CN216835791U - Automatic feeding and discharging machine table - Google Patents
Automatic feeding and discharging machine table Download PDFInfo
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- CN216835791U CN216835791U CN202220349308.7U CN202220349308U CN216835791U CN 216835791 U CN216835791 U CN 216835791U CN 202220349308 U CN202220349308 U CN 202220349308U CN 216835791 U CN216835791 U CN 216835791U
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Abstract
The utility model discloses an automatic feeding and discharging machine table, including circuit control box, the lift platform, the lift actuating mechanism, detection device and OHT butt joint control system, the top of circuit control box is equipped with the frame, the frame passes through the bottom plate with circuit control box and is connected, the frame top is equipped with the roof, the roof has seted up the window, the roof is equipped with relative positioning device and the box opener that sets up respectively at the four sides of window, positioning device and box opener all are connected with OHT butt joint control system electricity, the lift actuating mechanism is installed in the frame side and is connected with lift platform machinery, lift platform reciprocates through the window, the last detection device that is equipped with of lift platform, circuit control box the inside is equipped with OHT butt joint control system, lift actuating mechanism and detection device all are connected with OHT butt joint control system electricity; the utility model discloses a SMIF docks with OHT overhead traveling crane system, carries out automatic feeding and unloads, has reduced artifical transport, has improved production efficiency.
Description
Technical Field
The utility model relates to a semiconductor technology field, concretely relates to automatic feeding board of unloading.
Background
Currently, in the semiconductor manufacturing industry, an automatic loading and unloading machine (SMIF) is widely used. The automatic loading and unloading machine is attached to other equipment and is mainly responsible for guiding semiconductor wafers to be processed into the processing machine (i.e., loading) through the SMIF POD (wafer loading container) or guiding processed wafers back to the SMIF POD (i.e., unloading) from the processing machine.
In general, loading and unloading of SMIF POD requires manual loading and unloading and carrying, and cannot be docked with an OHT overhead crane system.
SUMMERY OF THE UTILITY MODEL
Therefore, the embodiment of the utility model provides an automatic feeding board of unloading to it needs the manual work to carry out the loading and unloading and carry the usefulness to solve the unloading of the ordinary SMIF POD that prior art exists, can't carry out the problem of butt joint with OHT overhead traveling crane system.
In order to achieve the above object, the embodiment of the present invention provides the following technical solutions:
an automatic feeding and discharging machine platform comprises a circuit control box, a lifting platform, a lifting driving mechanism, a detection device and an OHT butt joint control system, a frame is arranged above the circuit control box and is connected with the circuit control box through a bottom plate, the top of the frame is provided with a top plate, the top plate is provided with a window, the top plate is respectively provided with a positioning device and a box opening device which are oppositely arranged on the four sides of the window, the positioning device and the box opening device are both electrically connected with the OHT butt joint control system, the lifting driving mechanism is arranged on the side surface of the frame and is mechanically connected with the lifting platform, the lifting platform moves up and down through the window, the detection device is arranged on the lifting platform, an OHT butt joint control system is arranged in the circuit control box, and the lifting driving mechanism and the detection device are electrically connected with the OHT butt joint control system.
Preferably, the positioning device comprises a gland cylinder, a switching frame, a guide rail slider, a pressing sheet and a sensor in place, the sensor in place comprises a sensor body and a sensor shifting sheet, the gland cylinder is fixed on the top plate and fixedly connected with the switching frame, the switching frame is connected with the pressing sheet, the guide rail slider is arranged at one end, connected with the switching frame, of the pressing sheet, the sensor shifting sheet is further arranged on the switching frame and connected with the sensor body, and the sensor body and the gland cylinder are electrically connected with the OHT butt joint control system.
Preferably, the positioning device further comprises a positioning device shell, the gland cylinder, the switching frame, the guide rail sliding block, the pressing sheet and the in-place sensor are arranged in the positioning device shell, an opening is formed in the side face, close to the lifting platform, of the positioning device shell, and the pressing sheet extends out of the positioning device shell through the opening.
Preferably, the box opening device comprises an uncovering cylinder, a sliding block, a connecting rod mechanism and an uncovering deflector rod, the uncovering cylinder is fixed on the top plate and is mechanically connected with the sliding block, the sliding block is connected with the connecting rod mechanism, the uncovering deflector rod is arranged on the connecting rod mechanism, and the uncovering cylinder is electrically connected with the OHT butt joint control system.
