CN216900623U

CN216900623U - Wafer test probe equipment

Info

Publication number: CN216900623U
Application number: CN202121867532.7U
Authority: CN
Inventors: 黄晓辉; 周永昌; 董琪琪
Original assignee: Feicheng Semiconductor Shanghai Co ltd
Current assignee: Feicheng Semiconductor Shanghai Co ltd
Priority date: 2021-08-11
Filing date: 2021-08-11
Publication date: 2022-07-05
Anticipated expiration: 2031-08-11

Abstract

The utility model belongs to the field of wafers, and particularly relates to a wafer test probe device which comprises an operating mechanism, wherein the operating mechanism comprises a driving mechanism, an output shaft of the driving mechanism is fixedly connected with a rotating shaft through a coupler, the top end of the rotating shaft is fixedly provided with a supporting platform, the top of the supporting platform is fixedly provided with a rotating platform, and the top of the rotating platform is provided with a limiting groove; through operating device, driving motor, the apparatus further comprises a rotating shaft, supporting platform, the cooperation installation of revolving stage and spacing groove, realized being convenient for rotate spacing function, in the use, accessible driving motor drives the pivot and the electric current that produces, the wafer to the revolving stage top is rotated, make each corner of wafer on this revolving stage can both detect, and the setting of spacing groove, can carry on spacingly to the wafer, make this wafer can be difficult for shifting, the problem of general test probe equipment rotation not convenient for has been solved, the efficiency of test probe equipment has been improved.

Description

Wafer test probe equipment

Technical Field

The utility model relates to the field of wafers, in particular to a wafer test probe device.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor circuit, the raw material of the wafer is silicon, high-purity polycrystalline silicon is dissolved and then doped into a silicon crystal seed crystal, the silicon crystal seed crystal is slowly pulled out to form cylindrical monocrystalline silicon, a silicon crystal rod is ground, polished and sliced to form a silicon wafer, namely the wafer, after the wafer is processed, the wafer can be detected through a detection probe in the using process, and the detected qualified wafer can be used.

However, the current test probe device has the problem that the angle is not convenient to change, and the probe cannot be detected when the corner of the wafer is tested in the using process, so that the test work is influenced, and therefore, the improvement is needed.

Accordingly, a wafer test probe apparatus is provided to address the above problems.

SUMMERY OF THE UTILITY MODEL

In order to make up for the defects of the prior art and solve the problem of convenience in angle conversion, the utility model provides a wafer test probe device.

The technical scheme adopted by the utility model for solving the technical problems is as follows: the wafer test probe equipment comprises an operating mechanism, wherein the operating mechanism comprises a driving motor, an output shaft of the driving motor is fixedly connected with a rotating shaft through a coupler, a supporting platform is fixedly installed at the top end of the rotating shaft, a rotating platform is fixedly installed at the top of the supporting platform, and a limiting groove is formed in the top of the rotating platform.

The detection mechanism comprises an electric lifting push rod, a fixed block is fixedly mounted inside the electric lifting push rod, a connecting frame is fixedly mounted at the bottom end of the electric lifting push rod, a second sliding rail is fixedly mounted inside the connecting frame, a sliding block is fixedly mounted inside the second sliding rail, a connecting block is fixedly mounted inside the second sliding rail, and a probe is fixedly mounted at the bottom of the connecting block.

Preferably, the top fixed mounting of base has the connecting plate, and the quantity of base is two, and two bases use the perpendicular midline symmetry axisymmetric setting of connecting plate.

Preferably, the connecting plate is including depositing the case, and the equal fixed mounting in both sides of depositing the case has first slide rail, and the inside fixed mounting of first slide rail has the driving frame, and the equal fixed mounting in both sides of driving frame has the pulley.

Preferably, the supporting rods are fixedly mounted on two sides of the top of the connecting plate, and the supporting plates are fixedly mounted on the top of the supporting rods.

Preferably, the top both sides of backup pad are equal fixed mounting has the electric lift loop bar, and the top fixed mounting of electric lift loop bar has the fixed plate, and the quantity of electric lift loop bar is two.

Preferably, the driving motor is movably connected with the rotating platform through a rotating shaft, and the driving motor and the rotating shaft are vertically distributed.

Preferably, the fixing plate is connected with the probe head through an electric lifting push rod in a lifting mode, and the electric lifting push rod and the probe head are vertically distributed.

Preferably, the probe head is movably connected with the connecting frame through a second slide rail, and the connecting frame is of a square structure.

The utility model has the advantages that:

1. the utility model realizes the function of convenient rotation and limit through the matching installation of the operating mechanism, the driving motor, the rotating shaft, the supporting platform, the rotating platform and the limit groove, and in the using process, the current generated by driving the rotating shaft through the driving motor can rotate the wafer above the rotating platform, so that all corners of the wafer on the rotating platform can be detected;

2. the utility model realizes the function of convenient lifting and sliding through the matching installation of the detection mechanism, the electric lifting push rod, the fixed block, the connecting frame, the second slide rail, the slide block, the connecting block and the probe head.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.

