CN216749809U - Wafer pad pasting equipment and film pulling mechanism thereof - Google Patents

Abstract

The utility model discloses a wafer film sticking device and a film pulling mechanism thereof, which are used for sticking a film, wherein the film pulling mechanism comprises a bearing platform, a porous fixed suction plate and a porous movable suction plate, and the porous fixed suction plate is fixed on one side of the bearing platform; the porous movable suction plate moves back and forth corresponding to the other side of the bearing platform; the porous fixed suction plate and the porous movable suction plate jointly adsorb two sides of the mucous membrane, and the porous movable suction plate can drive one side of the mucous membrane to move in the direction away from the porous fixed suction plate so as to tighten the mucous membrane. Therefore, the movable porous suction plate can move towards the direction away from the fixed porous suction plate to provide a pulling force to the adhesive film, so that the adhesive film is smooth, the subsequent wafer can be conveniently adhered to the adhesive film, and the process or detection of the wafer is more stable.

Description

Wafer pad pasting equipment and film pulling mechanism thereof

Technical Field

The utility model relates to film pasting equipment, in particular to wafer film pasting equipment and a film pulling mechanism thereof.

Background

At present, machines for cutting adhesive films on the market use one or at least two cutters to cut the adhesive film on the carrier plate into a plurality of separated adhesive films for adhering subsequent frames.

However, if the adhesive film on the carrier is uneven, the adhesive film adhered to the frame will also be uneven when the carrier is adhered to the frame, which may affect the adhesion of the subsequent wafer, and may cause problems in the process or inspection of the wafer.

In view of the above, the present inventor has made an intensive study on the above prior art and applied the study in cooperation with the theory to solve the above problems, which is an improved objective of the present inventor.

SUMMERY OF THE UTILITY MODEL

The utility model provides a wafer film sticking device and a film pulling mechanism thereof, which utilize a movable porous suction plate to move towards a direction away from a fixed porous suction plate so as to provide a pulling force for a mucous membrane, so that the mucous membrane is smooth, a subsequent wafer is conveniently stuck on the mucous membrane, and the wafer processing procedure or detection is more stable.

The utility model provides a wafer film sticking device, which is used for sticking a film and a frame, and comprises: the film rolling mechanism is used for placing the mucous membrane; the film conveying device comprises at least two film pulling mechanisms which move circularly and convey the mucous membrane, and each film pulling mechanism comprises a bearing platform, a porous fixed suction plate fixed on one side of the bearing platform and a porous movable suction plate which moves back and forth corresponding to the other side of the bearing platform; the film cutting mechanism is configured corresponding to the at least two film pulling mechanisms, the film cutting mechanism can cut and separate the mucous membrane, and the frame is correspondingly adhered to the separated mucous membrane; the porous fixed suction plate and the porous movable suction plate jointly adsorb two sides of the mucous membrane, and the porous movable suction plate can drive one side of the mucous membrane to move in the direction away from the porous fixed suction plate so as to tighten the mucous membrane.

Preferably, one side of the top surface of each of the bearing tables is provided with a first groove and at least one third negative pressure suction hole located inside the first groove, and each of the porous fixed suction plates includes a porous material plate embedded in the first groove.

Preferably, each of the porous movable suction plates includes a movable base and a porous material plate, each of the movable bases reciprocates corresponding to the other side of the corresponding bearing table, a second groove and at least one fourth negative pressure suction hole located inside the second groove are formed in the top surface of each of the movable bases, and each of the porous material plates is embedded in each of the second grooves.

Preferably, the inner circumference of each first groove and each second groove has an annular inner circumference wall, and each annular inner circumference wall abuts against and is sealed to the outer circumference of each porous material plate.

Preferably, each of the first grooves and the second grooves has at least two inner sidewalls and at least two openings, respectively, each of the inner sidewalls abuts against and seals a portion of the outer periphery of each of the porous material plates, and each of the film-pulling mechanisms further includes a sealing adhesive layer, which covers and seals another portion of the outer periphery of each of the porous material plates through the openings.

