CN216849857U - Preparation device of standard sheet - Google Patents
Preparation device of standard sheet Download PDFInfo
- Publication number
- CN216849857U CN216849857U CN202123413372.1U CN202123413372U CN216849857U CN 216849857 U CN216849857 U CN 216849857U CN 202123413372 U CN202123413372 U CN 202123413372U CN 216849857 U CN216849857 U CN 216849857U
- Authority
- CN
- China
- Prior art keywords
- base
- standard
- preparing
- standard sheet
- panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Spray Control Apparatus (AREA)
Abstract
The utility model provides a preparation device of a standard sheet, which comprises a base, a supporting disk and a spraying module, wherein an included angle with adjustable angle is formed between the supporting disk and the surface of the base, and the standard sheet is placed in a groove of the supporting disk, so that the inclination angle of the standard sheet can be adjusted according to actual needs, and meanwhile, the groove can also prevent the standard sheet from falling off, thereby improving the reliability of the device; the relative position of the spray nozzle on the spraying module and the standard sheet can be adjusted according to actual conditions, so that the spraying solvent is uniformly coated on the standard sheet, and the quality of the standard sheet is improved. Additionally, the utility model provides a preparation facilities of standard piece has saved the human cost greatly, has improved the preparation efficiency of standard piece.
Description
Technical Field
The utility model belongs to the technical field of the silicon chip preparation, it is concrete, relate to a preparation facilities of standard piece.
Background
In a semiconductor manufacturing process, a Standard wafer (Standard wafer) is often required to monitor a device platform and know whether the performance of the device platform is deviated. In the process of preparing the standard sheet, a Polystyrene (PSL) solvent needs to be sprayed on the standard sheet, and in order to uniformly spray the PSL solvent on the standard sheet, the standard sheet needs to be inclined, and in the prior art, the standard sheet is usually inclined by a handheld manner or a vacuum suction pen, however, the above manner has a risk of dropping the standard sheet, thereby causing loss; in addition, the above method cannot achieve the purpose of accurately controlling the inclination angle of the standard sheet, so that it is difficult to uniformly spray the PSL solvent on the standard sheet.
SUMMERY OF THE UTILITY MODEL
In view of the above disadvantages of the prior art, the present invention provides a device for preparing a standard sheet, which comprises a base, a supporting disk and a spraying module, wherein the supporting disk and the surface of the base form an included angle with an adjustable angle, and the standard sheet is placed in a groove of the supporting disk, so that the inclination angle of the standard sheet can be adjusted according to the actual requirement, and the groove can prevent the standard sheet from falling off, thereby improving the reliability of the device; the relative position of the spray nozzle on the spraying module and the standard sheet can be adjusted according to actual conditions, so that the spraying solvent is uniformly coated on the standard sheet, and the quality of the standard sheet is improved. Additionally, the utility model provides a preparation facilities of standard piece has saved the human cost greatly, has improved the preparation efficiency of standard piece.
To achieve the above and other related objects, the present invention provides a device for preparing standard plate, comprising:
a base;
the supporting disc is arranged on the surface of the base, the front surface of the supporting disc is used for placing a standard sheet, and an included angle alpha is formed between the supporting disc and the surface of the base;
and the spraying module is positioned above the supporting disc and used for spraying the solvent to the standard sheet placed on the supporting disc.
Optionally, the included angle α ranges from 30 ° to 70 °.
Optionally, the method further includes:
a connector fixed to the base;
one end of the transmission piece is connected with the connecting piece;
and the driven part is matched and connected with the transmission part and is fixedly connected with the supporting plate so as to change an included angle alpha between the supporting plate and the surface of the base.
Optionally, the support disc is of a circular or semicircular or crescent structure.
Optionally, the edge of the front face of the support plate is provided with a groove to accommodate a standard sheet placed on the support plate.
Optionally, the spraying module comprises:
the support comprises a support column and a panel, one end of the support column is fixed to the surface of the base, the other end of the support column is connected with the panel, the height of the support column is adjustable to adjust an included angle between the panel and the surface of the base, and a slide way is arranged on one surface, close to the support disc, of the panel;
a nozzle disposed on the panel and movable along the slide.