FIG. 1 is a front cross-sectional view of an embodiment;

FIG. 2 is a front view of the embodiment;

FIG. 3 is a schematic structural view of a detecting mechanism according to an embodiment;

FIG. 4 is a schematic structural view of an operating mechanism of the embodiment;

FIG. 5 is an enlarged view of the structure at A in FIG. 1 according to the embodiment.

In the figure: 1. a base; 2. a storage box; 3. a first slide rail; 4. a transmission frame; 5. a pulley; 6. a support bar; 7. a support plate; 8. an electric lifting loop bar; 9. a fixing plate; 10. an operating mechanism; 1001. a drive motor; 1002. a rotating shaft; 1003. a support platform; 1004. a rotating table; 1005. a limiting groove; 11. a detection mechanism; 1101. an electric lifting push rod; 1102. a fixed block; 1103. a connecting frame; 1104. a second slide rail; 1105. a slider; 1106. connecting blocks; 1107. a probe head; 12. a connecting plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-5, a wafer test probe apparatus includes an operating mechanism 10, the operating mechanism 10 includes a driving motor 1001, an output shaft of the driving motor 1001 is fixedly connected to a rotating shaft 1002 through a coupler, a supporting platform 1003 is fixedly installed at a top end of the rotating shaft 1002, a rotating platform 1004 is fixedly installed at a top of the supporting platform 1003, a limiting groove 1005 is formed at the top of the rotating platform 1004, and a wafer above the rotating platform 1004 is rotated by a current generated by the driving motor 1001 driving the rotating shaft 1002 through the operating mechanism 10, the driving motor 1001, the rotating shaft 1002, the supporting platform 1003, the rotating platform 1004 and the limiting groove 1005, so that each corner of the wafer on the rotating platform 1004 can be detected, and the limiting groove 1005 can limit the wafer so that the wafer is not easy to shift, the problem that general test probe equipment is not convenient for rotating is solved, and the efficiency of the test probe equipment is improved.

The detection mechanism 11 comprises an electric lifting push rod 1101, a fixed block 1102 is fixedly installed inside the electric lifting push rod 1101, a connecting frame 1103 is fixedly installed at the bottom end of the electric lifting push rod 1101, a second sliding rail 1104 is fixedly installed inside the connecting frame 1103, a sliding block 1105 is fixedly installed inside the second sliding rail 1104, a connecting block 1106 is fixedly installed inside the second sliding rail 1104, a probe head 1107 is fixedly installed at the bottom of the connecting block 1106, and through the matched installation of the detection mechanism 11, the electric lifting push rod 1101, the fixed block 1102, the connecting frame 1103, the second sliding rail 1104, the sliding block 1105, the connecting block 1106 and the probe head 1107, the function of facilitating lifting and facilitating sliding is realized, in the using process, the connecting frame 1103 can be driven by pulling the electric lifting push rod 1101 downwards, the connecting frame 1103 drives the probe head 1107 to lift downwards, so as to achieve the effect of facilitating the detection of wafers with different heights and being capable of being more fit, the left and right sliding connection blocks 1106 slide inside the second slide rails 1104, so that the purpose of conveniently detecting the corners of the wafer is achieved, and the adaptability of the test probe equipment is improved.

In this embodiment, the top fixed mounting of base 1 has connecting plate 12, and the quantity of base 1 is two, and two bases 1 set up with the perpendicular midline symmetry axis of connecting plate 12, through the setting of base 1, reach the effect of being convenient for support the device.

In this embodiment, connecting plate 12 is including depositing case 2, and the equal fixed mounting in both sides of depositing case 2 has first slide rail 3, and the inside fixed mounting of first slide rail 3 has drive frame 4, and the equal fixed mounting in both sides of drive frame 4 has pulley 5, through depositing case 2, first slide rail 3, the cooperation installation of drive frame 4 and pulley 5, reach the effect of being convenient for deposit the instrument, in the use, the accessible is pulled forward and is deposited case 2 and drive the inside first slide rail 3 of first slide rail 3 and slide and take out, thereby place its instrument.

In this embodiment, the equal fixed mounting in top both sides of connecting plate 12 has bracing piece 6, and the top fixed mounting of bracing piece 6 has backup pad 7, through the setting of connecting plate 12 with bracing piece 6, reaches the fixed effect of depositing case 2 of being convenient for should deposit case 2 and can fix.

In this embodiment, the equal fixed mounting in top both sides of backup pad 7 has electric lift loop bar 8, and the top fixed mounting of electric lift loop bar 8 has fixed plate 9, and the quantity of electric lift loop bar 8 is two, through the effect of backup pad 7 with fixed plate 9 for it can support electric lift loop bar 8.

