KR20050024515A - Sensor for Detecting Signal of Radio Frequency and Large Power - Google Patents

Abstract

PURPOSE: A sensor for detecting radio frequency signals with large power is provided to detect a stable current by using an insulator with extremely low permeability as a flux space. CONSTITUTION: A primary conductor portion(110) receives RF currents and RF voltages. A current detector(200) generates secondary induced current using the permittivity of an insulator based on the current applied on the primary conductor portion to detect the induced input current. A voltage detector(300) generates an electrostatic induced voltage using the permittivity of the insulator based on the voltage applied on the primary conductor portion to detect the induced input voltage. An impedance detection unit(400) calculates magnitude and phase of the impedance based on the received voltage and current signals from the voltage and current detectors.

Description

Sensor for Detecting Signal of Radio Frequency and Large Power}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor for measuring a radio frequency (RF) large power signal. In particular, the RF high voltage is detected by detecting a stable RF large current without using a magnetic material having a high permeability and using capacitance formed by a dielectric and a plate conductor. The present invention relates to a sensor for measuring a high frequency high power signal for easily and stably measuring the magnitude, phase, and large power of an impedance.

Generally, a sensor for measuring a high frequency high power signal is a sensor used to detect signal characteristics of a high frequency signal, and a block configuration diagram thereof is shown in FIG. 1. The high frequency high power signal measuring sensor 100 illustrated in FIG. 1 is a high frequency high power signal measuring sensor used in a plasma processing apparatus that is a plasma processing apparatus.

The high frequency large power generator 10 shown in FIG. 1 generates a high frequency large power, and the impedance matcher 20 converts an impedance that can be matched with the impedance of the plasma chamber 30 to maximize the inside of the plasma chamber 30. In order to supply power, the high frequency high power signal measuring sensor 100 detects a current and a voltage transmitted from the high frequency high power generator 10 to the plasma chamber 30 to detect phase and power. The controller 40 connected to the power signal measuring sensor 100 controls the impedance converter 20 based on the phase and power input from the high frequency high power signal measuring sensor 100.

The high frequency high power signal measuring sensor described below is not limited to the plasma processing apparatus in the above use example, and may be used in an apparatus for detecting RF high current, high voltage and high power, and measuring impedance. Timely.

Hereinafter, a method of measuring RF high current and high voltage according to the prior art will be described.

2 is a simplified configuration diagram of a sensor for measuring a high frequency high power signal for detecting an RF current and a voltage according to the prior art.

First, a method of detecting the RF current according to the prior art will be described.

The sensor for measuring a high frequency high power signal according to the prior art is provided with a coaxial line 50 (inner conductor 50a, an outer conductor 50b) through which RF high current flows, so that the coaxial line 50 penetrates the center ring. a coil (54a) of the number of turns N ₂ is provided with a Trojan less coil (54) wound around.

In addition, the troidle core 54b is made of a magnetic material having a high permeability, and generates a high-density magnetic flux generated by RF large current flowing through the coaxial line 50, and as a result, a coil having a number of turns N ₂ Induced current is generated to detect the current.

On the other hand, the RF high voltage detection according to the prior art used a method of detecting the divided voltage after connecting the two commercial capacitors (C _a , C _b ) in series to divide the voltage.

However, the sensor for measuring the high frequency high power signal according to the prior art according to the above configuration poses the following problems.

First, in the case of using the high permeability magnetic body troidle core 54b for current detection, especially for large current detection, the relative permeability of the core 54b changes according to environmental changes. The induced magnetic flux is changed by the change in the relative permeability of the troidle core 54b, and as a result, the current induced in the secondary coil is changed. As a result, a problem arises in that the accurate RF large current value cannot be stably detected.

Second, in the case of a sensor for measuring a high frequency high power signal according to the prior art, there is a problem in that the dynamic range is not wide.

That is, in the case of a sensor for measuring a high frequency high power signal according to the prior art, a minimum operation, for example, 0.6 V or more must be maintained in order for a detector (not shown) to operate to read a induced RF high current and a distributed RF high voltage. To this end, the minimum value of the induced RF voltage must be larger than 0.6V, which is a relatively large value, and when the operating range is operated above the maximum value, there is a problem in that the device characteristics change. There is a problem that the operating range of is limited to, for example, 40 dB or less.

Third, in the case of the RF sensor according to the prior art, it is difficult to measure high voltage because it detects the voltage using commercial capacitors (C _a , C _b ), and it is difficult to measure the high current because the current is detected using a magnetic material having a high permeability. There was this.

The present invention has been created to solve the problems of the prior art as described above, the sensor for measuring a high frequency high power signal according to the present invention has the following object.

The first object of the present invention is to measure the current by generating an induction current using an insulator having a very low permeability, without using a trolley coil using a high permeability magnetic material for detecting the current, The present invention provides a sensor for measuring high frequency and high power signals with stable current detection values.

A second object of the present invention is to detect a voltage after distributing the voltage by using a distribution capacitor by an insulator and a conductor plate having a predetermined dielectric constant, without using a separate commercial capacitor or resistor in high voltage detection. It is to provide a sensor for measuring high frequency large power signal.

The third object of the present invention is to generate an induced current in an insulator whose relative permeability is similar to the specific magnetic permeability of a vacuum and detect the voltage using the distribution capacity by the insulator and the conductor plate of a predetermined dielectric constant, and the detected value The present invention provides a sensor for measuring a high frequency large power signal having a wide operating range by amplifying logarithmically.

