CN115656864A - Radio frequency power supply signal acquisition circuit and semiconductor process equipment - Google Patents

Radio frequency power supply signal acquisition circuit and semiconductor process equipment Download PDF

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CN115656864A
CN115656864A CN202211102594.8A CN202211102594A CN115656864A CN 115656864 A CN115656864 A CN 115656864A CN 202211102594 A CN202211102594 A CN 202211102594A CN 115656864 A CN115656864 A CN 115656864A
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voltage
circuit
current
transmission line
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CN115656864B (en
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黄东龙
周航
范宏阅
李光健
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Beijing Naura Microelectronics Equipment Co Ltd
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Abstract

The embodiment of the invention provides a radio frequency power supply signal acquisition circuit and semiconductor process equipment, which comprise: the directional coupler is used for receiving the voltage output by the radio frequency power supply and coupling the incoming and outgoing voltage wave signals and the reflected voltage wave signals; the voltage measuring module is connected with the directional coupler and used for adding the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage and value signal; shaping the transmission line voltage and value signals and converting the transmission line voltage and value signals into first square wave signals; the current measuring module is connected with the directional coupler and used for subtracting the incident voltage wave signal from the reflected voltage wave signal to generate a transmission line voltage difference value signal; shaping the transmission line voltage difference signal, and converting the transmission line voltage difference signal into a second square wave signal; the processor is connected with the voltage measuring module and the current measuring module and used for determining a current-voltage phase difference value according to the first square wave signal and the second square wave signal. The embodiment of the invention can calculate the current-voltage phase difference value of the output voltage and the output current of the radio frequency power supply.

Description

Radio frequency power supply signal acquisition circuit and semiconductor process equipment
Technical Field
The invention relates to the technical field of semiconductors, in particular to a radio frequency power supply signal acquisition circuit and semiconductor process equipment.
Background
The rf power source is a core component of semiconductor manufacturing equipment, and the rf energy generated by the rf power source is a core device for igniting and maintaining a plasma discharge. In recent years, with the rapid development of the microelectronic industry, the device size is gradually reduced, and the circuit integration level is gradually improved, so that different forms of plasma generated by a controllable radio frequency power supply with higher precision are required to meet the technological requirements, and the precision and the linearity of output power are determined by measuring the performance of a circuit in the radio frequency power supply.
At present, for the measurement of a radio frequency power supply, a directional coupler is used as a sensor to measure the output power of the power supply, but the method cannot measure and calculate the voltage, the current and the impedance of the output end of the radio frequency power supply, and cannot provide data to analyze the actual state of the current plasma, so that the measurement and control requirements of a more complex process cannot be met.
Disclosure of Invention
In view of the above, embodiments of the present invention are proposed to provide a signal acquisition circuit and a corresponding semiconductor processing apparatus that overcome or at least partially solve the above-mentioned problems.
In order to solve the above problem, an embodiment of the present invention discloses a radio frequency power signal acquisition circuit, where the radio frequency power signal acquisition circuit is used to connect with a radio frequency power, and the signal acquisition circuit includes:
the device comprises a directional coupler, a voltage measuring module, a current measuring module and a processor;
the directional coupler is used for receiving the voltage output by the radio frequency power supply and coupling an incoming voltage wave signal and a reflected voltage wave signal;
the voltage measuring module is connected with the directional coupler and is used for adding the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage and value signal; shaping the transmission line voltage and value signals and converting the transmission line voltage and value signals into first square wave signals;
the current measuring module is connected with the directional coupler and used for subtracting the incident voltage wave signal from the reflected voltage wave signal to generate a transmission line voltage difference value signal; shaping the transmission line voltage difference signal and converting the transmission line voltage difference signal into a second square wave signal;
the processor is connected with the voltage measuring module and the current measuring module and used for determining a current-voltage phase difference value according to the first square wave signal and the second square wave signal.
Optionally, the voltage measuring module is further configured to perform filtering rectification on the transmission line voltage and value signal, and convert the transmission line voltage and value signal into a first direct current signal;
the current measuring module is also used for filtering and rectifying the transmission line voltage difference value signal and converting the transmission line voltage difference value signal into a second direct current signal;
the processor is further configured to determine a voltage amplitude according to the first dc signal, determine a current amplitude according to the second dc signal, and determine a load impedance value according to the voltage amplitude, the current amplitude, and the current-voltage phase difference.
Optionally, the voltage measurement module comprises: an addition circuit and a first comparison circuit,
the addition circuit is connected with the directional coupler and is used for adding the incident voltage wave signal and the reflected voltage wave signal to generate the transmission line voltage and value signals;
the first comparison circuit is connected with the addition circuit and is used for shaping the transmission line voltage and the value signal into a first square wave signal.
Optionally, the voltage measurement module further comprises a first detector circuit and a first low-pass filter circuit,
the first detection circuit is connected with the addition circuit and is used for performing half-wave rectification on the transmission line voltage and value signals to generate a first rectification signal;
the input end of the first low-pass filter circuit is connected with the output end of the first detection circuit, and the output end of the first low-pass filter circuit is connected with the processor and used for converting the first rectified signal into a first direct current signal.
Optionally, the current measurement module comprises: a subtraction circuit and a second comparison circuit,
the subtraction circuit is connected with the directional coupler and is used for subtracting the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage difference value signal;
the second comparison circuit is connected with the subtraction circuit and used for shaping the transmission line current wave signal into a second square wave signal.
Optionally, the current measurement module further comprises a second detector circuit and a second low-pass filter circuit,
the second detection circuit is connected with the subtraction circuit and used for performing half-wave rectification on the transmission line voltage difference signal to generate a second rectification signal;
the input end of the second low-pass filter circuit is connected with the output end of the second detection circuit, and the output end of the second low-pass filter circuit is connected with the processor and used for converting the second rectified signal into a second direct current signal.
Optionally, the processor comprises a tri-state phase detector,
the three-state phase discriminator is connected with the voltage measuring module and the current measuring module and is used for receiving the first square wave signal and the second square wave signal; and determining the current-voltage phase difference value according to the first square wave signal and the second square wave signal.
Optionally, the tri-state phase detector comprises a first flip-flop, a second flip-flop and an and gate,
the clock input end of the first trigger is connected with the voltage measuring module; the clock input end of the second trigger is connected with the current measuring module; the trigger signal input end of the first trigger and the trigger signal input end of the second trigger are connected with a preset high level;
the output end of the AND gate is connected with the reset end of the first trigger and the reset end of the second trigger; and the input end of the AND gate is respectively connected with the output end of the first trigger and the output end of the second trigger.
Optionally, the first comparison circuit and the second comparison circuit are zero-crossing comparison circuits.
