CN216774596U - Radio frequency power supply - Google Patents
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- CN216774596U CN216774596U CN202123384296.6U CN202123384296U CN216774596U CN 216774596 U CN216774596 U CN 216774596U CN 202123384296 U CN202123384296 U CN 202123384296U CN 216774596 U CN216774596 U CN 216774596U
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Abstract
The application provides a radio frequency power supply, which comprises a power supply body and a detection module connected with the output end of the power supply body, wherein the detection module comprises an output cable connected with the power supply body, and a current detection element and a voltage detection element which are connected with the output cable; the current detection element is used for detecting the current of the output cable; the voltage detection element is used for detecting the voltage of the output cable. The radio frequency power supply realizes combination of current and voltage detection by arranging the current detection element and the voltage detection element on the power supply body through clamping, so that the detected current and voltage have no time delay, the consistency of data acquisition time is ensured, and the precision and the reliability of the output power of the radio frequency power supply are ensured. The detection module circuit is simplified, so that the radio frequency power supply module is miniaturized, and the problems that the current and the voltage of the conventional power supply are respectively acquired by two corresponding sensors, the response time of the acquired voltage and current data is different, the accuracy of the power output value is low, and the reliability is poor are solved.
Description
Technical Field
The application belongs to the technical field of power supplies, and particularly relates to a radio frequency power supply.
Background
When the existing radio frequency power supply outputs power, the power value of the output end needs to be acquired, the power value is obtained by acquiring the voltage signal and the current of the output end, and the acquired power value is compared with a value set by a user to perform PID closed-loop control. At present, the acquisition of voltage and current of a power supply respectively adopts a current sensor module to acquire current and a voltage sensor module to acquire voltage, so that the response time of acquired voltage and current data is different, and the accuracy and the reliability of the obtained power output value of the power supply are low.
In the process of supplying power to a load by using an existing power supply, the internal resistance of the power supply needs to be matched with the impedance of the load, an L-shaped ICP impedance matcher is adopted for matching the internal resistance of the power supply with the impedance of the load at present, but the L-shaped ICP impedance matcher has the condition that the current input into a coil cavity of the power supply can change along with the change of the environment, so that the energy input into the coil cavity can change, the concentration of the excited plasma is inconsistent, the uniformity is inconsistent, and the user requirements cannot be met. As shown in fig. 4, the L-shaped ICP impedance matcher is composed of a series inductor L1, a series adjustable capacitor C1, a parallel inductor L2, and a parallel adjustable capacitor C2.
SUMMERY OF THE UTILITY MODEL
An embodiment of the application provides a radio frequency power supply to solve the problems that the current and the voltage of the existing power supply are respectively collected by two corresponding sensors, the response time of collected voltage and current data is different, the precision of the power output value is low, and the reliability is poor.
In a first aspect, an embodiment of the present application provides a radio frequency power supply, including a power supply body and a detection module connected to an output end of the power supply body, where the detection module includes an output cable connected to the power supply body, and a current detection element and a voltage detection element connected to the output cable;
the current detection element is used for detecting the current of the output cable;
the voltage detection element is used for detecting the voltage of the output cable.
Optionally, the current detection element includes an inductor connected to the output cable, a first voltage dividing circuit connected to the inductor, and a first output terminal connected to the first voltage dividing circuit.
Optionally, the first voltage dividing circuit includes a first resistor and a second resistor connected in series.
Optionally, the voltage detection element includes an inductive capacitor connected to the output cable, and a second voltage division circuit and a second output terminal respectively connected to the inductive capacitor.
Optionally, the second voltage-dividing circuit includes a third inductor and a second capacitor connected in parallel.
Optionally, the radio frequency power supply includes a shielding element, the shielding element is disposed between the power supply body and the detection module, and the inductive capacitance is a capacitance formed between the shielding element and the output cable.
Optionally, the radio frequency power supply includes a protective casing, and the detection module and the shielding element are both disposed in the protective casing.
Optionally, the radio frequency power supply includes a radio frequency matcher connected to the output end of the power supply body, where the radio frequency matcher includes a radio frequency input end, a digital detection element connected to the radio frequency input end, an L-type network circuit connected to the radio frequency input end, an auxiliary adjustment circuit and a current-voltage detection circuit that are respectively connected to the L-type network circuit, and a radio frequency main output end;
the digital detection element is used for detecting the electrical quantity input by the radio frequency input end
The L-type network circuit is used for providing a first impedance for a load;
the auxiliary adjusting circuit is used for adjusting the first impedance to be matched with the impedance of the load;
the current and voltage detection circuit is used for detecting the current and the voltage output by the radio frequency main output end.