Preferably, the film conveying device further includes a circulating driving mechanism, the circulating driving mechanism is connected to and drives the film pulling mechanism to circularly move along a circulating path, a direction in which each of the porous movable suction plates is away from each of the porous fixed suction plates defines a stretching direction, the stretching direction is perpendicular to the circulating path, and the film cutting mechanism includes a moving cutter capable of moving along the stretching direction and cutting the mucous membrane.

Preferably, the film cutting mechanism further comprises a horizontal driver and a vertical driver, the horizontal driver is arranged above the film pulling mechanism, the vertical driver is fixedly connected with the horizontal driver and horizontally moves along with the horizontal driver, and the movable cutter is fixedly connected with the vertical driver and vertically moves along with the vertical driver.

Preferably, each of the fixed porous suction plates and each of the movable porous suction plates are respectively located on the left and right sides of the top surface of each of the bearing tables, at least two first negative pressure suction holes are formed in the lower side of the top surface of each of the bearing tables, and at least two second negative pressure suction holes are formed in the upper side of the top surface of each of the bearing tables, and when the mucous membrane is adsorbed on the two adjacent bearing tables, the horizontal driver is located between the adjacent first negative pressure suction holes and the adjacent second negative pressure suction holes.

Preferably, the film rolling device further comprises a moving mechanism, the moving mechanism is disposed at an end of the film pulling mechanism away from the film rolling mechanism, the moving mechanism includes a pressing actuator, an absorbing member fixed to the pressing actuator and vertically moving along with the pressing actuator, and a pushing actuator disposed under the absorbing member, the pushing actuator can drive each film pulling mechanism to ascend or descend, and the absorbing member can absorb the frame and press the frame and the separated mucous membrane to adhere to each other.

The utility model also provides a film pulling mechanism of the wafer film sticking equipment, which is used for a mucous membrane, and the film pulling mechanism comprises: a bearing table; a porous fixed suction plate fixed on one side of the bearing table; and a porous movable suction plate, which moves to and fro corresponding to the other side of the bearing platform; the porous fixed suction plate and the porous movable suction plate jointly adsorb two sides of the mucous membrane, and the porous movable suction plate can drive one side of the mucous membrane to move in the direction away from the porous fixed suction plate so as to tighten the mucous membrane.

Preferably, one side of the top surface of the susceptor is provided with a first groove and at least one third negative pressure suction hole located inside the first groove, and the porous fixed suction plate comprises a porous material plate embedded in the first groove.

Preferably, the porous movable suction plate comprises a movable base and a porous material plate, the movable base reciprocates corresponding to the other side of the bearing table, a second groove and at least one fourth negative pressure suction hole located in the second groove are formed in the top surface of the movable base, and the porous material plate is embedded in the second groove.

Preferably, the inner peripheries of the first groove and the second groove have an annular inner periphery respectively, and each annular inner periphery abuts against and is sealed at the outer periphery of each porous material plate.

Preferably, the sealing device further comprises a sealing adhesive layer, wherein the inner peripheries of the first groove and the second groove are respectively provided with at least two inner side walls and at least two openings, the inner side walls are abutted against and sealed at one part of the outer periphery of each porous material plate, and the sealing adhesive layer is covered and sealed at the other part of the outer periphery of each porous material plate through the openings.

Preferably, the fixed porous suction plate and the movable porous suction plate are respectively located on the left side and the right side of the top surface of the bearing table, at least two first negative pressure suction holes are arranged on the lower side of the top surface of the bearing table, and at least two second negative pressure suction holes are arranged on the upper side of the top surface of the bearing table.

Based on the above, the bearing table is made of stainless steel, and the porous fixed suction plates and the porous movable suction plates on the two sides of the bearing table are made of ceramic, so that the range of the ceramic is reduced, the film pulling mechanism has the advantages of cost saving and structural strength enhancement, and meanwhile, the ceramic is arranged on the two sides of the bearing table, so that the adsorption force of the film pulling mechanism is sufficient when the mucous membrane is tensioned.

