CN113138309A - Impedance measuring element, impedance matcher, radio frequency power supply and semiconductor process equipment - Google Patents
Impedance measuring element, impedance matcher, radio frequency power supply and semiconductor process equipment Download PDFInfo
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Abstract
The application provides an impedance measuring element, an impedance matcher, a radio frequency power supply and semiconductor process equipment, wherein the impedance measuring element is applied to a radio frequency transmission line and comprises a data acquisition unit, a data processing unit and an impedance calculation unit, wherein the data acquisition unit is used for acquiring voltage data, current data, forward power data and reflected power data of the radio frequency transmission line; the data processing unit is respectively connected with the data acquisition unit and the impedance calculation unit and is used for carrying out data processing on the voltage data, the current data, the forward power data and the reflected power data so as to obtain amplitude signals, phase signals and power reflection coefficient signals of the voltage waves and the current waves; the impedance calculation unit is used for determining the impedance of the radio frequency transmission line according to the amplitude signal, the phase signal and the power reflection coefficient signal. By applying the method and the device, the measurement precision is high, the response time is short, and the cost is low.
Description
Technical Field
The invention relates to the technical field of electronic components, in particular to an impedance measuring element, an impedance matcher, a radio frequency power supply and semiconductor process equipment.
Background
The impedance matcher is a part in microwave electronics and is mainly used on a transmission cable to achieve the purposes that all high-frequency microwave signals can be transmitted to a load point and no signal is reflected back to a source point, so that the energy benefit is improved. One core device of the impedance matcher is an impedance measuring element, the impedance measuring element is mainly used for acquiring voltage wave signals and current wave signals on a load through a sensor by applying an impedance measuring technology, and the impedance of the load is calculated and output through information such as the amplitude, the phase and the like of the signals.
With the continuous development and application of impedance measurement technology in the semiconductor industry, the requirements on parameters such as measurement accuracy and response time are increasing. Factors influencing parameters such as impedance measurement accuracy and response time comprise sampling accuracy, sampling frequency, calculation method and the like of the sensor.
However, in the radio frequency field, the impedance calculation model of the existing impedance measurement element has high requirements on the accuracy of the voltage amplitude signal and the current amplitude signal, and when the voltage amplitude signal and the current amplitude signal have slight deviation, the accuracy, the response time and the like of the impedance measurement are greatly reduced. And higher cost is often required for improving parameters such as the accuracy and the response time of impedance measurement.
Disclosure of Invention
The invention aims to at least solve one of the technical problems in the prior art and provides an impedance measuring element, an impedance matcher, a radio frequency power supply and semiconductor process equipment, which have the advantages of higher measuring precision, shorter response time and lower cost.
In order to achieve the object of the present invention, a first aspect provides an impedance measuring element applied to a radio frequency transmission line, comprising a data acquisition unit, a data processing unit and an impedance calculating unit, wherein,
the data acquisition unit is used for acquiring voltage data, current data, forward power data and reflected power data of the radio frequency transmission line;
the data processing unit is respectively connected with the data acquisition unit and the impedance calculation unit and is used for carrying out data processing on the voltage data, the current data, the forward power data and the reflected power data to obtain amplitude signals, phase signals and power reflection coefficient signals of voltage waves and current waves;
the impedance calculation unit is used for determining the load impedance of the radio frequency transmission line according to the amplitude signal, the phase signal and the power reflection coefficient signal.
Optionally, the data acquisition unit includes a voltage sensing device, a current sensing device, and a directional coupling device connected in series to the radio frequency transmission line;
the voltage sensing device is used for acquiring the voltage data of the radio frequency transmission line;
the current sensing device is used for acquiring the current data of the radio frequency transmission line;
the directional coupling device is configured to collect the forward power data and the reflected power data of the radio frequency transmission line.
Optionally, the directional coupling device includes an auxiliary transmission line and a coupling structure;
two ends of the auxiliary transmission line are respectively connected to the radio frequency transmission line and used for transmitting radio frequency power together with the radio frequency transmission line; the coupling structures are disposed on both sides of the auxiliary transmission line and are configured to couple the forward power data and the reflected power data.
Optionally, the coupling structure comprises a first coupling element and a second coupling element symmetrically disposed on both sides of the secondary transmission line;
the first coupling piece comprises a first coupling body and a first matching resistor, the first coupling body is used for directionally coupling out the forward power of the radio frequency transmission line, and the first matching resistor is used for matching out the voltage data of the forward power;
the second coupling piece comprises a second coupling body and a second matching resistor, the second coupling body is used for directionally coupling out the reflected power of the radio frequency transmission line, and the second matching resistor is used for matching out the voltage data of the reflected power.
