CN115656864B - Radio frequency power supply signal acquisition circuit and semiconductor process equipment - Google Patents

Radio frequency power supply signal acquisition circuit and semiconductor process equipment Download PDF

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CN115656864B
CN115656864B CN202211102594.8A CN202211102594A CN115656864B CN 115656864 B CN115656864 B CN 115656864B CN 202211102594 A CN202211102594 A CN 202211102594A CN 115656864 B CN115656864 B CN 115656864B
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voltage
circuit
current
wave signal
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CN115656864A (en
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黄东龙
周航
范宏阅
李光健
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Beijing Naura Microelectronics Equipment Co Ltd
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Beijing Naura Microelectronics Equipment Co Ltd
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Abstract

The embodiment of the invention provides a radio frequency power supply signal acquisition circuit and semiconductor process equipment, comprising: the directional coupler is used for receiving the voltage output by the radio frequency power supply and coupling the input and output voltage wave signals and the reflected voltage wave signals; the voltage measurement module is connected with the directional coupler and is used for adding the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage and value signal; shaping the transmission line voltage and the value signal, and converting the transmission line voltage and the value signal into a first square wave signal; the current measurement module is connected with the directional coupler and is used for subtracting the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage difference signal; shaping the transmission line voltage difference signal and converting the transmission line voltage difference signal into a second square wave signal; the processor is connected with the voltage measuring module and the current measuring module and is used for determining a current-voltage phase difference value according to the first square wave signal and the second square wave signal. The embodiment of the invention can calculate the current-voltage phase difference value of the output voltage and the output current of the radio frequency power supply.

Description

Radio frequency power supply signal acquisition circuit and semiconductor process equipment
Technical Field
The invention relates to the technical field of semiconductors, in particular to a radio frequency power supply signal acquisition circuit and semiconductor process equipment.
Background
The rf power supply is a core component of the semiconductor manufacturing equipment that generates rf energy that is the core device used to ignite and sustain the plasma discharge. In recent years, with the rapid development of the microelectronics industry, the size of devices is gradually reduced, and the integration level of circuits is gradually improved, so that different types of plasmas generated by radio frequency power supplies with higher controllable precision are required to meet the process requirements, and the precision and linearity of output power are determined by the performance of measurement circuits in the radio frequency power supplies.
At present, for the measurement of the radio frequency power supply, the directional coupler is used as a sensor to measure the output power of the power supply, but the mode cannot measure and calculate the voltage, current and impedance of the output end of the radio frequency power supply, so that the data cannot be provided to analyze the actual state of the current plasma, and further the measurement and control requirements of a more complex process cannot be realized.
Disclosure of Invention
In view of the foregoing, embodiments of the present invention have been developed to provide a signal acquisition circuit and corresponding semiconductor processing apparatus that overcome, or at least partially solve, the foregoing problems.
In order to solve the above problems, an embodiment of the present invention discloses a radio frequency power supply signal acquisition circuit, the radio frequency power supply signal acquisition circuit is used for being connected with a radio frequency power supply, the signal acquisition circuit includes:
the device comprises a directional coupler, a voltage measurement module, a current measurement module and a processor;
the directional coupler is used for receiving the voltage output by the radio frequency power supply and coupling an incident voltage wave signal and a reflected voltage wave signal;
the voltage measurement module is connected with the directional coupler and is used for adding the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage and a value signal; shaping the transmission line voltage and the value signal and converting the transmission line voltage and the value signal into a first square wave signal;
the current measurement module is connected with the directional coupler and is used for subtracting the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage difference signal; shaping the transmission line voltage difference signal and converting the transmission line voltage difference signal into a second square wave signal;
the processor is connected with the voltage measuring module and the current measuring module and is used for determining a current-voltage phase difference value according to the first square wave signal and the second square wave signal.
Optionally, the voltage measurement module is further configured to filter and rectify the transmission line voltage and the value signal, and convert the transmission line voltage and the value signal into a first direct current signal;
the current measurement module is also used for filtering and rectifying the transmission line voltage difference signal and converting the transmission line voltage difference signal into a second direct current signal;
the processor is further configured to determine a voltage amplitude according to the first dc signal, determine a current amplitude according to the second dc signal, and determine a load impedance value according to the voltage amplitude, the current amplitude, and the current-voltage phase difference.
Optionally, the voltage measurement module includes: an addition circuit and a first comparison circuit,
the adding circuit is connected with the directional coupler and is used for adding the incident voltage wave signal and the reflected voltage wave signal to generate the transmission line voltage and value signal;
the first comparison circuit is connected with the addition circuit and is used for shaping the transmission line voltage and the value signal into a first square wave signal.
Optionally, the voltage measurement module further comprises a first detection circuit and a first low-pass filter circuit,
the first detection circuit is connected with the addition circuit and is used for carrying out half-wave rectification on the transmission line voltage and the value signal to generate a first rectification signal;
The input end of the first low-pass filter circuit is connected with the output end of the first detection circuit, and the output end of the first low-pass filter circuit is connected with the processor and used for converting the first rectification signal into a first direct current signal.
Optionally, the current measurement module includes: a subtracting circuit and a second comparing circuit,
the subtracting circuit is connected with the directional coupler and is used for subtracting the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage difference signal;
the second comparison circuit is connected with the subtracting circuit and is used for shaping the transmission line current wave signal into a second square wave signal.
Optionally, the current measurement module further comprises a second detection circuit and a second low-pass filter circuit,
the second detection circuit is connected with the subtracting circuit and is used for half-wave rectifying the transmission line voltage difference signal to generate a second rectified signal;
the input end of the second low-pass filter circuit is connected with the output end of the second detection circuit, and the output end of the second low-pass filter circuit is connected with the processor and used for converting the second rectification signal into a second direct current signal.
Optionally, the processor includes a tri-state phase detector,
the tri-state phase discriminator is connected with the voltage measuring module and the current measuring module and is used for receiving the first square wave signal and the second square wave signal; and determining the current-voltage phase difference value according to the first square wave signal and the second square wave signal.
Optionally, the tri-state phase detector comprises a first flip-flop, a second flip-flop and an and gate,
the clock input end of the first trigger is connected with the voltage measurement module; the clock input end of the second trigger is connected with the current measurement module; the trigger signal input end of the first trigger and the trigger signal input end of the second trigger are connected with a preset high level;
the output end of the AND gate is connected with the reset end of the first trigger and the reset end of the second trigger; and the input end of the AND gate is respectively connected with the output end of the first trigger and the output end of the second trigger.
Optionally, the first comparison circuit and the second comparison circuit are zero-crossing comparison circuits.