Optionally, the auxiliary adjusting circuit includes a thirty-first capacitor, a forty-first capacitor, and a radio frequency auxiliary output end, a first end of the thirty-first capacitor is connected to the output end of the L-type network circuit, a second end of the thirty-first capacitor is connected to the first end of the forty-first capacitor and the radio frequency auxiliary output end, respectively, and a second end of the forty-first capacitor is grounded.
Optionally, the current-voltage detection circuit includes a voltage detector and a current detector connected to the output end of the L-type network circuit, and the voltage detector and the current detector are respectively connected to the rf auxiliary output end.
The radio frequency power supply provided by one embodiment of the application comprises a power supply body and a detection module connected with the output end of the power supply body, wherein the detection module comprises an output cable connected with the power supply body, and a current detection element and a voltage detection element which are connected with the output cable; the current detection element is used for detecting the current of the output cable; the voltage detection element is used for detecting the voltage of the output cable. The radio frequency power supply realizes combination of current and voltage detection by arranging the current detection element and the voltage detection element on the power supply body through clamping, so that the current and the voltage detected by the radio frequency power supply have no time delay, the consistency of data acquisition time is ensured, and the precision and the reliability of the output power of the radio frequency power supply are ensured. The detection module circuit of the radio frequency power supply is simplified, the radio frequency power supply module is miniaturized, and the problems that the current and the voltage of the existing power supply are respectively collected by two corresponding sensors, the response time of the collected voltage and current data is different, the precision of the power output power value is low, and the reliability is poor are solved.
Drawings
In order to more clearly illustrate the technical solution in one embodiment of the present application, the drawings used in the description of the embodiment will be briefly introduced below. It is obvious that the drawings in the following description are only some embodiments of the application, and that for a person skilled in the art, other drawings can also be derived from them without inventive effort.
For a more complete understanding of the present application and its advantages, reference is now made to the following descriptions taken in conjunction with the accompanying drawings. Wherein like reference numerals refer to like parts in the following description.
Fig. 1 is a schematic circuit diagram of a radio frequency power detection module according to an embodiment of the present application.
Fig. 2 is a schematic circuit diagram of an rf power detection module according to another embodiment of the present application.
Fig. 3 is a schematic circuit diagram of a radio frequency matcher for a radio frequency power supply according to another embodiment of the present application.
Fig. 4 is a schematic circuit diagram of a radio frequency matcher in a conventional radio frequency power supply.
Detailed Description
The technical solution in one embodiment of the present application will be clearly and completely described below with reference to the accompanying drawings in one embodiment of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
An embodiment of the application provides a radio frequency power supply to solve the problems that the current and the voltage of the existing power supply are respectively collected by two corresponding sensors, the response time of collected voltage and current data is different, the precision of the power output value is low, and the reliability is poor.
The first embodiment is as follows:
fig. 1 and fig. 2 are exemplary views of a radio frequency power supply provided in an embodiment of the present application, and fig. 1 is a schematic circuit diagram of a radio frequency power supply detection module provided in an embodiment of the present application. Fig. 2 is a schematic circuit diagram of a radio frequency power detection module according to another embodiment of the present application. The radio frequency power supply is widely applied to industries such as semiconductor process equipment, LED and solar photovoltaic industry, plasma generation in scientific experiments, radio frequency induction heating, medical cosmetology, normal pressure plasma disinfection and cleaning and the like, and is not limited to be widely used here.
As shown in fig. 1 and fig. 2, the utility model provides a radio frequency power supply includes power supply body and the detection module who is connected with the power supply body output, and the detection module includes output cable 10 that is connected with power supply body and current detection component 20 and the voltage detection component 30 of being connected with output cable 10.
It is further explained that the detection module is arranged on the circuit board. When the radio frequency power supply needs to collect the power of the output end, the current and the voltage at the same time output by the output cable in the radio frequency power supply can be collected through the current detection element 20 and the voltage detection element 30, so that the collection of the power of the output end of the radio frequency power supply is realized.
In the present invention, the current detection element 20 is mainly used for detecting the current of the output cable 10, and the voltage detection element 30 is mainly used for detecting the voltage of the output cable 10.
It is further noted that the current detecting element 20 may be a current sensor, the voltage detecting element 30 may be a voltage sensor, and in other embodiments, the current detecting element 20 and the voltage detecting element 30 may also be components or elements having current and voltage detection. The radio frequency power supply is provided with the current detection element 20 and the voltage detection element 30 on the power supply body to realize the combination of the current sensor and the voltage sensor, so that the current and the voltage detected by the radio frequency power supply have no time delay, the consistency of data acquisition time is ensured, and the precision and the reliability of the output power of the radio frequency power supply are ensured. The detection module circuit of the radio frequency power supply is simplified, so that the radio frequency power supply module is miniaturized.
