CN114442722A - Radio frequency power supply - Google Patents
Radio frequency power supply Download PDFInfo
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- CN114442722A CN114442722A CN202111643563.9A CN202111643563A CN114442722A CN 114442722 A CN114442722 A CN 114442722A CN 202111643563 A CN202111643563 A CN 202111643563A CN 114442722 A CN114442722 A CN 114442722A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
- G05F1/10—Regulating voltage or current
- G05F1/625—Regulating voltage or current wherein it is irrelevant whether the variable actually regulated is ac or dc
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Abstract
The application provides a radio frequency power supply, which comprises a power supply body and a detection module connected with the output end of the power supply body, wherein the detection module comprises an output cable connected with the power supply body, and a current detection element and a voltage detection element which are connected with the output cable; the current detection element is used for detecting the current of the output cable; the voltage detection element is used for detecting the voltage of the output cable. The radio frequency power supply realizes combination of current and voltage detection by arranging the current detection element and the voltage detection element on the power supply body through clamping, so that the detected current and voltage have no time delay, the consistency of data acquisition time is ensured, and the precision and the reliability of the output power of the radio frequency power supply are ensured. The detection module circuit is simplified, so that the radio frequency power supply module is miniaturized, and the problems that the current and the voltage of the conventional power supply are respectively collected by two corresponding sensors, the response time of the collected voltage and current data is different, the precision of the power output value is low, and the reliability is poor are solved.
Description
Technical Field
The application belongs to the technical field of power supplies, and particularly relates to a radio frequency power supply.
Background
When the existing radio frequency power supply outputs power, the power value of the output end needs to be acquired, the power value is obtained by acquiring the voltage signal and the current of the output end, and the acquired power value is compared with a value set by a user to perform PID closed-loop control. At present, the voltage and the current of a power supply are respectively acquired by adopting a current sensor module to acquire the current and a voltage sensor module to acquire the voltage, so that the response time of the acquired voltage and current data is different, and the accuracy and the reliability of the power output value of the power supply are low.
In the process of supplying power to a load by using an existing power supply, the internal resistance of the power supply needs to be matched with the impedance of the load, an L-shaped ICP impedance matcher is adopted for matching the internal resistance of the power supply with the impedance of the load at present, but the L-shaped ICP impedance matcher has the condition that the current input into a coil cavity of the power supply can change along with the change of the environment, so that the energy input into the coil cavity can change, the concentration of the excited plasma is inconsistent, the uniformity is inconsistent, and the user requirements cannot be met. As shown in fig. 4, the L-shaped ICP impedance matcher is composed of a series inductor L1, a series adjustable capacitor C1, a parallel inductor L2, and a parallel adjustable capacitor C2.
Disclosure of Invention
An embodiment of the application provides a radio frequency power supply to solve the problems that the current and the voltage of the existing power supply are respectively collected by two corresponding sensors, the response time of collected voltage and current data is different, the precision of the power output value is low, and the reliability is poor.
In a first aspect, an embodiment of the present application provides a radio frequency power supply, including a power supply body and a detection module connected to an output end of the power supply body, where the detection module includes an output cable connected to the power supply body, and a current detection element and a voltage detection element connected to the output cable;
the current detection element is used for detecting the current of the output cable;
the voltage detection element is used for detecting the voltage of the output cable.
Optionally, the current detection element includes an inductance coil connected to the output cable, a first voltage division circuit connected to the inductance coil, and a first output terminal connected to the first voltage division circuit.
Optionally, the first voltage dividing circuit includes a first resistor and a second resistor connected in series. The current detected by the current detection element is Im＝(R10/(R10+R20))Iin2In the formula, ImFor detection by current-sensing elementsCurrent, R10 is the resistance of the first resistor, R20 is the resistance of the second resistor, Iin2Is the secondary current of the inductor.
Optionally, the voltage detection element includes an inductive capacitor connected to the output cable, and a second voltage division circuit and a second output terminal respectively connected to the inductive capacitor.
Optionally, the second voltage-dividing circuit includes a third inductor and a second capacitor connected in parallel.