Optionally, the first low-pass filter circuit and the second low-pass filter circuit are integrating circuits.
Optionally, the radio frequency power supply signal acquisition circuit further includes: the power signal acquisition circuit is used for acquiring a power signal,
the directional coupler is also used for outputting alternating voltage signals;
the power signal acquisition circuit is connected with the directional coupler and is used for converting the alternating current voltage signal into a direct current voltage signal;
the processor is connected with the power signal acquisition circuit and is also used for determining an output power value according to the direct-current voltage signal.
Optionally, the signal acquisition circuit further comprises: the upper computer is used for processing the data,
the upper computer is connected with the output end of the processor and used for monitoring the voltage amplitude, the current-voltage phase difference value and the load impedance value in real time.
The embodiment of the invention also discloses semiconductor process equipment which comprises a radio frequency power supply, a radio frequency matcher, a process chamber and the radio frequency power supply signal acquisition circuit.
The embodiment of the invention has the following advantages:
according to the embodiment of the invention, a radio frequency power supply signal acquisition circuit is formed by a directional coupler, a voltage measurement module, a current measurement module and a processor; the directional coupler is used for receiving the voltage output by the radio frequency power supply and coupling the input and output voltage wave signals and the reflected voltage wave signals; the voltage measurement module is connected with the directional coupler and is used for adding the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage and value signal; shaping the transmission line voltage and the value signal, and converting the transmission line voltage and the value signal into a first square wave signal; the current measurement module is connected with the directional coupler and is used for subtracting the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage difference signal; shaping the transmission line voltage difference signal and converting the transmission line voltage difference signal into a second square wave signal; the processor is connected with the voltage measuring module and the current measuring module and is used for determining a current-voltage phase difference value according to the first square wave signal and the second square wave signal. The method comprises the steps that radio frequency power supply signals are collected through a directional coupler, a voltage measurement module processes voltage measurement signals, a current measurement module processes current measurement signals, and a processor calculates first square wave signals and second square wave signals transmitted by the voltage measurement module and the current measurement module to determine a current-voltage phase difference value; the method realizes the phase monitoring of voltage and current, is convenient for process research personnel to know the current-voltage phase difference value in real time so as to observe the change condition of the plasma load, and provides effective data support for realizing more complex processes.
Drawings
FIG. 1 is a block diagram of a prior art power harvesting circuit;
FIG. 2 is a block diagram of a radio frequency power signal acquisition circuit according to an embodiment of the present invention;
FIG. 3 is a block diagram of another RF power signal acquisition circuit according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a voltage measurement module according to an embodiment of the invention;
FIG. 5 is a schematic diagram of a current measurement module according to an embodiment of the invention
FIG. 6 is a schematic diagram of a tri-state discriminator according to an embodiment of the invention;
FIG. 7 is a schematic diagram of a phase measurement according to an embodiment of the present invention;
fig. 8 is a schematic structural view of a semiconductor processing apparatus according to an embodiment of the present invention.
Detailed Description
So that the manner in which the above recited objects, features and advantages of the present invention can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to the embodiments, some of which are illustrated in the appended drawings, and some, but not all of which are illustrated in the appended drawings. All other embodiments, which are derived by a person skilled in the art based on the embodiments of the invention, fall within the scope of protection of the invention.
The power acquisition circuit of the prior art radio frequency power supply can refer to fig. 1, and the ac voltage signal U output by the directional coupler i The dc component is zero, often at a frequency higher than the acquisition frequency of the control system, and cannot be directly acquired by an analog-to-digital converter (ADC, analog to Digital Converter). The prior art scheme uses a multiplier to convert an alternating voltage signal U i Is converted into a full-wave waveform U with positive voltage only i ' then pass through low pass filter to become DC signal U 1 ThenAmplified by an operational amplifier and changed into U 2 The data are collected by the ADC converter and then sent to the processor, and the processor determines U according to the sampling value of the ADC 2 ，U 2 The relation between the value of (c) and the power of the transmission main line is as follows:
U 2 ＝k 2 U 1 (equation 4)
And substituting the formula 3, the formula 2, the formula 1 and the formula 4 into the formula 4 respectively, and obtaining by calculation:
and the power of the transmission main line is as follows:
P＝k 3 P 1 (equation 7) substituting equation 6 into equation 7 yields:
wherein A is U i Amplitude, k of (a) 1 For multiplier coefficients, k 2 For operational amplifier coefficient, k 3 R is the load resistance value, P is the directional coupler coefficient 1 Is U (U) i And the corresponding power value, P is the actual output power. The ADC converter collects U 2 Is a value of (2).
It can be seen that U can be calculated according to equation 5 2 And then according to the formula 8, the relation between the actual output power P and A can be calculated, so that the actual output power P is calculated.
The technical scheme is that the power signal output by the measuring multiplier is directly collected and the voltage and current signals are not decomposed and calculated, so that the technical scheme cannot measure the voltage value and the current value of the output end of the radio frequency power supply, and similarly, the phase data is not available, and the phase and the impedance of the voltage and the current of the output end cannot be calculated.
Referring to fig. 2, a block diagram of a radio frequency power supply signal acquisition circuit according to an embodiment of the invention is shown. The radio frequency power supply signal acquisition circuit is used for being connected with a radio frequency power supply, and the radio frequency power supply signal acquisition circuit comprises:
the device comprises a directional coupler, a voltage measurement module, a current measurement module and a processor;
the directional coupler is used for receiving the voltage output by the radio frequency power supply and coupling an incident voltage wave signal and a reflected voltage wave signal;
the voltage measurement module is connected with the directional coupler and is used for adding the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage and a value signal; shaping the transmission line voltage and the value signal and converting the transmission line voltage and the value signal into a first square wave signal; optionally, the first square wave signal is a first square wave signal, that is, a first square wave signal with only positive period;
The current measurement module is connected with the directional coupler and is used for subtracting the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage difference signal; shaping the transmission line voltage difference signal and converting the transmission line voltage difference signal into a second square wave signal; optionally, the second square wave signal is a second square wave signal, that is, a second square wave signal with only positive period;
the processor is connected with the voltage measuring module and the current measuring module and is used for determining a current-voltage phase difference value according to the first square wave signal and the second square wave signal.
In the embodiment of the invention, the radio frequency power supply signal acquisition circuit can be composed of a directional coupler, a voltage measurement module, a current measurement module and a controller.
The directional coupler is a signal collector, is connected with the radio frequency power supply, receives the voltage output by the radio frequency power supply, and couples the input and output voltage wave signals and the reflected voltage wave signals based on the received voltage output by the radio frequency power supply.