Preferably, the box opening device further comprises a box opening device shell, the cover opening cylinder, the sliding block, the connecting rod mechanism and the cover opening deflector rod are arranged inside the box opening device shell, a through hole is formed in the top of the box opening device shell, and the cover opening deflector rod extends out of the box opening device shell through the through hole.
Preferably, the OHT butt joint control system includes controller, adapter and light sensor, the controller is installed on the lateral wall of circuit control case the inside, the adapter sets up the bottom surface of circuit control case with the controller electricity is connected, light sensor pass through the adapter with the controller electricity is connected.
Preferably, the adapter is a DB25 adapter.
Preferably, the detection device is an RFID reading device.
The utility model discloses following beneficial effect has at least: the utility model provides an automatic feeding and discharging machine table, including circuit control box, the lift platform, the lift actuating mechanism, detection device and OHT butt joint control system, the top of circuit control box is equipped with the frame, the frame passes through the bottom plate with circuit control box and is connected, the frame top is equipped with the roof, the roof has seted up the window, the roof is equipped with relative positioning device and the box opener that sets up respectively at the four sides of window, positioning device and box opener all are connected with OHT butt joint control system electricity, the lift actuating mechanism is installed in the frame side and is connected with lift platform machinery, lift platform reciprocates through the window, the last detection device that is equipped with of lift platform, circuit control box the inside is equipped with OHT butt joint control system, lift actuating mechanism and detection device all are connected with OHT butt joint control system electricity; the utility model discloses a SMIF docks with OHT overhead traveling crane system, carries out automatic feeding and unloads, has reduced artifical transport, has improved production efficiency.
Drawings
In order to clearly illustrate the prior art and the present invention, the drawings needed to be used in the description of the prior art and the embodiments of the present invention will be briefly described. It should be apparent that the drawings in the following description are merely exemplary, and that other drawings may be derived from the provided drawings by those of ordinary skill in the art without inventive effort.
The structure, ratio, size and the like shown in the present specification are only used for matching with the content disclosed in the specification, so as to be known and read by people familiar with the technology, and are not used for limiting the limit conditions that the present invention can be implemented, and any modification of the structure, change of the ratio relation or adjustment of the size should still fall within the scope that the technical content disclosed in the present invention can cover without affecting the efficacy that the present invention can produce and the purpose that can be achieved.
Fig. 1 is a schematic view of an overall structure of an automatic feeding and discharging machine platform provided in an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an installation position of an OHT docking control system according to an embodiment of the present invention;
fig. 3 is a top view of an automatic feeding and discharging machine platform provided in an embodiment of the present invention;
fig. 4 is a schematic structural view of a box opening device provided in an embodiment of the present invention;
fig. 5 is a schematic structural diagram of a positioning device according to an embodiment of the present invention.
Description of reference numerals:
1-a circuit control box; 2-a frame; 3-a bottom plate; 4-a top plate; 5, lifting the platform; 6-a lifting driving mechanism; 7-a box opening device; 71-uncovering the cylinder; 72-a slide block; 73-linkage mechanism; 74-cover opening deflector rod; 75-a rotating shaft; 8-a positioning device; 81-gland cylinder; 82-a transfer frame; 83-tabletting; 84-a rail slide; 85-sensor paddle; 86-a sensor body; 9-a detection device; 10-OHT docking control system; 101-a controller; 102-an adapter; 103-a light sensor; 104-cable.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
In the description of the present invention, "a plurality" means two or more unless otherwise specified. The terms "first," "second," "third," "fourth," and the like in the description and claims of the present invention and in the above-described drawings (if any) are intended to distinguish between the referenced items. For a scheme with a time sequence flow, the term expression does not need to be understood as describing a specific sequence or a sequence order, and for a scheme of a device structure, the term expression does not have distinction of importance degree, position relation and the like.
Furthermore, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements specifically listed, but may include other steps or elements not expressly listed that are inherent to such process, method, article, or apparatus or that are added to such process, method, article, or apparatus based on the concepts of the present invention.