The fourth object of the present invention is to generate an induced current in an insulator having a very low specific permeability, and to measure power by detecting a voltage by using a distribution capacity by an insulator and a conductor plate having a predetermined permittivity, thereby providing a very large power. It is to provide a sensor for measuring a high frequency high power signal that can detect the.

Sensor for measuring a high frequency high power signal according to the present invention for achieving the above object, by using the magnetic permeability of the insulator based on the primary conductor portion to which the RF current and voltage is applied, and the current applied to the primary conductor part. A current detection unit that detects an induced current induced by generating a secondary induced current, and generates an electrostatic induction voltage using a dielectric constant of an insulator based on a voltage applied to the primary conductor part to detect an electrostatic induced voltage. And a impedance detection unit for calculating and outputting a magnitude and a phase of the impedance based on the voltage signal and the current signal received from the voltage detection unit and the current detection unit, respectively.

Sensor for measuring a high frequency high power signal according to the present invention for achieving the above object, the magnetic flux of the insulator based on the primary side conductor portion to which RF current and voltage are applied, and the incident current applied to the primary side conductor portion. The secondary incident induction current is generated in the space to detect the induced incident current, and based on the voltage applied to the primary conductor part, an electrostatic induction voltage is generated using the dielectric constant of the insulator to divide the induced induced voltage. An incident power detection unit for detecting incident power by detecting a divided voltage, and generating a secondary reflection induced current in a magnetic flux space of an insulator based on a reflection current applied to the primary conductor part to detect the induced reflection current; And a reflection induced voltage generated by generating an electrostatic induction voltage using a dielectric constant of an insulator based on the voltage applied to the primary side conductor part. It is characterized in that it comprises a reflected power detection unit for detecting the reflected power by detecting the divided voltage by voltage division.

Next will be described in detail with reference to the accompanying drawings, a preferred embodiment of a sensor for measuring a high frequency high power signal according to the present invention.

First, the configuration and operation of the high frequency high power signal measuring sensor according to the first embodiment of the present invention will be described with reference to FIGS. 3 to 8.

3 is a block diagram of a sensor for measuring a high frequency high power signal according to a first embodiment of the present invention.

As shown in FIG. 3, the sensor for measuring the high frequency high power signal according to the first embodiment of the present invention includes a primary conductor part 110, a current detection unit 200, a voltage detection unit 300, and an impedance detection unit. And 400.

For example, the primary conductor part 110 transmits an RF high current from the high frequency large power generator 10 of FIG. 1 to the impedance converter 20 and an RF high voltage is applied from the plasma generator 10.

The current detection unit 200 detects the induced current generated by generating a secondary side induced current in the magnetic flux space of the insulator based on the current applied to the primary side conductor portion 110.

The voltage detection unit 300 detects the voltage induced by generating an electrostatic induction voltage using the dielectric constant of the insulator based on the voltage applied to the primary side conductor part 110.

The impedance detection unit 400 receives the current signal detected by the current detection unit 200 and the voltage signal detected by the voltage detection unit 300, calculates the magnitude and phase of the impedance, and is then recognized by the user. Print it out so you can.

The impedance detection unit 400 includes an impedance calculator (not shown) and an impedance output unit (not shown). The impedance calculator includes a current signal detected by the current detection unit 200 and the voltage detection unit 300. The amplitude and phase of the impedance are calculated by receiving the detected voltage signal, and the impedance output unit (not shown) outputs the magnitude and phase of the impedance received from the impedance calculation unit so that the user can recognize it.

4 shows a detailed block diagram of the current detection unit 200.

As shown in FIG. 4, the current detection unit 200 includes a secondary induction current generator 210 and a first logarithmic amplifier 220.

The secondary induction current generating unit 210 receives a current applied to the primary conductor unit 210 via an insulator having a specific magnetic permeability close to that of the vacuum between the primary conductor unit 110 and the primary conductor unit 110. Generates secondary induction current as a basis.

The first logarithmic amplifier 220 amplifies the induced current received from the secondary induction current generator 210.

5 shows a detailed block diagram of the voltage detection unit 300. As shown in FIG. 5, the voltage detection unit 300 includes a first voltage divider 310 and a second logarithmic amplifier 320.

The first voltage divider 310 generates an electrostatic induced voltage through an insulator having a predetermined dielectric constant between the primary conductor 110 and distributes the electrostatic induced voltage.

In addition, the second logarithmic amplifier 320 amplifies the voltage divided from the first voltage divider 310.

FIG. 6 is a detailed circuit diagram of the primary side conductor portion 110, the current detection unit 300, and the voltage detection unit 400 of FIG. 3.

Reference numeral 111 in FIG. 6 denotes an inner conductor 111 of a coaxial line to be described later for implementing the primary side conductor part 110.

In addition, C ₁ and C ₁ ′ constitute the first voltage divider 310, and reference numeral 221 denotes a first log amplifier 221 for implementing the first log amplifier 220 ( Log amplifier, and reference numeral 321 denotes a second log amplifier 221 for implementing the second log amplifier 320.

In addition, P1 is a configuration for generating the first capacitance C ₁ and generating the induced current I ₁ according to the first embodiment.

6, I ₁ is an induced current generated in the secondary side induction current generator 210, and V ₁ is a voltage distributed by the first voltage divider 310.

FIG. 7 is a perspective view of a physical configuration for implementing the primary conductor 110 of FIG. 3, the secondary induced current generator 210 of FIG. 4, and the first voltage divider 310 of FIG. 5. .

As illustrated in FIG. 7, the primary side conductor part 110 is implemented with an inner conductor 111 of a coaxial line described below. In addition, a plurality of insulated Ritz wires (not shown) are inserted into the inner conductor 111. The plurality of Litz wires (not shown) function to reduce the skin effect and the effective resistance generated in the inner conductor 111.

As illustrated in FIG. 7, the secondary induction current generating unit 210 is located in parallel with the inner conductor 111 and has a winding number of secondary side current detecting line 211 having a winding number of 0.5. (Hereinafter referred to simply as the 'conductor 211').

An insulator 120 is interposed between the conductor 211 and the inner conductor 111, and the conductor 211 is in contact with the insulator 120. The insulator 120 has a very low specific permeability, for example, a relative permeability close to that of vacuum (μ _s = 1).

The first voltage divider 310 includes a plate 311 and a plate having an insulator 120 having a predetermined dielectric constant between the conductors 111 to generate a _first capacitance C ₁ . It is composed of a capacitor (C ₁ ') connected in series with a conductor (Conducting Plate) (311).

In addition, the capacitance formed between the plate conductor 311 and the inner conductor 111 is the first capacitance C ₁ , and the capacitive element having the first capacitance is the capacitor C shown in FIG. 6. ₁ ).

8 is a bottom perspective view of the PCB 151 according to the first embodiment of the present invention. The PCB 151 shown in FIG. 8 is equipped with circuit elements for implementing the first embodiment. Reference numeral 151a is a bottom surface of the PCB 151.

The plate conductor 311 and the leader 211 are implemented by a copper foil pattern of the PCB 151.

In order to prevent electrostatic induction and magnetic induction between a circuit element mounted on the PCB 151, for example, an impedance calculator (not shown), an impedance output unit (not shown), and the inner conductor 111, the PCB is prevented. A shielding part (not shown) is provided between the 151 and the inner conductor 111.

In addition, in order to prevent the electrostatic induction voltage from occurring in the conductor 211 due to the voltage applied to the conductor 111, a voltage shielding portion (not shown) between the conductor 111 and the conductor 211. H) is provided.

Next, a process of measuring impedance based on the detected current and voltage after detecting the current and voltage by the configuration according to the first embodiment as described above will be described.

First, the process of detecting current will be described.

As shown in FIG. 6 and FIG. 7, when RF large current flows in the inner conductor 111, a variable magnetic field is generated in the surrounding space, and the variable magnetic field induces an induced current I ₁ to the conductor 211 by the ampere turn rule. Generate.

Since the induced current I ₁ generated as described above is generated from an insulator having a specific permeability similar to that of a vacuum, rather than a magnetic permeability of high magnetic permeability, the I ₁ is very stable and its value is, for example, several mA. Very small

As described above, the induced current signal I ₁ induced in the conductor 211 has a very small value and is amplified logarithmically by the first log amplifier 221. Since the induced current signal I ₁ is amplified logarithmic by the first logarithmic amplifier 221, the operating range is widened, for example, to 60 dB or more.

The current signal amplified logarithmically by the first logarithmic amplifier 221 is input to the impedance detection unit 400.

Secondly, the process of detecting the voltage will be described.

6 and 7, when RF high voltage, for example, 10 kV is applied to the inner conductor 111, an electrostatic induction voltage is induced on the conductor 311, and the inner conductor 111 and the plate 311 have a dielectric constant. An insulator 120 having ε ₀ ε _1s is interposed to form the capacitor C ₁ .

Inde capacitance of the capacitor (C ₁₎ is the level of pF unit, which is formed by an insulator, for example through a Teflon having a dielectric constant of the capacitance of the capacitor (C ₁₎ predetermined between the inner conductor 111 and a plate conductor 311 Because it becomes. In addition, when the insulation breakdown voltage of the insulator 120 is high, a very high high voltage can be applied, thereby making it easy to measure high voltage.

When the commercial capacitor C ₁ ′ is connected in series with the capacitor C1, the division voltage V ₁ is applied to the commercial capacitor C ₁ ′. The divided voltage signal V ₁ becomes a very low voltage of 1 V if, for example, 1 nF is used as the commercial capacitor C ₁ ′.

The voltage signal V ₁ distributed by the capacitor C ₁ and the capacitor C ₁ ′ is input to the second log amplifier 321. The divided voltage signal V ₁ input to the second log amplifier 321 is logarithmically amplified by the second log amplifier 321.

Since the divided voltage V ₁ is amplified logarithmic by the second logarithmic amplifier 321, the operating range is widened to 60 dB, for example.

The divided voltage signal V ₁ amplified logarithmically by the second logarithmic amplifier 321 is input to the impedance detection unit 400.

Finally, the impedance detection unit 400 receives the logarithmic amplified induction current signal I ₁ and the divided voltage signal V ₁ received from the first log amplifier 221 and the second log amplifier 321, respectively. As a basis, the phase and amplitude of the impedance are calculated and output so that the user can recognize them.

In addition, since the configuration of measuring the magnitude and phase of the impedance based on the input current signal and the voltage signal by the impedance detection unit 400 is a technique known to those skilled in the art before the present application, a detailed description thereof will be omitted.

In the first embodiment of the present invention, the magnitude and phase of the impedance are detected based on the distribution voltage and the induced current. However, according to the present invention, if the power calculation unit and the power output unit are provided at the rear end of the impedance detection unit 400, power is supplied. Of course, it can measure.

Next, a configuration and an operation process of a sensor for measuring a high frequency high power signal according to a second embodiment of the present invention will be described with reference to FIGS. 9 to 13.

9 is a block diagram of a sensor for measuring a high frequency high power signal according to a second embodiment of the present invention.

As shown in FIG. 9, the sensor for measuring the high frequency high power signal according to the second embodiment of the present invention includes a primary conductor part 110, an incident power detection unit 500, and a reflected power detection unit 600. It is composed.

The primary conductor part 110 transmits RF large current and is applied with RF high voltage.

The incident power detection unit 500 detects the incident current induced by generating a secondary incident induction current in the magnetic flux space of the insulator based on the incident current applied to the primary side conductor unit 110, and the primary side The incident power is detected by generating an electrostatic induction voltage using the dielectric constant of the insulator based on the voltage applied to the conductor unit 110 to divide the induced voltage into a predetermined value to detect the divided voltage.

The reflected power detection unit 600 detects the incident current induced by generating a secondary side reflection induced current in the magnetic flux space of the insulator based on the reflected current applied to the primary side conductor unit 110. Based on the voltage applied to the conductor unit 110, the electrostatic induction voltage is generated using the dielectric constant of the insulator, and the induced voltage generated is voltage-divided to a predetermined value to detect the reflected voltage.

FIG. 10 is a detailed block diagram of FIG. 9.

As shown in FIG. 10, the incident power detection unit 500 includes a secondary directional induction current generator 550, a second voltage divider 510, a first calculator 520, and a third logarithmic amplifier. 530 and the incident power output unit 540.

The secondary side directional induction current generator 550 generates an induction induced current when an incident current is applied to the primary side conductor part 110 with an insulator interposed between the primary side conductor part 110.

The second voltage divider 510 divides the induced voltage generated by generating an electrostatic induction voltage by the interposition of an insulator having a predetermined dielectric constant based on a voltage applied to the primary conductor 110. do.

The first calculator 520 receives the incident current signal output from the secondary directional induction current generator 550 and the divided voltage signal output from the second voltage divider 510 to calculate incident power. .

The third logarithmic amplifier 530 amplifies the calculated incident power signal output from the first calculator 520.

The incident power output unit 540 receives the amplified incident power signal output from the third logarithmic amplifier 530 and outputs incident power at a predetermined DC (Direct Current) value so that a user can recognize the incident power output unit 540.

As shown in FIG. 10, the reflected power detection unit 600 includes a secondary directional induction current generator 550, a third voltage divider 610, a second calculator 620, and a fourth logarithmic amplifier. The unit 630 and the reflected power output unit 640.

The secondary directional induction current generating unit 550 induces reflection when a reflected current flows through the primary conductor unit 110 by a common configuration with the secondary directional induction current generating unit of the incident power detection unit 500. Generates a current.

The third voltage divider 610 generates an electrostatic induction voltage by using a dielectric constant of an insulator interposed between the primary conductor part 110 and the voltage based on the voltage applied to the primary conductor part 110. The induced induction voltage is divided by a predetermined value.

The second calculator 620 calculates the reflected power by receiving the reflected current signal output from the secondary directional induction current generator 550 and the divided voltage signal output from the third voltage divider 610.

The fourth logarithmic amplifier 630 amplifies the reflected power signal output from the second calculator 620.

The reflected power output unit 640 outputs the reflected power at a predetermined DC value based on the amplified reflected power signal received from the fourth logarithmic amplifier 630.

FIG. 11 shows a partial detailed circuit diagram of FIG. 10.

Reference numeral 111 in FIG. 11 denotes an inner conductor 111 of a coaxial line described below for implementing the primary side conductor part 110.

In addition, the illustrated C ₂ and the second variable impedance (C ₂ ′ and the parallel of the variable resistor R ₅ ) constitute a second voltage divider 510, and the C ₂ and the third variable impedance C ₂ ′ and the variable variable voltage. The parallel of the resistor R ₆ ) constitutes a third voltage divider 510.

R _ref and R _fwd are resistors constituting the secondary directional induction current generator 550, I _1ref is a secondary side reflection induced current derived from the reflected current I _ref , and I _1fwd is an incident current I _fwd ) is the secondary incident induction current derived from

The reference numeral 521 is a first operator 521 for implementing the first operator 520, and the reference numeral 621 is a second operator 621 for implementing the second operator 620. to be. Reference numeral 531 denotes a third logarithmic amplifier 531 for implementing the third logarithmic amplifier 530, and reference numeral 631 denotes a fourth logarithm for implementing the fourth logarithmic amplifier 630. Amplifier 631.

P ₂ is a configuration for generating the second capacitance C ₂ and generating the incident induced current or the reflected induced current according to the second embodiment.

12 is a perspective view of a physical configuration for implementing the primary conductor portion, the second voltage divider, the secondary directional induction current generator, and the third voltage divider of FIG. 10.

As shown in FIG. 12, the primary conductor part 110 is implemented as an inner conductor 111 of a coaxial line. In addition, a sufficient number of litz wires (not shown) are inserted into the inner conductor 111 shown in FIG. 12, and the litz wires (not shown) reduce internal effects by reducing skin effect and lowering effective resistance. The power is reduced, and as a result, the heat generation is reduced.

The secondary directional induction current generating unit 550 includes a secondary directional induction current conductor 551 (hereinafter referred to simply as a directional conductor) positioned parallel to the inner conductor 111 and the directional conductor. A resistor R _fwd connected in parallel to the incidence end of the incident direction 551 and a resistor R _ref connected in parallel to the reflection direction end of the directional conductor 551.