The voltage measuring module is connected with the directional coupler, and the incident voltage wave signal and the reflected voltage wave signal output by the directional coupler are transmitted to the voltage measuring module. The voltage measurement module is used for measuring an output voltage signal of the radio frequency power supply. The method is specifically used for adding the incident voltage wave signal and the reflected voltage wave signal to obtain a transmission line voltage sum value signal. And shaping the transmission line voltage and the value signal, and converting the transmission line voltage and the value signal into a first square wave signal. The phase of the output voltage of the radio frequency power supply is characterized by a first square wave signal.
The directional coupler is also connected with the current measuring module, the incident voltage wave signal and the reflected voltage wave signal output by the directional coupler are also transmitted to the current measuring module, and the current measuring module is used for measuring the output current signal of the radio frequency power supply. Specifically, the current measurement module is configured to subtract the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage difference signal. And shaping the transmission line voltage difference signal, and converting the transmission line voltage difference signal into a second square wave signal. The phase of the radio frequency power supply output current is characterized by a second square wave signal.
The processor is connected with the voltage measurement module and the current measurement module, receives the first square wave signal output by the voltage measurement module and receives the second square wave signal output by the current measurement module. In practical application, the processor may be provided with at least two signal input interfaces, one of which receives the signal output by the voltage measurement module and the other of which receives the signal output by the current measurement module. The processor calculates the phase difference between the two square wave signals according to the first square wave signal and the second square wave signal, and determines the phase difference as a current-voltage phase difference value.
According to the embodiment of the invention, a radio frequency power supply signal acquisition circuit is formed by a directional coupler, a voltage measurement module, a current measurement module and a processor; the directional coupler is used for receiving the voltage output by the radio frequency power supply and coupling the input and output voltage wave signals and the reflected voltage wave signals; the voltage measurement module is connected with the directional coupler and is used for adding the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage and value signal; shaping the transmission line voltage and the value signal, and converting the transmission line voltage and the value signal into a first square wave signal; the current measurement module is connected with the directional coupler and is used for subtracting the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage difference signal; shaping the transmission line voltage difference signal and converting the transmission line voltage difference signal into a second square wave signal; the processor is connected with the voltage measuring module and the current measuring module and is used for determining a current-voltage phase difference value according to the first square wave signal and the second square wave signal. The method comprises the steps that radio frequency power supply signals are collected through a directional coupler, a voltage measurement module processes voltage measurement signals, a current measurement module processes current measurement signals, and a processor calculates first square wave signals and second square wave signals transmitted by the voltage measurement module and the current measurement module to determine a current-voltage phase difference value; the method realizes the phase monitoring of voltage and current, is convenient for process research personnel to know the current-voltage phase difference value in real time so as to observe the change condition of the plasma load, and provides effective data support for realizing more complex processes.
Referring to fig. 3, another radio frequency power signal acquisition circuit block diagram of an embodiment of the present invention is shown.
In the embodiment of the invention, according to the theory of the transmission line, the voltage and the current of the Z point on the transmission line are as follows:
U (z) ＝U + +U - (equation 9)
I ( z ) ＝I + +I - (equation 10)
Wherein U is + Is the incident electricity at the Z point on the transmission linePressure U - Is the reflected voltage at the Z point on the transmission line, U (z) Actual voltage at point Z on transmission line, I + Is the incident current at the Z point on the transmission line, I - Is the reflected current at the Z point on the transmission line, I (z) Is the actual current at point Z on the transmission line.
According to the formula defined by the characteristic impedance:
calculated from equation 11:
U + ＝Z 0 I + (equation 12)
U - ＝-Z 0 I - (equation 13)
Subtracting equation 13 from equation 12 and introducing equation 10 yields:
I (z) ＝(U + -U - )/Z 0 (equation 14)
From the above formulas 9 to 14, the voltage and current at the output end of the rf power supply and the phase difference between them can be obtained from the incident wave voltage and the reflected wave voltage.
For this purpose, a directional coupler may be used to receive the signal of the radio frequency power source, coupling the incoming voltage wave signal and the reflected voltage wave signal. The voltage measuring module and the current measuring module are used for processing the incident voltage wave signal and the reflected voltage wave signal.
The voltage measurement module is connected with the directional coupler, adds the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage and a value signal, shapes the transmission line voltage wave signal based on the transmission line voltage wave signal, converts the transmission line voltage wave signal into a first square wave signal, filters and rectifies the transmission line voltage and the value signal, and converts the transmission line voltage and the value signal into a first direct current signal so as to calculate a voltage amplitude and a voltage phase.
Specifically, the voltage measurement module may include: the first detection circuit is connected with the first low-pass filter circuit.
The adding circuit is connected with the directional coupler, receives the incident voltage wave signal and the reflected voltage wave signal sent by the directional coupler, adds the incident voltage wave signal and the reflected voltage wave signal, and generates the transmission line voltage sum value signal.
The first comparison circuit is connected with the addition circuit and is used for comparing the transmission line voltage and the value signal with the reference voltage so as to shape the sine waveforms of the transmission line voltage and the value signal and generate a first square wave signal, so that the phase of the first square wave signal is the same as the phase of the voltage wave in the main circuit of the radio frequency power supply, and the phase of the first square wave signal is used for representing the phase of the voltage wave in the main circuit of the radio frequency power supply.
Further, the first comparison circuit is a zero-crossing comparison circuit, that is, the sinusoidal waveform of the transmission line voltage wave signal is shaped based on a zero value, and a first square wave signal larger than zero is generated, so that the same phase conversion from the sinusoidal wave to the square wave is realized. To shape the sinusoidal waveforms of the transmission line voltage and the value signal, and to generate a first square wave signal having only a positive period such that the phase of the first square wave signal is the same as the phase of the voltage wave in the main loop of the radio frequency power supply.
The first detection circuit is also connected to the summing circuit, i.e. the summing circuit may comprise two output ports, one of which is connected to the first detection circuit and the other to the first comparison circuit. The first detection circuit performs half-wave rectification on the sine waveform of the received transmission line voltage and value signal to generate a first rectification signal.
Further, the first detection circuit is a half-wave rectification circuit. The transmission line voltage and value signal having positive and negative half-cycle sine waveforms are rectified into a first rectified signal having only a positive half-cycle sine wave by using a half-wave rectification circuit, i.e., the waveform of the first rectified signal is a sine wave having only a positive cycle.