Optionally, the voltage detected by the voltage detection element is:
in the formula of UmL20 is the inductance of the third inductor, j is the imaginary unit, w is the angular frequency of the cable input side, C10 is the capacitance of the inductive capacitor, C20 is the capacitance of the second capacitor, U is the voltage detected by the voltage detecting elementinTo output the voltage output by the cable.
Optionally, the radio frequency power supply includes a shielding element, the shielding element is disposed between the power supply body and the detection module, and the inductive capacitance is a capacitance formed between the shielding element and the output cable.
Optionally, the radio frequency power supply includes a protective casing, and the detection module and the shielding element are both disposed in the protective casing.
Optionally, the radio frequency power supply includes a radio frequency matcher connected to the output end of the power supply body, where the radio frequency matcher includes a radio frequency input end, a digital detection element connected to the radio frequency input end, an L-type network circuit connected to the radio frequency input end, an auxiliary adjustment circuit and a current-voltage detection circuit that are respectively connected to the L-type network circuit, and a radio frequency main output end;
the digital detection element is used for detecting the electrical quantity input by the radio frequency input end
The L-type network circuit is used for providing a first impedance for a load;
the auxiliary adjusting circuit is used for adjusting the first impedance to be matched with the impedance of the load;
and the current and voltage detection circuit is used for detecting the current and the voltage output by the radio frequency main output end.
Optionally, the auxiliary adjusting circuit includes a thirty-first capacitor, a forty-first capacitor, and a radio frequency auxiliary output end, a first end of the thirty-first capacitor is connected to the output end of the L-type network circuit, a second end of the thirty-first capacitor is connected to the first end of the forty-first capacitor and the radio frequency auxiliary output end, respectively, and a second end of the forty-first capacitor is grounded.
Optionally, the current output by the radio frequency auxiliary output end is:
Z1＝Zl1+ZC11；
Z3＝ZC31+(ZC41//Zl2)
in the formula I0For the current, Z, output by the RF auxiliary outputC31Is the impedance of the thirty-first capacitor, ZC41Is the impedance of the forty-first capacitor, Zl1Impedance of the main output of the radio frequency, ZC11Impedance of the eleventh capacitor, Z, in an L-network circuitl1Impedance, V, output for the auxiliary output of the radio frequencysThe voltage input by the radio frequency input end.
Optionally, the current-voltage detection circuit includes a voltage detector and a current detector connected to the output end of the L-type network circuit, and the voltage detector and the current detector are respectively connected to the rf auxiliary output end.
The radio frequency power supply provided by one embodiment of the application comprises a power supply body and a detection module connected with the output end of the power supply body, wherein the detection module comprises an output cable connected with the power supply body, and a current detection element and a voltage detection element which are connected with the output cable; the current detection element is used for detecting the current of the output cable; the voltage detection element is used for detecting the voltage of the output cable. The radio frequency power supply realizes combination of current and voltage detection by arranging the current detection element and the voltage detection element on the power supply body through clamping, so that the current and the voltage detected by the radio frequency power supply have no time delay, the consistency of data acquisition time is ensured, and the precision and the reliability of the output power of the radio frequency power supply are ensured. The detection module circuit of the radio frequency power supply is simplified, the radio frequency power supply module is miniaturized, and the problems that the current and the voltage of the existing power supply are respectively collected by two corresponding sensors, the response time of the collected voltage and current data is different, the precision of the power output power value is low, and the reliability is poor are solved.
Drawings
In order to more clearly illustrate the technical solution in one embodiment of the present application, the drawings used in the description of the embodiment will be briefly introduced below. It is obvious that the drawings in the following description are only some embodiments of the application, and that other drawings can be derived from these drawings by a person skilled in the art without inventive effort.
For a more complete understanding of the present application and its advantages, reference is now made to the following descriptions taken in conjunction with the accompanying drawings. Wherein like reference numerals refer to like parts in the following description.
Fig. 1 is a schematic circuit diagram of an rf power detection module according to an embodiment of the present application.
Fig. 2 is a schematic circuit diagram of an rf power detection module according to another embodiment of the present application.
Fig. 3 is a schematic circuit diagram of a radio frequency matcher for a radio frequency power supply according to another embodiment of the present application.