Optionally, the first low-pass filter circuit and the second low-pass filter circuit are integration circuits.
Optionally, the radio frequency power signal acquisition circuit further includes: a power signal acquisition circuit for acquiring a power signal,
the directional coupler is also used for outputting an alternating voltage signal;
the power signal acquisition circuit is connected with the directional coupler and used for converting the alternating voltage signal into a direct voltage signal;
the processor is connected with the power signal acquisition circuit and is also used for determining an output power value according to the direct-current voltage signal.
Optionally, the signal acquisition circuit further comprises: an upper computer is arranged on the main body,
the upper computer is connected with the output end of the processor and used for monitoring the voltage amplitude, the current-voltage phase difference value and the load impedance value in real time.
The embodiment of the invention also discloses semiconductor process equipment which comprises a radio frequency power supply, a radio frequency matcher, a process chamber and the radio frequency power supply signal acquisition circuit.
The embodiment of the invention has the following advantages:
in the embodiment of the invention, a radio frequency power signal acquisition circuit is formed by a directional coupler, a voltage measurement module, a current measurement module and a processor; the directional coupler is used for receiving the voltage output by the radio frequency power supply and coupling the incoming and outgoing voltage wave signals and the reflected voltage wave signals; the voltage measuring module is connected with the directional coupler and used for adding the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage and value signal; shaping the transmission line voltage and value signals and converting the transmission line voltage and value signals into first square wave signals; the current measuring module is connected with the directional coupler and used for subtracting the incident voltage wave signal from the reflected voltage wave signal to generate a transmission line voltage difference value signal; shaping the transmission line voltage difference signal, and converting the transmission line voltage difference signal into a second square wave signal; the processor is connected with the voltage measuring module and the current measuring module and used for determining a current-voltage phase difference value according to the first square wave signal and the second square wave signal. Collecting radio frequency power supply signals through a directional coupler, processing voltage measurement signals through a voltage measurement module, processing current measurement signals through a current measurement module, and calculating a first square wave signal and a second square wave signal transmitted by the voltage measurement module and the current measurement module through a processor to determine a current-voltage phase difference value; the method realizes the phase monitoring of the voltage and the current, is convenient for process research personnel to know the current-voltage phase difference value in real time so as to observe the change condition of the plasma load, and provides effective data support for realizing more complex processes.
Drawings
FIG. 1 is a block diagram of a prior art power harvesting circuit;
FIG. 2 is a block diagram of a radio frequency power signal acquisition circuit according to an embodiment of the present invention;
FIG. 3 is a block diagram of another RF power signal acquisition circuit according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a voltage measurement module of an embodiment of the present invention;
FIG. 5 is a schematic diagram of a current measurement module according to an embodiment of the present invention
FIG. 6 is a schematic diagram of a tri-state evaluator of an embodiment of the present invention;
FIG. 7 is a phase measurement schematic of an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a semiconductor processing apparatus according to an embodiment of the present invention.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, the present invention is described in further detail with reference to the accompanying drawings and the detailed description thereof. All other embodiments, which can be derived from the embodiments of the present invention by a person skilled in the art, are within the scope of the present invention.
Referring to fig. 1, a power acquisition circuit of a radio frequency power supply in the prior art may be an alternating voltage signal U output by a directional coupler i The dc component is zero, the frequency is often higher than the acquisition frequency of the control system, and the dc component cannot be directly acquired through an Analog-to-Digital Converter (ADC). The prior art solution uses a multiplier to convert the ac voltage signal U into the ac voltage signal U i Is converted into a full-wave waveform U with positive voltage only i ' is converted into a direct current signal U through a low-pass filter 1 Then amplified by an operational amplifier to become U 2 Collected by the ADC and sent to the processor, and the processor determines U according to the ADC sampling value 2 ，U 2 The relationship between the value of (d) and the power of the transmission main line is as follows:
Figure BDA0003841233090000051
Figure BDA0003841233090000052
Figure BDA0003841233090000053
U 2 ＝k 2 U 1 (formula 4)
Respectively substituting formula 3, formula 2, formula 1 into formula 4, and obtaining by calculation:
Figure BDA0003841233090000054
and the power of the transmission main line is:
Figure BDA0003841233090000055
P＝k 3 P 1 (equation 7) substituting equation 6 into equation 7 yields:
Figure BDA0003841233090000056
wherein A is U i Amplitude of (k) 1 Is a multiplier coefficient, k 2 Is the operational amplifier coefficient, k 3 For the directional coupler coefficient, R is the load resistance, P 1 Is U i The corresponding power value, P, is the actual output power. ADC converter acquires U 2 The value of (c).
It can be seen that U can be calculated according to equation 5 2 The relation with A, and then the relation between the actual output power P and A can be calculated according to the formula 8, so that the actual output power P can be calculated.
Because the technical scheme directly collects and measures the power signal output by the multiplier, and does not decompose and calculate the voltage and current signals, the technical scheme can not measure the voltage value and the current value of the output end of the radio frequency power supply, and similarly, because no phase data exists, the phase and the impedance of the voltage and the current of the output end can not be calculated.
Referring to fig. 2, a block diagram of a radio frequency power signal acquisition circuit according to an embodiment of the present invention is shown. Radio frequency power supply signal acquisition circuit is used for being connected with radio frequency power supply, radio frequency power supply signal acquisition circuit includes:
the device comprises a directional coupler, a voltage measuring module, a current measuring module and a processor;
the directional coupler is used for receiving the voltage output by the radio frequency power supply and coupling an incoming voltage wave signal and a reflected voltage wave signal;
the voltage measuring module is connected with the directional coupler and used for adding the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage and value signal; shaping the transmission line voltage and value signals and converting the transmission line voltage and value signals into first square wave signals; optionally, the first square wave signal is a first square wave signal, that is, the first square wave signal has only a positive period;
the current measuring module is connected with the directional coupler and used for subtracting the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage difference value signal; shaping the transmission line voltage difference signal and converting the transmission line voltage difference signal into a second square wave signal; optionally, the second square wave signal is a second square wave signal, that is, a second square wave signal with only positive period;
the processor is connected with the voltage measuring module and the current measuring module and used for determining a current-voltage phase difference value according to the first square wave signal and the second square wave signal.
In the embodiment of the invention, the radio frequency power supply signal acquisition circuit can be composed of a directional coupler, a voltage measurement module, a current measurement module and a controller.
The directional coupler is a signal collector, is connected with the radio frequency power supply and receives voltage output by the radio frequency power supply, and is coupled to the incoming and outgoing voltage wave signals and the reflected voltage wave signals based on the received voltage output by the radio frequency power supply.