The first low-pass filter circuit is connected with the first detection circuit and the processor. The method comprises the following steps: the input end of the first low-pass filter circuit is connected with the output end of the first detection circuit, the output end of the first low-pass filter circuit is connected with the processor, and the first low-pass filter circuit converts the alternating current first rectification signal into a direct current first direct current signal.
Further, the first low-pass filter circuit is an integrating circuit, samples the first rectified signal with only a positive half cycle sine waveform, converts the first rectified signal into a direct current first direct current signal, and can reversely deduce the load of the first rectified signal based on the amplitude of the first direct current signal.
Furthermore, the voltage measurement module may further include: a first overvoltage protection circuit.
The input end of the first overvoltage protection circuit is connected with the output end of the directional coupler, and the output end of the first overvoltage protection circuit is connected with the input end of the addition circuit;
in practical application, at least one first overvoltage protection circuit can be added between the addition circuit and the directional coupler, the input end of the first overvoltage protection circuit is connected with the output end of the directional coupler, the output end of the first overvoltage protection circuit is connected with the input end of the addition circuit, the voltage of the incident voltage wave which is introduced into the addition circuit is set within a reasonable range through the first overvoltage protection circuit, the burning of the addition circuit and the later-stage circuit due to overvoltage is avoided, and the probability of circuit faults is reduced. The number of the first overvoltage protection circuits may be determined according to the requirement of circuit design, which is not limited in the embodiment of the present invention.
In practical application, two clamping diodes, namely a first clamping diode and a second clamping diode, can be adopted to form a first overvoltage protection circuit, so that an overvoltage protection function is realized.
In an embodiment of the present invention, the voltage measurement module may further include: a first follower circuit.
The first follower circuit is disposed between the first overvoltage protection circuit and the adder circuit. The input end of the first follower circuit is connected with the output end of the first overvoltage protection circuit, the output end of the first follower circuit is connected with the adder circuit, the input voltage wave signal passes through the follower circuit, the output driving capability of the input voltage wave signal is increased, the input voltage wave signal is matched with the adder circuit, and the load capability of the adder circuit is improved.
In an embodiment of the invention, the voltage measurement module further comprises: a first amplifying circuit.
Specifically, a first amplifying circuit may be provided between the first low-pass filter circuit and the processor. The input end of the first amplifying circuit is connected with the output end of the first low-pass filter circuit, the output end of the first amplifying circuit is connected with the input end of the controller, the first amplifying circuit receives the first direct current signal to amplify the signal, fixed proportion amplification of the signal is achieved, and the processor is convenient to sample and calculate. The magnification may be set by those skilled in the art according to actual needs, and the embodiment of the present invention is not limited in particular. In an example of the invention, the magnification may be doubled.
In an embodiment of the invention, the voltage measurement module further includes: a first analog-to-digital conversion circuit.
A first analog to digital conversion circuit may be provided before the amplified first direct current signal enters the processor. The input end of the first analog-to-digital conversion circuit is connected with the output end of the first amplifying circuit, the output end of the first analog-to-digital conversion circuit is connected with the input end of the controller, the amplified first direct-current signal is subjected to digital-to-analog conversion, the analog quantity is converted into the digital quantity, and the data processing is conveniently carried out directly based on the digital quantity.
In order to more clearly explain the circuit principle of the voltage measurement module, reference may be made to fig. 4, which shows a schematic diagram of a voltage measurement module according to an embodiment of the present invention. The circuit of the voltage measuring module will be described by taking this schematic diagram as an example.
An incident voltage wave signal (U) + ) And reflected voltage wave signal (U) - ) The first overvoltage protection circuit includes a clamp diode D1 (first clamp diode) and a clamp diode D3 (second clamp diode). The 2 pin of the clamping diode D1 is connected with the 1 pin of the clamping diode D3 and then is connected with the directional coupler, an incident voltage wave signal is received, the 1 pin of the clamping diode D1 is connected with the positive electrode of the power supply, the 2 pin of the clamping diode D3 is connected with the negative electrode of the power supply, the first follower circuit comprises an operational amplifier U1, and the 3 pins of the homodromous input end of the operational amplifier U1 are connected The output end of the first overvoltage protection circuit, the 2 pin and the 1 pin of the inverting input end of the operational amplifier U1 are connected, the 4 pin of the operational amplifier U1 is a negative power pin of the operational amplifier and is connected with a power negative electrode, and the 8 pin of the operational amplifier U1 is a positive power pin of the operational amplifier and is connected with a power positive electrode. The main function of the first follower circuit is to increase the output driving capability to enable the incident voltage wave signal to be matched with a later-stage circuit, the 1 pin of the operational amplifier U1 is connected with an adder circuit, the adder circuit comprises a resistor R2, a resistor R4, a resistor R6, a resistor R7 and the operational amplifier U4, the 3 pin of the homodromous input end of the adder circuit is connected with one end of the resistor R7, and the other end of the resistor R7 is connected with GND (ground) to realize 0 voltage input. The inverting input end of the adding circuit is respectively connected with a resistor R4, a resistor R6 and a resistor R2, the other end of the resistor R4 is connected with the 1 pin of the operational amplifier U1, the other end of the resistor R6 is connected with the directional coupler, the reflected voltage wave signal is received, the other end of the resistor R2 is connected with the 1 pin of the operational amplifier U4 to serve as a feedback resistor, and the main function of the adding circuit is to realize the signal U + And U - Added to give U in equation 1 (z) The signal, its output end 1 pin of the operational amplifier U4 is connected with first comparator circuit and detection circuit respectively, the first comparator circuit is the zero-crossing comparator circuit, it includes resistance R8, resistance R9 and operational amplifier U5, the syntropy input end 1 pin of operational amplifier U5 connects resistance R8 and resistance R9 respectively, the other end of resistance R8 is connected with output end 1 pin of operational amplifier U4 of adder circuit, the another end GND of resistance R9 realizes the resistance divider function, the inverting input end GND of operational amplifier U5, realize and 0 voltage comparison, the main function of zero-crossing comparator circuit is realized to shape the complete sine wave into the first square wave signal of only positive half cycle, 8 pins of its output end operational amplifier U5 are connected with one pin of processor U12, processor U12 includes tri-state phase detector, one input end of this phase detector is connected with output end of operational amplifier U5 in order to obtain the phase place of voltage, the first detection circuit includes diode D2, 2 pins of diode D2 and output end of adder circuit U4 are connected with main function of rectifying half-wave signal of only positive half cycle, the first half-wave rectifier circuit is obtained The 1 pin is connected with a first low-pass filter circuit, the first low-pass filter circuit comprises a resistor R5 and a capacitor C1, one end of the resistor R5 is connected with the 1 pin of a diode D2 at the output end of the first detection circuit, the other end of the resistor R5 is connected with the capacitor C1, the other end of the capacitor C1 is connected with GND, and the main function is to filter an alternating current signal into a first direct current signal, and the output end of the first low-pass filter circuit is connected with a first amplifying circuit. The first amplifying circuit comprises a resistor R1, a resistor R3 and an operational amplifier U2, wherein the homodromous input end 3 pin of the operational amplifier U2 is connected with the output end of the first low-pass filter circuit, the inverting input end 2 pin of the operational amplifier U2 is respectively connected with one end of the resistor R3 and one end of the resistor R1, the other end of the resistor R3 is connected with GND, the other end of the resistor R1 is connected with the 1 pin of the operational amplifier U2 and is used as a feedback resistor, the main function is to realize twice signal amplification, the 1 pin of the operational amplifier U2 at the output end is connected with the first analog-to-digital conversion circuit, the first analog-to-digital conversion circuit comprises an ADC sampling chip U3, the main function is to realize analog signal conversion into digital signals, and the output end of the analog-to-digital conversion circuit is connected with the input end of a processor U12, so that the processor U12 realizes the reading of voltage values.