Fig. 4 is a schematic circuit diagram of a radio frequency matcher in a conventional radio frequency power supply.
Detailed Description
The technical solution in one embodiment of the present application will be clearly and completely described below with reference to the accompanying drawings in one embodiment of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
An embodiment of the application provides a radio frequency power supply to solve the problems that the current and the voltage of the existing power supply are respectively collected by two corresponding sensors, the response time of collected voltage and current data is different, the precision of the power output value is low, and the reliability is poor.
The first embodiment is as follows:
fig. 1 and fig. 2 are exemplary views of a radio frequency power supply provided in an embodiment of the present application, and fig. 1 is a schematic circuit diagram of a radio frequency power supply detection module provided in an embodiment of the present application. Fig. 2 is a schematic circuit diagram of an rf power detection module according to another embodiment of the present application. The radio frequency power supply is widely applied to industries such as semiconductor process equipment, LED and solar photovoltaic industry, plasma generation in scientific experiments, radio frequency induction heating, medical cosmetology, normal pressure plasma disinfection and cleaning and the like, and is not limited to be widely used here.
As shown in fig. 1 and 2, the present invention provides a radio frequency power supply, which includes a power supply body and a detection module connected to an output end of the power supply body, where the detection module includes an output cable 10 connected to the power supply body, and a current detection element 20 and a voltage detection element 30 connected to the output cable 10.
It is further explained that the detection module is arranged on the circuit board. When the radio frequency power supply needs to collect the power of the output end, the current and the voltage at the same time output by the output cable in the radio frequency power supply can be collected through the current detection element 20 and the voltage detection element 30, so that the collection of the power of the output end of the radio frequency power supply is realized.
In the present invention, the current detection element 20 is mainly used for detecting the current of the output cable 10, and the voltage detection element 30 is mainly used for detecting the voltage of the output cable 10.
It is further noted that the current detecting element 20 may be a current sensor, the voltage detecting element 30 may be a voltage sensor, and in other embodiments, the current detecting element 20 and the voltage detecting element 30 may also be components or elements having current and voltage detection. The radio frequency power supply is provided with the current detection element 20 and the voltage detection element 30 on the power supply body to realize the combination of the current sensor and the voltage sensor, so that the current and the voltage detected by the radio frequency power supply have no time delay, the consistency of data acquisition time is ensured, and the precision and the reliability of the output power of the radio frequency power supply are ensured. The detection module circuit of the radio frequency power supply is simplified, so that the radio frequency power supply module is miniaturized.
The radio frequency power supply provided by one embodiment of the application comprises a power supply body and a detection module connected with the output end of the power supply body, wherein the detection module comprises an output cable connected with the power supply body, and a current detection element and a voltage detection element which are connected with the output cable; the current detection element is used for detecting the current of the output cable; the voltage detection element is used for detecting the voltage of the output cable. The radio frequency power supply realizes combination of current and voltage detection by arranging the current detection element and the voltage detection element on the power supply body through clamping, so that the current and the voltage detected by the radio frequency power supply have no time delay, the consistency of data acquisition time is ensured, and the precision and the reliability of the output power of the radio frequency power supply are ensured. The detection module circuit of the radio frequency power supply is simplified, the radio frequency power supply module is miniaturized, and the problems that the current and the voltage of the existing power supply are respectively collected by two corresponding sensors, the response time of the collected voltage and current data is different, the precision of the power output power value is low, and the reliability is poor are solved.
As shown in fig. 1, in an embodiment of the present invention, the current detecting element 20 includes an inductor L10 connected to the output cable 10, a first voltage dividing circuit 21 connected to the inductor L10, and a first output terminal 22 connected to the first voltage dividing circuit 21.
Further, the first voltage dividing circuit 21 includes a first resistor R10 and a second resistor R20 connected in series. In this embodiment, the turn ratio of the primary winding and the secondary winding of the inductor L10 is preferably 1: 60. the first resistor R10 converts the voltage output by the power transmission cable 10 into current, and the second resistor R20 is a voltage dividing resistor which can adjust the voltage output by the output power transmission cable 10. The primary winding of the inductor L10 is replaced with a transmission conductor or structural member, which simplifies the structure. All electronic components in the current detection element 20 are delay-free devices, so that the output response speed of the electronic components is high.
