CN216940041U - Moisturizing liquid spraying device for edge polishing equipment - Google Patents
Moisturizing liquid spraying device for edge polishing equipment Download PDFInfo
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- CN216940041U CN216940041U CN202123211735.3U CN202123211735U CN216940041U CN 216940041 U CN216940041 U CN 216940041U CN 202123211735 U CN202123211735 U CN 202123211735U CN 216940041 U CN216940041 U CN 216940041U
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- moisturizing
- liquid
- spray
- edge polishing
- pipe
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- 239000007788 liquid Substances 0.000 title claims abstract description 85
- 230000003020 moisturizing effect Effects 0.000 title claims abstract description 85
- 238000005498 polishing Methods 0.000 title claims abstract description 48
- 238000005507 spraying Methods 0.000 title claims abstract description 35
- 230000007246 mechanism Effects 0.000 claims abstract description 57
- 239000007921 spray Substances 0.000 claims abstract description 48
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 238000012546 transfer Methods 0.000 abstract description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 8
- 229910052710 silicon Inorganic materials 0.000 abstract description 8
- 239000010703 silicon Substances 0.000 abstract description 8
- 235000012431 wafers Nutrition 0.000 description 7
- 230000009286 beneficial effect Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model discloses a moisturizing liquid spraying device for edge polishing equipment, which is positioned above the edge polishing equipment, and comprises: the moisturizing mechanism is provided with a liquid inlet and a liquid outlet which are communicated with the liquid guide cavity, the liquid inlet is arranged on one side of the moisturizing mechanism and is suitable for being communicated with a water source, and the liquid outlet is arranged on the bottom wall of the moisturizing mechanism; the spray pipe is arranged on the side wall of the moisturizing mechanism and communicated with the liquid guide cavity, a spray opening is formed in the free end of the spray pipe, and the spray direction of the spray opening is different from that of the liquid outlet. According to the moisturizing liquid spraying device, the transfer and carrying arm and the silicon wafer can be moisturized, the unfilled corner polishing mechanism can be cleaned, pollution in the manufacturing process can be reduced, and a good manufacturing process environment can be kept.
Description
Technical Field
The utility model relates to the field of polishing, in particular to a moisturizing liquid spraying device for edge polishing equipment.
Background
In the related art, some liquid may be splashed onto the transfer arm or the platen during the polishing process of the edge polishing apparatus, thereby forming crystals, which may affect the processing environment of the apparatus.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to solving at least one of the problems of the prior art. Therefore, the utility model provides a moisturizing liquid spraying device for edge polishing equipment, which can not only moisturize a transfer and carrying arm and a silicon wafer, but also clean a corner lacking polishing mechanism, is beneficial to reducing pollution in a manufacturing process and keeps a good manufacturing process environment.
According to the embodiment of the utility model, the moisturizing liquid spraying device for the edge polishing device is positioned above the edge polishing device, and comprises: the moisturizing mechanism is provided with a liquid inlet and a liquid outlet which are communicated with the liquid guide cavity, the liquid inlet is arranged on one side of the moisturizing mechanism and is suitable for being communicated with a water source, and the liquid outlet is arranged on the bottom wall of the moisturizing mechanism; the spray pipe is arranged on the side wall of the moisturizing mechanism and communicated with the liquid guide cavity, a spray opening is formed in the free end of the spray pipe, and the spray direction of the spray opening is different from that of the liquid outlet.
According to the moisturizing liquid spraying device for the edge polishing equipment, the moisturizing mechanism and the spraying pipe are arranged, the moisturizing mechanism can spray water downwards through the liquid outlet to moisturize the transfer carrying arm and the silicon wafer, the spraying pipe can spray water laterally to clean the unfilled corner polishing mechanism, pollution in the manufacturing process is reduced, a good manufacturing process environment is kept, meanwhile, cleaning work of workers is reduced, and production efficiency is improved.
In some embodiments of the utility model, the side wall of the moisturizing mechanism is provided with a mounting boss, the mounting boss is provided with an outlet communicated with the liquid guide cavity, and the mounting boss is suitable for being connected with the spray pipe.
In some embodiments of the utility model, the number of the mounting bosses is multiple, the mounting bosses are arranged at intervals in the length direction of the moisturizing mechanism, one of the mounting bosses is connected with the spray pipe, and outlets of the other mounting bosses are blocked by plugs.
In some embodiments of the utility model, the shower includes a plurality of pipe sections, one of two adjacent pipe sections having a ball-turning portion, and the other of two adjacent pipe sections having a mating port adapted to mate with the ball-turning portion.
In some embodiments of the utility model, a plurality of the tube segments are plastic pieces.