The current measurement module is connected with the directional coupler, subtracts the incident voltage wave signal and the reflected voltage wave signal which are coupled by the directional coupler to generate a transmission line voltage difference signal, and converts the transmission line voltage difference signal into a second square wave signal and a second direct current signal based on the transmission line voltage difference signal so as to calculate the current amplitude and the current phase.
Specifically, the current measurement module includes: a subtracting circuit, a second comparing circuit, a second detecting circuit and a second low-pass filter circuit,
the subtracting circuit is connected with the directional coupler, receives the incident voltage wave signal and the reflected voltage wave signal sent by the directional coupler, and subtracts the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage difference signal.
The second comparison circuit is connected with the subtracting circuit and compares the transmission line voltage difference signal with the reference voltage to shape the transmission line voltage difference signal and generate a second square wave signal, so that the phase of the second square wave signal is identical with the phase of the current wave in the main loop of the radio frequency power supply, and the phase of the current wave is represented by the phase of the second square wave signal.
Further, the second comparison circuit is a zero-crossing comparison circuit, that is, the transmission line voltage difference signal is shaped based on a zero value, and a second square wave signal larger than zero is generated, so that the same-phase conversion from sine wave to square wave is realized.
The second detection circuit is connected to the subtracting circuit. The second detection circuit rectifies the received transmission line voltage difference signal to generate a second rectified signal.
Further, the second detection circuit is a half-wave rectification circuit. The transmission line voltage difference signal with positive and negative half-cycle sine waveforms is rectified by using a half-wave rectifying circuit, the positive half-cycle sine wave is reserved, and a second rectification signal with only a positive half cycle is generated.
The input end of the second low-pass filter circuit is connected with the output end of the second detection circuit, the output end of the second low-pass filter circuit is connected with the processor, and the second low-pass filter circuit filters the alternating-current second rectification signal and converts the alternating-current second rectification signal into a second direct-current signal.
Further, the second low-pass filter circuit is an integrating circuit, and it should be noted that the integrating circuit may be the same as the integrating circuit used in the first low-pass filter circuit. The second rectified signal having only a positive half-cycle sine waveform is sampled by the integrating circuit and converted into a second direct current signal of direct current. The amplitude of the second rectified signal, i.e. the amplitude of the current, is inversely derived based on the second direct current signal.
In an embodiment of the present invention, the current measurement module may further include: and a second overvoltage protection circuit.
The second overvoltage protection circuit is disposed between the subtracting circuit and the directional coupler. The input end of the second overvoltage protection circuit is connected with the output end of the directional coupler, the output end of the second overvoltage protection circuit is connected with the input end of the subtracting circuit, the second overvoltage protection circuit sets the voltage of the reflected voltage wave which is fed into the subtracting circuit within a reasonable range, burning of the subtracting circuit and the later-stage circuit due to overvoltage is avoided, and the probability of circuit faults is reduced. The number of the second overvoltage protection circuits is at least one, and the specific number can be set according to the requirement.
In practical application, the second overvoltage protection circuit can be formed by adopting the third clamping diode and the fourth clamping diode, so that an overvoltage protection function is realized. Wherein the performance parameters of the third clamp diode and the fourth clamp diode may correspond to the performance parameters of the first clamp diode and the second clamp diode.
In an embodiment of the invention, the current measurement module further includes: and a second follower circuit.
And a second follower circuit is arranged between the second overvoltage protection circuit and the subtracting circuit, the input end of the second follower circuit is connected with the output end of the second overvoltage protection circuit, the output end of the second follower circuit is connected with the subtracting circuit, and the reflected voltage wave signal passes through the follower circuit to increase the output driving capability of the reflected voltage wave signal so as to enable the reflected voltage wave signal to be matched with the subtracting circuit.
In an embodiment of the invention, the current measurement module further includes: the second amplifying circuit is provided with a second amplifying circuit,
and a second amplifying circuit is arranged between the second low-pass filter circuit and the controller, and amplifies the second direct-current signal, so that the processor can conveniently sample and calculate. Specifically, the input end of the second amplifying circuit is connected with the output end of the second low-pass filter circuit, the output end of the second amplifying circuit is connected with the input end of the processor, and the second amplifying circuit receives the second direct current signal to amplify the signal, so that the fixed proportion amplification of the signal is realized.
In an embodiment of the invention, the current measurement module further includes: second analog-to-digital conversion circuit
The input end of the second analog-to-digital conversion circuit is connected with the output end of the second amplifying circuit, the output end of the second analog-to-digital conversion circuit is connected with the input end of the processor, digital-to-analog conversion is carried out on the amplified second direct-current signal, analog quantity is converted into digital quantity, and the processor is convenient to directly process the second direct-current signal based on the digital quantity.
In an embodiment of the present invention, the current measurement module may include: an inverter and an adder.
The inverter is the input side of the current measurement module which will realize the inversion of the input reflected voltage to obtain a negative reflected voltage. The adder is used for subtracting the reflected voltage and the incident voltage for the output side of the current measurement module and outputting a transmission line voltage difference signal.
In order to more clearly illustrate the circuit principle of the current measurement module, reference may be made to fig. 5, which shows a schematic diagram of a current measurement module according to an embodiment of the present invention. The circuit of the current measurement module will be described by taking this schematic diagram as an example.