In the embodiment of the present invention, the current detected by the current detecting element 20 is Im＝(R10/(R10+R20))Iin2In the formula, ImFor the current detected by the current detecting element, R10 is the resistance of the first resistor, R20 is the resistance of the second resistor, Iin2Is the secondary current of the inductance coil.
To be further explained, N is defined as the ratio of the number of turns of the secondary winding to the number of turns of the primary winding of the inductor L10, i.e. N is N2/N1Then the amplitude I of the secondary current of the inductor L10in2Comprises the following steps:
wherein, Iin1The value of the primary current is input to the inductor L10.
Amplitude I of secondary current of inductance coil L10in2The current value I collected by the current detection element 20 can be obtained by shunting the current through the first resistor R10 and the second resistor R20mComprises the following steps:
wherein k isiFor inputting a primary current Iin1Collecting current value I with current induction circuitmRatio of (a) to (b), in general, kiGreater than 1.
As shown in fig. 2, in an embodiment of the present invention, the voltage detecting element 30 includes a sensing capacitor C10 connected to the output cable 10, and a second voltage dividing circuit 31 and a second output terminal 32 connected to the sensing capacitor C10, respectively.
Further, the second voltage dividing circuit 31 includes a third inductor L31 and a second capacitor C20 connected in parallel. In this embodiment, the second voltage dividing circuit 31 mainly includes a third inductor L31 and a second capacitor C20, and compared with the conventional hall sensor for detecting voltage, which can only select a certain narrow bandwidth and cannot achieve a high bandwidth, the radio frequency power supply realizes a high bandwidth and fast response function through the second resistor R20 of the current detecting element 20, the third inductor L31 of the voltage detecting element 30, and the second capacitor C20.
In the embodiment of the present invention, the voltage detected by the voltage detecting element 30 is:
in the formula of UmL20 is the inductance of the third inductor, j is the imaginary unit, w is the angular frequency of the cable input side, C10 is the capacitance of the inductive capacitor, C20 is the capacitance of the second capacitor, U is the voltage detected by the voltage detecting elementinFor outputting the voltage output by the cable.
Further, the input voltage of the voltage detection element is UinThen, according to the voltage division of the sensing capacitor C10 and the second voltage dividing circuit 31, the voltage value U collected by the voltage detection elementmComprises the following steps:
wherein k isuIs an input voltage UinAnd collecting the voltage value UmRatio of (a) to (b), in general, kuGreater than 1.
In one embodiment of the invention, the rf power supply includes a shielding element disposed between the power supply body and the detection module, and the sensing capacitor C10 is a capacitor formed between the shielding element and the output cable 10.
It is further noted that the shielding element may be a faraday shielding ring, or may be another element having a shielding function. A fixed capacitance value is induced between the faraday shield and the power transmission cable 10 (copper column), which is defined herein as an inductive capacitance C10, and the inductive capacitance C10 is essentially a non-capacitive device, with the safe isolation of the rf power output and input being achieved by the shielding element. As shown in fig. 2, one end of the sensing capacitor C10 is connected to the second capacitor C20 in the voltage detection element 30; the first output terminal 22 of the current detection element 20 and the second output terminal 32 of the voltage detection element 30 are used for detecting the values of the output voltage and the output current, respectively.
In the present embodiment, the shielding element can reduce the interference of the primary winding of the inductor L10 to the secondary winding, i.e. the parasitic capacitance between the primary winding and the secondary winding of the current detecting element 20 can be reduced, and the leakage inductance will not be increased significantly. Under ideal conditions, the shielding element can make the interference voltage on the current detection element 20 and the voltage detection element 30 be zero, thereby reducing the interference between the coils and improving the reliability and detection accuracy of the current detection element 20 and the voltage detection element 30.
In an embodiment of the invention, the rf power supply includes a protective housing, and the detection module and the shielding element are disposed in the protective housing.
