CN216955053U - 片盒包装袋内气体含量及密封性检测装置 - Google Patents
片盒包装袋内气体含量及密封性检测装置 Download PDFInfo
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- CN216955053U CN216955053U CN202220377476.7U CN202220377476U CN216955053U CN 216955053 U CN216955053 U CN 216955053U CN 202220377476 U CN202220377476 U CN 202220377476U CN 216955053 U CN216955053 U CN 216955053U
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- 238000001514 detection method Methods 0.000 claims abstract description 136
- 239000007789 gas Substances 0.000 claims description 122
- 238000000605 extraction Methods 0.000 claims description 13
- 238000005086 pumping Methods 0.000 claims description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 238000012856 packing Methods 0.000 claims description 7
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 21
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000012360 testing method Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 238000001125 extrusion Methods 0.000 description 5
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
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- 238000005520 cutting process Methods 0.000 description 1
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- 238000000407 epitaxy Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229920006280 packaging film Polymers 0.000 description 1
- 239000012785 packaging film Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
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- 238000012545 processing Methods 0.000 description 1
- 238000012031 short term test Methods 0.000 description 1
- 238000011895 specific detection Methods 0.000 description 1
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CN202220377476.7U CN216955053U (zh) | 2022-02-23 | 2022-02-23 | 片盒包装袋内气体含量及密封性检测装置 |
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CN202220377476.7U CN216955053U (zh) | 2022-02-23 | 2022-02-23 | 片盒包装袋内气体含量及密封性检测装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115165238A (zh) * | 2022-08-11 | 2022-10-11 | 中国核动力研究设计院 | 一种检测系统及方法 |
CN115829428A (zh) * | 2023-02-16 | 2023-03-21 | 湖南湾田供应链管理有限公司 | 一种基于物联网的园区智慧物流控制系统 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115165238A (zh) * | 2022-08-11 | 2022-10-11 | 中国核动力研究设计院 | 一种检测系统及方法 |
CN115829428A (zh) * | 2023-02-16 | 2023-03-21 | 湖南湾田供应链管理有限公司 | 一种基于物联网的园区智慧物流控制系统 |
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Address after: No. 1, Xinxin Road, Jinshanqiao Development Zone, Xuzhou, Jiangsu 221000 Patentee after: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. Address before: No. 1, Xinxin Road, Jinshanqiao Development Zone, Xuzhou, Jiangsu 221000 Patentee before: XUZHOU XINJING SEMICONDUCTOR TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20230705 Address after: 221004 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee after: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: No. 1, Xinxin Road, Jinshanqiao Development Zone, Xuzhou, Jiangsu 221000 Patentee before: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. |
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Address after: 221004 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee after: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. Country or region after: China Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Address before: 221004 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee before: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. Country or region before: China Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. |