The second overvoltage protection includes a clamp diode D4 (third clamp diode) and D6 (fourth clamp diode). The 2 pin of the clamping diode D4 is connected with the 1 pin of the clamping diode D6 and then is connected with the directional coupler, a reflected voltage wave signal is received, the 1 pin of the clamping diode D4 is connected with the positive electrode of the power supply, the 2 pin of the clamping diode D6 is connected with the negative electrode of the power supply, the second follower circuit comprises an operational amplifier U6, the 3 pin of the homodromous input end of the operational amplifier U6 is connected with the output end of the second overvoltage protection circuit, the 2 pin and the 1 pin of the inverting input end of the operational amplifier U6 are connected, the 4 pin of the operational amplifier U6 is the negative electrode of the power supply, the 8 pin of the operational amplifier U6 is the positive electrode of the power supply and is connected with the positive electrode of the power supply. The function of the second follower circuit is to increase the output driving capability to match the reflected voltage wave signal with the subsequent circuit, and the 1 pin of the operational amplifier U6 is connected to the subtracting circuit. The subtracting circuit includes an inverter and an adder. The inverter comprises an operational amplifier U7, a resistor R11, a resistor R13 and a resistor R17. The same-direction input end 3 pin of the operational amplifier U7 is connected with one end of a resistor R17, and the other end of the resistor R17 is connected with GND, so that 0 voltage input is realized. The inverting input end of the operational amplifier U7 is respectively connected with one ends of a resistor R13 and a resistor R11, the other end of the resistor R13 is connected with the 1 pin of the operational amplifier U6 at the output end of the second follower circuit, the other end of the resistor R11 is connected with the 1 pin of the operational amplifier U7, and the input voltage is inverted to obtain U - The output end of the adder is connected with the 1 pin of the operational amplifier U7, the adder comprises the operational amplifier U10, a resistor R12, a resistor R15, a resistor R18 and a resistor R19, and the operational amplifier U10 has the same directionThe input end 3 pin is connected with one end of a resistor R19, the other end of the resistor R19 is connected with GND to realize 0 voltage input, the inverting input end 2 pin of an operational amplifier U10 is respectively connected with a resistor R18, a resistor R15 and a resistor R12, and the other end of the resistor R18 is connected with a directional coupler U + The other end of the resistor R15 is connected with the 1 pin of the operational amplifier U7 at the output end of the inverter, the other end of the resistor R12 is connected with the 1 pin of the operational amplifier U10 as a feedback resistor, the 1 pin of the operational amplifier U10 at the output end is respectively connected with the second detection circuit and the second comparison circuit, and the subtracting circuit has the functions of realizing the signal U + And U - Is calculated by the difference value of (2). The second comparison circuit is a zero-crossing comparison circuit and comprises a resistor R20, a resistor R21 and an operational amplifier U11, wherein a 1 pin at the same-direction input end of the operational amplifier U11 is respectively connected with one ends of the resistor R20 and the resistor R21, the other end of the resistor R20 is connected with a 1 pin of an operational amplifier U10 at the output end of the subtracting circuit, the other end of the resistor R21 is connected with GND, the resistance voltage dividing function is realized, the reverse input end of the operational amplifier U11 is connected with GND, the comparison with 0 voltage is realized, the zero-crossing comparison circuit is used for shaping a complete sine wave into a second square wave signal with only a positive half cycle, the 8 pin of the operational amplifier U11 at the output end is connected with the other pin of the processor U12, the other input end of a tri-state phase discriminator in the processor U12 is connected with the output end of the operational amplifier U11 so as to acquire the current phases, and the two input ends of the tri-state phase discriminator acquire the voltage and the current phases respectively so as to acquire the current-voltage phase difference values, and the tri-state phase discriminator will be described in detail below. The second detection circuit comprises a diode D5, wherein the 2 pin of the diode D5 is connected with the 1 pin of the output end operational amplifier U10 of the subtracting circuit, the main function is to perform half-wave rectification to obtain a second rectification signal with only positive half cycle, the 1 pin of the output end diode D2 is connected with a second low-pass filter circuit, the second low-pass filter circuit comprises a resistor R16 and a capacitor C2, one end of the resistor R16 is connected with the 1 pin of the output end diode D2 of the second detection circuit, the other end of the resistor R16 is connected with the capacitor C2, and the other end of the capacitor C2 is connected with GND to realize the filtering of an alternating current signal into a second direct current signal, and the output end of the second rectification signal is connected with a second amplifying electricity The roads are connected. The second amplifying circuit comprises a resistor R10, a resistor R14 and an operational amplifier U8, wherein the homodromous input end 3 pin of the operational amplifier U8 is connected with the output end of the second low-pass filter circuit, the inverting input end 2 pin of the operational amplifier U2 is respectively connected with the resistor R14 and the resistor R10, the other end of the resistor R14 is connected with GND, the other end of the resistor R10 is connected with the 1 pin of the operational amplifier U8 and is used as a feedback resistor to amplify the second direct current signal twice, the output end of the resistor R10 is connected with the 1 pin of the operational amplifier U8 and the second analog-to-digital conversion circuit, the second analog-to-digital conversion circuit comprises an ADC sampling chip U9, and the main function is that the analog signal is converted into a digital signal, and the output end of the second analog-to-digital conversion circuit is connected with the pin input end of the processor U12, so that the processor U12 can realize the reading of a current value.
The power signal acquisition circuit is connected with the directional coupler and the processor, and is used for converting an alternating current voltage signal into a direct current voltage signal and transmitting the direct current voltage signal to the processor.
Specifically, the power signal acquisition circuit may be composed of a multiplier, a low-pass filter, an operational amplifier and an ADC converter. Wherein the multiplier converts the waveform of the alternating voltage signal into a full-wave waveform U with positive voltage only i ' then pass through low pass filter to become DC signal U 1 Then amplified by operational amplifier to become U 2 Collected by the ADC converter and sent to the processor.
The processor is connected with the voltage measuring module, the current measuring module and the power signal acquisition circuit, and the values of the acquired first direct current signal, second direct current signal, first square wave signal and second square wave signal are substituted into formulas 9 and 14 to calculate to obtain voltage amplitude, current amplitude and current-voltage phase difference value.
Further, as can be seen from the above, the first rectification signal or the second rectification signal with only positive half cycle is obtained by half-wave rectification through the detection circuit, U a For the amplitude, after passing through the low-pass filter circuit, the calculation formula of the half-wave rectification average value can be obtained:
when the amplification factor is 2 times through the amplifying circuit, the following steps are obtained:
U 4 ＝2U 3 (equation 16)
The following can be obtained by combining equations 15 and 16:
the same principle can be obtained:
from equations 17 and 18, respectively:
the voltage values of U4 and U6 are sampled by the digital-to-analog conversion circuit, and then the voltage amplitude is obtained by the formula 19.