Optionally, the voltage sensing device includes a first capacitive element and a second capacitive element, the first capacitive element and the second capacitive element are connected in series, the first capacitive element is configured to form a first capacitance with the radio frequency transmission line, the second capacitive element forms a second capacitance, and a capacitance value of the second capacitance is greater than a capacitance value of the first capacitance, so as to reduce the shared voltage of the first capacitance;
the voltage sensing device is used for acquiring the voltage division of the first capacitor so as to acquire the voltage data of the radio frequency transmission line.
Optionally, the current sensing device comprises a magnetic member surrounding the radio frequency transmission line and an induction coil wound on the magnetic member, the magnetic member and the induction coil being used for sensing the current data of the radio frequency transmission line.
Optionally, the data processing unit includes a first processing module and a second processing module, where the first processing module is configured to perform data processing on the voltage data and the current data to obtain an amplitude signal and a phase signal of a voltage wave and a current wave, respectively;
the second processing module is used for carrying out data processing on the forward power data and the reflected power data to obtain a power reflection coefficient signal.
Optionally, the second processing module includes a first sub-processing module and a second sub-processing module, the first sub-processing module is configured to perform data processing on the forward power data and the reflected power data to obtain a power reflection coefficient analog signal, and the second sub-processing module is configured to perform digital processing on the phase signal and the power reflection coefficient analog signal respectively to convert the phase signal into a digital phase signal and convert the power reflection coefficient analog signal into a digital power reflection coefficient signal.
Optionally, the first sub-processing module comprises any one of a divider, a multiplier and a rectifying circuit.
Optionally, the first processing module comprises a magnitude processing module and a phase processing module;
the amplitude processing module comprises:
two rectifiers for over-rectifying the voltage data and the current data, respectively;
the summing circuit is used for summing results rectified by the two rectifiers;
the calibrator is used for calibrating the result summed by the summing circuit;
the amplifying circuit is used for amplifying the signal of the result calibrated by the calibrator; and/or
The phase processing module includes:
the two zero-crossing comparators are used for respectively carrying out zero-crossing comparison on the voltage data and the current data;
the rectifier is used for rectifying the result after the comparison of the two zero-crossing comparators;
the calibrator is used for calibrating the result rectified by the rectifier;
and the amplifying circuit is used for amplifying the signal of the result calibrated by the calibrator.
To achieve the object of the present invention, a second aspect provides an impedance matcher, including an impedance measuring element and an impedance matching element, wherein the impedance measuring element is the impedance measuring element of the first aspect.
In order to achieve the object of the present invention, a third aspect provides a radio frequency power supply, which includes a power supply main body and an impedance matcher, where the impedance matcher is the impedance matcher of the second aspect.
To achieve the object of the present invention, in a fourth aspect, there is provided a semiconductor process apparatus comprising an apparatus body and a radio frequency power supply for supplying power to the apparatus body, the radio frequency power supply being the radio frequency power supply of the third aspect
The invention has the following beneficial effects:
the impedance measuring element provided by the invention not only collects the voltage data and the current data of the radio frequency transmission line, but also collects the forward power data and the reflected power data, obtains the amplitude signal of the voltage wave and the current wave and the phase signal of the voltage wave and the current wave through the voltage data and the current data, obtains the reflected coefficient signal through the forward power data and the reflected power data, and then can calculate the specific value of the load impedance of the radio frequency transmission line according to the amplitude signal, the phase signal and the reflected coefficient signal. Because the mode of the impedance is only related to the power reflection coefficient, and the power reflection coefficient is also dependent on the ratio of the reflected power data to the forward power data, the mode accuracy of the impedance is only dependent on the ratio of the reflected power data to the forward power data (reflected as the ratio of two voltages in practical application), compared with the prior art, the uncertainty of the collected data can be reduced from two (voltage amplitude signals and current amplitude signals) to one (the ratio of the reflected power data to the forward power data), and the factors influencing the impedance accuracy are reduced, so that the mode accuracy of the measured impedance can be improved; in the data acquisition unit, the mode accuracy of the measured impedance can be greatly improved only by improving the accuracy of the forward power data and the reflected power data (the accuracy of the forward power data is often consistent with that of the reflected power data), and the method is relatively low in cost and easy to implement. Meanwhile, only the positive and negative of the voltage wave and the current wave are needed, so that the impedance calculation can be completed only by collecting the positive and negative of the voltage and the current, namely, the precision requirement on the voltage data and the current data is extremely low, the data collection can be completed by adopting components with simple manufacture and lower cost, and the data processing is simple, the speed is higher and the response time is shorter. In addition, the impedance measuring device provided by the embodiment has a wide application range, and compared with the prior art, the impedance measuring device can be widely applied to various large, medium and small radio frequency power supplies, impedance matchers, various semiconductor (or other) process equipment and the like besides measuring load impedance.