Referring to fig. 1, fig. 2 and fig. 3, an embodiment of the present invention provides an automatic loading and unloading machine, including a circuit control box 1, a lifting platform 5, a lifting driving mechanism 6, a detection device 9 and an OHT docking control system 10, where the detection device 9 is an RFID reading device; the top of the circuit control box 1 is provided with a frame 2, the frame 2 is connected with the circuit control box 1 through a bottom plate 3, the top of the frame 2 is provided with a top plate 4, a window is arranged on the top plate 4, the top plate 4 is respectively provided with a positioning device 8 and an opening device 7 which are oppositely arranged on four sides of the window, the positioning device 8 and the opening device 7 are electrically connected with an OHT butt joint control system 10, a lifting driving mechanism 6 is arranged on the side surface of the frame 2 and is mechanically connected with a lifting platform 5, the lifting platform 5 moves up and down through the window, a detection device 9 is arranged on the lifting platform 5, the OHT butt joint control system 10 is arranged in the circuit control box 1, and the lifting driving mechanism 6 and the detection device 9 are electrically connected with the OHT butt joint control system 10. The utility model discloses a SMIF docks with OHT overhead traveling crane system, carries out automatic feeding and unloads, has reduced artifical transport, has improved production efficiency.
Referring to fig. 4, the box opening device 7 includes a cover opening cylinder 71, a slider 72, a link mechanism 73 and a cover opening lever 74, the cover opening cylinder 71 is fixed on the top plate 4 and mechanically connected to the slider 72, the slider 72 is connected to the link mechanism 73, the link mechanism 73 is provided with the cover opening lever 74, and the cover opening cylinder 71 is electrically connected to the OHT docking control system 10.
The box opening device 7 further comprises a box opening device shell, the cover opening air cylinder 71, the sliding block 72, the connecting rod mechanism 73 and the cover opening shifting rod 74 are arranged inside the box opening device shell, a through hole is formed in the top of the box opening device shell, and the cover opening shifting rod 74 extends out of the box opening device 7 shell through the through hole.
Referring to fig. 5, the positioning device 8 includes a capping cylinder 81, an adapting frame 82, a guide rail slider 84, a pressing sheet 83 and an in-place sensor, the in-place sensor includes a sensor body 86 and a sensor dial 85, the capping cylinder 81 is fixed on the top plate 4 and is fixedly connected with the adapting frame 82, the adapting frame 82 is connected with the pressing sheet 83, the guide rail slider 84 is arranged at one end of the pressing sheet 83 connected with the adapting frame 82, the sensor dial 85 is further arranged on the adapting frame 82, the sensor dial 85 is connected with the sensor body 86, and the sensor body 86 and the capping cylinder 81 are electrically connected with the OHT docking control system 10.
The positioning device 8 further comprises a positioning device shell, the gland cylinder 81, the switching frame 82, the guide rail sliding block 84, the pressing sheet 83 and the in-place sensor are arranged in the positioning device shell, an opening is formed in the side face, close to the lifting platform 5, of the positioning device shell, and the pressing sheet 83 extends out of the positioning device shell through the opening.
OHT butt joint control system 10 includes controller 101, adapter 102 and light sensor 103, and adapter 102 is the DB25 adapter, and controller 101 installs on the lateral wall of circuit control box 1 the inside, and the adapter sets up the bottom surface and is connected with controller 101 electricity of circuit control box 1, and light sensor 103 is connected with controller 101 electricity through cable 104 and adapter 102, and light sensor 103 carries out the communication with the OHT overhead traveling crane system.
Specifically, when loading is performed, the controller 101 determines whether an SMIF POD exists on the lifting platform 5 through an in-place sensor in the positioning device 8, when the SMIF POD does not exist, the controller 101 sends a loading request to an OHT overhead traveling crane system through the optical sensor 103 to perform loading operation, and when loading is completed, the controller 101 determines whether loading is successful through the in-place sensor; after the feeding is successful, the controller 101 controls the box opening device 7 to open the cover, firstly, the positioning device 8 fixes the SMIF POD, the unlocking device unlocks the SMIF POD, and after the unlocking is completed, the controller 101 controls the lifting driving mechanism 6 to move the lifting platform 5 downwards and move to the bottom to complete the opening of the cover; during the downward movement, the detection device 9 scans and records the wafers, and the controller 101 accurately calculates the accurate number of the wafers, the cross-slot placement error and the heavy-piece placement error through an internal algorithm.