Optionally, the support is arranged parallel to the support plate.
Optionally, the slide way includes a first slide way and a second slide way which are arranged in a crossing manner.
Optionally, the movement mode of the nozzle includes:
moving along the first slideway;
moving along the second slideway;
rotating around the central symmetry axis of the nozzle.
Optionally, the spraying device further comprises a control system, wherein the control system is in communication connection with the transmission member and the spraying module to control the movement of the transmission member and the spraying module.
The utility model provides a preparation facilities of standard piece has following beneficial effect at least:
the utility model provides a preparation facilities of standard piece includes base, supporting disk and sprays the module, and the supporting disk forms an angularly adjustable contained angle with the base surface, and the standard piece is placed in the recess of supporting disk, so the inclination of standard piece can be adjusted according to actual need, and the recess also can prevent that the standard piece from dropping simultaneously, has improved the reliability of device; the relative position of the spray nozzle on the spraying module and the standard sheet can be adjusted according to actual conditions, so that the spraying solvent is uniformly coated on the standard sheet, and the quality of the standard sheet is improved. Additionally, the utility model provides a preparation facilities of standard piece has saved the human cost greatly, has improved the preparation efficiency of standard piece.
Drawings
FIG. 1 shows a schematic view of a manufacturing apparatus for a standard tablet provided as an example.
Fig. 2 is a schematic view showing the connection of the support plate and the base in the embodiment.
Description of the element reference numerals
10 base
20 support disc
21 groove
30 spraying module
31 support
311 support column
312 Panel
3121 first slideway
3122 second slideway
32 nozzle
41 transmission member
42 follower
43 connecting piece
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The present invention can also be implemented or applied through other different specific embodiments, and various details in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.
It should be noted that the drawings provided in the present embodiment are only schematic and illustrative of the basic idea of the present invention, and although the drawings only show the components related to the present invention and are not drawn according to the number, shape and size of the components in actual implementation, the form, quantity, position relationship and proportion of the components in actual implementation can be changed at will on the premise of implementing the technical solution of the present invention, and the layout of the components may be more complicated.
Examples
The embodiment provides a device for preparing a standard sheet, as shown in fig. 1-2, comprising a base 10, a supporting plate 20 and a spraying module 30, wherein the supporting plate 20 is disposed on a surface of the base 10, a front surface of the supporting plate 20 is used for placing the standard sheet, an included angle α is formed between the supporting plate 20 and the surface of the base 10, and the spraying module 30 is disposed above the supporting plate 20 and is used for spraying a solvent onto the standard sheet.
As shown in fig. 2, the supporting plate 20 is disposed on the base 10 through the transmission member 41, the driven member 42, and the connection member 43. Alternatively, the connecting member 43 is fixed in the base 10, the bottom of the transmission member 41 is connected to the connecting member 43 and coaxially disposed, and the driven member 42 is connected to the transmission member 41 and fixedly connected to the supporting plate 20. When the included angle α between the supporting plate 20 and the base 10 is adjusted, the connecting member 43 drives the transmission member 41 to rotate around its own central axis, and drives the driven member 42 to rotate around the central axis of the driven member 42, and the driven member 42 is fixedly connected to the supporting plate 20, so that the supporting plate 20 can be driven to rotate, thereby changing the included angle α between the supporting plate 20 and the base surface, which is, for example, in the range of 30 ° to 70 °. In the alternative of this embodiment, the transmission member 41 is a gear shaft, the driven member 42 is a gear, and the connecting member 43 is a bearing, and in other alternative embodiments, the transmission member 41, the driven member 42, and the connecting member 43 may be other components capable of supporting the supporting plate and simultaneously realizing the swinging of the supporting plate.