The voltage measurement module is connected with the directional coupler, and an incident voltage wave signal and a reflected voltage wave signal output by the directional coupler are transmitted to the voltage measurement module. The voltage measuring module is used for measuring an output voltage signal of the radio frequency power supply. The method is specifically used for adding the incident voltage wave signal and the reflected voltage wave signal to obtain a transmission line voltage and value signal. And then, shaping the transmission line voltage and value signals, and converting the transmission line voltage and value signals into first square wave signals. And representing the phase of the output voltage of the radio frequency power supply through the first square wave signal.
The directional coupler is also connected with the current measuring module, an incident voltage wave signal and a reflected voltage wave signal output by the directional coupler are also transmitted to the current measuring module, and the current measuring module is used for measuring an output current signal of the radio frequency power supply. Specifically, the current measurement module is configured to subtract the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage difference signal. And then, shaping the transmission line voltage difference signal, and converting the transmission line voltage difference signal into a second square wave signal. And representing the phase of the output current of the radio frequency power supply through the second square wave signal.
The processor is connected with the voltage measuring module and the current measuring module, receives the first square wave signal output by the voltage measuring module and receives the second square wave signal output by the current measuring module. In practical applications, the processor may be provided with at least two signal input interfaces, one signal input interface receiving the signal output by the voltage measuring module, and the other signal output interface receiving the signal output by the current measuring module. The processor calculates the phase difference between the two square wave signals according to the first square wave signal and the second square wave signal, and the phase difference is determined as a current-voltage phase difference value.
The embodiment of the invention forms a radio frequency power signal acquisition circuit by a directional coupler, a voltage measurement module, a current measurement module and a processor; the directional coupler is used for receiving the voltage output by the radio frequency power supply and coupling the incoming and outgoing voltage wave signals and the reflected voltage wave signals; the voltage measuring module is connected with the directional coupler and used for adding the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage and value signal; shaping the transmission line voltage and value signals and converting the transmission line voltage and value signals into first square wave signals; the current measuring module is connected with the directional coupler and used for subtracting the incident voltage wave signal from the reflected voltage wave signal to generate a transmission line voltage difference value signal; shaping the transmission line voltage difference signal, and converting the transmission line voltage difference signal into a second square wave signal; the processor is connected with the voltage measuring module and the current measuring module and used for determining a current-voltage phase difference value according to the first square wave signal and the second square wave signal. Collecting radio frequency power supply signals through a directional coupler, processing voltage measurement signals through a voltage measurement module, processing current measurement signals through a current measurement module, and calculating a first square wave signal and a second square wave signal transmitted by the voltage measurement module and the current measurement module through a processor to determine a current-voltage phase difference value; the method realizes the phase monitoring of the voltage and the current, is convenient for process research personnel to know the current-voltage phase difference value in real time so as to observe the change condition of the plasma load, and provides effective data support for realizing more complex processes.
Referring to fig. 3, a block diagram of another rf power signal acquisition circuit according to an embodiment of the present invention is shown.
In the embodiment of the present invention, according to the transmission line theory, the voltage and current at the Z point on the transmission line are:
U (z) ＝U + +U - (formula 9)
I (z) ＝I + +I - (formula 10)
Wherein, U + Is incident voltage, U, at point Z on the transmission line - Is the reflected voltage of point Z on the transmission line, U (z) Actual voltage at point Z on the transmission line, I + Is incident current at point Z on the transmission line, I - Is the reflected current at point Z on the transmission line, I (z) Is the actual current at point Z on the transmission line.
Formula defined according to characteristic impedance:
Figure BDA0003841233090000081
calculated from equation 11, it can be:
U + ＝Z 0 I + (formula 12)
U - ＝-Z 0 I - (formula 13)
Subtracting equation 13 from equation 12 and substituting equation 10 yields:
I (z) ＝(U + -U - )/Z 0 (formula 14)
As can be seen from the above equations 9 to 14, the voltage and current at the output terminal of the rf power supply and the phase difference therebetween can be obtained from the incident wave voltage and the reflected wave voltage.
For this purpose, a directional coupler may be used to receive the signal from the rf power source, couple the incoming and outgoing voltage wave signals and the reflected voltage wave signal. And the incident voltage wave signal and the reflected voltage wave signal are processed by the voltage measuring module and the current measuring module.
The voltage measurement module is connected with the directional coupler, adds the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage and value signal, shapes the transmission line voltage wave signal based on the transmission line voltage wave signal, converts the transmission line voltage wave signal into a first square wave signal, performs filtering rectification on the transmission line voltage and value signal, and converts the transmission line voltage and value signal into a first direct current signal so as to calculate the voltage amplitude and the voltage phase.
Specifically, the voltage measurement module may include: the circuit comprises an addition circuit, a first comparison circuit, a first detection circuit and a first low-pass filter circuit.
The adding circuit is connected with the directional coupler, receives an incident voltage wave signal and a reflected voltage wave signal sent by the directional coupler, adds the incident voltage wave signal and the reflected voltage wave signal, and generates the transmission line voltage and value signal.
The first comparison circuit is connected with the addition circuit and used for comparing the transmission line voltage and the value signal with the reference voltage so as to shape the sine waveform of the transmission line voltage and the value signal and generate a first square wave signal, so that the phase of the first square wave signal is the same as the phase of the voltage wave in the radio frequency power supply main loop, and the phase of the first square wave signal represents the phase of the voltage wave in the radio frequency power supply main loop.
Furthermore, the first comparison circuit is a zero-crossing comparison circuit, namely, the sine waveform of the transmission line voltage wave signal is shaped based on zero value, a first square wave signal larger than zero is generated, and the same-phase conversion from sine wave to square wave is realized. The sine waveform of the transmission line voltage and value signals is shaped to generate a first square wave signal with only a positive period, so that the phase of the first square wave signal is the same as that of a voltage wave in a radio frequency power supply main loop.
The first detector circuit is also connected to the adder circuit, i.e. the adder circuit may comprise two output ports, one of which is connected to the first detector circuit and the other of which is connected to the first comparator circuit. The first detection circuit performs half-wave rectification on the sine waveform of the received transmission line voltage and value signal to generate a first rectified signal.
Further, the first detector circuit is a half-wave rectifier circuit. Rectification of the transmission line voltage and value signals with positive and negative half-cycle sine waveforms into a first rectified signal with only positive half-cycle sine waves is achieved through the use of a half-wave rectification circuit, namely the waveform of the first rectified signal is sine waves with only positive cycles.
The first low-pass filter circuit is connected with the first detector circuit and the processor. The method specifically comprises the following steps: the input end of the first low-pass filter circuit is connected with the output end of the first detection circuit, the output end of the first low-pass filter circuit is connected with the processor, and the first low-pass filter circuit converts the first alternating current rectification signal into a first direct current signal.