The radio frequency power supply provided by one embodiment of the application comprises a power supply body and a detection module connected with the output end of the power supply body, wherein the detection module comprises an output cable connected with the power supply body, and a current detection element and a voltage detection element which are connected with the output cable; the current detection element is used for detecting the current of the output cable; the voltage detection element is used for detecting the voltage of the output cable. The radio frequency power supply realizes combination of current and voltage detection by arranging the current detection element and the voltage detection element on the power supply body through clamping, so that the current and the voltage detected by the radio frequency power supply have no time delay, the consistency of data acquisition time is ensured, and the precision and the reliability of the output power of the radio frequency power supply are ensured. The detection module circuit of the radio frequency power supply is simplified, the radio frequency power supply module is miniaturized, and the problems that the current and the voltage of the existing power supply are respectively collected by two corresponding sensors, the response time of the collected voltage and current data is different, the precision of the power output power value is low, and the reliability is poor are solved.
As shown in fig. 1, in an embodiment of the present invention, the current detecting element 20 includes an inductor L10 connected to the output cable 10, a first voltage dividing circuit 21 connected to the inductor L10, and a first output terminal 22 connected to the first voltage dividing circuit 21.
Further, the first voltage dividing circuit 21 includes a first resistor R10 and a second resistor R20 connected in series. In this embodiment, the turn ratio of the primary winding and the secondary winding of the inductor L10 is preferably 1: 60. the first resistor R10 converts the voltage output by the power transmission cable 10 into a current, and the second resistor R29 is a voltage dividing resistor capable of adjusting the voltage output by the output power transmission cable 10. The primary winding of the inductor L10 is replaced with a transmission conductor or structural member, which simplifies the structure. All electronic components in the current detection element 20 are delay-free devices, so that the output response speed of the electronic components is high.
As shown in fig. 2, in an embodiment of the present invention, the voltage detecting element 30 includes a sensing capacitor C10 connected to the output cable 10, and a second voltage dividing circuit 31 and a second output terminal 32 connected to the sensing capacitor C10, respectively.
Further, the second voltage dividing circuit 31 includes a third inductor L31 and a second capacitor C20 connected in parallel. In this embodiment, the second voltage dividing circuit 31 mainly includes a third inductor L31 and a second capacitor C20, and compared with the conventional hall sensor for detecting voltage, which can only select a certain narrow bandwidth and cannot achieve a high bandwidth, the radio frequency power supply realizes a high bandwidth and fast response function through the second resistor R20 of the current detecting element 20, the third inductor L31 of the voltage detecting element 30, and the second capacitor C20.
In one embodiment of the utility model, the rf power supply includes a shielding element disposed between the power supply body and the detection module, and the sensing capacitor C10 is a capacitor formed between the shielding element and the output cable 10.
It is further noted that the shielding element may be a faraday shielding ring, or may be another element having a shielding function. A fixed capacitance value is induced between the faraday shield ring and the power transmission cable 10 (copper column), and defined as an induction capacitor C10, the induction capacitor C10 is substantially a non-capacitive device, and the safety isolation between the output and the input of the radio frequency power supply is realized by a shielding element, as shown in fig. 2, one end of the induction capacitor C10 is connected with the second capacitor C20 in the voltage detection element 30; the first output terminal 22 of the current detection element 20 and the second output terminal 32 of the voltage detection element 30 are used for detecting the values of the output voltage and the output current, respectively.
In the present embodiment, the shielding element can reduce the interference of the primary winding of the inductor L10 to the secondary winding, i.e. the parasitic capacitance between the primary winding and the secondary winding of the current detecting element 20 can be reduced, and the leakage inductance will not be increased significantly. Under ideal conditions, the shielding element can make the interference voltage on the current detection element 20 and the voltage detection element 30 zero, thereby reducing the interference between the coils and improving the reliability and detection accuracy of the current detection element 20 and the voltage detection element 30.
In an embodiment of the present invention, the rf power supply includes a protection housing, and the detection module and the shielding element are disposed in the protection housing.
It is further noted that the protective shell may be a shell made of an aluminum block. In this embodiment, the aluminum block casing is wrapped outside the shielding element, the current detection element 20 and the voltage detection element 30, so as to prevent the interference of the outside on the current and the voltage detected by the radio frequency power supply, and ensure the stability of the current signal and the voltage signal. Wherein, this radio frequency power supply wraps up detection module and shielding element through protection casing, has guaranteed the stability of sampling voltage and electric current.