As shown in fig. 2, the edge of the front surface of the supporting plate 20 is provided with a groove 21 to accommodate the standard plate placed on the supporting plate to prevent the standard plate from sliding off. In this embodiment, the supporting plate 20 may have a circular structure, a semicircular structure, or a crescent structure, which is suitable for placing a standard plate. The groove can be only arranged in a sector area of the bottom end of the supporting disc, or arranged at the bottom end of the supporting disc and the edge of part of the side face, and can also be arranged at the whole edge of the supporting disc.
As shown in fig. 1, in the present embodiment, the spray module 30 includes a bracket 31 and a nozzle 32 for spraying a solvent to a standard sheet placed on the support tray 20.
As an example, the bracket 31 includes a supporting column 311 and a panel 312, one end of the supporting column 311 is fixed to the surface of the base 10, and the other end is connected to the panel 312, alternatively, the panel is a rectangular or circular panel, and when the panel is a rectangular panel, the supporting column is disposed at four corners of the panel; when the panel is a circular panel, the support posts are preferably evenly distributed at the edges of the circular panel to stably support the panel. In addition, the height of each supporting column can be adjusted, the distance between the panel and the base can be adjusted by adjusting the height of the supporting column 311, and the included angle between the panel 312 and the surface of the base 10 can be adjusted, so that the distance between the panel 312 and the supporting disk 20 can optimally realize solvent spraying, and the panel and the supporting disk can be kept parallel all the time.
As an example, for better solvent spraying effect, the panel 312 is provided with a slide on one side close to the supporting tray 20, and optionally, the slide may be a plurality of slides arranged to intersect with each other, for example, the slide includes a first slide 3121 and a second slide 3122, and the first slide 3121 and the second slide 3122 are arranged to intersect with each other, and preferably, are arranged to be perpendicular to each other.
As an example, the nozzle 32 is disposed on a side of the panel 312 close to the supporting tray 20, and the nozzle 32 can move along the first sliding way 3121 and the second sliding way 3122 and can rotate around its own central symmetry axis. In the process of spraying the solvent to the standard sheet, the relative position of the nozzle and the standard sheet is adjusted through one or more of the movement modes, so that the aim of uniformly spraying the sprayed solvent to the surface of the standard sheet can be fulfilled.
Illustratively, the nozzle 32 is also connected by a conduit to a solvent reservoir (not shown) for storing the spray solvent and delivering the spray solvent to the nozzle 32 through the conduit.
The standard wafer manufacturing apparatus provided in this embodiment further includes a control system (not shown in the drawings), and in this embodiment, the control system is disposed in the base 10 for integration. The control system is in communication connection with the transmission piece 41, controls the transmission piece 41 to rotate around the central axis thereof, and then drives the support plate 20 to rotate through the driven piece 42, so as to achieve the purpose of adjusting the included angle alpha; the control system is also in communication with the spray module 30 and is capable of controlling the movement of the nozzle 32 as well as the spray rate, spray time, solvent flow rate, etc. of the sprayed solvent. In the process of preparing the standard sheet, the angle of the included angle alpha, the relative position of the nozzle and the standard sheet, the spraying speed, the spraying time, the solvent flow and the like of the sprayed solvent can be adjusted in real time by inputting signals to the control system, and finally the sprayed solvent is uniformly coated on the standard sheet.
The utility model provides a preparation device of a standard sheet, which comprises a base, a supporting disk and a spraying module, wherein an included angle with adjustable angle is formed between the supporting disk and the surface of the base; the relative position of the spray nozzle and the standard sheet on the spraying module can be adjusted according to actual conditions, so that the spraying solvent is uniformly coated on the standard sheet, and the quality of the standard sheet is improved. Additionally, the utility model provides a preparation facilities of standard piece has saved the human cost greatly, has improved the preparation efficiency of standard piece.
The above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. An apparatus for preparing a master batch, comprising:
a base;
the supporting disc is arranged on the surface of the base, the front surface of the supporting disc is used for placing a standard sheet, and an included angle alpha is formed between the supporting disc and the surface of the base;
and the spraying module is positioned above the supporting disc and used for spraying the solvent to the standard sheet placed on the supporting disc.