Drawings
Fig. 1 is a schematic diagram of a frame structure of an impedance measuring element provided in this embodiment;
fig. 2 is a schematic view of a modular structure of a data acquisition unit of the impedance measurement element provided in this embodiment;
fig. 3 is a schematic structural diagram of a data acquisition unit of the impedance measurement element provided in this embodiment;
fig. 4 is a schematic structural diagram of a first processing module of the impedance measuring device provided in this embodiment;
fig. 5 is a first schematic structural diagram (low precision requirement) of a second processing module of the impedance measuring device provided in this embodiment;
fig. 6 is a second schematic structural diagram (high precision requirement) of the second processing module of the impedance measuring device provided in this embodiment;
fig. 7 is a schematic flow chart of the impedance measuring method provided in this embodiment.
Detailed Description
Reference will now be made in detail to the present application, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar parts or parts having the same or similar functions throughout. In addition, if a detailed description of the known art is not necessary for illustrating the features of the present application, it is omitted. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present. Further, "connected" or "coupled" as used herein may include wirelessly connected or wirelessly coupled. As used herein, the term "and/or" includes all or any element and all combinations of one or more of the associated listed items.
The following describes the technical solutions of the present application and how to solve the above technical problems in specific embodiments with reference to the accompanying drawings.
In order to solve the above technical problems, the present embodiment performs research and analysis on the existing impedance measuring device, and finds that: the existing impedance measurement element rectifies voltage data to obtain a voltage amplitude signal after detecting the voltage data and current data of a radio frequency transmission line, rectifies the current data to obtain a current amplitude signal, and passes the voltage data and the current data through a phase discriminator to obtain a voltage and current phase signal Ph 1. And then the algorithm module calculates the impedance of the load according to the voltage amplitude signal, the current amplitude signal and the voltage and current phase signal Ph 1. However, since the voltage amplitude signal and the current amplitude signal pass through the rectifying circuits, and the components of the rectifying circuits are different, the filter circuits of the two rectifying circuits are not completely symmetrical, the amplitude and the phase of the rectified voltage data and the rectified current data are different, and the accuracy requirements of the impedance calculation model on the voltage amplitude signal and the current amplitude signal are higher, so that the impedance measurement accuracy is lower directly, or higher-cost and higher-accuracy electronic components are required to obtain higher-accuracy voltage data and current data. In the impedance calculation model, the coupling coefficient of voltage data and current data, the rectified amplitude and phase difference and the error of the phase discriminator need to be processed and modeled respectively, so that the processing steps of the error caused by precision are more, and the places needing calibration are more, thereby not only increasing the manufacturing cost, but also reducing the data processing time and the response time of the impedance measurement element.
Referring to fig. 1, the present embodiment provides an impedance measuring device applied to a radio frequency transmission line, including a data acquisition unit, a data processing unit and an impedance calculating unit, wherein the data acquisition unit is configured to acquire voltage data U1, current data U2, forward power data P1 and reflected power data P2 of the radio frequency transmission line; the data processing unit is respectively connected with the data acquisition unit and the impedance calculation unit and is used for carrying out data processing on voltage data U1, current data U2, forward power data P1 and reflected power data P2 so as to obtain an amplitude signal Mag1, a phase signal Ph1 and a power reflection coefficient signal of voltage waves and current waves; the impedance calculation unit is used for determining the load impedance of the radio frequency transmission line according to the amplitude signal Mag1, the phase signal Ph1 and the power reflection coefficient signal.
The rf transmission line may be understood as a transmission line of the rf power source, and may be a central conductive core of a transmission cable. The rf power source may be an rf power source applied to semiconductor processing equipment (e.g., a plasma etcher, a wafer cleaning machine, a physical vapor deposition apparatus, etc.), or may be an rf power source applied to other equipment, which is not specifically limited in this embodiment. The voltage data U1, the current data U2, the forward power data P1, and the reflected power data P2 may be actual measured voltage values, current values, forward power values, and reflected power values, or corresponding voltage signals, current signals, forward power signals, and reflected power signals, or may be further converted into voltage signals. The amplitude signal mag1, the phase signal Ph1 and the power reflection coefficient signal of the voltage wave and the current wave can be corresponding voltage signals so as to perform non-dimensionalization operation.
The principle of determining the impedance of the radio frequency transmission line 7 in this embodiment is as follows:
first, according to the definition of impedance (in a circuit having a resistance, an inductance and a capacitance, the impedance acting on the current in the circuit is called impedance, the impedance is expressed by Z and is a complex number, the real part is called resistance, and the imaginary part is called reactance, wherein the impedance acting on the alternating current in the circuit by the capacitance is called capacitive reactance, the impedance acting on the alternating current in the circuit by the inductance is called inductive reactance, and the impedance acting on the alternating current in the circuit by the capacitance and the inductance is called reactance in general), there is an impedance ZLFormula (1):
ZL＝a+jb， (1)
wherein Z isLFor the load impedance of the radio frequency line, a denotes the real part of the impedance, b denotes the imaginary part of the impedance, and j is an imaginary sign.