In some embodiments of the utility model, the moisturizing mechanism is a resin.
In some embodiments of the present invention, the moisturizing liquid spray apparatus further comprises: the first control valve is arranged on the spray pipe, and the opening degree of the first control valve is adjustable.
In some embodiments of the present invention, the moisturizing liquid spray apparatus further comprises: and the second control valve is connected between the liquid inlet and the water source, and the opening degree of the second control valve is adjustable.
In some embodiments of the present invention, the liquid outlet is a plurality of liquid outlets, and the plurality of liquid outlets are uniformly spaced apart in a length direction of the moisturizing mechanism.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the utility model.
Drawings
Fig. 1 is a schematic view of a moisturizing liquid-jet apparatus according to an embodiment of the utility model;
fig. 2 is a schematic front view of a moisturizing liquid-jet apparatus according to an embodiment of the present invention;
fig. 3 is a left side schematic view of a moisturizing liquid-jet apparatus according to an embodiment of the present invention;
fig. 4 is a schematic top view of a moisturizing liquid spray apparatus according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of the construction of the moisturizing mechanism, the shower, and the second control valve, according to one embodiment of the present disclosure;
fig. 6 is a schematic structural view of the moisturizing liquid-jet apparatus, the transfer and carrying arm, and the unfilled corner polishing mechanism according to an embodiment of the present invention.
Reference numerals:
a moisturizing liquid spray device 100;
a moisturizing mechanism 10; a drainage lumen 11; a liquid inlet 12; a liquid outlet 13; a mounting boss 14; an outlet 141;
a shower pipe 20; a spray port 21; a tube section 22; a ball rotating section 23; a fitting port 24;
a plug 30;
a first control valve 40; a second control valve 50;
a transfer/conveyance arm 200; unfilled corner polishing mechanism 300.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the utility model and are not to be construed as limiting the utility model.
The following disclosure provides many different embodiments, or examples, for implementing different features of the utility model. To simplify the disclosure of the present invention, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present invention. Moreover, the present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the applicability of other processes and/or the use of other materials.
A moisturizing liquid spray apparatus 100 for an edge polishing device according to an embodiment of the present invention will be described below with reference to fig. 1 to 6. It can be understood that the edge polishing device needs to use the polishing solution and the polishing pad to cooperate in the polishing process, and the edge of the wafer has a certain roughness by means of chemical mechanical polishing, so as to obtain a silicon single crystal edge with a smoother and smoother edge.
Referring to fig. 1 and 6, in the moisturizing liquid spray device 100 for an edge polishing apparatus according to an embodiment of the present invention, the moisturizing liquid spray device 100 is located above the edge polishing apparatus, where above may be understood as directly above or obliquely above.
Referring to fig. 1, the moisturizing spray device 100 may include a moisturizing mechanism 10 and a spraying pipe 20, the moisturizing mechanism 10 defines a liquid guiding cavity 11, the moisturizing mechanism 10 has a liquid inlet 12 and a liquid outlet 13 communicated with the liquid guiding cavity 11, the liquid inlet 12 is disposed on one side of the moisturizing mechanism 10 and is suitable for being communicated with a water source, wherein the water source may provide pure water to the moisturizing mechanism 10, the liquid outlet 13 is disposed on a bottom wall of the moisturizing mechanism 10, the spraying pipe 20 is disposed on a side wall of the moisturizing mechanism 10, the spraying pipe 20 is communicated with the liquid guiding cavity 11, a free end of the spraying pipe 20 has a spraying port 21, and a spraying direction of the spraying port 21 is different from a spraying direction of the liquid outlet 13.
It can be understood that, referring to fig. 6, the edge polishing apparatus includes an edge polishing mechanism (not shown), a transferring and carrying arm 200 and a corner polishing mechanism 300, the corner polishing mechanism is located at one side of the edge polishing mechanism, the moisture-retaining liquid-spraying device 100 is disposed above the edge polishing mechanism, the transferring and carrying arm 200 is adapted to transfer and carry silicon wafers between the edge polishing station and the corner polishing station, and during the processing, there is slurry sputtering during the corner polishing and edge polishing, so that some of the slurry is sputtered onto the transferring and carrying arm 200 and the corner polishing mechanism 300, thereby forming crystals and affecting the processing environment of the apparatus.
In view of this, according to the moisturizing liquid spraying apparatus 100 of the embodiment of the utility model, by providing the moisturizing mechanism 10 and the spraying pipe 20, the moisturizing mechanism 10 can spray water downwards through the liquid outlet 13 to moisturize the transfer and carrying arm 200 and the silicon wafer, and the spraying pipe 20 can spray water laterally to clean the corner cut polishing mechanism 300 and other devices, which is beneficial to reducing pollution during the manufacturing process, maintaining a good manufacturing environment, reducing cleaning work of workers, and improving production efficiency.