It is further noted that the protective shell may be a shell made of an aluminum block. In this embodiment, the aluminum block casing is wrapped outside the shielding element, the current detection element 20 and the voltage detection element 30, so as to prevent the interference of the outside on the current and the voltage detected by the radio frequency power supply, and ensure the stability of the current signal and the voltage signal. Wherein, this radio frequency power supply wraps up detection module and shielding element through protection casing, has guaranteed the stability of sampling voltage and electric current.
Fig. 3 is a schematic circuit diagram of a radio frequency matcher for a radio frequency power supply according to another embodiment of the present application.
As shown in fig. 3, in an embodiment of the present invention, the rf power supply includes an rf matcher 40 connected to the output terminal of the power supply body, the rf matcher 40 includes an rf input terminal 41, a digital detection element 42 connected to the rf input terminal 41, an L-type network circuit 43 connected to the digital detection element 42, an auxiliary adjustment circuit 44 and a current-voltage detection circuit 45 respectively connected to the L-type network circuit 43, and an rf main output terminal 46, and the rf main output terminal 46 is connected to a load.
It is further noted that the rf matcher 40 may be disposed between the output end of the power supply body and the detection module.
As shown in fig. 3, in the embodiment of the present invention, the rf input terminal 41 is mainly used for connecting with the output terminal of the power supply body.
As shown in fig. 3, in the embodiment of the present invention, the digital detecting element 42 is mainly used for detecting the electrical quantity input at the radio frequency input terminal.
It should be further noted that the data detecting element 42 may be a digital detector, which belongs to an existing detecting component, and the data detecting element 42 can detect the voltage and the current lamp electrical quantity, and can also detect parameters such as a standing wave ratio and an impedance value. Compared with the analog detector at the input end of the existing radio frequency matcher, the digital detector can more accurately read the parameters of the input end, and simultaneously, certain impedance values such as standing-wave ratio and standing-wave ratio can be calculated through signals collected by the digital detector, so that the digital detector is convenient for a user to monitor or use.
As shown in fig. 3, in the embodiment of the present invention, the L-type network circuit 43 is mainly used to provide a first impedance to the load.
It is further noted that the L-network circuit 43 comprises an eleventh inductance L11An eleventh capacitor C11Twenty-first inductor L21And a twenty-first capacitor C21Eleventh inductance L11First terminal and twenty-first inductor L21Are connected to the radio frequency input terminal 41, and an eleventh inductor L11Second terminal and eleventh capacitor C11Is connected to the eleventh capacitor C11Is connected to the input of the auxiliary regulating circuit 44 and the current-voltage detection circuit 42, respectively, and a twenty-first inductor L21Second terminal and twenty-first capacitor C21Is connected to a twenty-first capacitor C21The second terminal of (a) is grounded. In this embodiment, the twenty-first capacitor C21And an eleventh capacitance C11Are all adjustable capacitors.
As shown in fig. 3, in the embodiment of the present invention, the auxiliary adjusting circuit 44 is mainly used for adjusting the first impedance to match with the impedance of the load.
It is further illustrated that the auxiliary adjustment circuit 44 comprises a thirty-first capacitor C31A forty-th capacitor C41And an RF auxiliary output terminal 47, a thirty-first capacitor C31Is connected to the output of the L-network circuit 43, and a thirty-first capacitor C31Respectively with a forty-first capacitor C41And the rf auxiliary output 47, forty-one capacitor C41And a second terminal of the rf auxiliary output 47 is connected to ground and the load. In this embodiment, the forty-first capacitor C41Is an adjustable capacitor. The RF power is passed through a forty-first capacitor C in an auxiliary regulator circuit 44 of the RF match 4041The current output by the rf power supply is made adjustable, specifically, by adjusting the forty-first capacitor C in the auxiliary adjusting circuit 4441Compared with the existing radio frequency matcher, the impedance matching in the radio frequency matcher 40 is increased from the original two degrees of freedom to three degrees of freedom, so that the impedance matching is more flexible, and the current value in the radio frequency power supply is easier to realize.
In the embodiment of the present invention, the current output by the rf auxiliary output terminal is:
Z1＝Zl1+ZC11；
Z3＝ZC31+(ZC41//Zl2)
in the formula I0For the current, Z, output by the RF auxiliary outputC31Is the impedance of the thirty-first capacitor, ZC41Is the impedance of the forty-first capacitor, Zl1Impedance of the main output of the radio frequency, ZC11For L-type networkImpedance of the eleventh capacitor in the path, Zl1Impedance, V, output for the auxiliary output of the radio frequencysThe voltage is input by the radio frequency input end.