The definition of the radio frequency power and the calculation of the reflection coefficient are as follows:
wherein U is the amplitude of the voltage wave, Z0Is the standard impedance (50 Ω in this embodiment), Γ, of the RF line in this embodiment0Is a reflection coefficient, PREFAs value of reflected power, PFWDIs a forward power value, P2The reflected power data P2, P in the present embodiment1Is the forward power data P1 in this embodiment.
According to the relationship between the load impedance and the reflection coefficient, the following calculation is carried out:
from the relationship between voltage and power, it can be known that the reflection coefficient is positively correlated with the amplitude (Mag1) of the voltage wave and the current wave, i.e. when the amplitude of the voltage wave and the amplitude of the current wave are greater than 0, the reflection coefficient is greater than 0, so, Z isLThe modulus of (d) is calculated as follows:
when Mag1 > 0, then Γ0When > 0, ZLThe mold (A) is as follows:
when Mag1 is less than 0, then gamma is0When < 0, ZLThe mold (A) is as follows:
the phase angles of the voltage wave and the current wave are calculated by the formula of the phase signal Ph1 as follows:
θ＝π×ph1/U0 (7)
wherein, theta is the phase angle of the voltage wave and the current wave, ph1 is the phase signal of the voltage wave and the current wave, U0The maximum value of ph 1.
According to the above-mentioned ZLThe definition of (1) is as follows:
from the above equations (8) and (9), Z can be derivedLThe values of the real part a and the imaginary part b of (a) are:
as can be seen from the above description, the impedance measuring element provided in this embodiment collects not only the voltage data U1 and the current data U2 of the radio frequency transmission line, but also the forward power data P1 and the reflected power data P2, obtains the amplitude signal Mag1 of the voltage wave and the current wave and the phase signal Ph1 of the voltage wave and the current wave through the voltage data U1 and the current data U2, obtains the reflection coefficient signal Rf1 through the forward power data P1 and the reflected power data P2, and then can calculate the specific value of the impedance of the radio frequency transmission line load according to the amplitude signal Mag1, the phase signal Ph1 and the reflection coefficient signal Rf 1. Because the mode of the impedance is only related to the power reflection coefficient, and the power reflection coefficient is dependent on the ratio of the reflected power data to the forward power data, the mode accuracy of the impedance is only dependent on the ratio of the reflected power data to the forward power data (generally reflecting the ratio of two voltages), compared with the prior art, the uncertainty of the collected data can be reduced from two (the amplitude signal of the voltage and the amplitude signal of the current) to one (the ratio of the reflected power data to the forward power data), and the factors influencing the impedance accuracy are reduced, so that the mode accuracy of the measured impedance can be improved; in the data acquisition unit, the mode accuracy of the measured impedance can be greatly improved only by improving the accuracy of the forward power data P1 and the reflected power data P2 (the accuracy of the forward power data P1 is often consistent with that of the reflected power data P2), and the method is relatively low in cost and easy to implement. Meanwhile, only the positive and negative of the voltage wave and the current wave are needed, so that the impedance calculation can be completed only by collecting the positive and negative of the voltage and the current, namely, the precision requirements on the voltage data U1 and the current data U2 are extremely low, the data collection can be completed by adopting components and parts which are simple to manufacture and low in cost, and the data processing is simple, the speed is high, and the response time is short. In addition, the impedance measuring element provided in this embodiment collects parameters such as forward power, reflected power, load power, standing wave ratio, reflection coefficient, etc. besides voltage and current data, and the measuring range depends on the power level that the transmission cable can transmit (several w to several hundred kw can be measured), so the application range is wider.
It should be noted that, the specific structures of the data acquisition unit, the data processing unit and the impedance calculation unit are not particularly limited in this embodiment, as long as the function of measuring impedance can be achieved.
As shown in fig. 2, the data acquisition unit may include a voltage sensing device 101, a current sensing device 102, and a directional coupling device 103 connected in series to the radio frequency transmission line 7; the voltage induction device 101 can be used for collecting voltage data U1 of the radio frequency transmission line 7; the current sensing device 102 is used for acquiring current data U2 of the radio frequency transmission line 7; the directional coupling device 103 may be used to collect forward power data P1 and reflected power data P2 of the radio frequency transmission line 7. The voltage sensing device 101, the current sensing device 102 and the directional coupling device 103 may be formed on a single printed circuit board, or may be respectively disposed on two or three printed circuit boards, and the two ends of the printed circuit board (as a whole) may be respectively disposed with an input terminal 1 and an output terminal 2 (which may be a standard connection port of the rf transmission line 7) to be connected to the rf transmission line 7, as shown in fig. 3, the input terminal 1 and the output terminal 2 may be respectively connected to the rf transmission line 7 through a solder joint 3 and a solder joint 4.