Further, the first low-pass filter circuit is an integrating circuit, samples the first rectified signal with only positive half cycle sine waveform, converts the first rectified signal into a direct current first direct current signal, and can reversely deduce the load of the first rectified signal based on the amplitude of the first direct current signal.
In addition, the voltage measurement module may further include: a first overvoltage protection circuit.
The input end of the first overvoltage protection circuit is connected with the output end of the directional coupler, and the output end of the first overvoltage protection circuit is connected with the input end of the addition circuit;
in practical application, at least one first overvoltage protection circuit can be added between the addition circuit and the directional coupler, the input end of the first overvoltage protection circuit is connected with the output end of the directional coupler, the output end of the first overvoltage protection circuit is connected with the input end of the addition circuit, and the voltage of an incident voltage wave introduced into the addition circuit is set within a reasonable range through the first overvoltage protection circuit, so that the addition circuit and a later-stage circuit are prevented from being burnt due to overvoltage, and the probability of circuit faults is reduced. The number of the first overvoltage protection circuits may be determined according to the requirements of the circuit design, and is not limited in the embodiments of the present invention.
In practical application, two clamping diodes, namely a first clamping diode and a second clamping diode, can be adopted to form a first overvoltage protection circuit, so that an overvoltage protection function is realized.
In an embodiment of the present invention, the voltage measuring module may further include: a first follower circuit.
The first follower circuit is provided between the first overvoltage protection circuit and the addition circuit. The input end of the first following circuit is connected with the output end of the first overvoltage protection circuit, the output end of the first following circuit is connected with the addition circuit, and incident voltage wave signals pass through the following circuit, so that the output driving capability of the incident voltage wave signals is increased, the incident voltage wave signals are matched with the addition circuit, and the load capacity of the addition circuit is improved.
In an embodiment of the present invention, the voltage measuring module further includes: a first amplifying circuit.
Specifically, a first amplification circuit may be provided between the first low-pass filter circuit and the processor. The input end of the first amplifying circuit is connected with the output end of the first low-pass filter circuit, the output end of the first amplifying circuit is connected with the input end of the controller, the first amplifying circuit receives the first direct current signal to amplify the signal, fixed-proportion amplification of the signal is achieved, and a processor can conduct sampling calculation conveniently. The amplification factor may be set by a person skilled in the art according to actual requirements, and the embodiment of the present invention is not particularly limited in this respect. In an example of the invention, the magnification may be doubled.
In an embodiment of the present invention, the voltage measuring module further includes: a first analog-to-digital conversion circuit.
A first analog to digital conversion circuit may be provided before the amplified first dc signal enters the processor. The input end of the first analog-to-digital conversion circuit is connected with the output end of the first amplifying circuit, the output end of the first analog-to-digital conversion circuit is connected with the input end of the controller, digital-to-analog conversion is carried out on the amplified first direct current signal, analog quantity is converted into digital quantity, and data processing is directly carried out on the basis of the digital quantity.
In order to more clearly illustrate the circuit principle of the voltage measuring module, reference may be made to fig. 4, which shows a schematic diagram of a voltage measuring module according to an embodiment of the present invention. The circuit of the voltage measuring module is explained by taking the schematic diagram as an example.
Incident voltage wave signal (U) coupled out by directional coupler + ) And reflecting the voltage wave signal (U) - ) The first overvoltage protection circuit includes a clamp diode D1 (first clamp diode) and a clamp diode D3 (second clamp diode). The direct current protection circuit is characterized in that a 2 pin of a clamping diode D1 and a 1 pin of a clamping diode D3 are connected and then connected with a directional coupler to receive an incident voltage wave signal, the 1 pin of the clamping diode D1 is connected with a power supply anode, the 2 pin of the clamping diode D3 is connected with a power supply cathode, a first following circuit comprises an operational amplifier U1, the 3 pin of the same-direction input end of the operational amplifier U1 is connected with the output end of a first overvoltage protection circuit, the 2 pin of the inverting input end of the operational amplifier U1 is connected with the 1 pin, the 4 pin of the operational amplifier U1 is a negative power supply pin of an operational amplifier and is connected with the power supply cathode, and the 8 pin of the operational amplifier U1 is a positive power supply pin of the operational amplifier and is connected with the power supply anode. The main function of the first follower circuit is to increase the output driving capability to match the incident voltage wave signal with the subsequent stage circuit, the 1 pin of the operational amplifier U1 is connected with the adder circuit, the adder circuit comprises a resistor R2, a resistor R4, a resistor R6, a resistor R7 and an operational amplifier U4, the 3 pin of the equidirectional input end of the adder circuit is connected with one end of the resistor R7, and the other end of the resistor R7 is connected with GND (ground), so that the input of 0 voltage is realized. The inverting input end of the adding circuit is respectively connected with a resistor R4, a resistor R6 and a resistor R2, the other end of the resistor R4 is connected with a pin 1 of an operational amplifier U1, the other end of the resistor R6 is connected with a directional coupler to receive a reflected voltage wave signal, the other end of the resistor R2 is connected with the pin 1 of the operational amplifier U4 to serve as a feedback resistor, and the adding circuit mainly has the function of realizing the signal U + And U - Adding to obtain U in formula 1 (z) The signal, 1 pin of its output operational amplifier U4 is connected with first comparison circuit and detection circuit respectively, and first comparison circuit is zero cross comparison circuit, and it includes resistance R8, resistance R9 and operational amplifier U5, and the syntropy input end 1 pin of operational amplifier U5 is connected with resistance R8 and resistance R9 respectively, and the other end of resistance R8 is connected with 1 pin of the output operational amplifier U4 of addition circuit, and the other end of resistance R9The zero-crossing comparison circuit mainly has the functions of shaping a complete sine wave into a first square wave signal with only a positive half cycle, connecting an 8 pin of the operational amplifier U5 at the output end of the zero-crossing comparison circuit with a pin of a processor U12, connecting the processor U12 with a tri-state phase discriminator, connecting one input end of the tri-state phase discriminator with the output end of the operational amplifier U5 to obtain the phase of the voltage, connecting a 2 pin of a diode D2 with a 1 pin of an operational amplifier U4 at the output end of an addition circuit, performing half-wave rectification to obtain a first rectified signal with only the positive half cycle, connecting a 1 pin of a diode D2 at the output end of the first detection circuit with a first low-pass filter circuit, connecting one end of a resistor R5 with a 1 pin of a diode D2 at the output end of the first detection circuit, connecting the other end of the resistor R5 with a capacitor C1, connecting another pin of the capacitor C1 with another alternating-current filter circuit, and connecting the first low-pass filter circuit with the first direct-current amplifier circuit. The first amplifying circuit comprises a resistor R1, a resistor R3 and an operational amplifier U2, a pin 3 of a homodromous input end of the operational amplifier U2 is connected with an output end of the first low-pass filter circuit, a pin 2 of an inverting input end of the operational amplifier U2 is respectively connected with one end of the resistor R3 and one end of the resistor R1, the other end of the resistor R3 is connected with a GND (ground), the other end of the resistor R1 is connected with a pin 1 of the operational amplifier U2 to serve as a feedback resistor, the main function is to achieve twice signal amplification, a pin 1 of the operational amplifier U2 at the output end of the operational amplifier U2 is connected with a first analog-to-digital conversion circuit, the first analog-to-digital conversion circuit comprises an ADC (analog-to-digital converter) sampling chip U3, the main function is to achieve conversion of an analog signal into a digital signal, the output end of the analog-to-digital conversion circuit is connected with an input end of a processor U12, and the processor U12 is enabled to achieve reading of a voltage value.