Fig. 3 is a schematic circuit diagram of a radio frequency matcher for a radio frequency power supply according to another embodiment of the present application.
As shown in fig. 3, in an embodiment of the present invention, the rf power supply includes an rf matcher 40 connected to the output terminal of the power supply body, the rf matcher 40 includes an rf input terminal 41, a digital detection element 42 connected to the rf input terminal 41, an L-type network circuit 43 connected to the digital detection element 42, an auxiliary adjustment circuit 44 and a current-voltage detection circuit 45 respectively connected to the L-type network circuit 43, and an rf main output terminal 46, and the rf main output terminal 46 is connected to a load.
It is further noted that the rf matcher 40 may be disposed between the output end of the power supply body and the detection module.
As shown in fig. 3, in the embodiment of the present invention, the rf input terminal 41 is mainly used for connecting with the output terminal of the power supply body.
As shown in fig. 3, in the embodiment of the present invention, the digital detecting element 42 is mainly used for detecting the electrical quantity input at the rf input terminal.
It is further noted that the data detecting element 42 may be a digital detector, which belongs to an existing detecting component, and the data detecting element 42 can detect the voltage, the current, the lamp electrical quantity, and can also detect parameters such as standing wave ratio, impedance value, and the like. Compared with the analog detector at the input end of the existing radio frequency matcher, the digital detector can more accurately read the parameters of the input end, and simultaneously, certain impedance values such as standing-wave ratio and standing-wave ratio can be calculated through signals collected by the digital detector, so that the digital detector is convenient for a user to monitor or use.
As shown in fig. 3, in the embodiment of the present invention, the L-type network circuit 43 is mainly used to provide a first impedance to the load.
It is further noted that the L-type network circuit 43 includes an eleventh inductor L11, an eleventh capacitor C11, a twenty-first inductor L21, and a twenty-first capacitor C21, a first end of the eleventh inductor L11 and a first end of the twenty-first inductor L21 are both connected to the radio frequency input terminal 41, a second end of the eleventh inductor L11 is connected to a first end of the eleventh capacitor C11, a second end of the eleventh capacitor C11 is respectively connected to the auxiliary adjustment circuit 44 and the input terminal of the current and voltage detection circuit 42, a second end of the twenty-first inductor L21 is connected to a first end of the twenty-first capacitor C21, and a second end of the twenty-first capacitor C21 is grounded. In the present embodiment, the twenty-first capacitor C21 and the eleventh capacitor C11 are both adjustable capacitors.
As shown in fig. 3, in the embodiment of the present invention, the auxiliary adjusting circuit 44 is mainly used for adjusting the first impedance to match with the impedance of the load.
It is further noted that the auxiliary adjusting circuit 44 includes a thirty-first capacitor C31, a forty-first capacitor C41, and a radio frequency auxiliary output 47, a first end of the thirty-first capacitor C31 is connected to the output terminal of the L-type network circuit 43, a second end of the thirty-first capacitor C31 is connected to the first end of the forty-first capacitor C41 and the radio frequency auxiliary output 47, respectively, a second end of the forty-first capacitor C41 is connected to ground, and the radio frequency auxiliary output 47 is connected to the load. In this embodiment, the forty-first capacitor C41 is an adjustable capacitor. The current output by the radio frequency power supply is adjustable through a forty-first capacitor C41 in an auxiliary adjusting circuit 44 of the radio frequency matcher 40, and specifically, the magnitude of the current output by the radio frequency power supply is changed by adjusting the capacitance value of the forty-first capacitor C41 in the auxiliary adjusting circuit 44, so that the impedance of the radio frequency power supply matched with a load is changed.
As shown in fig. 3, in the embodiment of the present invention, the current-voltage detection circuit 45 is mainly used for detecting the current and the voltage output by the rf main output terminal 46.
Further, the current-voltage detection circuit 45 includes a voltage detector 451 and a current detector 452 connected to the output terminal of the L-type network circuit 43, and the voltage detector 451 and the current detector 452 are respectively connected to the radio frequency auxiliary output terminal 46.
It is further illustrated that the voltage detector 451 and the current detector 452 are respectively used for detecting the voltage and the current outputted from the rf auxiliary output terminal 46. The voltage detector 451 may be a voltage transformer and the current detector 452 may be a current transformer. In this embodiment, the current-voltage detector 451 and the current detector 452 are added to the output terminal of the rf matcher 40, the current and voltage data at the output terminal of the rf matcher 40 can be measured, and then the auxiliary adjusting circuit 44 adjusts the capacitance value of forty-one capacitor, so as to adjust the current at the input terminal and the output terminal of the power coil of the rf power supply to achieve a consistent or set ratio, thereby ensuring that the excitation energy of the power coil of the rf power supply is uniform.