It should be noted that, in actual use, the size difference between different types of devices is large, the positions of the voltage sensing device 101, the current sensing device 102 and the directional coupling device 103 can be interchanged, and the spatial arrangement can be reasonably arranged according to actual requirements.
In a specific embodiment of this embodiment, the voltage sensing device 101 and the current sensing device 102 may be disposed on the first printed circuit board 19, the directional coupling device 103 may be disposed on the second printed circuit board 20, so as to facilitate the fabrication of the data acquisition unit, and the first printed circuit board 19 and the second printed circuit board 20 may be formed on the substrate 14.
As shown in fig. 2 and 3, the directional coupling device 103 may include an auxiliary transmission line 13 and a coupling structure; the auxiliary transmission line 13 is arranged on the second printed circuit board 20, and two ends of the auxiliary transmission line are respectively connected to the radio frequency transmission line 7 and used for transmitting radio frequency power together with the radio frequency transmission line 7; the coupling structure may be disposed on the second printed circuit board 20 on both sides of the auxiliary transmission line 13. Thus, the auxiliary transmission line 13 and the rf transmission line 7 can transmit rf power together, and the divided voltage and the transmitted rf power on the auxiliary transmission line 13 can be designed according to actual needs, and forward power data P1 and reflected power data P2 within a specified numerical range corresponding to the forward power data and reflected power data of the rf transmission line 7 are coupled out, so as to process the collected data and improve the response time. Preferably, the auxiliary transmission line 13 and the coupling structure may be microstrip lines, so as to reduce the data level in the impedance measurement process, facilitate data processing, and further improve the response time and the application range of the impedance measurement element.
Specifically, the coupling structure includes a first coupling element and a second coupling element symmetrically disposed on both sides of the auxiliary transmission line 13, the first coupling element is used for directionally coupling the forward power data P1, and the second coupling element is used for directionally coupling the reflected power data P2, so that the accuracy of the collected power data can be improved by setting the symmetry degree of the first coupling element and the second coupling element, and then the mode accuracy of the measured impedance is improved.
Further, as shown in fig. 3, the first coupling member may include a first coupling body 11 and a first matching resistor 17, the first coupling body 11 is used for directionally coupling the forward power of the outgoing radio frequency transmission line, and the first matching resistor 17 is used for matching the voltage data of the outgoing forward power, that is, the forward power data P1; the second coupling member comprises a second coupling body 12 and a second matching resistor 18, the second coupling body 12 is used for directionally coupling the reflected power of the out-frequency transmission line, the second matching resistor 18 is used for matching out the voltage data of the reflected power, namely the reflected power data P2, therefore, the forward power data P1 and the reflected power data P2 represented by voltage can be directly collected through the first coupling member and the second coupling member, dimensionless calculation of the impedance measuring element is facilitated, and the response time of the impedance measuring element can be further improved.
In another embodiment of this embodiment, as shown in fig. 2 and 3, the voltage sensing device 101 may include a first capacitor element 10 and a second capacitor element 15, the first capacitor element 10 is connected in series with the second capacitor element 15, and the first capacitor element 10 may be connected to the rf transmission line 7 in an insulated manner, as shown in fig. 3, a portion of the first capacitor element 10 crossing and opposing the rf transmission line 7 may form a first capacitor, and the second capacitor element 15 forms a second capacitor, where a capacitance value of the second capacitor is greater than a capacitance value of the first capacitor, so as to reduce a voltage shared by the first capacitor; the voltage sensing device 101 is used for acquiring the divided voltage of the first capacitor to acquire the voltage data U1 of the radio frequency transmission line 7, so as to acquire the voltage data U1. The first capacitor element 10 and the second capacitor element 15 may be low-precision and low-cost elements, for example, the first capacitor element 10 may be used as one plate of a capacitor, and may be in a manner that a copper sheet wraps an enameled wire, and the second capacitor element 15 may be a low-precision capacitor, which is simple to manufacture, low in cost, small in inductance value, and high in withstand voltage value.
In another embodiment of this embodiment, the current sensing device 102 may include a magnetic member 8 surrounding the rf transmission line 7 and an induction coil 9 wound on the magnetic member 8, wherein the magnetic member 8 and the induction coil 9 are used for sensing the current of the rf transmission line 7. The magnetic member 8 and the radio frequency transmission line 7 are insulated and spaced, and the magnetic member 8 can directly surround the rubber outer covered wire 5 of the radio frequency transmission line 7 (in practical implementation, the transmission cable can directly pass through the annular magnetic member 8, and fig. 6 is a shielding layer of the transmission cable). Preferably, the induction coil 9 can be wound using enameled wire or other wire, and the inductance depends on the parameters of the magnetic member 8 and the induction coil 9. A current matching resistor 16 may be provided on the induction coil 9 to directly collect a voltage corresponding to the induced current, i.e., the current data U2.