The current measuring module is connected with the directional coupler, subtracts the incident voltage wave signal and the reflected voltage wave signal coupled out by the directional coupler to generate a transmission line voltage difference signal, and converts the transmission line voltage difference signal into a second square wave signal and a second direct current signal based on the transmission line voltage difference signal so as to calculate the current amplitude and the current phase.
Specifically, the current measurement module includes: a subtraction circuit, a second comparison circuit, a second detection circuit and a second low-pass filter circuit,
the subtracting circuit is connected with the directional coupler, receives an incident voltage wave signal and a reflected voltage wave signal sent by the directional coupler, subtracts the incident voltage wave signal and the reflected voltage wave signal, and generates a transmission line voltage difference value signal.
The second comparison circuit is connected with the subtraction circuit and compares the transmission line voltage difference signal with the reference voltage to shape the transmission line voltage difference signal to generate a second square wave signal, so that the phase of the second square wave signal is the same as the phase of the current wave in the radio frequency power supply main loop, and the phase of the current wave is represented by the phase of the second square wave signal.
Furthermore, the second comparison circuit is a zero-crossing comparison circuit, namely, the transmission line voltage difference signal is shaped based on zero value to generate a second square wave signal larger than zero, so that the same-phase conversion from sine wave to square wave is realized.
The second detection circuit is connected to the subtraction circuit. The second detection circuit rectifies the received transmission line voltage difference signal to generate a second rectified signal.
Further, the second detection circuit is a half-wave rectification circuit. The half-wave rectification circuit is used for rectifying a transmission line voltage difference signal with positive and negative half-cycle sine waveforms, a positive half-cycle sine wave is reserved, and a second rectification signal with only a positive half cycle is generated.
The input end of the second low-pass filter circuit is connected with the output end of the second detection circuit, the output end of the second low-pass filter circuit is connected with the processor, and the second low-pass filter circuit filters the second alternating current rectification signal and converts the second alternating current rectification signal into a second direct current signal.
Further, the second low-pass filter circuit is an integrating circuit, and it should be noted that the integrating circuit may be the same as the integrating circuit used in the first low-pass filter circuit. The second rectified signal with only positive half cycle sine waveform is sampled by the integrating circuit and converted into a second direct current signal of direct current. The amplitude of the second rectified signal, i.e. the amplitude of the current, is back-derived based on the second direct current signal.
In an embodiment of the present invention, the current measuring module may further include: and a second overvoltage protection circuit.
The second overvoltage protection circuit is disposed between the subtraction circuit and the directional coupler. The input end of the second overvoltage protection circuit is connected with the output end of the directional coupler, the output end of the second overvoltage protection circuit is connected with the input end of the subtraction circuit, the voltage of the reflected voltage wave led into the subtraction circuit is set within a reasonable range by the second overvoltage protection circuit, the subtraction circuit and a rear-stage circuit are prevented from being burnt due to overvoltage, and the probability of circuit faults is reduced. The number of the second overvoltage protection circuits is at least one, and the specific number can be set according to requirements.
In practical application, a third clamping diode and a fourth clamping diode can be adopted to form a second overvoltage protection circuit, so that an overvoltage protection function is realized. Wherein the performance parameters of the third clamping diode and the fourth clamping diode may correspond to the performance parameters of the first clamping diode and the second clamping diode.
In an embodiment of the invention, the current measurement module further includes: a second follower circuit.
And a second following circuit is arranged between the second overvoltage protection circuit and the subtraction circuit, the input end of the second following circuit is connected with the output end of the second overvoltage protection circuit, the output end of the second following circuit is connected with the subtraction circuit, and the reflected voltage wave signal passes through the following circuit, so that the output driving capability of the reflected voltage wave signal is increased, and the reflected voltage wave signal is matched with the subtraction circuit.
In an embodiment of the invention, the current measurement module further includes: a second amplifying circuit for amplifying the second signal,
and a second amplifying circuit is arranged between the second low-pass filter circuit and the controller, and amplifies the second direct current signal, so that the processor can conveniently perform sampling calculation. Specifically, the input end of the second amplifying circuit is connected with the output end of the second low-pass filter circuit, the output end of the second amplifying circuit is connected with the input end of the processor, and the second amplifying circuit receives the second direct current signal to amplify the signal, so that the fixed-proportion amplification of the signal is realized.
In an embodiment of the invention, the current measuring module further includes: second analog-to-digital conversion circuit
The input end of the second analog-to-digital conversion circuit is connected with the output end of the second amplifying circuit, the output end of the second analog-to-digital conversion circuit is connected with the input end of the processor, digital-to-analog conversion is carried out on the amplified second direct-current signal, the analog quantity is converted into the digital quantity, and the processor can process the second direct-current signal directly based on the digital quantity.
In an embodiment of the present invention, the current measurement module may include: an inverter and an adder.
The inverter is used for realizing the inversion of the input reflected voltage to obtain a negative reflected voltage for the input side of the current measuring module. The adder subtracts the reflected voltage and the incident voltage to output a transmission line voltage difference signal for the output side of the current measurement module.
In order to more clearly illustrate the circuit principle of the current measuring module, reference may be made to fig. 5, which shows a schematic diagram of a current measuring module according to an embodiment of the present invention. The circuit of the current measuring module is explained by taking the schematic diagram as an example.