Then set I b Is the amplitude of the current, i.e. I at this time b Equal to I (z) ，U b Is the value of the transmission line voltage and the value signal, and when the radio frequency power supply is matched, the matching impedance is 50 ohms, namely Z 0 50; substituting equation 20 into equation 14 yields:
the processor calculates the known voltage amplitude U through testing a And current amplitude I b Current-voltage phase difference between themI.e. when at a certain moment the voltage amplitude U a And current amplitude I b The corresponding proportion of the current phase is multiplied to obtain the actual voltage value and the current value at the moment, and the load impedance value is the ratio of the actual voltage value to the current value, so that a load impedance value calculation formula can be obtained:
therefore, after calculating the voltage amplitude, the current amplitude and the current-voltage phase difference value, the processor substitutes the voltage amplitude, the current amplitude and the current-voltage phase difference value into the formula 22, and can calculate the load impedance value.
Meanwhile, the processor may calculate the output power of the rf power source according to equations 5 and 8.
In one embodiment of the invention, the processor includes a tri-state phase detector,
the first input end and the second input end of the tri-state phase discriminator are respectively connected with the voltage measuring module and the current measuring module, and the current-voltage phase difference value is calculated and determined according to the first square wave signal and the second square wave signal by receiving the first square wave signal and the second square wave signal.
Referring to fig. 6, a schematic diagram of a tri-state phase detector of the present invention is shown. Taking the received square wave signal as a square wave signal as an example, an input end (U_CLK) of a first trigger of the tri-state phase discriminator is connected with an output end of the voltage measurement module, receives the first square wave signal, and takes the first square wave signal as a clock signal of the first trigger. The input end (I_CLK) of a second trigger of the tri-state phase discriminator is connected with the output end of the current measuring module, receives a second square wave signal, and takes the second square wave signal as a clock signal of the second trigger. The first flip-flop and the second flip-flop are, for example, D flip-flops. And connecting the trigger signal input end of the first trigger and the trigger signal input end of the second trigger with a preset high level, namely setting the two triggers to be high level. When u_clk/i_clk rises, the first flip-flop or the second flip-flop outputs a high level corresponding to q=d of the flip-flop. And the reset end of the first trigger is connected with the reset end of the second trigger and the AND gate, namely, the signal UP output by the first trigger and the signal DN output by the second trigger are subjected to AND operation through the AND gate and output to the reset end of the first trigger and the reset end of the second trigger. And resetting the UP and DN output by the tri-state phase discriminator module when the signal UP and the signal DN are simultaneously high to form a low level, and otherwise, resetting the UP and DN to be high level.
The phase measurement calculation method shown in fig. 7 is used, for example, the processor may be an FPGA, and the processor generates the 400MHz reference clock signal Fs by using a phase-locked loop. Setting a GATE-control TIME; gate_time is an integer multiple N of the period of the measured signal UP, signal DN. Then, the rising edges of the clock signal Fs, the signal UP and the signal DN are counted based on one high level TIME of the gate_time, and since the number of rising edges of the signal UP and the signal DN is the same, one rising edge number of the signal UP and the signal DN can be adopted. Then, the ratio of the number of rising edges of the signal UP or the signal DN to the clock signal Fs is adopted as a difference value in a single gating time period, and the difference value is converted into an angle value, namely a current-voltage phase difference value. As shown in fig. 7, when gate_time is high, the rising edges fs_cnt of Fs are counted, and the rising edges up_cnt, dn_cnt of Fs when the count signal UP, DN are high, i.e., the phase difference, can be obtained:
the current-voltage phase difference is calculated by equation 23.
The processor is connected with the output end of the voltage measuring module, the output end of the current measuring module and the output of the power collecting current, and is used for receiving the first direct current signal output by the voltage measuring module and the second direct current signal output by the current measuring module, and calculating the voltage amplitude and the current amplitude through formulas 9 and 14. And the processor calculates a load impedance value according to the voltage amplitude, the current amplitude and the current-voltage phase difference value substituted into the formula 23.
In an embodiment of the invention, the radio frequency power signal acquisition circuit further includes: the upper computer is used for processing the data,
in practical application, an upper computer can be arranged at the output end of the processor, and the voltage amplitude value, the current-voltage phase difference value and the load impedance value obtained by calculation of the processor are transmitted to the upper computer. The upper computer visualizes the voltage amplitude, the current-voltage phase difference value and the load impedance value, and displays the voltage amplitude, the current-voltage phase difference value and the impedance value.
The embodiment of the invention is used for coupling the input and output voltage wave signals and the reflected voltage wave signals through the directional coupler; the voltage measurement module is connected with the directional coupler and is used for adding the incident voltage wave signal and the reflected voltage wave signal to generate a current-voltage phase and value signal; and converting the transmission line voltage wave signal into a first square wave signal and a first direct current signal; the current measurement module is connected with the directional coupler and is used for subtracting the incident voltage wave signal and the reflected voltage wave signal to generate a current-voltage phase difference value signal; and converting the transmission line current wave signal into a second square wave signal and a second direct current signal; the processor is connected with the voltage measurement module and the current measurement module, and is used for determining a voltage amplitude value according to the first direct current signal, determining a current amplitude value according to the second direct current signal, determining a current-voltage phase difference value according to the first square wave signal and the second square wave signal, and determining a load impedance value according to the voltage amplitude value, the current amplitude value and the current-voltage phase difference value. The voltage and the current of the radio frequency power supply load are monitored in real time, and when the reflected power of the power supply is overlarge, whether the current is overlarge or the voltage is overlarge can be judged, so that further analysis of reasons is facilitated; the load impedance of the radio frequency power supply can be monitored in real time by utilizing the measured voltage value, the current value and the phase thereof, so that the impedance change condition of plasma can be further known, the current-voltage phase difference value is calculated through the tri-state phase discriminator, and the phase detection precision is improved; the voltage, current and load impedance information of the real-time output end are displayed through the upper computer, so that process research and development personnel can know the change condition of the plasma load conveniently, and effective data support is provided for realizing more complex processes.
Referring to fig. 8, a schematic structural diagram of a semiconductor processing apparatus 801 according to an embodiment of the present invention is shown, wherein the semiconductor processing apparatus 801 includes a rf power supply 8011, a rf matcher 8012, a process chamber 8013, and a rf power signal acquisition circuit 8014 as described above.
In this specification, each embodiment is described in a progressive manner, and each embodiment is mainly described by differences from other embodiments, and identical and similar parts between the embodiments are all enough to be referred to each other.