In some embodiments of the present invention, referring to fig. 2 and 3, the side wall of the moisturizing mechanism 10 is provided with a mounting boss 14, the mounting boss 14 has an outlet 141 communicating with the liquid guide chamber 11, and the mounting boss 14 is adapted to be connected with the shower pipe 20. For example, the outer contour of the moisturizing mechanism 10 is formed substantially in a rectangular parallelepiped, the mounting boss 14 is provided on the front side wall of the moisturizing mechanism 10, and the rear end of the shower pipe 20 is hermetically connected to the mounting boss 14. Therefore, the moisture preservation mechanism 10 and the spray pipe 20 are conveniently connected in a sealing mode, and the connection reliability is improved.
In some embodiments of the present invention, referring to fig. 1 and 2, a plurality of mounting bosses 14 are provided, the plurality of mounting bosses 14 are arranged at intervals in a length direction of the moisturizing mechanism 10, one of the mounting bosses 14 is connected to the shower pipe 20, and outlets 141 of the remaining mounting bosses 14 are blocked by plugs 30. For example, two mounting bosses 14 are provided, the two mounting bosses 14 are arranged at intervals in the left-right direction, the mounting boss 14 on the left side is connected with the rear end of the shower pipe 20 in a sealing manner, and the mounting boss 14 on the right side is blocked by the plug 30. Therefore, when the spraying and sucking effects of the moisturizing liquid spraying device 100 on the unfilled corner polishing mechanism 300 need to be increased, the plug 30 can be detached from the mounting boss 14 and replaced by the spraying pipe 20, and the moisturizing liquid spraying device 100 can adapt to different working scenes.
In some embodiments of the present invention, and as shown with reference to fig. 3 and 4, the shower pipe 20 includes a plurality of pipe sections 22, one of two adjacent pipe sections 22 having a bulb section 23, and the other of two adjacent pipe sections 22 having a mating port 24 adapted to mate with the bulb section 23. It can be understood that, through the rotating fit between the outer wall of the ball rotating part 23 and the inner wall of the fitting port 24, the included angle between two adjacent pipe sections 22 can be adjusted, which is convenient for adjusting the spraying angle of the spraying pipe 20, and is beneficial to improving the cleaning effect of the unfilled corner polishing mechanism 300.
In some embodiments of the present invention, and as shown in FIG. 1, each of the plurality of tube segments 22 is a plastic piece. It can be appreciated that the plastic part has advantages of low cost, high durability, light weight, etc. by making the plurality of pipe sections 22 all plastic parts, it is advantageous to reduce the manufacturing cost of the shower 20, improve the durability of the shower 20, and reduce the weight.
In some embodiments of the present invention, and as shown with reference to FIG. 1, the moisturizing mechanism 10 is a resin. It can be understood that the resin member has the advantages of good flexibility, corrosion resistance, high and low temperature resistance, aging resistance, long service life and the like, and the comprehensive performance of the moisturizing mechanism 10 can be improved by making the moisturizing mechanism 10 a resin member.
In some embodiments of the present invention, referring to fig. 1, the moisturizing liquid spray apparatus 100 further includes: the first control valve 40, the first control valve 40 is located shower 20, and the aperture of first control valve 40 is adjustable. It can be understood that the water inflow of the shower pipe 20 can be adjusted by adjusting the opening degree of the first control valve 40, so that the spraying intensity of the shower pipe 20 can be adjusted, and the shower pipe 20 can be closed if necessary, which is beneficial to being suitable for different application scenarios.
In some embodiments of the present invention, as shown with reference to fig. 1 and 5, the moisturizing liquid spray device 100 further includes: and the second control valve 50 is connected between the liquid inlet 12 and a water source, and the opening degree of the second control valve 50 is adjustable. It can be understood that the worker can adjust the water inflow of the liquid inlet 12 by adjusting the opening degree of the second control valve 50, so as to adjust the water outflow of the liquid outlet 13, which is beneficial to meet different moisture preservation requirements. Further, the second control valve 50 may also transmit signals to a control system of the edge polishing apparatus, and the moisturizing liquid spraying device 100 may perform moisturizing liquid spraying at regular time, which is beneficial to the intelligent control of the moisturizing liquid spraying device 100.