The second overvoltage protection includes clamping diodes D4 (third clamping diode) and D6 (fourth clamping diode). 2 pins of the clamping diode D4 and 1 pin of the clamping diode D6 are connected and then connected with the directional coupler to receive a reflected voltage wave signal, 1 pin of the clamping diode D4 is connected with the positive electrode of a power supply, 2 pins of the clamping diode D6 are connected with the negative electrode of the power supply, the second follower circuit comprises an operational amplifier U6, 3 pins of the same-direction input end of the operational amplifier U6 are connected with the output end of the second overvoltage protection circuit, 2 pins of the inverting input end of the operational amplifier U6 are connected with 1 pin, 4 pins of the operational amplifier U6 are negative pins and are connected with the negative electrode of the power supply, and 8 pins of the operational amplifier U6 are positive pins and are connected with the positive electrode of the power supply. The function of the second following circuit is to increase the output driving capability so that the reflected voltage wave signal matches with the post-stage circuit, and the 1 pin of the operational amplifier U6 is connected with the subtraction circuit. The subtracting circuit comprises an inverterAnd an adder. The inverter comprises an operational amplifier U7, a resistor R11, a resistor R13 and a resistor R17. The pin 3 of the homodromous input end of the operational amplifier U7 is connected with one end of the resistor R17, and the other end of the resistor R17 is connected with GND (ground potential) to realize the input of 0 voltage. The inverting input end of the operational amplifier U7 is respectively connected with one ends of a resistor R13 and a resistor R11, the other end of the resistor R13 is connected with the pin 1 of the operational amplifier U6 at the output end of the second follower circuit, the other end of the resistor R11 is connected with the pin 1 of the operational amplifier U7, and the input voltage is inverted to obtain U - The 1 pin of the operational amplifier U7 at the output end of the operational amplifier is connected with an adder, the adder comprises an operational amplifier U10, a resistor R12, a resistor R15, a resistor R18 and a resistor R19, the 3 pin of the homodromous input end of the operational amplifier U10 is connected with one end of the resistor R19, the other end of the resistor R19 is connected with GND to realize the input of 0 voltage, the 2 pin of the inverting input end of the operational amplifier U10 is respectively connected with the resistor R18, the resistor R15 and the resistor R12, and the other end of the resistor R18 is connected with a directional coupler U + The other end of the resistor R15 is connected with the 1 pin of the operational amplifier U7 at the output end of the inverter to receive an incident voltage wave signal, the other end of the resistor R12 is connected with the 1 pin of the operational amplifier U10 to serve as a feedback resistor, the 1 pin of the operational amplifier U10 at the output end is respectively connected with a second detection circuit and a second comparison circuit, and the function of the subtraction circuit is to realize the signal U + And U - And (4) calculating the difference value of (c). The second comparison circuit is a zero-crossing comparison circuit and comprises a resistor R20, a resistor R21 and an operational amplifier U11, wherein a pin 1 at the equidirectional input end of the operational amplifier U11 is respectively connected with one end of the resistor R20 and one end of the resistor R21, the other end of the resistor R20 is connected with a pin 1 of an operational amplifier U10 at the output end of the subtraction circuit, the other end of the resistor R21 is connected with a GND (ground potential) to realize a resistor voltage division function, the reverse input end of the operational amplifier U11 is connected with the GND to realize comparison with 0 voltage, the zero-crossing comparison circuit has the function of shaping a complete sine wave into a second square wave signal with only a positive half cycle, an 8 pin of the operational amplifier U11 at the output end is connected with the other pin of the processor U12, the other input end of a three-state phase discriminator in the processor U12 is connected with the output end of the operational amplifier U11 to acquire the phase of current, and two input ends of the three-state phase discriminator respectively acquire voltageAnd the phase of the current, resulting in a current-voltage phase difference, as will be described in more detail below. The second detection circuit comprises a diode D5, a 2 pin of the diode D5 is connected with a 1 pin of an output end operational amplifier U10 of the subtraction circuit, the main function is to perform half-wave rectification to obtain a second rectification signal only with a positive half cycle, the 1 pin of the output end diode D2 is connected with a second low-pass filter circuit, the second low-pass filter circuit comprises a resistor R16 and a capacitor C2, one end of the resistor R16 is connected with the 1 pin of the output end diode D2 of the second detection circuit, the other end of the resistor R16 is connected with the capacitor C2, the other end of the capacitor C2 is connected with GND, alternating current signals are filtered into second direct current signals, and the output end of the second detection circuit is connected with the second amplification circuit. The second amplifying circuit comprises a resistor R10, a resistor R14 and an operational amplifier U8, the pin 3 of the homodromous input end of the operational amplifier U8 is connected with the output end of the second low-pass filter circuit, the pin 2 of the inverting input end of the operational amplifier U2 is respectively connected with the resistor R14 and the resistor R10, the other end of the resistor R14 is connected with GND, the other end of the resistor R10 is connected with the pin 1 of the operational amplifier U8 to serve as a feedback resistor, the second direct-current signal is amplified twice, the pin 1 of the operational amplifier U8 at the output end of the second analog-to-digital conversion circuit is connected with the second analog-to-digital conversion circuit, the second analog-to-digital conversion circuit comprises an ADC sampling chip U9, the main function is to convert an analog signal into a digital signal, the output end of the second analog-to-digital conversion circuit is connected with the pin input end of the processor U12, and the processor U12 is enabled to read the current value.
The power signal acquisition circuit is connected with the directional coupler and the processor, and the power signal acquisition circuit is used for converting the alternating voltage signal into a direct voltage signal and transmitting the direct voltage signal to the processor.
Specifically, the power signal acquisition circuit can be composed of a multiplier, a low-pass filter, an operational amplifier and an ADC (analog-to-digital converter). Wherein the multiplier converts the waveform of the AC voltage signal into a full-wave waveform U with positive voltage only i ' is converted into a direct current signal U through a low-pass filter 1 Then amplified by operational amplifier to become U 2 And the data is collected by the ADC converter and then sent to the processor.
The processor is connected with the voltage measuring module, the current measuring module and the power signal collecting circuit, and substitutes the values of the collected first direct current signal, the collected second direct current signal, the collected first square wave signal and the collected second square wave signal into formulas 9 and 14 to calculate and obtain a voltage amplitude value, a current amplitude value and a current-voltage phase difference value.
Further, as can be seen from the above, half-wave rectification is performed by the detector circuit to obtain the first rectified signal or the second rectified signal, U, having only positive half cycles a For the amplitude value, the calculation formula of the half-wave rectification average value is obtained after passing through a low-pass filter circuit:
Figure BDA0003841233090000161
when the amplification factor of the amplifier circuit is 2 times, the following can be obtained:
U 4 ＝2U 3 (formula 16)
Combining equations 15 and 16 yields:
Figure BDA0003841233090000162
the same can be obtained:
Figure BDA0003841233090000163
derived from equations 17 and 18, respectively:
Figure BDA0003841233090000164
Figure BDA0003841233090000165
the voltage values of U4 and U6 are sampled by a digital-to-analog conversion circuit, and then the voltage amplitude value can be obtained by a formula 19.
Then set I b Is the magnitude of the current, i.e. at this time I b Is equal to I (z) ，U b For transmitting the values of line voltage and value signals and having a matching impedance of 50 ohms, Z, when the RF power is matched 0 Is 50; substituting equation 20 into equation 14 yields:
Figure BDA0003841233090000166
the processor calculates the known voltage amplitude U through testing a And amplitude of current I b And the current-voltage phase difference value between them
Figure BDA0003841233090000172
That is, when the voltage amplitude U is applied at a certain moment a And the current amplitude I b The proportion corresponding to the current phase is multiplied to obtain the actual voltage value and the current value at the moment, the load impedance value is the ratio of the actual voltage value and the current value, and a load impedance value calculation formula is obtained:
Figure BDA0003841233090000171
therefore, after the processor calculates the voltage amplitude, the current amplitude and the current-voltage phase difference, the voltage amplitude, the current amplitude and the current-voltage phase difference are substituted into the formula 22, and the load impedance value can be calculated.
Meanwhile, the processor can calculate the output power of the radio frequency power supply according to formulas 5 and 8.
In one embodiment of the invention, the processor includes a three-state phase detector,
the first input end and the second input end of the three-state phase discriminator are respectively connected with the voltage measuring module and the current measuring module, and the current-voltage phase difference value is calculated and determined according to the first square wave signal and the second square wave signal by receiving the first square wave signal and the second square wave signal.
Referring to fig. 6, a schematic diagram of a three-state phase detector of the present invention is shown. Taking the received square wave signal as a square wave signal as an example, the input end (U _ CLK) of the first flip-flop of the three-state phase detector is connected to the output end of the voltage measurement module, receives the first square wave signal, and uses the first square wave signal as a clock signal of the first flip-flop. And the input end (I _ CLK) of a second trigger of the three-state phase discriminator is connected with the output end of the current measuring module, receives a second square wave signal and takes the second square wave signal as a clock signal of the second trigger. The first flip-flop and the second flip-flop are, for example, D flip-flops. The trigger signal input end of the first trigger and the trigger signal input end of the second trigger are connected with a preset high level, namely the two triggers are set to be the high level. When U _ CLK/I _ CLK rises, Q = D of the corresponding flip-flop, the first flip-flop or the second flip-flop outputs a high level. And the reset end of the first trigger and the reset end of the second trigger are connected with the AND gate, namely, the signal UP output by the first trigger and the signal DN output by the second trigger are subjected to AND operation through the AND gate and output to the reset ends of the first trigger and the second trigger. And when the signal UP and the signal DN are simultaneously high, resetting the UP and the DN output by the three-state phase discriminator module to form low level, otherwise, forming high level.
Again using the phase measurement calculation method shown in fig. 7, the processor may be, for example, an FPGA, which generates the 400MHz reference clock signal Fs using a phase locked loop. Setting gating TIME GATE _ TIME; the GATE _ TIME is an integer multiple N of the period of the UP and DN signals to be measured. Then, based on the one-TIME high level TIME of the GATE _ TIME, the rising edges of the clock signal Fs, the signal UP, and the signal DN are counted, and since the rising edges of the signal UP and the signal DN have the same number, the number of one rising edge of the signal UP and the signal DN may be used. Then, the ratio of the number of rising edges of the signal UP or DN to the clock signal Fs is used as the difference value in a single gating time period, and the difference value is converted into an angle value, namely the current-voltage phase difference value. As shown in fig. 7, when the GATE _ TIME is high, fs rising edge Fs _ CNT is counted, and at the same TIME, fs rising edges UP _ CNT and DN _ CNT are counted when the UP and DN signals are high, i.e. phase difference, so that:
Figure BDA0003841233090000181
the current-voltage phase difference value is calculated by equation 23.
The processor is connected with the output end of the voltage measuring module, the output end of the current measuring module and the output end of the power acquisition current, and is used for receiving a first direct current signal output by the voltage measuring module and a second direct current signal output by the current measuring module and calculating a voltage amplitude value and a current amplitude value through formulas 9 and 14. And, the processor also substitutes formula 23 to calculate the load impedance value according to the voltage amplitude, the current amplitude and the current-voltage phase difference.
In an embodiment of the invention, the rf power signal acquisition circuit further includes: an upper computer is arranged on the main body,
in practical application, an upper computer can be arranged at the output end of the processor, and the voltage amplitude, the current-voltage phase difference value and the load impedance value which are obtained by calculation of the processor are all transmitted to the upper computer. The upper computer visualizes the voltage amplitude, the current-voltage phase difference value and the load impedance value, and displays the voltage amplitude, the current-voltage phase difference value and the impedance value.
The embodiment of the invention is used for coupling an incoming and outgoing voltage wave signal and a reflected voltage wave signal through the directional coupler; the voltage measurement module is connected with the directional coupler and used for adding the incident voltage wave signal and the reflected voltage wave signal to generate a current-voltage phase sum value signal; converting the transmission line voltage wave signal into a first square wave signal and a first direct current signal; the current measuring module is connected with the directional coupler and used for subtracting the incident voltage wave signal and the reflected voltage wave signal to generate a current-voltage phase difference value signal; converting the transmission line current wave signal into a second square wave signal and a second direct current signal; the processor is connected with the voltage measuring module and the current measuring module and used for determining a voltage amplitude value according to the first direct current signal, determining a current amplitude value according to the second direct current signal, determining a current-voltage phase difference value according to the first square wave signal and the second square wave signal, and determining a load impedance value according to the voltage amplitude value, the current amplitude value and the current-voltage phase difference value. The voltage and the current of the radio frequency power supply load can be monitored in real time, and when the reflected power of the power supply is overlarge, the current or the voltage can be judged to be overlarge, so that the reason can be further analyzed conveniently; by measuring the voltage value, the current value and the phase thereof, the load impedance of the radio frequency power supply can be monitored in real time, so that the impedance change condition of the plasma can be further known, the current-voltage phase difference value is calculated through the three-state phase discriminator, and the phase detection precision is improved; the voltage, the current and the load impedance information of the real-time output end are displayed through the upper computer, process research personnel can know the change condition of the plasma load conveniently, and effective data support is provided for realizing a more complex process.
Referring to fig. 8, a schematic structural diagram of a semiconductor processing apparatus according to an embodiment of the present invention is shown, where the semiconductor processing apparatus 801 includes a rf power source 8011, a rf matcher 8012, a process chamber 8013, and a rf power signal acquisition circuit 8014 as described above.
The embodiments in the present specification are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
As will be appreciated by one skilled in the art, embodiments of the present invention may be provided as a method, apparatus, or computer program product. Accordingly, embodiments of the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, embodiments of the present invention may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and so forth) having computer-usable program code embodied therein.
Embodiments of the present invention are described with reference to flowchart illustrations and/or block diagrams of methods, terminal devices (systems), and computer program products according to embodiments of the invention. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing terminal to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing terminal, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing terminal to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing terminal to cause a series of operational steps to be performed on the computer or other programmable terminal to produce a computer implemented process such that the instructions which execute on the computer or other programmable terminal provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
While preferred embodiments of the present invention have been described, additional variations and modifications of these embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the embodiments of the invention.
Finally, it should also be noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or terminal that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or terminal. Without further limitation, an element defined by the phrase "comprising a … …" does not exclude the presence of another identical element in a process, method, article, or terminal device that comprises the element.
The radio frequency power signal acquisition circuit and the semiconductor process equipment provided by the invention are described in detail, and the principle and the implementation mode of the invention are explained by applying specific examples, and the description of the examples is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed, and in summary, the content of the present specification should not be construed as a limitation to the present invention.

Claims (13)

1. A radio frequency power signal acquisition circuit, wherein the radio frequency power signal acquisition circuit is configured to be connected to a radio frequency power source, the signal acquisition circuit comprising:
the device comprises a directional coupler, a voltage measuring module, a current measuring module and a processor;
the directional coupler is used for receiving the voltage output by the radio frequency power supply and coupling an incoming voltage wave signal and a reflected voltage wave signal;
the voltage measuring module is connected with the directional coupler and used for adding the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage and value signal; shaping the transmission line voltage and value signals and converting the transmission line voltage and value signals into first square wave signals;
the current measuring module is connected with the directional coupler and used for subtracting the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage difference value signal; shaping the transmission line voltage difference signal and converting the transmission line voltage difference signal into a second square wave signal;
the processor is connected with the voltage measuring module and the current measuring module and used for determining a current-voltage phase difference value according to the first square wave signal and the second square wave signal.
2. The signal acquisition circuit of claim 1,
the voltage measuring module is also used for filtering and rectifying the transmission line voltage and value signals and converting the transmission line voltage and value signals into first direct current signals;
the current measurement module is also used for filtering and rectifying the transmission line voltage difference signal and converting the transmission line voltage difference signal into a second direct current signal;
the processor is further configured to determine a voltage amplitude according to the first dc signal, determine a current amplitude according to the second dc signal, and determine a load impedance value according to the voltage amplitude, the current amplitude, and the current-voltage phase difference.
3. The radio frequency power supply signal acquisition circuit of claim 1 or 2, wherein the voltage measurement module comprises: an addition circuit and a first comparison circuit,
the addition circuit is connected with the directional coupler and is used for adding the incident voltage wave signal and the reflected voltage wave signal to generate the transmission line voltage and value signals;
the first comparison circuit is connected with the addition circuit and is used for shaping the transmission line voltage and the value signal into a first square wave signal.
4. The RF power signal acquisition circuit of claim 3, wherein the voltage measurement module further comprises a first detection circuit and a first low pass filter circuit,
the first detection circuit is connected with the addition circuit and is used for performing half-wave rectification on the transmission line voltage and value signals to generate first rectification signals;
the input end of the first low-pass filter circuit is connected with the output end of the first detection circuit, and the output end of the first low-pass filter circuit is connected with the processor and used for converting the first rectified signal into a first direct current signal.
5. A radio frequency power signal acquisition circuit as claimed in claim 1 or 2, wherein the current measurement module comprises: a subtraction circuit and a second comparison circuit,
the subtraction circuit is connected with the directional coupler and is used for subtracting the incident voltage wave signal and the reflected voltage wave signal to generate a transmission line voltage difference value signal;
the second comparison circuit is connected with the subtraction circuit and used for shaping the transmission line current wave signal into a second square wave signal.
6. The RF power signal acquisition circuit of claim 5, wherein the current measurement module further comprises a second detector circuit and a second low pass filter circuit,
the second detection circuit is connected with the subtraction circuit and used for performing half-wave rectification on the transmission line voltage difference signal to generate a second rectification signal;
the input end of the second low-pass filter circuit is connected with the output end of the second detection circuit, and the output end of the second low-pass filter circuit is connected with the processor and used for converting the second rectified signal into a second direct current signal.
7. The radio frequency power supply signal acquisition circuit of any one of claims 1-6, wherein the processor comprises a tri-state phase detector,
the tristate phase detector is connected with the voltage measuring module and the current measuring module and is used for receiving the first square wave signal and the second square wave signal; and determining the current-voltage phase difference value according to the first square wave signal and the second square wave signal.
8. The radio frequency power supply signal acquisition circuit of claim 7, wherein the three-state phase detector comprises a first flip-flop, a second flip-flop, and an AND gate,
the clock input end of the first trigger is connected with the voltage measuring module; the clock input end of the second trigger is connected with the current measuring module; the trigger signal input end of the first trigger and the trigger signal input end of the second trigger are connected with a preset high level;
the output end of the AND gate is connected with the reset end of the first trigger and the reset end of the second trigger; and the input end of the AND gate is respectively connected with the output end of the first trigger and the output end of the second trigger.
9. The radio frequency power supply signal acquisition circuit according to claim 3 or 5, wherein the first comparison circuit and the second comparison circuit are zero-crossing comparison circuits.
10. A radio frequency power supply signal acquisition circuit as claimed in claim 4 or 6, wherein the first low pass filter circuit and the second low pass filter circuit are integrating circuits.
11. The radio frequency power supply signal acquisition circuit according to claim 1 or 2, further comprising: a power signal acquisition circuit for acquiring a power signal,
the directional coupler is also used for outputting an alternating voltage signal;
the power signal acquisition circuit is connected with the directional coupler and used for converting the alternating voltage signal into a direct voltage signal;
the processor is connected with the power signal acquisition circuit and is also used for determining an output power value according to the direct-current voltage signal.
12. The radio frequency power signal acquisition circuit as claimed in any one of claims 1 to 9, further comprising: an upper computer, a control system and a control system,
the upper computer is connected with the output end of the processor and used for monitoring the voltage amplitude, the current-voltage phase difference value and the load impedance value in real time.
13. Semiconductor processing equipment comprising a radio frequency power supply, a radio frequency matcher, a process chamber and a radio frequency power supply signal acquisition circuit as claimed in any one of claims 1 to 12.
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