In another specific implementation manner of this embodiment, the data processing unit may include a first processing module and a second processing module, the first processing module is configured to perform data processing on the voltage data U1 and the current data U2 to obtain an amplitude signal mag1 and a phase signal Ph1 of a voltage wave and a current wave, respectively; the second processing module is used for performing data processing on the forward power data P1 and the reflected power data P2 to obtain a power reflection coefficient signal.
The first processing module may include an amplitude processing module and a phase processing module to obtain an amplitude signal mag1 and a phase signal Ph1 of the voltage wave and the current wave, respectively, so as to further increase the data processing speed and improve the response time.
Specifically, the amplitude processing module may include: two rectifiers, respectively used for over-rectifying the voltage data U1 and the current data U2; the summing circuit is used for summing results rectified by the two rectifiers; the calibrator is used for calibrating the result summed by the summing circuit; and the amplifying circuit is used for amplifying the signal of the result calibrated by the calibrator.
The phase processing module may include: the two zero-crossing comparators are used for respectively carrying out zero-crossing comparison on the voltage data U1 and the current data U2; the rectifier is used for rectifying the result after the comparison of the two zero-crossing comparators; the calibrator is used for calibrating the result rectified by the rectifier; and the amplifying circuit is used for amplifying the signal of the result calibrated by the calibrator.
As shown in fig. 4, waveforms of the voltage data U1 and the current data U2 are respectively rectified in the forward direction and the reverse direction to obtain direct current information of a voltage wave and a current wave, the direct current information is summed by a summing circuit, then offset calibration is performed, the direct current information is calibrated to 0V under the condition of a standard load of 50 Ω, and finally an amplitude signal Mag1 is obtained through output of an amplifying circuit. The method comprises the steps of respectively carrying out zero-crossing comparison on waveforms of voltage data U1 and current data U2 to obtain respective pulse signals, then rectifying the pulse signals through a rectifier (which can be a phase detector or a phase detection circuit) to obtain phases of current waves and voltage waves, then carrying out bias calibration on the phases, calibrating the phases to be 0V under the condition that a standard load is 50 omega, and finally outputting the phase signals Ph1 through an amplifying circuit. The phase signal Ph1 after passing through the zero comparator can reduce the influence of factors such as waveform distortion and harmonic waves, and improve the measurement accuracy of the phase signal Ph 1.
The second processing module may include a first sub-processing module and a second sub-processing module, the first sub-processing module is configured to perform data processing on the forward power data P1 and the reflected power data P2 to obtain a power reflection coefficient analog signal, and the second sub-processing module is configured to perform digital processing on the phase signal Ph1 and the power reflection coefficient analog signal to convert the phase signal Ph1 into a digital phase signal and convert the power reflection coefficient analog signal into a digital power reflection coefficient signal.
The first sub-processing module may include, but is not limited to, any one of a divider, a multiplier, and a rectifying circuit, and the second sub-processing module may be, but is not limited to, an ADC module.
Specifically, under a general scene (certain requirements on impedance measurement accuracy but low requirements are met), the first sub-processing module adopts a divider and calculates a reflection coefficient by using the divider; the second sub-processing module adopts an ADC module for carrying out data processing on the reflection coefficient.
As shown in fig. 5, in a usage scenario where the requirement for impedance measurement accuracy is low, the voltage signals of the power directional coupling may be converted into dc signals P1 'and P2' using a rectifier circuit (which may also use a low-accuracy divider or a low-accuracy multiplier) composed of a low-cost detector and a low-pass filter, and then the dc signals P1 'and P2' are collected by the ADC module and transmitted to the impedance calculation unit, so as to complete division calculation in the impedance calculation unit.
As shown in fig. 6, in a usage scenario where the impedance measurement accuracy requirement and the response time requirement are high, the voltage signals of the power directional coupling may be converted into dc signals P1 'and P2' by using a high-precision divider or a high-precision multiplier, and then the dc signals P1 'and P2' are collected by using an ADC module and transmitted to the impedance calculation unit, so as to complete division calculation in the impedance calculation unit.