Drawings

The foregoing and other objects, features and advantages of the utility model will be apparent from the following more particular description of preferred embodiments of the utility model, as illustrated in the accompanying drawings. Like reference numerals refer to like parts throughout the drawings, and the drawings are not intended to be drawn to scale in actual dimensions, emphasis instead being placed upon illustrating the principles of the utility model.

FIG. 1 is a schematic perspective view of a film laminating apparatus according to a preferred embodiment of the present invention;

FIG. 2 is a top view of a preferred embodiment film laminating apparatus of the present invention;

FIG. 3 is an exploded perspective view of the film drawing mechanism of the preferred embodiment of the present invention;

FIG. 4 is a perspective assembly view of the film drawing mechanism of the preferred embodiment of the present invention;

FIG. 5 is a top view of a film drawing mechanism according to a preferred embodiment of the present invention;

FIG. 6 is a schematic view of a first usage state of the film laminating apparatus according to the preferred embodiment of the present invention;

FIG. 7 is a schematic view of a second usage state of the film laminating apparatus according to the preferred embodiment of the present invention;

FIG. 8 is a schematic view of the film drawing mechanism according to the preferred embodiment of the present invention in use;

FIG. 9 is a schematic view of a first state of use of the film cutting mechanism according to the preferred embodiment of the present invention;

FIG. 10 is a schematic view of a second state of use of the film cutting mechanism of the preferred embodiment of the present invention;

FIG. 11 is a schematic view of a third use state of the film cutting mechanism according to the preferred embodiment of the present invention;

FIG. 12 is a schematic view showing a third usage state of the film laminating apparatus according to the preferred embodiment of the present invention;

FIG. 13 is a schematic view showing a fourth usage state of the film laminating apparatus according to the preferred embodiment of the present invention;

FIG. 14 is a schematic view of a preferred embodiment of the present invention showing a frame and mucosa to be bonded;

FIG. 15 is a schematic view of a preferred embodiment of the frame and mucosa assembly of the present invention;

fig. 16 is a perspective assembly view of another embodiment of the film drawing mechanism of the present invention.

Reference numerals are as follows:

100: mucous membrane

101: release paper

102: unfilled corner

200: frame structure

201: hollow-out opening

10 wafer pad pasting equipment

1: film winding mechanism

11: mucous membrane fixing shaft

12: release paper fixing shaft

2: conveying film device

21: circulating driving mechanism

22: film drawing mechanism

23: bearing platform

231: first negative pressure suction hole

232: second negative pressure suction hole

233: the first groove

234: third negative pressure suction hole

24: porous fixed suction plate

25: porous movable suction plate

251: movable base

252: second groove

253: fourth negative pressure suction hole

26. 26': porous material board

271: annular inner peripheral wall

272: inner side wall

273: opening of the container

28: adhesive sealing layer

3: film cutting mechanism

31: horizontal driver

32: vertical driver

33: movable cutter

34: protective outer frame

4: moving mechanism

41: push-down actuator

42: adsorption piece

43: push-up actuator

5: corner cutting mechanism

d: direction of stretching

s: circulation path

w1, w 2: width of

h1, h 2: separation distance

Detailed Description

In the description, numerous specific details are provided to provide a thorough understanding of embodiments of the utility model; one skilled in the art will recognize, however, that the utility model may be practiced without one or more of the specific details; in other instances, well-known details are not shown or described to avoid obscuring aspects of the utility model. The technical contents and detailed description of the present invention are described below with reference to the drawings:

referring to fig. 1 to 15, the present invention provides a wafer film pasting device and a film pulling mechanism thereof, which are used for pasting a mucous membrane 100 to a frame 200, wherein the wafer film pasting device 10 mainly comprises a film rolling mechanism 1, a film conveying device 2 and a film cutting mechanism 3; the film drawing mechanism 22 mainly includes a supporting platform 23, a porous fixed suction plate 24 and a porous movable suction plate 25.