In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
In the description of the present application, the terms "first", "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more features.
The foregoing detailed description has provided radio frequency power supplies provided by an embodiment of the present application, and specific examples have been applied herein to illustrate the principles and implementations of the present application, and the above description of the embodiments is only provided to help understand the method and the core ideas of the present application; meanwhile, for those skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.
Claims (10)
1. A radio frequency power supply is characterized by comprising a power supply body and a detection module connected with the output end of the power supply body, wherein the detection module comprises an output cable connected with the power supply body, and a current detection element and a voltage detection element which are connected with the output cable;
the current detection element is used for detecting the current of the output cable;
the voltage detection element is used for detecting the voltage of the output cable.
2. The rf power supply of claim 1, wherein the current detecting element comprises an inductor connected to the output cable, a first voltage dividing circuit connected to the inductor, and a first output terminal connected to the first voltage dividing circuit.
3. The radio frequency power supply according to claim 2, wherein the first voltage dividing circuit includes a first resistor and a second resistor connected in series.
4. The radio frequency power supply according to claim 1, wherein the voltage detection element includes an inductive capacitor connected to the output cable, and a second voltage division circuit and a second output terminal respectively connected to the inductive capacitor.
5. The RF power supply of claim 4, wherein the second voltage divider circuit comprises a third inductor and a second capacitor connected in parallel.
6. The radio frequency power supply of claim 4, comprising a shielding element disposed between the power supply body and the detection module, the inductive capacitance being a capacitance formed between the shielding element and the output cable.
7. The radio frequency power supply of claim 6, comprising a protective housing, wherein the detection module and the shielding element are both disposed within the protective housing.
8. The radio frequency power supply according to claim 1, comprising a radio frequency matcher connected with the output end of the power supply body, wherein the radio frequency matcher comprises a radio frequency input end, a digital detection element connected with the radio frequency input end, an L-type network circuit connected with the radio frequency input end, an auxiliary regulating circuit and a current-voltage detection circuit which are respectively connected with the L-type network circuit, and a radio frequency main output end;
the digital detection element is used for detecting the electrical quantity input by the radio frequency input end
The L-type network circuit is used for providing a first impedance for a load;
the auxiliary adjusting circuit is used for adjusting the first impedance to be matched with the impedance of the load;
the current and voltage detection circuit is used for detecting the current and the voltage output by the radio frequency main output end.
9. The radio frequency power supply according to claim 8, wherein the auxiliary adjustment circuit comprises a thirty-first capacitor, a forty-first capacitor and a radio frequency auxiliary output terminal, a first terminal of the thirty-first capacitor is connected to the output terminal of the L-type network circuit, a second terminal of the thirty-first capacitor is respectively connected to the first terminal of the forty-first capacitor and the radio frequency auxiliary output terminal, and a second terminal of the forty-first capacitor is grounded.
10. The radio frequency power supply according to claim 8, wherein the current-voltage detection circuit comprises a voltage detector and a current detector connected to the L-type network circuit output terminal, the voltage detector and the current detector being respectively connected to the radio frequency auxiliary output terminal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123384296.6U CN216774596U (en) | 2021-12-29 | 2021-12-29 | Radio frequency power supply |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123384296.6U CN216774596U (en) | 2021-12-29 | 2021-12-29 | Radio frequency power supply |
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| Publication Number | Publication Date |
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| CN216774596U true CN216774596U (en) | 2022-06-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202123384296.6U Active CN216774596U (en) | 2021-12-29 | 2021-12-29 | Radio frequency power supply |
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| CN (1) | CN216774596U (en) |
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- 2021-12-29 CN CN202123384296.6U patent/CN216774596U/en active Active
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Inventor after: Yao Zhiyi Inventor after: Tang Yahai Inventor before: Yao Zhiyi Inventor before: Tang Yahai Inventor before: Zhang Guidong |
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Address after: 518000 functional supporting area B, Taohuayuan Zhichuang Town, Tiegang community, Xixiang street, Bao'an District, Shenzhen, Guangdong 101201301 Patentee after: Shenzhen Hengyunchang Vacuum Technology Co.,Ltd. Country or region after: China Address before: 518000 functional supporting area B, Taohuayuan Zhichuang Town, Tiegang community, Xixiang street, Bao'an District, Shenzhen, Guangdong 101201301 Patentee before: SHENZHEN HENGYUNCHANG VACUUM TECHNOLOGY CO.,LTD. Country or region before: China |