprism adjusting bracket (82), and third pentaprism adjusting bracket (82) setting is adjusted in second displacement
On frame (10);
The emergent light of the laser (1) passes through intermediate aperture and light hole, is divided into two bundles level after being incident to center pentaprism
Light, wherein a branch of horizon light, which is incident to adjustment pentaprism (71), is converted to vertical light, another beam horizon light is incident to reference to five ribs
Mirror (81) is converted to vertical light.
2. the light supply apparatus according to claim 1 for the vertical assembling & adjusting system of X-ray focusing mirror, it is characterised in that: institute
The center pentaprism of stating includes the first compensating glass (63) from top to bottom set gradually, the first pentaprism (64), the second compensating glass
(61), the plane of incidence of the second pentaprism (62), first pentaprism (64) and the second pentaprism (62) is arranged in parallel, and described
One compensating glass (63), the first pentaprism (64) cemented surface on be coated with the first spectro-film (42), second compensating glass (61),
The second spectro-film (41) are coated on two pentaprisms (62) cemented surface.
3. the light supply apparatus according to claim 2 for the vertical assembling & adjusting system of X-ray focusing mirror, it is characterised in that: institute
The material for stating the first spectro-film (42) and the second spectro-film (41) is specially silver.
4. the light supply apparatus according to claim 1 or 2 or 3 for the vertical assembling & adjusting system of X-ray focusing mirror, feature exist
In: aperture and laser (1) positional relationship are concentric among the optical platform (3), light hole and laser (1) positional relationship
It also is concentric.
5. the light supply apparatus according to claim 4 for the vertical assembling & adjusting system of X-ray focusing mirror, it is characterised in that: institute
Laser adjusting bracket (2) is stated to be fixed on standard bread board (11).
6. the light supply apparatus according to claim 5 for the vertical assembling & adjusting system of X-ray focusing mirror, it is characterised in that: the
One displacement adjusting bracket (5), second displacement adjusting bracket (10) are symmetrical arranged about center pentaprism group (6).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201920122059.6U CN209417440U (en) | 2019-01-24 | 2019-01-24 | Light supply apparatus for the vertical assembling & adjusting system of X-ray focusing mirror |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201920122059.6U CN209417440U (en) | 2019-01-24 | 2019-01-24 | Light supply apparatus for the vertical assembling & adjusting system of X-ray focusing mirror |
Publications (1)
Publication Number | Publication Date |
---|---|
CN209417440U true CN209417440U (en) | 2019-09-20 |
Family
ID=67944204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201920122059.6U Withdrawn - After Issue CN209417440U (en) | 2019-01-24 | 2019-01-24 | Light supply apparatus for the vertical assembling & adjusting system of X-ray focusing mirror |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN209417440U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109683344A (en) * | 2019-01-24 | 2019-04-26 | 中国科学院西安光学精密机械研究所 | Light supply apparatus and its building method for the vertical assembling & adjusting system of X-ray focusing mirror |
-
2019
- 2019-01-24 CN CN201920122059.6U patent/CN209417440U/en not_active Withdrawn - After Issue
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109683344A (en) * | 2019-01-24 | 2019-04-26 | 中国科学院西安光学精密机械研究所 | Light supply apparatus and its building method for the vertical assembling & adjusting system of X-ray focusing mirror |
CN109683344B (en) * | 2019-01-24 | 2023-10-03 | 中国科学院西安光学精密机械研究所 | Light source device for X-ray focusing mirror vertical adjustment system and construction method thereof |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US3762821A (en) | Lens assembly | |
CN109683344A (en) | Light supply apparatus and its building method for the vertical assembling & adjusting system of X-ray focusing mirror | |
CN103837080B (en) | Sub-micrometer precision coaxial confocal towards micro assemby is directed at detection method and device | |
EP2859395B1 (en) | System, method, and device for determining a focal position of an objective in a microscopy imaging system | |
CN209417440U (en) | Light supply apparatus for the vertical assembling & adjusting system of X-ray focusing mirror | |
JP5464991B2 (en) | Proximity exposure apparatus and proximity exposure method | |
US4542956A (en) | Fiber optics transfer systems | |
CN109581827A (en) | Photoetching projection objective lens optimal focal plane detection device and method | |
CN101281025A (en) | Eccentric inspection apparatus and eccentric adjusting apparatus | |
CN208155524U (en) | A kind of vertical assembling & adjusting system of X-ray focusing mirror | |
CN100363780C (en) | Producing method of optical device, positioning master, optical device and projector | |
CN1206561C (en) | Optical system through axle central device and adjusting method | |
CN103718209B (en) | Adjusting gear and optics erecting device | |
CN106653138A (en) | Assembling and adjusting system and method for multilayer nested X-ray focusing optical device | |
CN110248059A (en) | A kind of object tracking device and method | |
CN1561911A (en) | Laser broad angle sector crossing tube ball X-ray beam central line indicator | |
JP4799324B2 (en) | Exposure apparatus, exposure method, and manufacturing method of display panel substrate | |
CN209486405U (en) | The assembling & adjusting system of optical plate in a kind of optics module | |
JP4761289B2 (en) | Marking apparatus and marking method | |
CN216972660U (en) | Electron beam evaporation ion auxiliary high vacuum film coating machine | |
CN216160126U (en) | Illumination system and optical detection device | |
CN206194389U (en) | Optical system of debuging of multilayer nested X ray focusing | |
JP3865459B2 (en) | Semiconductor device mounting equipment | |
CN106768373A (en) | A kind of Zero positioning device of infrared follow-up device | |
JPH0543083B2 (en) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
AV01 | Patent right actively abandoned | ||
AV01 | Patent right actively abandoned | ||
AV01 | Patent right actively abandoned |
Granted publication date: 20190920 Effective date of abandoning: 20231003 |
|
AV01 | Patent right actively abandoned |
Granted publication date: 20190920 Effective date of abandoning: 20231003 |