It is further explained that the L-type network circuit 43 is responsible for power matching, and keeps the impedance at 50 Ω as follows: zin＝[(Z3//Zl2)+Z1]//Z2(ii) a By varying the eleventh capacitance C11Of a size of Zin＝Zs，ZsThe impedance input by the radio frequency input end is used, so that the optimal impedance matching relation is achieved, and the power transmitted to the load by the power supply is maximized.
A fortieth capacitor C41The output current is adjusted as follows:
on the premise of ensuring the optimal impedance matching relation, the capacitance C is changed by changing the forty-one capacitor C41Of a size of Z3Changes are made to change the current I output by the RF auxiliary output terminalo。
Wherein:
ZL1＝jwL11
ZL2＝jwL21
Z1＝ZL11+ZC11；
in the formula, ZC11、C11Are respectively asEleventh capacitor C11Impedance and capacitance value of, ZC21、C21Are respectively the twenty-first capacitor C21J is an imaginary unit, w is the angular frequency of the cable input side, ZC31、C31Are respectively a thirty-first capacitor C31Impedance and capacitance value of, ZL11、L11Are respectively an eleventh inductance L11Impedance and inductance value of, ZL21、L21Respectively twenty-first inductance L21Impedance and inductance values of.
The ratio K of the input of the rf input 41 to the output of the rf main output 46 can be adjusted by the rf matcher 40. The concrete steps are as follows:
by adjusting the eleventh capacitance C11Twenty-first capacitor C21And a thirty-first capacitor C31Thereby changing the size of the impedances Z1, Z2, Z3 and thereby changing the size of K.
As shown in fig. 3, in the embodiment of the present invention, the current-voltage detection circuit 45 is mainly used for detecting the current and the voltage output by the rf main output terminal 46.
Further, the current-voltage detection circuit 45 includes a voltage detector 451 and a current detector 452 connected to the output terminal of the L-type network circuit 43, and the voltage detector 451 and the current detector 452 are respectively connected to the radio frequency auxiliary output terminal 46.
It is further illustrated that the voltage detector 451 and the current detector 452 are respectively used for detecting the voltage and the current outputted from the rf auxiliary output terminal 46. The voltage detector 451 may be a voltage transformer and the current detector 452 may be a current transformer. In this embodiment, the current-voltage detector 451 and the current detector 452 are added to the output terminal of the rf matcher 40, the current and voltage data at the output terminal of the rf matcher 40 can be measured, and then the auxiliary adjusting circuit 44 adjusts the capacitance value of forty-one capacitor, so as to adjust the current at the input terminal and the output terminal of the power coil of the rf power supply to achieve a consistent or set ratio, thereby ensuring that the excitation energy of the power coil of the rf power supply is uniform.
In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
In the description of the present application, the terms "first", "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more features.
The foregoing detailed description has provided radio frequency power supplies provided by an embodiment of the present application, and specific examples have been applied herein to illustrate the principles and implementations of the present application, and the above description of the embodiments is only provided to help understand the method and the core ideas of the present application; meanwhile, for those skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.
Claims (10)
1. A radio frequency power supply is characterized by comprising a power supply body and a detection module connected with the output end of the power supply body, wherein the detection module comprises an output cable connected with the power supply body, and a current detection element and a voltage detection element which are connected with the output cable;
the current detection element is used for detecting the current of the output cable;
the voltage detection element is used for detecting the voltage of the output cable.
2. The rf power supply of claim 1, wherein the current detecting element includes an inductor connected to the output cable, a first voltage dividing circuit connected to the inductor, and a first output terminal connected to the first voltage dividing circuit;
wherein the first voltage dividing circuit includes a first resistor and a second resistor connected in series.
3. The radio frequency power supply according to claim 2, wherein the current detected by the current detecting element is Im＝(R10/(R10+R20))Iin2In the formula, ImR10 is the resistance value of the first resistor, R20 is the resistance value of the second resistor, Iin2Is the secondary current of the inductance coil.