When blanking is performed, the controller 101 judges whether an SMIF POD exists on the lifting platform 5 through an in-place sensor in the positioning device 8, when the SMIF POD exists, the controller 101 sends a blanking request to the OHT overhead traveling crane system through the optical sensor 103 to perform blanking operation, and when blanking is completed, the controller 101 judges whether blanking is successful through the in-place sensor in the positioning device 8.
The present invention has been described in considerable detail by the general description and the specific examples given above. It should be noted that, without departing from the inventive concept, it is obvious that several variations and modifications can be made to the specific embodiments, which fall within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (8)
1. An automatic feeding and discharging machine platform is characterized by comprising a circuit control box, a lifting platform, a lifting driving mechanism, a detection device and an OHT butt joint control system, a frame is arranged above the circuit control box and is connected with the circuit control box through a bottom plate, the top of the frame is provided with a top plate, the top plate is provided with a window, the top plate is respectively provided with a positioning device and a box opening device which are oppositely arranged on the four sides of the window, the positioning device and the box opening device are both electrically connected with the OHT butt joint control system, the lifting driving mechanism is arranged on the side surface of the frame and is mechanically connected with the lifting platform, the lifting platform moves up and down through the window, the detection device is arranged on the lifting platform, an OHT butt joint control system is arranged in the circuit control box, and the lifting driving mechanism and the detection device are electrically connected with the OHT butt joint control system.
2. The automatic feeding and discharging machine table as claimed in claim 1, wherein the positioning device comprises a capping cylinder, an adapting frame, a rail slider, a pressing plate and an in-place sensor, the in-place sensor comprises a sensor body and a sensor dial, the capping cylinder is fixed on the top plate and fixedly connected with the adapting frame, the adapting frame is connected with the pressing plate, the rail slider is arranged at one end of the pressing plate connected with the adapting frame, the sensor dial is further arranged on the adapting frame and connected with the sensor body, and the sensor body and the capping cylinder are electrically connected with the OHT docking control system.
3. The automatic loading and unloading machine station as claimed in claim 2, wherein the positioning device further comprises a positioning device housing, the capping cylinder, the adapting frame, the rail block, the pressing sheet and the in-place sensor are disposed inside the positioning device housing, an opening is disposed on a side surface of the positioning device housing close to the lifting platform, and the pressing sheet extends out of the positioning device housing through the opening.
4. The automatic loading and unloading machine station as claimed in claim 1, wherein the box opening device comprises a cover opening cylinder, a slider, a link mechanism and a cover opening lever, the cover opening cylinder is fixed on the top plate and is mechanically connected with the slider, the slider is connected with the link mechanism, the link mechanism is provided with the cover opening lever, and the cover opening cylinder is electrically connected with the OHT docking control system.
5. The automatic loading and unloading machine station as claimed in claim 4, wherein the box opening device further comprises a box opening device shell, the box opening cylinder, the slider, the link mechanism and the cover opening lever are arranged inside the box opening device shell, a through hole is formed in the top of the box opening device shell, and the cover opening lever extends out of the box opening device shell through the through hole.
6. The automatic loading and unloading machine station as claimed in claim 1, wherein the OHT docking control system comprises a controller, an adapter and a light sensor, the controller is installed on a side wall inside the circuit control box, the adapter is arranged on the bottom surface of the circuit control box and is electrically connected with the controller, and the light sensor is electrically connected with the controller through the adapter.
7. The automatic feeding and discharging machine station as claimed in claim 6, wherein the adapter is a DB25 adapter.
8. The automatic feeding and discharging machine station as claimed in claim 1, wherein the detection device is an RFID reading device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220349308.7U CN216835791U (en) | 2022-02-21 | 2022-02-21 | Automatic feeding and discharging machine table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220349308.7U CN216835791U (en) | 2022-02-21 | 2022-02-21 | Automatic feeding and discharging machine table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216835791U true CN216835791U (en) | 2022-06-28 |
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ID=82090201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220349308.7U Active CN216835791U (en) | 2022-02-21 | 2022-02-21 | Automatic feeding and discharging machine table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216835791U (en) |
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2022
- 2022-02-21 CN CN202220349308.7U patent/CN216835791U/en active Active
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