As shown in fig. 1 to 2, 6 to 7, and 12 to 13, the film rolling mechanism 1 is used for placing the mucosa 100, the film rolling mechanism 1 includes a mucosa fixing shaft 11 and a release paper fixing shaft 12 disposed above the mucosa fixing shaft 11, the mucosa 100 is entirely rolled on the mucosa fixing shaft 11, a release paper 101 is attached to the mucosa surface of the mucosa 100, and the release paper fixing shaft 12 is used for rolling up the release paper 101.

As shown in fig. 1 to 13, the film conveying device 2 includes a circulating driving mechanism 21 and at least two film pulling mechanisms 22, the circulating driving mechanism 21 is connected to drive the at least two film pulling mechanisms 22 to move circularly along a circulating path s, each film pulling mechanism 22 includes a supporting platform 23, a porous fixed suction plate 24 fixed on one side of the supporting platform 23, and a porous movable suction plate 25 reciprocating corresponding to the other side of the supporting platform 23, so that the adhesive film 100 is sucked and conveyed by the at least two film pulling mechanisms 22 and is stretched from the adhesive film fixed shaft 11 toward the at least two film pulling mechanisms 22.

In detail, the fixed porous suction plates 24 and the movable porous suction plates 25 are respectively located on the left and right sides of the top surface of each support platform 23, and at least two first negative pressure suction holes 231 are provided on the lower side of the top surface of each support platform 23 and at least two second negative pressure suction holes 232 are provided on the upper side thereof. The movable porous suction plate 25 can be moved relative to the fixed porous suction plate 24 by a pneumatic cylinder or an oil cylinder, but not limited thereto.

In addition, a first groove 233 and one or at least two third negative pressure suction holes 234 located inside the first groove 233 are disposed on one side of the top surface of each bearing platform 23, and each porous fixed suction plate 24 includes a porous material plate 26 embedded in the first groove 233.

Furthermore, each porous movable suction plate 25 comprises a movable base 251 and a porous material plate 26 ', each movable base 251 reciprocates corresponding to the other side of each bearing platform 23, a second groove 252 and one or at least two fourth negative pressure suction holes 253 located in the second groove 252 are arranged on the top surface of each movable base 251, and each porous material plate 26' is embedded in each second groove 252.

The platform 23 is made of stainless steel, the porous material plates 26 and 26' are made of ceramic, and at least two pores for air to flow through are formed in the ceramic, so that the porous fixed suction plate 24 and the porous movable suction plate 25 can suck air through the pores, and the effect of stable adsorption of the porous fixed suction plate 24 and the porous movable suction plate 25 is achieved.

The inner peripheries of the first grooves 233 and the second grooves 252 respectively have an annular inner peripheral wall 271, and the annular inner peripheral wall 271 abuts and is sealed to the outer peripheries of the porous material plates 26 and 26 ', so that the pores at the outer peripheries of the porous material plates 26 and 26' are sealed by the annular inner peripheral wall 271 and air cannot be sucked, and only the pores at the top surfaces of the porous material plates 26 and 26 'can suck air, thereby concentrating and improving the adsorption force of the top surfaces of the porous material plates 26 and 26', and allowing the porous fixed suction plate 24 and the porous movable suction plate 25 to adsorb the mucosa 100 more stably.

The distance h1 between the porous fixed suction plate 24 and the porous movable suction plate 25 is equal to or greater than the width w1 of the mucous membrane 100, the distance h2 between the porous fixed suction plate 24 and the porous movable suction plate 25 is less than the width w1 of the mucous membrane 100, so that the porous fixed suction plate 24 and the porous movable suction plate 25 can jointly suck the two sides of the mucous membrane 100, and the porous movable suction plate 25 can drive one side of the mucous membrane 100 to move away from the porous fixed suction plate 24 to tighten the mucous membrane 100.

The direction in which each of the movable porous suction plates 25 is separated from each of the fixed porous suction plates 24 is defined as a stretching direction d, and the stretching direction d is arranged perpendicular to the circulation path s.

As shown in fig. 1 to 2, 6 to 7, and 9 to 13, the cutting mechanism 3 is disposed corresponding to at least two film pulling mechanisms 22, the cutting mechanism 3 can cut and separate the mucosa 100, and the frame 200 is adhered corresponding to the separated mucosa 100.

As described further below, the film cutting mechanism 3 includes a horizontal driver 31, a vertical driver 32 and a moving cutter 33, the moving cutter 33 is a conical blade, the horizontal driver 31 is disposed above the at least two film pulling mechanisms 22, the vertical driver 32 is fixedly connected to the horizontal driver 31 and moves horizontally left and right along with the horizontal driver 31, the moving cutter 33 is fixedly connected to the vertical driver 32 and moves vertically up and down along with the vertical driver 32, so that the moving cutter 33 can move a horizontal moving distance along with the horizontal driver 31 and a vertical moving distance along with the vertical driver 32.

In addition, the film pulling mechanism 22 can absorb the mucous membrane 100 in an adjacent abutting arrangement, and when the mucous membrane 100 is absorbed on two adjacent abutting film pulling mechanisms 22, the horizontal driver 31 can be located between the adjacent first negative pressure suction holes 231 and at least two second negative pressure suction holes 232, so that the movable cutter 33 can completely cut and separate the mucous membrane 100 in a knife manner, and simultaneously, the generation of waste materials is avoided, so as to achieve the characteristics of effectively utilizing resources and saving cost.

Furthermore, the film cutting mechanism 3 further comprises a protective outer frame 34, the protective outer frame 34 covers the horizontal driver 31, the vertical driver 32 and the movable cutter 33, and the vertical driver 32 can drive the movable cutter 33 to be hidden in the protective outer frame 34, so that the movable cutter 33 can be hidden in the protective outer frame 34 when not in use, and the use safety of the film cutting mechanism 3 is further improved.

As shown in fig. 1 to 2 and 5 to 13, the wafer pasting apparatus 10 of the present invention further includes a corner cutting mechanism 5, the corner cutting mechanism 5 is used for cutting two corners 102 on two sides of the mucous membrane 100, so that the movable cutter 33 can completely cut and separate the mucous membrane 100 from the two corners 102, that is, the movable cutter 33 can move and cut the mucous membrane 100 from one corner 102 to the other corner 102 along the stretching direction d, the horizontal moving distance of the movable cutter 33 is greater than the width w1 of the mucous membrane 100, so that the movable cutter 33 can completely cut and separate the mucous membrane 100, and the frame 200 is adhered to the separated mucous membrane 100.

The angle cutting mechanism 5 includes a pneumatic cylinder or an oil cylinder and an angle cutting knife connected to the pneumatic cylinder or the oil cylinder, and the pneumatic cylinder or the oil cylinder drives the angle cutting knife to move toward the direction close to the mucous membrane 100 so as to drive the angle cutting knife to punch the two sides of the mucous membrane 100 and cut two unfilled corners 102. As shown in fig. 1, 6 to 7, and 12 to 13, the wafer film laminating apparatus 10 of the present invention further includes a moving mechanism 4, the moving mechanism 4 is disposed at one end of at least two film pulling mechanisms 22 away from the film rolling mechanism 1, the moving mechanism 4 includes a pressing actuator 41, a suction device 42 fixed to the pressing actuator 41 and vertically moving along with the pressing actuator 41, and a lifting actuator 43 disposed below the suction device 42, the lifting actuator 43 can drive each film pulling mechanism 22 to ascend or descend, and the suction device 42 can suck the frame 200 and press the frame 200 and the separated mucosa 100 to be adhered to each other.

As shown in fig. 14 to 15, a hollow 201 is disposed inside the frame 200, the hollow 201 exposes the adhesive surface of the adhesive film 100 for adhering the wafer, and since the separated adhesive film 100 is rectangular or square, the frame 200 is a rectangular frame or a square frame, the width w2 of the frame 200 is substantially equal to (i.e. substantially equal to or slightly larger than) the width w1 of the adhesive film 100, and the corner end of the frame 200 is designed to be rounded for convenient taking and avoiding collision damage, the corner end of the separated mucous membrane 100 can be cut into unfilled corners 102 by the corner cutting mechanism 5, so that the outer periphery of the mucous membrane 100 is completely hidden in the frame 200, further, the shape of the separated adhesive film 100 is matched with the shape of the frame 200, so as to prevent the adhesive film 100 from being tilted, and avoid the generation of excessive waste material of the adhesive film 100, thereby effectively and completely utilizing each sub-material of the mucous membrane 100 and achieving the effect of saving cost.

The width w2 of the frame 200 is preferably about 1mm greater than the width w1 of the mucosa 100, so that the outer circumference of the frame 200 is slightly larger than the outer circumference of the mucosa 100.

In addition, the preferred embodiment of the circulating driving mechanism 21, the horizontal driver 31, the vertical driver 32, the pressing actuator 41, and the lifting actuator 43 is a pneumatic cylinder or an oil cylinder, and the suction member 42 is a vacuum chuck, but not limited thereto.

As shown in fig. 1 to 15, in the usage state of the wafer film pasting apparatus 10 and the film drawing mechanism 22 according to the present invention, any two film drawing mechanisms 22 are used to suck the adhesive film 100 in an adjacent abutting arrangement, and when the adhesive film 100 is sucked by the film drawing mechanisms 22, the porous fixed suction plate 24 and the porous movable suction plate 25 will suck both sides of the adhesive film 100 together, and the porous movable suction plate 25 can drive one side of the adhesive film 100 to move away from the porous fixed suction plate 24 to tighten the adhesive film 100.

The angle cutting mechanism 5 cuts two unfilled corners 102 on two sides of the mucous membrane 100, when the mucous membrane 100 is absorbed on the two adjacent membrane pulling mechanisms 22, the horizontal driver 31 and the two unfilled corners 102 are located between the adjacent first negative pressure suction holes 231 and at least two second negative pressure suction holes 232, the vertical driver 32 drives the movable cutter 33 to extend out of the protective outer frame 34, the horizontal driver 31 drives the movable cutter 33 to move along the stretching direction d and cut the mucous membrane 100 in the gap between the two bearing tables 23, the movable cutter 33 can move along the stretching direction d from one unfilled corner 102 and cut the mucous membrane 100 to the other unfilled corner 102, and the horizontal moving distance of the movable cutter 33 is greater than the width w1 of the mucous membrane 100, so that the movable cutter 33 can completely cut and separate the mucous membrane 100, and the unfilled corner 102 is formed at the corner end of the separated mucous membrane 100.

Then, the film pulling mechanism 22 with the separated mucous membrane 100 is moved into the operation area of the moving mechanism 4, because the mucous membrane surface of the mucous membrane 100 is disposed upward relative to the bearing platform 23, the pushing actuator 43 drives the film pulling mechanism 22 to ascend, the adsorbing member 42 adsorbs the frame 200 and drives the frame 200 to move downward, and further the mucous membrane surfaces of the frame 200 and the mucous membrane 100 are pressed to be adhered to each other, after the mutually adhered frame 200 and mucous membrane 100 are moved away from the bearing platform 23, the film pulling mechanism 22 moves to abut against another film pulling mechanism 22 and adsorbs the mucous membrane 100, so as to achieve the action that at least two film pulling mechanisms 22 circularly move along the circulation path s.

Therefore, when the porous movable suction plate 25 drives one side of the adhesive film 100 to move away from the porous fixed suction plate 24, a pulling force is applied to the adhesive film 100, so as to pull and level the adhesive film 100, so that the subsequent frame 200 and the adhesion between the wafer and the adhesive film 100 are more smooth and compact, and the process or the detection of the wafer is more stable.

In addition, the known adsorption bearing platform is made of all stainless steel materials and has the problem of insufficient adsorption force, and the known adsorption bearing platform is made of all ceramic materials and has the problems of high cost and easy breakage; in comparison, the present invention utilizes the carrier table 23 made of stainless steel, and the porous fixed suction plates 24 and the porous movable suction plates 25 on both sides of the carrier table 23 made of ceramic, so as to reduce the range of ceramic, and make the film-pulling mechanism 22 have the advantages of saving cost and enhancing structural strength, and meanwhile, the ceramic is disposed on both sides of the carrier table 23, so that the absorption force of the film-pulling mechanism 22 is sufficient when the adhesive film 100 is tensioned.

Moreover, because the movable cutter 33 needs to be corrected or replaced, the film cutting mechanism 3 is arranged above at least two film pulling mechanisms 22 and further has a distance with the film pulling mechanisms 22, so that the correction or replacement of the movable cutter 33 can be facilitated, and the collision and the movement to the film pulling mechanisms 22 in the process of correcting or replacing the movable cutter 33 can be avoided.

Referring to fig. 16, another embodiment of the film drawing mechanism 22 of the present invention is shown, in which the embodiment of fig. 16 is substantially the same as the embodiment of fig. 1 to 15, and the embodiment of fig. 16 is different from the embodiment of fig. 1 to 15 in that the structures of the fixed porous suction plate 24 and the movable porous suction plate 25 are different.

As described in detail below, the inner peripheries of the first groove 233 and the second groove 252 respectively have at least two inner sidewalls 272 and at least two openings 273, the at least two inner sidewalls 272 abut and are sealed to a portion of the outer periphery of each porous material plate 26, 26 ', each film pulling mechanism 22 further includes a sealant layer 28, and the sealant layer 28 covers and is sealed to another portion of the outer periphery of each porous material plate 26, 26' through the at least two openings 273.

Therefore, the pores at the outer periphery of the porous material plates 26 and 26 ' are sealed by the inner wall 272 and the sealant layer 28, so that air cannot be sucked, and only the pores at the top surfaces of the porous material plates 26 and 26 ' can suck air, thereby concentrating and improving the suction force at the top surfaces of the porous material plates 26 and 26 ', so that the porous fixed suction plate 24 and the porous movable suction plate 25 can more firmly suck the adhesive film 100.

However, the above description is only a preferred embodiment of the present invention, and the scope of the present invention should not be limited by the above description, and all equivalent variations and modifications made by the claims of the present invention should also be covered by the protection scope of the present invention. The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features. The present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof, and it is therefore intended that all such changes and modifications as would be obvious to one skilled in the art be included within the scope of the appended claims.

Claims (15)

1. A wafer film sticking apparatus for sticking a film to a frame, comprising:

the film rolling mechanism is used for placing the mucous membrane;

the film conveying device comprises at least two film pulling mechanisms which move circularly and convey the mucous membrane, and each film pulling mechanism comprises a bearing platform, a porous fixed suction plate fixed on one side of the bearing platform and a porous movable suction plate which moves back and forth corresponding to the other side of the bearing platform; and

the film cutting mechanism is configured corresponding to the film pulling mechanism, the film cutting mechanism can cut and separate the mucous membrane, and the frame is correspondingly adhered to the separated mucous membrane;

the porous fixed suction plate and the porous movable suction plate jointly adsorb two sides of the mucous membrane, and the porous movable suction plate can drive one side of the mucous membrane to move in the direction away from the porous fixed suction plate so as to tighten the mucous membrane.

2. The wafer laminating apparatus according to claim 1, wherein a first groove and at least a third vacuum suction hole are formed on one side of the top surface of each of the plurality of susceptors, and each of the plurality of porous fixed suction plates comprises a porous plate embedded in the first groove.

3. The wafer coating apparatus according to claim 2, wherein each of the porous suction plates comprises a movable base and a porous plate, each movable base reciprocates corresponding to the other side of the susceptor, and the top surface of each movable base is provided with a second groove and at least one fourth negative pressure suction hole located inside the second groove, and each porous plate is engaged with each second groove.

4. The wafer laminating apparatus according to claim 3, wherein the inner periphery of each of the first recesses and the second recesses has an annular inner periphery, and each of the annular inner peripheries abuts against and is sealed to the outer periphery of each of the porous material plates.

5. The wafer laminating apparatus according to claim 3, wherein the inner periphery of each of the first grooves and the second grooves respectively has at least two inner sidewalls and at least two openings, each of the inner sidewalls abuts against and seals a portion of the outer periphery of each of the porous material plates, and each of the film pulling mechanisms further includes a sealing adhesive layer covering and sealing another portion of the outer periphery of each of the porous material plates through the openings.

6. The wafer film laminating apparatus according to claim 1, wherein the film conveying device further comprises a circulating driving mechanism connected to and driving the film drawing mechanism to move circularly along a circulating path, a direction in which each of the porous movable suction plates is away from each of the porous fixed suction plates defines a stretching direction, the stretching direction is perpendicular to the circulating path, and the film cutting mechanism comprises a moving cutter capable of moving along the stretching direction and cutting the adhesive film.

7. The wafer laminating apparatus according to claim 6, wherein the film cutting mechanism further comprises a horizontal driver and a vertical driver, the horizontal driver is disposed above the film pulling mechanism, the vertical driver is fixedly connected to the horizontal driver and horizontally moves along with the horizontal driver, and the moving tool is fixedly connected to the vertical driver and vertically moves along with the vertical driver.

8. The wafer laminating apparatus according to claim 7, wherein each of the fixed porous suction plates and each of the movable porous suction plates are respectively located on left and right sides of a top surface of each of the plurality of stages, at least two first negative pressure suction holes are formed on a lower side of the top surface of each of the plurality of stages, and at least two second negative pressure suction holes are formed on an upper side of the top surface of each of the plurality of stages, and when the adhesive film is adhered to two adjacent stages, the horizontal driver is located between the adjacent first negative pressure suction holes and the adjacent second negative pressure suction holes.

9. The wafer film pasting apparatus as claimed in claim 1, further comprising a moving mechanism disposed at an end of the film drawing mechanism away from the film rolling mechanism, wherein the moving mechanism comprises a pressing actuator, a suction member fixed to the pressing actuator and moving vertically along with the pressing actuator, and a pushing actuator disposed under the suction member, the pushing actuator can drive the film drawing mechanisms to move up or down, and the suction member can suck the frame and press the frame and the separated adhesive film to adhere to each other.

10. The utility model provides a wafer pad pasting equipment draw membrane mechanism for taut mucous membrane, its characterized in that draws membrane mechanism includes:

a bearing table;

a porous fixed suction plate fixed on one side of the bearing table; and

a porous movable suction plate which reciprocates corresponding to the other side of the bearing platform;

the porous fixed suction plate and the porous movable suction plate jointly adsorb two sides of the mucous membrane, and the porous movable suction plate can drive one side of the mucous membrane to move in the direction away from the porous fixed suction plate so as to tighten the mucous membrane.

11. The film drawing mechanism of wafer film pasting equipment as claimed in claim 10, wherein a first groove and at least a third negative pressure suction hole located inside the first groove are formed on one side of the top surface of the susceptor, and the porous fixed suction plate comprises a porous material plate embedded in the first groove.

12. The film drawing mechanism of wafer film pasting equipment as claimed in claim 11, wherein the porous movable suction plate comprises a movable base and a porous material plate, the movable base reciprocates corresponding to the other side of the carrier, and the top surface of the movable base is provided with a second groove and at least one fourth negative pressure suction hole located inside the second groove, the porous material plate is embedded in the second groove.

13. The film pulling mechanism of claim 12, wherein the inner peripheries of the first recess and the second recess have an annular inner peripheral wall, and each annular inner peripheral wall abuts against and is sealed to the outer periphery of each porous material plate.

14. The film drawing mechanism of wafer film pasting equipment as claimed in claim 12, further comprising a sealing adhesive layer, wherein the inner peripheries of the first and second grooves respectively have at least two inner sidewalls and at least two openings, the inner sidewalls abut against and seal a portion of the outer periphery of each porous material plate, and the sealing adhesive layer covers and seals another portion of the outer periphery of each porous material plate through the openings.

15. The film drawing mechanism of wafer film pasting equipment as claimed in claim 10, wherein the porous fixed suction plate and the porous movable suction plate are respectively located at the left and right sides of the top surface of the susceptor, the underside of the top surface of the susceptor is provided with at least two first negative pressure suction holes and the upside of the top surface of the susceptor is provided with at least two second negative pressure suction holes.

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