Based on the same concept of the impedance measuring element, the present embodiment further provides an impedance measuring method for a radio frequency transmission line, as shown in fig. 1 and 7, the method comprising the steps of:
step S1, collecting voltage data U1, current data U2, forward power data P1 and reflected power data P2 of the radio frequency transmission line;
step S2, performing data processing on the voltage data U1, the current data U2, the forward power data P1 and the reflected power data P2 to obtain an amplitude signal mag1, a phase signal Ph1 and a power reflection coefficient signal of the voltage wave and the current wave;
in step S3, the impedance of the rf transmission line is determined according to the amplitude signal mag1, the phase signal Ph1, and the power reflection coefficient signal.
The impedance measuring method provided by this embodiment not only collects the voltage data U1 and the current data U2 of the radio frequency transmission line, but also collects the forward power data P1 and the reflected power data P2, obtains the amplitude signal Mag1 of the voltage wave and the current wave and the phase signal Ph1 of the voltage wave and the current wave through the voltage data U1 and the current data U2, obtains the reflection coefficient signal Rf1 through the forward power data P1P1 and the reflected power data P2P2, and then can calculate the specific value of the impedance of the radio frequency transmission line load according to the amplitude signal Mag1, the phase signal Ph1 and the reflection coefficient signal Rf 1. Because the mode of the impedance is only related to the power reflection coefficient, and the power reflection coefficient is also dependent on the ratio of the reflected power data to the forward power data, the mode accuracy of the impedance is only dependent on the ratio of the reflected power data to the forward power data (reflected as the ratio of two voltages in practical application), compared with the prior art, the uncertainty of the collected data can be reduced from two (voltage amplitude signals and current amplitude signals) to one (the ratio of the reflected power data to the forward power data), and the factors influencing the impedance accuracy are reduced, so that the mode accuracy of the measured impedance can be improved; and the mode accuracy of the measured impedance can be greatly improved only by improving the accuracy of the forward power data P1 and the reflected power data P2 (the accuracy of the forward power data P1 is often consistent with that of the reflected power data P2), and the method is relatively low in cost and easy to implement. Meanwhile, only the positive and negative of the voltage wave and the current wave are needed, so that the impedance calculation can be completed only by collecting the positive and negative of the voltage and the current, namely, the precision requirements on the voltage data U1 and the current data U2 are extremely low, the data collection can be completed by adopting components and parts which are simple to manufacture and low in cost, and the data processing is simple, the speed is high, and the response time is short. In addition, the impedance measuring method provided in this embodiment collects parameters such as forward power, reflected power, load power, standing-wave ratio, reflection coefficient, etc. in addition to the voltage and current data U2, since the measuring range depends on the power level that the transmission cable can transmit (several w to several hundred kw can be measured), the application range is wider, compared with the prior art, the impedance measuring method can be widely applied to various large, medium and small radio frequency power supplies, impedance matchers, various semiconductor (or other) process equipment, etc. in addition to measuring the load impedance.
The present embodiment further provides an impedance matcher, including an impedance measuring element and an impedance matching element, where the impedance measuring element is the impedance measuring element according to any one of the above embodiments.
The impedance matcher provided in this embodiment includes the impedance measuring element of any of the above embodiments, and at least the beneficial effects of the impedance measuring element can be achieved, which are not described herein again.
Based on the same concept of the impedance measuring element, this embodiment further provides a radio frequency power supply, which includes a power supply main body and an impedance matcher, where the impedance matcher is the impedance matcher of any of the above embodiments, and is used to perform impedance matching on a load of the radio frequency power supply, so as to improve output stability of the radio frequency power supply.
The radio frequency power supply provided by this embodiment includes an impedance matcher having the impedance measuring element of any of the above embodiments, and at least the beneficial effects of the impedance measuring element can be achieved, which are not described herein again.
Based on the same concept of the impedance measuring element, the present embodiment further provides a semiconductor process apparatus, which includes an apparatus main body and a radio frequency power supply for supplying power to the apparatus main body, where the radio frequency power supply is the radio frequency power supply of any one of the above embodiments. The semiconductor processing equipment can be, but is not limited to, a plasma etcher, a wafer cleaning machine, physical vapor deposition equipment and the like.
The semiconductor processing equipment provided by this embodiment includes a radio frequency power supply configured with an impedance matcher having the impedance measuring element of any of the above embodiments, and at least the beneficial effects of the impedance measuring element can be achieved, which are not described herein again.
It is to be understood that the above embodiments are merely exemplary embodiments that are employed to illustrate the principles of the present application, and that the present application is not limited thereto. It will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the application, and these changes and modifications are to be considered as the scope of the application.
In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be construed as limiting the present application.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
In the description herein, particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.
Claims (13)
1. An impedance measuring element applied to a radio frequency transmission line is characterized by comprising a data acquisition unit, a data processing unit and an impedance calculating unit, wherein,
the data acquisition unit is used for acquiring voltage data, current data, forward power data and reflected power data of the radio frequency transmission line;
the data processing unit is respectively connected with the data acquisition unit and the impedance calculation unit and is used for carrying out data processing on the voltage data, the current data, the forward power data and the reflected power data to obtain amplitude signals, phase signals and power reflection coefficient signals of voltage waves and current waves;
the impedance calculation unit is used for determining the load impedance of the radio frequency transmission line according to the amplitude signal, the phase signal and the power reflection coefficient signal.