In some embodiments of the present invention, referring to fig. 1, the liquid outlet 13 is multiple, and the multiple liquid outlets 13 are uniformly spaced apart in the length direction of the moisturizing mechanism 10. For example, the number of the liquid outlets 13 is three, and the three liquid outlets 13 are spaced apart in the left-right direction and distributed on the bottom wall of the moisturizing mechanism 10. Therefore, the moisturizing effect of the moisturizing liquid spraying device 100 on the transfer carrying arm 200 and the silicon wafer is improved, uniform moisturizing is achieved, and the polishing quality of the silicon wafer is improved.
Other configurations and operations of the moisturizing liquid spray apparatus 100 according to embodiments of the present invention are known to those of ordinary skill in the art and will not be described in detail herein.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the utility model and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the utility model.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In the description of the specification, reference to the description of "one embodiment," "some embodiments," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
While embodiments of the utility model have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the utility model, the scope of which is defined by the claims and their equivalents.
Claims (9)
1. A liquid spray device of moisturizing for edge polishing equipment, characterized in that, the liquid spray device of moisturizing is located the top of edge polishing equipment, liquid spray device of moisturizing includes:
the moisturizing mechanism is provided with a liquid inlet and a liquid outlet which are communicated with the liquid guide cavity, the liquid inlet is arranged on one side of the moisturizing mechanism and is suitable for being communicated with a water source, and the liquid outlet is arranged on the bottom wall of the moisturizing mechanism;
the spray pipe is arranged on the side wall of the moisturizing mechanism and communicated with the liquid guide cavity, a spray opening is formed in the free end of the spray pipe, and the spray direction of the spray opening is different from that of the liquid outlet.
2. The moisturizing liquid spray device for the edge polishing apparatus according to claim 1, wherein a side wall of the moisturizing mechanism is provided with a mounting boss having an outlet communicated with the liquid guide cavity, the mounting boss being adapted to be connected with the spray pipe.
3. The moisturizing liquid spraying device for the edge polishing equipment as claimed in claim 2, wherein the number of the mounting bosses is multiple, the mounting bosses are arranged at intervals in the length direction of the moisturizing mechanism, one of the mounting bosses is connected with the spraying pipe, and outlets of the other mounting bosses are blocked by plugs.
4. The moisturizing spray apparatus for an edge polishing device according to claim 1, wherein the spray pipe comprises a plurality of pipe sections, one of two adjacent pipe sections having a ball-turning portion, and the other of two adjacent pipe sections having a fitting port adapted to fit with the ball-turning portion.
5. The moisturizing spray assembly of claim 4, wherein the plurality of tube segments are plastic.
6. The moisturizing liquid spray apparatus for the edge polishing apparatus according to any one of claims 1 to 5, wherein the moisturizing mechanism is a resin member.
7. The moisturizing liquid spray apparatus for an edge polishing device according to any one of claims 1 to 5, further comprising:
the first control valve is arranged on the spray pipe, and the opening degree of the first control valve is adjustable.
8. The moisturizing liquid spray apparatus for an edge polishing device according to any one of claims 1 to 5, further comprising:
the second control valve is connected between the liquid inlet and the water source, and the opening degree of the second control valve is adjustable.
9. The moisturizing liquid spray device for the edge polishing apparatus according to any one of claims 1 to 5, wherein the liquid outlet is provided in a plurality, and the liquid outlets are uniformly spaced in a length direction of the moisturizing mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123211735.3U CN216940041U (en) | 2021-12-20 | 2021-12-20 | Moisturizing liquid spraying device for edge polishing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123211735.3U CN216940041U (en) | 2021-12-20 | 2021-12-20 | Moisturizing liquid spraying device for edge polishing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216940041U true CN216940041U (en) | 2022-07-12 |
Family
ID=82309702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123211735.3U Active CN216940041U (en) | 2021-12-20 | 2021-12-20 | Moisturizing liquid spraying device for edge polishing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216940041U (en) |
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2021
- 2021-12-20 CN CN202123211735.3U patent/CN216940041U/en active Active
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Legal Events
| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 1, Xinxin Road, Jinshanqiao Development Zone, Xuzhou, Jiangsu 221000 Patentee after: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. Address before: No. 1, Xinxin Road, Jinshanqiao Development Zone, Xuzhou, Jiangsu 221000 Patentee before: XUZHOU XINJING SEMICONDUCTOR TECHNOLOGY Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230713 Address after: 221004 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee after: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: No. 1, Xinxin Road, Jinshanqiao Development Zone, Xuzhou, Jiangsu 221000 Patentee before: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| CP03 | Change of name, title or address |
Address after: 221004 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee after: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. Country or region after: China Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Address before: 221004 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee before: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. Country or region before: China Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. |