The directional conductor 551 separates the incident power and the reflected power, and the separation characteristic of the incident power and the reflected power (hereinafter, abbreviated as 'separation characteristic') is used to measure the incident power. In this case, it means a characteristic capable of measuring incident power without being affected by the presence or absence of reflected power.

The second voltage divider 510 is positioned to be spaced apart from the inner conductor 111 by a predetermined interval and is interposed with an insulator 120 having a predetermined dielectric constant based on the voltage of the inner conductor 111. (C ₂ ) and a voltage detecting plate conductor (hereinafter, simply referred to as a “plate conductor”) 553 for generating a second incident electrostatic induction voltage, and the directional conductors connected in series to the plate conductor 553. the second consists of the variable impedance element (C ₂ 'in parallel with the variable resistor R ₅₎ (Fig. 12, the second of R ₅ components of variable impedance for adjusting the incident power and reflected power separation performance characteristics based on 551) Is omitted).

In addition, the third voltage distribution unit 610 includes the plate conductor 553 in common and generates a capacitance C ₂ and an electrostatic induction voltage based on the voltage of the inner conductor 111. 553 and a third variable impedance C ₂ ′ and a variable resistor R ₆ connected in series with the plate conductor 553 to adjust the performance of the separation of the incident power and the reflected power by the directional conductor 551. Parallel) (the illustration of R _{6 which} is a component of the third variable impedance is omitted in FIG. 12).

P ₂ shown in FIG. 12 is a physical configuration for generating the second capacitance C ₂ and generating the incident induced current or the reflected induced current according to the second embodiment.

The directional conductor 551 and the plate conductor 553 may be implemented in a copper foil pattern (not shown) of the PCB as in the first embodiment.

Then, a circuit element mounted on a PCB (not shown) according to the second embodiment, for example, the first calculator 521, the second calculator 621, the second variable impedance element C ₂ ′ and the variable resistor R ₅ in parallel, Generation of electrostatic induction and magnetic induction between the third variable impedance element (parallel of C ₂ ′ and variable resistor R ₆ ), the incident power output unit 540 and the reflected power output unit 640, and the inner conductor 111. In order to prevent the PCB (not shown) is provided with a shield (not shown).

In addition, a voltage shield between the conductor 111 and the directional conductor 511 to prevent the electrostatic induction voltage from occurring in the directional conductor 551 due to the voltage applied to the conductor 111. (Not shown) is provided.

Next, a process of detecting incident power and reflected power according to the second embodiment will be described.

First, a process of detecting incident power will be described.

As shown in FIGS. 11 and 12, when the incident current I _fwd flows through the inner conductor 111, the secondary incident induction current I _1fwd occurs in the directional conductor 551.

Since the outlet side enters the induced current I _1fwd generated as described above, in the vacuum and a non-magnetic material of the magnetic permeability as in the conventional non-magnetic permeability produced in the insulation of relative permeability has a value similar to the (μ _s = 1), the I _1fwd is It is very stable and its value is very small, for example several mA.

The secondary incident induction current I _1fwd generated as described above is input to the first calculator 521.

11 and 12, an insulator 120 having a relative dielectric constant ε _2s is inserted between the inner conductor 111 and the plate conductor 553 to have a capacitor C ₂ having a predetermined capacitance. Is formed.

The capacitance of the capacitor C ₂ is in the unit of several pF. As described in the first embodiment, the capacitance of the capacitor C ₂ is a dielectric between the inner conductor 111 and the plate conductor 451. This is because the interposition is formed.

In addition, an impedance Z ₂ = (1 / R ₅ + jωC ₂ ′) is connected in series to the capacitor C ₂ , and a voltage distributed to the impedance Z ₂ is input to the first calculator 521.

Impedance Z ₂ is almost capacitive and R ₅ has little effect on Z ₂ . By adjusting the magnitude of R ₅ , the separation characteristic of the directional leader 551 may be improved to the maximum.

The first operator 521 receives the input secondary incident induction current I _1fwd and the voltage signal divided by the impedance Z ₂ , calculates the incident power, and transfers the incident power to the third logarithmic amplifier 531. do.

The third logarithmic amplifier 531 amplifies the incident power signal received from the first operator 521.

As described above, since the incident power signal is amplified by the third logarithmic amplifier 531, the power operating range is widened.

The incident power signal amplified by the third logarithmic amplifier 531 is input to the incident power output unit 540, and the incident power output unit 540 outputs incident power at a predetermined DC value that can be recognized by the user. .

Since the configuration in which the incident power output unit 540 outputs incident power is well known before application of the present invention, a detailed description thereof will be omitted.

Secondly, the process of detecting the reflected power will be described.

The process of detecting the reflected power is also the same as the process of detecting the incident power.

That is, within the conductor (111) reflection current (I _ref) is passed through it is guided to the outlet side reflection induced current I _1ref the direction leading member (551), said secondary reflecting the induced current (I _1ref) to the second computing unit (621 ) Is entered.

As shown in FIG. 12, the capacitor C ₂ formed by the insulator 111 and the plate member 553, which was used for the voltage detection for the incident power detection, is used as it is to detect the reflected power. . Thus, the characteristics of capacitor C ₂ are the same as in incident power.

As shown in FIG. 11, impedance Z ₃ = (1 / R ₆ + jωC ₂ ′) for voltage distribution is obtained, and Z ₃ is adjustable by the variable resistor R ₆ . The voltage signal distributed to the impedance Z ₃ is input to the second calculator 621.

The second calculator 621 calculates the reflected power based on the input secondary side reflection induced current I _1ref and the voltage divided by the impedance Z ₃ , and the calculated reflected power signal is a fourth log amplifier 631. And the reflected power output unit 640 is output as a DC value.

Next, a configuration of a sensor for measuring high frequency high power signal according to a third embodiment of the present invention will be described with reference to FIGS. 13 and 14.

FIG. 13 is a circuit diagram of a sensor for measuring a high frequency high power signal according to the third embodiment.

A third embodiment of a sensor for measuring a high frequency high power signal according to the present invention is an invention for simultaneously executing the first embodiment and the second embodiment, and the primary side conductor portion of the first and second embodiments ( 110 to have a common configuration, and the first capacitor (C ₁ ) and the second capacitor (C ₂ ) for the voltage distribution having a common configuration (that is, C ₁ = C ₂ = C ₅ ) The configuration according to the third embodiment is realized by combining the configuration according to the first embodiment and the configuration according to the second embodiment.

That is, the sensor for measuring the high frequency high power signal according to the third embodiment of the present invention includes the primary side conductor portion 110 of the first and second embodiments, the current detecting unit 200 of the first embodiment, and And a voltage detection unit 300, an incident power detection unit 500 and a reflected power detection unit 600 of the second embodiment, and detecting the first capacitor C ₁ and the incident power of the voltage detection unit 300. The second capacitor C ₂ of the unit 500 and the reflected power detection unit 600 is implemented with a common capacitor C ₅ .

P _{3 shown} is a circuit configuration diagram for generating capacitance C ₅ , generating induction current I ₁ , and generating directional induction current I _1fwd , I _1ref according to the third embodiment.

14 is a bottom perspective view of the PCB 150 according to the third embodiment.

As shown in FIG. 14, the conductor 211 according to the first embodiment and the directional conductor 551 according to the second embodiment are shown, and the capacitor is maintained at a constant distance from the inner conductor 111. A voltage detection plate (CP) for implementing (C ₅ ) is shown.

Next, an operation process according to the third embodiment having the above configuration will be described.

As described above, the third embodiment of the present invention is a combination of the impedance measurement configuration according to the first embodiment and the power detection configuration according to the second embodiment. As an invention for carrying out simultaneously.

That is, the impedance detection according to the third embodiment is performed by the configuration for detecting the induced current and the distribution voltage according to the first embodiment, as shown in FIG. 13, and the power detection according to the third embodiment is performed. As shown in FIG. 13, the directional induction current and the divided voltage are detected and calculated and output according to the second embodiment. The capacitor C ₅ detects the divided voltage and power for impedance detection. It is commonly used for the distribution voltage detection.

Therefore, one plate plate CP illustrated in the PCB 150 shown in FIG. 14 is commonly used for the distribution voltage for impedance detection and the distribution voltage detection for power detection.

On the other hand, Figure 15 is an exploded perspective view of the physical configuration of the sensor for measuring high frequency high power signal according to the present invention. 15 is a configuration diagram for actually using the high frequency high power signal measuring sensor according to the first, second and third embodiments of the present invention as a single unit. to be.

15 shows the inner conductor 111 and the outer conductor 130 constituting the coaxial line. The inner conductor 111 and the outer conductor 130 flow a large current while maintaining a high RF voltage.

The outer conductor 130 protects circuit elements mounted on the inner conductor 111, the conductor 211, the directional conductor 551, the plate conductor 311, and the PCB 151, and is electrically grounded. Performs the function of.

In addition, a plurality of insulated Ritz wires (not shown) are inserted into the outer conductor 130. The plurality of Litz wires (not shown) provided in the outer conductor 130 reduce the skin effect and lower the effective resistance, thereby reducing the internal power consumption, and thus reducing the heat generation.

The insulator 120 is filled between the inner conductor 111 and the outer conductor 130. The insulator 120 has a dielectric constant epsilon _1s in the first embodiment, a dielectric constant epsilon _2s in the second embodiment, and a dielectric constant epsilon _3s in the third embodiment.

In addition, an opening 130b is formed at an upper portion of the outer conductor 130, and the PCB 150 is seated on the insulator 120 through the opening 130b. In addition, reference numeral 130a denotes a through hole of the outer conductor 130, and the inner conductor 111 inserted into the insulator 120 is coupled to the through hole 130a.

In the case of the first embodiment, the PCB 150 is the PCB 151 shown in FIG. 8, and in the second embodiment, the directional leader 551 and the plate conductor 553 have a copper foil pattern. It is a PCB (not shown), and in the case of the third embodiment, is a PCB 150 shown in FIG. 14, and the PCB 150 shown in FIG. 15 is the PCB 150 according to the third embodiment. Is implemented.

In addition, the coaxial cable formed by the inner conductor 111 and the outer conductor 130 is connected to the connector 160, and the connector 160 connects a sensor for measuring a high frequency high power signal and an external device (not shown).

As described above, the first embodiment of the present invention uses the conductor 211 as the secondary side induced current and the magnetic flux for generating the induced current in the conductor 211 is generated in the insulator space. It can sense a stable current value that does not change value, and because the induced current value is very small, it can have a very wide operating range.

In the embodiment of the present invention, the first log amplifier 231, the second log amplifier 331, the impedance detection unit 400, the third log amplifier 431, the fourth log amplifier 631 and the incident power output unit The 540 and the reflected power output unit 640 are implemented as separate components, but may be implemented as one IC chip.

The above embodiments of the present invention are merely one embodiment of the technical idea of the present invention, and of course, other modifications are possible within the technical idea of the present invention.

The high frequency high power signal measuring sensor of the present invention having the configuration and operation process as described above has the following effects.

First, in the current detection, by using a magnetic material of extremely low specific permeability (that is, an insulator) as a magnetic flux space without using a magnetic material having a high permeability, there is an effect of detecting a stable current without a change in the measured value.

Second, in current detection, a high current magnetic field does not generate an induction current but generates an induction current in a conductor having a number of turns of 0.5 in a magnetic flux space of a magnetic body having an extremely low specific permeability. As a result, the size and weight of the sensor for measuring a high frequency high power signal can be easily reduced.

Third, in voltage detection, the voltage is detected by using a capacitor implemented by a conductor which maintains a predetermined distance from the inner conductor of the coaxial line without using a separate commercially available capacitor. It is possible to detect a low voltage, for example several mV, and as a result, there is an effect that the size and weight of the sensor for measuring a high frequency high power signal is easily reduced.

Fourth, by detecting the low induction current and the low distribution voltage and amplifying it by the logarithmic amplifier, the operation range of the high frequency high power signal measuring sensor is extended.

Fifth, in the voltage detection, there is an effect of lowering the product cost by using a capacitor implemented by a plate conductor that maintains a predetermined distance with the inner conductor of the coaxial line without using a separate commercial capacitor.

Sixth, the high voltage insulation is possible by inserting an insulator having excellent insulation properties between the inner conductor of the coaxial line for voltage detection and the plate conductor maintaining a predetermined distance, so that high voltage (for example, 30 kV) can be applied. have.

Seventh, by adjusting the separation characteristics of the directional leader by using a variable resistor without using a variable capacitor, it is easy to design and produce, thereby lowering the product cost.

Eighth, it is easy to implement and maintain by adjusting the separation characteristic of the directional conductor with a variable variable resistor.

Ninth, by inserting a Litz wire into the inner conductor to reduce the skin effect and minimize the effective resistance of the inner conductor can transmit a large current, and as a result can measure the large power.

Tenth, there is no signal to be drawn directly from the inner conductor and the inner conductor, which is a high voltage high current element, is sufficiently insulated with good insulator, which eliminates the possibility of electric shock. There is.

FIG. 1 is a block diagram illustrating the use of a sensor for measuring a high frequency high power signal.

2 is a simplified configuration diagram of a sensor for measuring a high frequency high power signal according to the prior art.

3 is a block diagram of a sensor for measuring a high frequency high power signal according to a first embodiment of the present invention.

4 is a detailed block diagram of the current detection unit of FIG. 3.

FIG. 5 is a detailed block diagram of the voltage detection unit of FIG. 3.

FIG. 6 is a detailed circuit diagram of the primary side conductor portion, the current detection unit, and the voltage detection unit of FIG. 3.

FIG. 7 is a perspective view of a physical configuration for implementing the primary conductor part of FIG. 3, the secondary induction current generator of FIG. 4, and the first voltage divider of FIG. 5.

8 is a bottom perspective view of a PCB according to a first embodiment of the present invention.

9 is a block diagram of a sensor for measuring a high frequency high power signal according to a second embodiment of the present invention.

10 is a detailed block diagram of FIG. 9.

FIG. 11 is a partial detailed circuit diagram of FIG. 10.

FIG. 12 is a perspective view of a physical configuration for implementing the primary conductor portion, the second voltage divider, the secondary directional induction current generator, and the third voltage divider of FIG. 10.

13 is a circuit configuration diagram of a sensor for measuring high frequency high power signal according to a third embodiment of the present invention.

14 is a bottom perspective view of a PCB according to a third embodiment of the present invention.

15 is an exploded perspective view of a physical configuration of a sensor for measuring high frequency high power signal according to an embodiment of the present invention.

         Explanation of symbols on the main parts of the drawings

10; High frequency large power generator 20; Impedance transducer

30; Plasma chamber 40; Controller

100; Sensor for measuring high frequency high power signal 110; Primary conductor part

111; Internal conductor 120; Insulator

130; External conductor 130a; Through hole

130b; Opening 150; PCB

200; Current detection unit 210; Secondary side induction current generator

211; Secondary induction current conductor 220; First Log Amplifier

221; First logarithmic amplifier 300; Voltage detection unit

310; A first voltage divider 311; Plate conductor for voltage detection

320; Second logarithmic amplifier 321; 2nd Log Amplifier

400; Impedance detection unit 500; Incident power detection unit

510; Second voltage divider 520; First operation unit

521; First operator 530; Third Log Amplifier

531; Third logarithmic amplifier 540; Incident power output

550; Secondary directional induction current generator

551; Secondary directional inductive current conductor

553; Plate conductor 600 for second voltage detection; Reflected power detection unit

610; Third voltage divider 620; Second operation unit

621; Second operator 630; Fourth Log Amplifier

631; Fourth logarithmic amplifier 640; Reflected power output

CP; Voltage detection plate conductor

Claims (14)

A primary conductor part to which an RF (Radio Frequency) current and voltage are applied; A current detection unit detecting a induced incident current by generating a secondary induced current using the magnetic permeability of the insulator based on the current applied to the primary conductor; A voltage detection unit for generating an electrostatic induction voltage using a dielectric constant of an insulator based on the voltage applied to the primary side conductor part to detect the electrostatically induced voltage; And an impedance detection unit for calculating and outputting the magnitude and phase of the impedance based on the voltage signal and the current signal received from the voltage detection unit and the current detection unit, respectively. The method of claim 1, wherein the current detection unit, A secondary side induction current generator including an insulator interposed between the primary side conductor part and a secondary side induced current based on a current applied to the primary side conductor part; And a first logarithmic amplifier configured to amplify the induced current received from the secondary induction current generator. The method of claim 1, wherein the voltage detection unit, A conductor for generating an electrostatic induction voltage by interposing an insulator having a predetermined dielectric constant between the primary conductor part and the first impedance element connected in series with the conductor based on a voltage applied to the primary conductor part; A first voltage divider configured to distribute the electrostatically induced voltage; And a second logarithmic amplifier configured to amplify the voltage distributed from the first voltage divider. A primary conductor part to which RF current and voltage are applied; The secondary incident induction current is generated using the permeability of the insulator based on the incident current applied to the primary side conductor part to detect the induced current, and the dielectric constant of the insulator is based on the voltage applied to the primary side conductor part. An incident power detection unit which detects incident power by generating an electrostatic induction voltage and voltage-dividing the induced voltage generated by using the detected voltage; Based on the reflected current applied to the primary conductor part, the secondary reflection induced current is generated in the magnetic flux space of the insulator to detect the induced reflection current, and the dielectric constant of the insulator is determined based on the voltage applied to the primary conductor part. And a reflected power detection unit for detecting the reflected power by generating a capacitive induced voltage using the voltage distribution and detecting the divided voltage. The method of claim 4, wherein the incident power detection unit, A conductor interposed between the primary side conductor portion and a secondary side induced induction current when the incident current is applied to the primary side conductor portion; a first resistor connected in parallel to the terminal in the incident direction; A secondary side directional induction current generator comprising a second resistor connected in parallel with the terminal in the reflection direction of the conductor; A second voltage divider for voltage-dividing an induced voltage generated by generating an electrostatic induction voltage by interposing an insulator having a predetermined dielectric constant between the primary conductor part and a voltage applied to the primary conductor part; A first calculator configured to calculate an incident power signal based on the divided voltage signal and the incident induced current signal respectively received from the second voltage divider and the secondary directional induction current generator; A third logarithmic amplifier for amplifying the incident power signal received from the first calculator; And an incident power output unit configured to output a logarithmic amplified incident power signal received from the third logarithmic amplifier unit. The method of claim 5, wherein the reflected power detection unit, A third voltage divider configured to divide the induced voltage generated by generating an electrostatic induction voltage using a dielectric constant of an insulator interposed between the primary conductor part based on a voltage applied to the primary conductor part; On the basis of the divided voltage signal received from the third voltage divider and the reflected induced current signal received from the secondary directional induction current generator that generates a secondary reflected induced current when the reflected current is applied to the primary conductor. A second calculating unit calculating a reflected power signal; A fourth logarithmic amplifier for amplifying the reflected power signal received from the second calculator; And a reflected power output unit configured to output a logarithmic amplified reflected power signal received from the fourth logarithmic amplifier unit. The method of claim 6, wherein the second voltage divider, A conductor for generating a capacitance and an induction voltage based on a voltage applied to the primary conductor part via an insulator having a predetermined dielectric constant between the primary conductor part; A high frequency high power signal comprising a second variable impedance element including a variable resistance element connected in series with the conductor to adjust the performance of the separation of the incident power and the reflected power by the secondary directional induction current generator; Measurement sensor. The method of claim 7, wherein the third voltage divider, And a third variable impedance element including a variable resistor connected in series with the conductor of the second voltage divider to adjust performance of the separation of the incident power and the reflected power by the secondary directional induction current generator. Sensor for measuring high frequency large power signal. The sensor of claim 2, 3, 5, or 7, wherein the conductor is implemented by a copper foil pattern of a printed circuit board (PCB). The method according to claim 1 or 4, A sensor for measuring a high frequency high power signal, characterized in that a plurality of insulated Ritz wires are provided inside the primary conductor part. The method according to claim 1 or 4, An outer conductor for mechanically protecting a circuit element and performing a function of a grounding wire is further included, and the plurality of insulated litz wires are provided inside the outer conductor, respectively. sensor. The method of claim 9, A high frequency high power signal measuring sensor, characterized in that a shield is inserted between the PCB and the primary conductor to prevent electrostatic induction and magnetic induction between the circuit element mounted on the PCB and the primary conductor. . The method according to claim 2 or 5, High-frequency high-power signal measurement, characterized in that the voltage shield is inserted to prevent the generation of electrostatic induction voltage in the secondary side induction current generating unit and the secondary side directional induction current generating unit by the voltage applied to the primary side conductor portion. Sensor. The method of claim 4, wherein A current detection unit detecting a induced incident current by generating a secondary induced current using the magnetic permeability of the insulator based on the current applied to the primary conductor; A voltage detection unit for generating an electrostatic induction voltage using a dielectric constant of an insulator based on the voltage applied to the primary side conductor part to detect the electrostatically induced voltage; Sensor for measuring high frequency high power signal, characterized in that it further comprises an impedance detection unit for calculating and outputting the magnitude and phase of the impedance based on the voltage signal and the current signal received from the voltage detection unit and the current detection unit, respectively .