4. The radio frequency power supply according to claim 1, wherein the voltage detection element comprises an inductive capacitor connected to the inductor, and a second voltage division circuit and a second output terminal respectively connected to the inductive capacitor, the second voltage division circuit comprising a third inductor and a second capacitor connected in parallel.
5. The RF power supply of claim 4, wherein the voltage detected by the voltage detecting element is:
in the formula of UmL20 is the inductance of the third inductor, j is the imaginary unit, w is the angular frequency of the cable input side, C10 is the capacitance of the inductive capacitor, C20 is the capacitance of the second capacitor, U is the voltage detected by the voltage detecting elementinFor outputting the voltage output by the cable.
6. The radio frequency power supply of claim 4, comprising a shielding element disposed between the power supply body and the detection module, the inductive capacitance being a capacitance formed between the shielding element and the output cable.
7. The radio frequency power supply of claim 6, comprising a protective housing, wherein the detection module and the shielding element are both disposed within the protective housing.
8. The radio frequency power supply according to claim 1, comprising a radio frequency matcher connected with the output end of the power supply body, wherein the radio frequency matcher comprises a radio frequency input end, a digital detection element connected with the radio frequency input end, an L-type network circuit connected with the radio frequency input end, an auxiliary regulating circuit and a current-voltage detection circuit which are respectively connected with the L-type network circuit, and a radio frequency main output end;
the digital detection element is used for detecting the electrical quantity input by the radio frequency input end
The L-type network circuit is used for providing a first impedance for a load;
the auxiliary adjusting circuit is used for adjusting the first impedance to be matched with the impedance of the load;
the current and voltage detection circuit is used for detecting the current and the voltage output by the radio frequency main output end.
9. The radio frequency power supply according to claim 8, wherein the auxiliary adjusting circuit comprises a thirty-first capacitor, a forty-first capacitor and a radio frequency auxiliary output terminal, a first end of the thirty-first capacitor is connected to the output terminal of the L-type network circuit, a second end of the thirty-first capacitor is respectively connected to the first end of the forty-first capacitor and the radio frequency auxiliary output terminal, and a second end of the forty-first capacitor is grounded;
wherein, the current that radio frequency auxiliary output export is:
Z1＝Zl1+ZC11；
Z3＝ZC31+(ZC41//Zl2)
in the formula I0For the current, Z, output by the RF auxiliary outputC31Is the impedance of the thirty-first capacitor, ZC41Is the impedance of the forty-first capacitor, Zl1Impedance of the main output of the radio frequency, ZC11Impedance of the eleventh capacitor, Z, in an L-network circuitl1Impedance, V, output for the auxiliary output of the radio frequencysThe voltage is input by the radio frequency input end.
10. The radio frequency power supply according to claim 8, wherein the current-voltage detection circuit comprises a voltage detector and a current detector connected to the L-type network circuit output terminal, the voltage detector and the current detector being respectively connected to the radio frequency auxiliary output terminal.
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| CN202111643563.9A CN114442722A (en) | 2021-12-29 | 2021-12-29 | Radio frequency power supply |
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| CN202111643563.9A CN114442722A (en) | 2021-12-29 | 2021-12-29 | Radio frequency power supply |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117294121A (en) * | 2023-11-23 | 2023-12-26 | 深圳市恒运昌真空技术有限公司 | E-class constant-frequency power amplifier parallel driving system of inversion switching circuit and radio frequency power supply |
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2021
- 2021-12-29 CN CN202111643563.9A patent/CN114442722A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117294121A (en) * | 2023-11-23 | 2023-12-26 | 深圳市恒运昌真空技术有限公司 | E-class constant-frequency power amplifier parallel driving system of inversion switching circuit and radio frequency power supply |
| CN117294121B (en) * | 2023-11-23 | 2024-03-29 | 深圳市恒运昌真空技术股份有限公司 | E-class constant-frequency power amplifier parallel driving system of inversion switching circuit and radio frequency power supply |
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Inventor after: Lin Guihao Inventor after: Lin Weiqun Inventor before: Lin Guihao Inventor before: Lin Weiqun Inventor before: Zhang Guidong |