2. The impedance measurement element of claim 1, wherein the data acquisition unit comprises a voltage sensing device, a current sensing device and a directional coupling device connected in series on the radio frequency transmission line;
the voltage sensing device is used for acquiring the voltage data of the radio frequency transmission line;
the current sensing device is used for acquiring the current data of the radio frequency transmission line;
the directional coupling device is configured to collect the forward power data and the reflected power data of the radio frequency transmission line.
3. The impedance measurement element of claim 2, wherein the directional coupling device comprises an auxiliary transmission line and a coupling structure;
two ends of the auxiliary transmission line are respectively connected to the radio frequency transmission line and used for transmitting radio frequency power together with the radio frequency transmission line; the coupling structures are disposed on both sides of the auxiliary transmission line and are configured to couple the forward power data and the reflected power data.
4. The impedance measurement element of claim 3, wherein the coupling structure comprises a first coupling member and a second coupling member symmetrically disposed on either side of the secondary transmission line;
the first coupling piece comprises a first coupling body and a first matching resistor, the first coupling body is used for directionally coupling out the forward power of the radio frequency transmission line, and the first matching resistor is used for matching out the voltage data of the forward power;
the second coupling piece comprises a second coupling body and a second matching resistor, the second coupling body is used for directionally coupling out the reflected power of the radio frequency transmission line, and the second matching resistor is used for matching out the voltage data of the reflected power.
5. The impedance measurement element of claim 2, wherein the voltage sensing device comprises a first capacitive element and a second capacitive element, the first capacitive element and the second capacitive element being connected in series, the first capacitive element being configured to form a first capacitance with the radio frequency transmission line, the second capacitive element forming a second capacitance, the second capacitance having a capacitance value greater than the capacitance value of the first capacitance to reduce the shared voltage of the first capacitance;
the voltage sensing device is used for acquiring the voltage division of the first capacitor so as to acquire the voltage data of the radio frequency transmission line.
6. The impedance measurement element of claim 2, wherein the current sensing device comprises a magnetic member surrounding the radio frequency transmission line and an induction coil wound around the magnetic member, the magnetic member and the induction coil being configured to sense the current data of the radio frequency transmission line.
7. The impedance measuring unit according to any one of claims 1 to 6, wherein the data processing unit comprises a first processing module and a second processing module, the first processing module is configured to perform data processing on the voltage data and the current data to obtain an amplitude signal and a phase signal of a voltage wave and a current wave, respectively;
the second processing module is used for carrying out data processing on the forward power data and the reflected power data to obtain a power reflection coefficient signal.
8. The impedance measuring device according to claim 7, wherein the second processing module comprises a first sub-processing module and a second sub-processing module, the first sub-processing module is configured to perform data processing on the forward power data and the reflected power data to obtain a power reflection coefficient analog signal, and the second sub-processing module is configured to perform digital processing on the phase signal and the power reflection coefficient analog signal to convert the phase signal into a digital phase signal and convert the power reflection coefficient analog signal into a digital power reflection coefficient signal, respectively.
9. The impedance measurement device of claim 8, wherein the first sub-processing module comprises any one of a divider, a multiplier and a rectifying circuit.
10. The impedance measurement element of claim 7, wherein the first processing module comprises an amplitude processing module and a phase processing module;
the amplitude processing module comprises:
two rectifiers for over-rectifying the voltage data and the current data, respectively;
the summing circuit is used for summing results rectified by the two rectifiers;
the calibrator is used for calibrating the result summed by the summing circuit;
the amplifying circuit is used for amplifying the signal of the result calibrated by the calibrator; and/or
The phase processing module includes:
the two zero-crossing comparators are used for respectively carrying out zero-crossing comparison on the voltage data and the current data;
the rectifier is used for rectifying the result after the comparison of the two zero-crossing comparators;
the calibrator is used for calibrating the result rectified by the rectifier;
and the amplifying circuit is used for amplifying the signal of the result calibrated by the calibrator.
11. An impedance matcher, comprising an impedance measuring element and an impedance matching element, wherein the impedance measuring element is the impedance measuring element according to any one of claims 1 to 10.
12. A radio frequency power supply, comprising a power supply main body and an impedance matcher, wherein the impedance matcher is the impedance matcher as claimed in claim 11.
13. A semiconductor processing apparatus comprising an apparatus body and a radio frequency power supply for supplying power to said apparatus body, wherein said radio frequency power supply is the radio frequency power supply of claim 12.
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