It will be apparent to those skilled in the art that embodiments of the present invention may be provided as a method, apparatus, or computer program product. Accordingly, embodiments of the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, embodiments of the invention may take the form of a computer program product on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) having computer-usable program code embodied therein.
Embodiments of the present invention are described with reference to flowchart illustrations and/or block diagrams of methods, terminal devices (systems), and computer program products according to embodiments of the invention. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing terminal device to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing terminal device, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiment and all such alterations and modifications as fall within the scope of the embodiments of the invention.
Finally, it is further noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or terminal that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or terminal. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article or terminal device comprising the element.
The above description of the rf power signal acquisition circuit and the semiconductor processing apparatus provided by the present invention applies specific examples to illustrate the principles and embodiments of the present invention, and the above examples are only used to help understand the method and core ideas of the present invention; meanwhile, as those skilled in the art will have variations in the specific embodiments and application scope in accordance with the ideas of the present invention, the present description should not be construed as limiting the present invention in view of the above.

Claims (11)

1. The utility model provides a radio frequency power supply signal acquisition circuit which characterized in that, radio frequency power supply signal acquisition circuit is used for being connected with the radio frequency power supply, signal acquisition circuit includes:
the device comprises a directional coupler, a voltage measurement module, a current measurement module and a processor;
the directional coupler is connected with the radio frequency power supply and is used for receiving the voltage output by the radio frequency power supply and coupling an incident voltage wave signal and a reflected voltage wave signal;
the voltage measurement module is connected with the directional coupler and is used for adding the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage and a value signal; shaping the transmission line voltage and the value signal and converting the transmission line voltage and the value signal into a first square wave signal; the first square wave signal characterizes the phase of the output voltage of the radio frequency power supply;
the current measurement module is connected with the directional coupler and is used for subtracting the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage difference signal; shaping the transmission line voltage difference signal and converting the transmission line voltage difference signal into a second square wave signal; the second square wave signal characterizes the phase of the output current of the radio frequency power supply;
The processor is connected with the voltage measuring module and the current measuring module and is used for determining a current-voltage phase difference value according to the first square wave signal and the second square wave signal;
the processor comprises a three-state phase discriminator, wherein the three-state phase discriminator is connected with the voltage measurement module and the current measurement module and is used for receiving the first square wave signal and the second square wave signal; determining the current-voltage phase difference value according to the ratio of the rising edge number of signals output by the first square wave signal and the second square wave signal in the tri-state phase discriminator to the clock signal number in the tri-state phase discriminator in a preset single gating time period;
the voltage measurement module is also used for filtering and rectifying the transmission line voltage and the value signal and converting the transmission line voltage and the value signal into a first direct current signal;
the current measurement module is also used for filtering and rectifying the transmission line voltage difference signal and converting the transmission line voltage difference signal into a second direct current signal;
the processor is further configured to determine a voltage amplitude according to the first dc signal, determine a current amplitude according to the second dc signal, and determine a load impedance value according to the voltage amplitude, the current amplitude, and the current-voltage phase difference.
2. The radio frequency power signal acquisition circuit of claim 1, wherein the voltage measurement module comprises: an addition circuit and a first comparison circuit,
the adding circuit is connected with the directional coupler and is used for adding the incident voltage wave signal and the reflected voltage wave signal to generate the transmission line voltage and value signal;
the first comparison circuit is connected with the addition circuit and is used for shaping the transmission line voltage and the value signal into the first square wave signal.
3. The radio frequency power signal acquisition circuit as set forth in claim 2, wherein the voltage measurement module further comprises a first detector circuit and a first low pass filter circuit,
the first detection circuit is connected with the addition circuit and is used for carrying out half-wave rectification on the transmission line voltage and the value signal to generate a first rectification signal;
the input end of the first low-pass filter circuit is connected with the output end of the first detection circuit, and the output end of the first low-pass filter circuit is connected with the processor and used for converting the first rectification signal into the first direct current signal.
4. The radio frequency power signal acquisition circuit of claim 3, wherein the current measurement module comprises: a subtracting circuit and a second comparing circuit,
The subtracting circuit is connected with the directional coupler and is used for subtracting the incident voltage wave signal and the reflected voltage wave signal to generate the transmission line voltage difference signal;
the second comparison circuit is connected with the subtracting circuit and is used for shaping the transmission line voltage difference signal into the second square wave signal.
5. The RF power signal acquisition circuit as recited in claim 4, wherein the current measurement module further comprises a second detector circuit and a second low pass filter circuit,
the second detection circuit is connected with the subtracting circuit and is used for half-wave rectifying the transmission line voltage difference signal to generate a second rectified signal;
the input end of the second low-pass filter circuit is connected with the output end of the second detection circuit, and the output end of the second low-pass filter circuit is connected with the processor and used for converting the second rectification signal into the second direct current signal.
6. The radio frequency power signal acquisition circuit as set forth in claim 1, wherein the tri-state phase detector comprises a first flip-flop, a second flip-flop, and an AND gate,
the clock input end of the first trigger is connected with the voltage measurement module; the clock input end of the second trigger is connected with the current measurement module; the trigger signal input end of the first trigger and the trigger signal input end of the second trigger are connected with a preset high level;
The output end of the AND gate is connected with the reset end of the first trigger and the reset end of the second trigger; and the input end of the AND gate is respectively connected with the output end of the first trigger and the output end of the second trigger.
7. The radio frequency power signal acquisition circuit of claim 4, wherein the first comparison circuit and the second comparison circuit are zero crossing comparison circuits.
8. The radio frequency power signal acquisition circuit of claim 5, wherein the first low pass filter circuit and the second low pass filter circuit are integrating circuits.
9. The radio frequency power signal acquisition circuit of claim 1, further comprising: the power signal acquisition circuit is used for acquiring a power signal,
the directional coupler is also used for outputting alternating voltage signals;
the power signal acquisition circuit is connected with the directional coupler and is used for converting the alternating current voltage signal into a direct current voltage signal;
the processor is connected with the power signal acquisition circuit and is also used for determining an output power value according to the direct-current voltage signal.
10. The radio frequency power signal acquisition circuit of any one of claims 1-7, further comprising: the upper computer is used for processing the data,
The upper computer is connected with the output end of the processor and used for monitoring the voltage amplitude, the current-voltage phase difference value and the load impedance value in real time.
11. A semiconductor process apparatus comprising a radio frequency power supply, a radio frequency matcher, a process chamber and a radio frequency power supply signal acquisition circuit as claimed in any one of claims 1 to 10.
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