In this embodiment, driving motor 1001 is through pivot 1002 and revolving stage 1004 swing joint, and driving motor 1001 and pivot 1002 vertical distribution, through the cooperation installation of driving motor 1001, pivot 1002 and revolving stage 1004, reach the effect of being convenient for to rotate, and in the use, accessible driving motor 1001 drives pivot 1002 and the electric current that produces rotates the wafer of revolving stage 1004 top for each corner of wafer on this revolving stage 1004 can both be detected.

In this embodiment, the fixed plate 9 goes up and down through electric lift push rod 1101 and is connected with probe head 1107, and electric lift push rod 1101 and probe head 1107 are the vertical distribution, through fixed plate 9, the cooperation installation of electric lift push rod 1101 and probe head 1107, reach the effect of being convenient for to go up and down, in the use, accessible pulls electric lift push rod 1101 downwards and drives the link 1103, the link 1103 drives the probe head 1107 and goes up and down again, and reach the effect that carries out the detection that is convenient for can laminate more to the wafer of equidimension height not.

In this embodiment, the probe 1107 passes through second slide rail 1104 and link 1103 swing joint, and the link 1103 is square structure, through the cooperation installation of probe 1107, second slide rail 1104 and link 1103, reaches the effect of the horizontal slip of being convenient for, slides in second slide rail 1104 inside through horizontal sliding connection piece 1106 to reach the convenient purpose of detecting the wafer corner.

During operation, at first place the device in suitable position, then place the wafer on revolving stage 1004, then, pulling electric lift push rod 1101 downwards drives link 1103, and link 1103 drives probe 1107 lift downwards again, when needs examine the round crystal corner, but the horizontal slip connecting block 1106 slides in second slide rail 1104 is inside, reuse driving motor 1001 drive pivot 1002 and the electric current that produces, rotate the wafer of revolving stage 1004 top to convenient work.

In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing shows and describes the general principles, essential features, and advantages of the utility model. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the utility model as claimed.

Claims

1. A wafer test probe apparatus, characterized by: the automatic feeding device comprises an operating mechanism (10), wherein the operating mechanism (10) comprises a driving motor (1001), an output shaft of the driving motor (1001) is fixedly connected with a rotating shaft (1002) through a coupler, a supporting platform (1003) is fixedly installed at the top end of the rotating shaft (1002), a rotating table (1004) is fixedly installed at the top of the supporting platform (1003), and a limiting groove (1005) is formed in the top of the rotating table (1004);

a detection mechanism (11), detection mechanism (11) includes electric lift push rod (1101), the inside fixed mounting of electric lift push rod (1101) has fixed block (1102), the bottom fixed mounting of electric lift push rod (1101) has link (1103), the inside fixed mounting of link (1103) has second slide rail (1104), the inside fixed mounting of second slide rail (1104) has slider (1105), the inside fixed mounting of second slide rail (1104) has connecting block (1106), the bottom fixed mounting of connecting block (1106) has probe head (1107).

2. The wafer test probe apparatus of claim 1, wherein: the top fixed mounting of a base (1) has connecting plate (12), just the quantity of base (1) is two, and just two bases (1) set up with the perpendicular mid-line symmetry axis of connecting plate (12).

3. The wafer test probe apparatus of claim 2, wherein: connecting plate (12) are including depositing case (2), and the equal fixed mounting in both sides of depositing case (2) has first slide rail (3), and the inside fixed mounting of first slide rail (3) has drive frame (4), and the equal fixed mounting in both sides of drive frame (4) has pulley (5).

4. The wafer test probe apparatus of claim 2, wherein: the supporting rods (6) are fixedly mounted on two sides of the top of the connecting plate (12), and the supporting plate (7) is fixedly mounted on the top of each supporting rod (6).

5. The wafer test probe apparatus of claim 4, wherein: the equal fixed mounting in top both sides of backup pad (7) has electric lift loop bar (8), and the top fixed mounting of electric lift loop bar (8) has fixed plate (9), and the quantity of electric lift loop bar (8) is two.

6. The wafer test probe apparatus of claim 1, wherein: the driving motor (1001) is movably connected with the rotating platform (1004) through a rotating shaft (1002), and the driving motor (1001) and the rotating shaft (1002) are vertically distributed.

7. The wafer test probe apparatus of claim 5, wherein: the fixing plate (9) is connected with the probe head (1107) in a lifting mode through the electric lifting push rod (1101), and the electric lifting push rod (1101) and the probe head (1107) are vertically distributed.

8. The wafer test probe apparatus of claim 1, wherein: the probe head (1107) is movably connected with the connecting frame (1103) through a second sliding rail (1104), and the connecting frame (1103) is of a square structure.