2. The apparatus for preparing a master batch of claim 1, wherein the included angle α is in the range of 30 ° to 70 °.
3. The apparatus for preparing a master batch according to claim 2, further comprising:
a connector fixed to the base;
one end of the transmission piece is connected with the connecting piece;
and the driven part is matched and connected with the transmission part and is fixedly connected with the supporting plate so as to change an included angle alpha between the supporting plate and the surface of the base.
4. The apparatus for preparing standard plate according to claim 1, wherein the support disc has a circular or semicircular or crescent-shaped structure.
5. A device for preparing standard plates according to claim 1 or 4, wherein the edge of the front surface of the supporting plate is provided with a groove to accommodate the standard plate placed on the supporting plate.
6. The apparatus for preparing a master batch of claim 1, wherein the spray module comprises:
the support comprises a support column and a panel, one end of the support column is fixed to the surface of the base, the other end of the support column is connected with the panel, the height of the support column is adjustable so as to adjust the included angle between the panel and the surface of the base, and a slide way is arranged on one surface, close to the support plate, of the panel;
a nozzle disposed on the panel and movable along the slide.
7. The apparatus for preparing a master batch of claim 6, wherein the support is disposed parallel to the support plate.
8. The apparatus of claim 6, wherein the slide comprises a first slide and a second slide arranged in a cross-over arrangement.
9. The apparatus for preparing a master batch of claim 8, wherein the nozzle is moved in a manner comprising:
moving along the first slideway;
moving along the second slideway;
rotating around the central symmetry axis of the nozzle.
10. A master slice preparation apparatus as claimed in claim 3 further comprising a control system in communication with the drive and the spray module to control movement of the drive and the spray module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123413372.1U CN216849857U (en) | 2021-12-30 | 2021-12-30 | Preparation device of standard sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123413372.1U CN216849857U (en) | 2021-12-30 | 2021-12-30 | Preparation device of standard sheet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216849857U true CN216849857U (en) | 2022-06-28 |
Family
ID=82112539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123413372.1U Active CN216849857U (en) | 2021-12-30 | 2021-12-30 | Preparation device of standard sheet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216849857U (en) |
-
2021
- 2021-12-30 CN CN202123413372.1U patent/CN216849857U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101823223B (en) | Glass polishing system | |
| JPWO2009034795A1 (en) | Substrate transfer robot, vacuum processing equipment | |
| CN216849857U (en) | Preparation device of standard sheet | |
| CN108300961A (en) | A kind of mounting system and method for mask frame | |
| TW201143914A (en) | Application method and application device | |
| CN206255626U (en) | Base plate transfer device and the base plate processing system comprising it | |
| CN209139035U (en) | A kind of glue stations and adhesive tape installation system | |
| CN105413961B (en) | A kind of glue coating equipment | |
| CN110817424B (en) | Method for adjusting huge distance of tiny electronic components, huge transfer method and equipment | |
| KR101318600B1 (en) | Substrate feeding device | |
| CN209448329U (en) | A kind of lateral cable trench cover automatic laying device | |
| CN215964473U (en) | Asynchronous bivalve adhesive deposite device | |
| CN108993943A (en) | Cleaning equipment | |
| CN211010460U (en) | A photographic track for commodity is shot | |
| US20060104787A1 (en) | Substrate delivering apparatus | |
| CN111716867B (en) | Multi-point fitting curved surface fitting equipment, control method and control system | |
| CN110164795A (en) | Wet processing equipment and wafer wet processing method | |
| JPH1167624A (en) | Substrate processing device | |
| CN208722848U (en) | A kind of nozzle corresponds to Multicarity glue feeder | |
| CN221086108U (en) | Atomizer with adjustable base | |
| CN207616314U (en) | The special tune needle card grinding one mechanism of ocean of probe card | |
| CN112349636A (en) | High-precision large-board-level micro-assembly equipment | |
| TW201607613A (en) | Liquid material dropping device and method | |
| CN207611536U (en) | A kind of optics island equipment for popularization exhibitions | |
| JPH06142594A (en) | Device for forming film on disk |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |