TWM622602U - Wafer tape mounting apparatus and its corner cutting mechanism - Google Patents

Abstract

This creation is about a wafer lamination equipment and its corner cutting mechanism, which are used for mucous membranes. The wafer lamination equipment includes a film rolling mechanism, a transfer film device, a film cutting mechanism and a corner cutting mechanism, and the film rolling mechanism is used for placing the mucosa; The film conveying device includes a plurality of film pulling mechanisms that move cyclically and absorb and transmit the mucous membrane; the film cutting mechanism corresponds to the configuration of the plurality of film pulling mechanisms, and the film cutting mechanism includes a moving knife; the angle cutting mechanism is arranged between the film rolling mechanism and the film cutting mechanism, and the angle cutting mechanism The mechanism includes two bevel cutters arranged on both sides of the mucosa; wherein, the two bevel cutters are used to cut two bevels on both sides of the mucosa, and the moving cutter is used to completely cut and separate the mucosa from the two bevels. Thereby, the corner ends of the separated mucous membranes can be chamfered to fit the frame shape.

Description

Wafer sticking equipment and its corner cutting mechanism

This creation is about a lamination equipment, especially a wafer lamination equipment and its corner cutting mechanism.

At present, the machines for cutting adhesive films on the market will use one or more cutters to cut the adhesive films placed on the carrier plate into a plurality of circular or square separating adhesive films for subsequent frame bonding.

However, after the step of bonding the frame and the adhesive film is completed, the remaining adhesive films will be hollowed out one by one, and cannot be used for subsequent use. Finally, the remaining adhesive films will be discarded as waste, which is a waste of resources. In addition, the corners of the frame are designed with rounded corners to facilitate access and avoid collision damage. Therefore, how to cut the film to match the shape of the frame and avoid the generation of waste is the focus of industry research and development.

In view of this, the creator of the present invention has devoted himself to the research and application of the theory, and tried his best to solve the above-mentioned problems, which is the goal of the creator's improvement.

This creation provides a wafer lamination equipment and its corner cutting mechanism, which uses two corner cutters to cut two missing corners on both sides of the mucosa, and then moves the cutter to completely cut and separate the mucosa from the two corners, so that the separation The corner ends of the separated mucous membranes are cut to fit the shape of the frame, and there is no generation of excessive waste, so as to achieve the characteristics of efficient use of resources and cost saving.

In this creative embodiment, the present invention provides a wafer lamination device for a mucous membrane and a frame, the wafer lamination device includes: a film roll mechanism for placing the mucous membrane; a transfer membrane device, It includes a plurality of film pulling mechanisms that circulate and move and adsorb and transmit the mucous membrane; all film mechanisms are configured corresponding to the plurality of film pulling mechanisms, and the film cutting mechanism includes a moving knife; and a cutting angle mechanism, which is arranged between the film rolling mechanism and the cutting Between the membrane mechanisms, the corner cutting mechanism comprises two corner cutting knives arranged on both sides of the mucosa; wherein, the two corner cutting knives are used to cut two missing corners on both sides of the mucosa, and the moving cutter is used for cutting two corners. After completely cutting and separating the mucous membranes from the two missing corners, the frame corresponds to the separated mucous membranes.

In this creative embodiment, the present creative system provides a corner cutting mechanism of a wafer lamination equipment, which is used for a mucosa. The corner cutting mechanism includes: two corner cutting knives, which are arranged on both sides of the mucosa, and the two corner cutting tools are A knife is used to cut two bevels on both sides of the mucosa.

Based on the above, the moving tool can move from one missing corner and cut the mucosa to the other missing corner. The horizontal moving distance of the moving tool is greater than the width of the mucosa, so that the moving tool can directly cut the mucosa, and the shape of the separated mucosa matches the outer surface of the frame. Type, without the generation of waste, in order to achieve the characteristics of efficient use of resources and cost savings, and to prevent the occurrence of tilting of the mucosa.

Based on the above, since the moving tool often needs to be calibrated or replaced, the film cutting mechanism is arranged above the multiple film pulling mechanisms, and is further away from the film pulling mechanism, which is more convenient for the calibration or replacement of the moving tool, and avoids the need to correct or replace the moving tool. During the process, it collides and moves to the film pulling mechanism.

100: mucous membrane

101: Release paper

102: missing corners

200: Frame

201: Hollow mouth

10: Wafer sticking equipment

1: Rolling film mechanism

11: Mucosal fixation shaft

12: Release paper fixed shaft

2: Transfer film device

21: Circulation drive mechanism

22: Film pulling mechanism

23: Bearing platform

231: The first negative pressure suction hole

232: The second negative pressure suction hole

233: First groove

234: The third negative pressure suction hole

24: Porous fixed suction plate

25: Porous movable suction plate

251: Active Pedestal

252: Second groove

253: Fourth negative pressure suction hole

26, 26': porous material board

3: Film cutting mechanism

31: Horizontal Drive

32: Vertical Drive

33: Move the tool

34: Protect the outer frame

4: Moving mechanism

41: Press down the actuator

42: Adsorber

43: Push-Up Actuator

5: Chamfering mechanism

51: Chamfering knife

511: Cylinder

512: Angled blade

513: Blow hole

514: air chamber

52: Stamping Driver

53: Limit seat

531: Guide rail

532: Positive pressure pipe

533: Membrane tank

54: Aggregate Box

55: Return spring

56: Lateral membrane rod

d: stretch direction

s: loop path

w1, w2: width

h1, h2: separation distance

θ: acute angle

Figure 1 is a three-dimensional schematic diagram of the film sticking equipment of the present invention.

FIG. 2 is another partial perspective view of the film sticking equipment of the present invention.

FIG. 3 is an enlarged schematic diagram of the area A of FIG. 2 of the present invention.

Figure 4 is a three-dimensional schematic diagram of the corner cutting mechanism of the present invention.

FIG. 5 is another partial perspective view of the corner cutting mechanism of the present invention.

FIG. 6 is a schematic diagram of the first use state of the corner cutting mechanism of the present invention.

FIG. 7 is a schematic diagram of the second use state of the corner cutting mechanism of the present invention.

FIG. 8 is a schematic diagram of the third use state of the corner cutting mechanism of the present invention.

FIG. 9 is a schematic diagram of the fourth use state of the corner cutting mechanism of the present invention.

Fig. 10 is a schematic diagram of the first use state of the film-making device.

Figure 11 is a schematic diagram of the second use state of the film-making device.

Figure 12 is a schematic diagram of the use state of the film pulling mechanism of the present invention.

Figure 13 is a schematic diagram of the first use state of the film cutting mechanism of the present invention.

Figure 14 is a schematic diagram of the second use state of the film cutting mechanism of the present invention.

Figure 15 is a schematic diagram of the third use state of the film cutting mechanism of the present invention.

Figure 16 is a schematic diagram of the third use state of the film-making device.

Figure 17 is a schematic diagram of the fourth use state of the film-making device.

Figure 18 is a schematic diagram of the frame of this creation and the mucosa to be bonded.

Figure 19 is a schematic diagram of the composition of the frame and the mucous membrane of this creation.

The detailed description and technical content of this creation will be described with the drawings as follows, but the attached drawings are only for illustrative purposes and are not intended to limit this creation.

Please refer to FIG. 1 to FIG. 19 , the present invention provides a wafer lamination equipment and its corner cutting mechanism, which are used for a mucous membrane 100 and a frame 200 . The wafer lamination equipment 10 mainly includes a film roll mechanism 1 , a The film conveying device 2 , the film cutting mechanism 3 and the angle cutting mechanism 5 ; the cutting mechanism 5 mainly includes two cutting blades 51 .

As shown in FIG. 1 , FIG. 10 to FIG. 11 , and FIG. 16 to FIG. 17 , the film rolling mechanism 1 is used for placing the mucosa 100 , and the film rolling mechanism 1 includes a mucosal fixing shaft 11 and a separator disposed above the mucosal fixing shaft 11 . The liner fixing shaft 12 , the whole roll of the mucous membrane 100 is sleeved on the mucous membrane fixing shaft 11 , a release paper 101 is attached to the adhesive surface of the mucous membrane 100 , and the release paper fixing shaft 12 is used for winding the release liner 101 .

As shown in FIGS. 1 to 2 and FIGS. 10 to 17 , the film conveying device 2 includes a circulating driving mechanism 21 and a plurality of film pulling mechanisms 22 . The circulating driving mechanism 21 is connected to and drives the plurality of film pulling mechanisms 22 along a loop path s Circular movement, each film pulling mechanism 22 includes a carrying table 23 , a porous fixed suction plate 24 fixed on one side of the carrying table 23 and a porous movable suction plate 25 reciprocatingly moved corresponding to the other side of the carrying table 23 , so that the mucous membrane 100 is sucked and transported by the plurality of film pulling mechanisms 22 and stretched from the mucous membrane fixing shaft 11 toward the direction of the plurality of film pulling mechanisms 22 .

The detailed description is as follows, each porous fixed suction plate 24 and each porous movable suction plate 25 are respectively located on the left and right sides of the top surface of each bearing platform 23, and a plurality of first The negative pressure suction holes 231 and the upper side are provided with a plurality of second negative pressure suction holes 232 . Wherein, the porous movable suction plate 25 can be driven by a pneumatic cylinder or an hydraulic cylinder to move relative to the porous fixed suction plate 24, but is not limited thereto.

In addition, a first groove 233 and one or a plurality of third negative pressure suction holes 234 located inside the first groove 233 are disposed on one side of the top surface of each supporting platform 23 , and each porous fixed suction plate 24 includes A porous material plate 26 fitted into the first groove 233 .

Furthermore, each porous movable suction plate 25 includes a movable base 251 and a porous material plate 26 ′. 251 A second groove 252 and one or a plurality of fourth negative pressure suction holes 253 are disposed on the top surface of the second groove 252, and each porous material plate 26' is fitted into each second groove 252.

In addition, the bearing platform 23 is made of stainless steel, the porous material plates 26 and 26' are made of ceramic material, and the ceramic material is provided with a plurality of pores for gas circulation, so that the porous fixed suction plate 24 and the porous movable suction plate are formed. 25 can suck gas through the pores, so that the porous fixed suction plate 24 and the porous movable suction plate 25 have the effect of stable adsorption.

Wherein, the distance h1 between the outer side of the porous fixed suction plate 24 and the porous movable suction plate 25 is equal to or greater than the width w1 of the mucosa 100 , and the distance h2 between the inner side of the porous fixed suction plate 24 and the porous movable suction plate 25 is smaller than that of the mucosa 100 The width w1 of the width w1 makes the porous fixed suction plate 24 and the porous movable suction plate 25 absorb both sides of the mucous membrane 100 together, and the porous movable suction plate 25 can drive one side of the mucosa 100 away from the porous fixed suction plate 24. The mucous membrane 100 is moved and stretched.

In addition, the direction in which each porous movable suction plate 25 is away from each porous fixed suction plate 24 is defined as a stretching direction d, and the stretching direction d is arranged perpendicular to the loop path s.

As shown in FIGS. 1 to 3 , 10 to 11 , and 13 to 17 , the film cutting mechanism 3 is configured corresponding to the plurality of film pulling mechanisms 22 , the film cutting mechanism 3 can cut and separate the mucosa 100 , and the frame 200 corresponds to the separated mucosa 100 bonding.

Further description is as follows, the film cutting mechanism 3 includes a horizontal driver 31, a vertical driver 32 and a moving knife 33, the moving knife 33 is a conical blade, the horizontal driver 31 is arranged above the plurality of film pulling mechanisms 22, and the vertical driver 32 is fixed Connected to the horizontal driver 31 and follows the horizontal driver 31 to move left and right horizontally, the moving tool 33 is fixed to the vertical driver 32 and follows the vertical driver 32 to vertically move up and down, so that the moving tool 33 can follow the horizontal driver 31 to move a horizontal distance , and follow the vertical drive 32 to move a vertical moving distance.

In addition, the film pulling mechanism 22 will adsorb the mucosa 100 in an adjacent abutting arrangement. When the mucosa 100 is adsorbed on the adjacent two film pulling mechanisms 22, the horizontal driver 31 will be located in the adjacent number one. Between the negative pressure suction holes 231 and the plurality of second negative pressure suction holes 232 , the movable knife 33 can completely cut and separate the mucosa 100 in one knife, while avoiding the generation of waste, so as to achieve the characteristics of effective utilization of resources and cost saving.

Furthermore, the film-cutting mechanism 3 further includes a protective outer frame 34, the protective outer frame 34 covers the outside of the horizontal driver 31, the vertical driver 32 and the moving tool 33, and the vertical driver 32 can drive the moving tool 33 to be hidden outside the protection. Inside the frame 34 , the movable cutter 33 can be stored in the protective outer frame 34 when not in use, thereby improving the use safety of the film cutting mechanism 3 .

As shown in FIGS. 1 , 4 to 11 , and 16 to 17 , the corner cutting mechanism 5 is arranged between the film winding mechanism 1 and the film cutting mechanism 3 . Corner knife 51. Wherein, the second angle cutter 51 in this embodiment is disposed above the mucosa 100, but not limited thereto.

Among them, the two corner cutters 51 are used to cut two missing corners 102 on both sides of the mucosa 100, and the moving cutter 33 is used to completely cut and separate the mucosa 100 from the two missing corners 102, that is, the moving tool 33 can cut out the two missing corners 100. 102 starts to move along the stretching direction d and cuts the mucosa 100 to another missing corner 102, and the horizontal moving distance of the moving knife 33 is greater than the width w1 of the mucosa 100, so that the moving knife 33 can completely cut and separate the mucosa 100, and the frame 200 again Correspondingly, the separated mucosa 100 is bonded.

In addition, the corner cutting mechanism 5 further includes a second punching driver 52, the second punching driver 52 is connected to the second corner cutting knife 51 and drives the second corner cutting blade 51 to move toward the direction close to the mucosa 100, so as to drive the second corner cutting blade 51 to the two sides of the mucosa 100. Two missing corners 102 are cut out by side punching.

Furthermore, each corner cutter 51 has a column body 511, one end of each column body 511 is fixed to each punch driver 52 and the other end extends with an angular blade 512 and a plurality of blowing holes 513 arranged inside the angular blade 512, And each cylinder 511 is provided with an air cavity 514 which communicates with the plurality of blowing holes 513 .

Wherein, the inner side of the angular blade 512 in this embodiment is V-shaped and has an acute angle θ, so that the cut corners 102 cut out from both sides of the mucosa 100 are also V-shaped, and the size of the holes of the plurality of blowing holes 513 The larger one corresponds to the inner side of the angular blade 512 , and the angular blade 512 in this embodiment is a pentagonal ring blade, but not limited thereto, the angular blade 512 can also be a triangular ring blade.

In addition, the angle cutting mechanism 5 further includes two limiting seats 53 , two collecting boxes 54 and two returning springs 55 . The two collecting boxes 54 are arranged below the two limiting seats 53 , and each limiting seat 53 is provided with a guide The rails 531 and a positive pressure through tube 532, each column 511 is accommodated and slides on each guide rail 531, each positive pressure through tube 532 and each air chamber 514 can be disposed opposite to each other and communicated with each other, allowing the positive pressure through tube 532 gives positive pressure airflow to the plurality of blowing holes 513 through the air chamber 514, each return spring 55 is connected to each cylinder 511 at one end and is connected to each limit seat 53 at the other end, so that the return spring 55 is used to drive the angle cutter 51 away from Mucosal 100 direction reset.

In addition, the angle cutting mechanism 5 further includes a transverse film support rod 56. The transverse film support rod 56 is arranged on one side of the two limit seats 53. Each limit seat 53 is provided with a transverse support film rod 56 opposite to each guide A film-containing groove 533 communicated with the guide rail 531, the lower part of the mucosa 100 is pushed against by the transverse support rod 56 and both sides pass through the film-containing grooves 533, so that the guide rail 531 guides the chamfering knife 51 to move to the mucosa. 100 on both sides.

As shown in FIG. 1 , FIG. 10 to FIG. 11 , and FIG. 16 to FIG. 17 , the present wafer sticking device 10 further includes a transfer mechanism 4 , and the transfer mechanism 4 is arranged at one end of the plurality of film pulling mechanisms 22 away from the film rolling mechanism 1 , The transfer mechanism 4 includes a push-down actuator 41 , a suction member 42 fixed to the push-down actuator 41 and moving vertically following the push-down actuator 41 , and a push-up actuator 43 disposed below the suction member 42 . , the push-up actuator 43 can drive each film pulling mechanism 22 to ascend or descend, and the adsorption member 42 can absorb the frame 200 and press the frame 200 and the separated mucous membrane 100 to adhere to each other.

As shown in FIG. 18 to FIG. 19 , a hollow opening 201 is provided inside the frame 200 , and the hollow opening 201 exposes the adhesive surface of the mucous membrane 100 to stick the wafer. It is a rectangular frame body or a square frame body, the width w2 of the frame 200 is substantially equal to (substantially equal to or slightly larger than) the width w1 of the mucosa 100, and the corner ends of the frame 200 are convenient to take and avoid collision damage. With the rounded corner design, the corner end of the separated mucosa 100 can be cut into a missing corner 102 by the corner cutting mechanism 5, so that the outer periphery of the mucosa 100 is completely hidden in the frame 200, and then the separated mucosa 100 is shaped. The shape matches the shape of the frame 200 so as to prevent the mucous membrane 100 from being tilted, and avoid the generation of excessive waste of the mucous membrane 100 , and effectively and completely utilize every material of the mucous membrane 100 to save costs.

Preferably, the width w2 of the frame 200 is about 1 mm larger than the width w1 of the mucous membrane 100 , so that the outer periphery of the frame 200 is slightly larger than the outer periphery of the mucous membrane 100 .

In addition, the best embodiment of the circulating driving mechanism 21 , the horizontal driver 31 , the vertical driver 32 , the push-down actuator 41 , the push-up actuator 43 , and the punching driver 52 is a pneumatic cylinder or a hydraulic cylinder, and the adsorption member 42 It is a vacuum suction cup, but not limited thereto.

As shown in FIG. 1 to FIG. 19 , the use state of the wafer sticking device 10 and the film pulling mechanism 22 of the present invention is that any two film pulling mechanisms 22 are used to adsorb the mucosa 100 in an adjacent abutting arrangement, and the mucosa 100 When sucked by the film pulling mechanism 22, the porous fixed suction plate 24 and the porous movable suction plate 25 will jointly absorb the two sides of the mucosa 100, and the porous movable suction plate 25 can drive one side of the mucosa 100 away from the porous fixed suction plate 25. The direction of the plate 24 moves to tighten the mucosa 100 .

Furthermore, the second punching driver 52 drives the two corner cutters 51 to cut two corners 102 on both sides of the mucous membrane 100 , and the corner cutter 51 is pressed down until the positive pressure through-pipe 532 and the air chamber 514 are disposed opposite to each other and communicate with each other. , the positive pressure through-pipe 532 will give the plurality of blowing holes 513 a positive pressure air flow, and the larger hole size of the plurality of blowing holes 513 is arranged on the inner side of the angular blade 512, so that the wastes in the missing corners 102 can be quickly and smoothly blown into the aggregate Collected in box 54. In this way, the waste of the missing corner 102 is prevented from adhering to the corner cutting edge 512 to affect the next corner cutting, so that the corner cutting mechanism 5 has the advantage of smooth corner cutting.

In addition, when the mucous membrane 100 is adsorbed on the adjacent two film pulling mechanisms 22, the horizontal driver 31 and the two missing corners 102 will be located in the adjacent first negative pressure suction holes 231 and a plurality of second negative pressure suction holes Between 232, the vertical driver 32 drives the moving tool 33 to extend out of the outer protective frame 34, and the horizontal driver 31 drives the moving tool 33 to move along the stretching direction d and cuts the mucous membrane 100 in the gap between the two bearing platforms 23, and the moving tool 33 can move along the stretching direction d from one of the missing corners 102 and cut the mucosa 100 to the other missing corner 102, and move The horizontal moving distance of the movable cutter 33 is greater than the width w1 of the mucosa 100 , so that the movable cutter 33 can completely cut and separate the mucosa 100 .

After that, the film pulling mechanism 22 with the separated mucous membrane 100 adsorbed will enter the working area of the transfer mechanism 4. Since the adhesive surface of the mucous membrane 100 is set upward relative to the bearing platform 23, the push-up actuator 43 drives the film pulling mechanism 22 to rise, The adsorption member 42 adsorbs the frame 200 and drives the frame 200 to move down, thereby pressing the frame 200 and the adhesive surface of the mucous membrane 100 to adhere to each other. Move to abut against another film pulling mechanism 22 and absorb the mucosa 100, so as to achieve the action of the plurality of film pulling mechanisms 22 moving cyclically along the loop path s.

Thereby, when the porous movable suction plate 25 drives the side of the mucosa 100 to move away from the porous fixed suction plate 24, a pulling force will be applied to the mucosa 100, and the mucosa 100 will be tightened and leveled, so that the subsequent frame 200 and the The adhesion between the wafer and the mucous membrane 100 is more even and close, and the process or inspection of the wafer is more stable.

In addition, the conventional adsorption carrier is made of all stainless steel, which has the problem of insufficient adsorption force, and the conventional adsorption carrier is composed of all ceramic materials, which has the problem of high cost and easy to break; It is made of stainless steel, and the porous fixed suction plates 24 and the porous movable suction plates 25 on both sides of the bearing platform 23 are made of ceramic materials, thereby reducing the range of ceramic materials, so that the film pulling mechanism 22 has the advantages of saving cost and enhancing structural strength. At the same time, the ceramic material is arranged on both sides of the bearing platform 23 , so that the film pulling mechanism 22 has sufficient adsorption force when pulling the mucous membrane 100 .

Furthermore, since the moving tool 33 often needs to be calibrated or replaced, the film cutting mechanism 3 is arranged above the plurality of film pulling mechanisms 22, and is further separated from the film pulling mechanism 22, which is more convenient for the correction or replacement of the moving tool 33, and avoids the need for a The process of correcting or replacing the moving tool 33 collides and moves to the film pulling mechanism 22 .

To sum up, the wafer lamination equipment and its corner cutting mechanism of this creation can indeed achieve the intended purpose of use, solve the lack of conventional knowledge, and have industrial application, novelty and progress, and fully meet the requirements of patent application. If you file an application in accordance with the Patent Law, please check and approve the patent in this case to ensure that creator's rights.

100: mucous membrane

101: Release paper

200: Frame

10: Wafer sticking equipment

1: Rolling film mechanism

11: Mucosal fixation shaft

12: Release paper fixed shaft

2: Transfer film device

21: Circulation drive mechanism

22: Film pulling mechanism

23: Bearing platform

24: Porous fixed suction plate

25: Porous movable suction plate

3: Film cutting mechanism

31: Horizontal Drive

32: Vertical Drive

34: Protect the outer frame

4: Moving mechanism

41: Press down the actuator

42: Adsorber

43: Push-Up Actuator

5: Chamfering mechanism

52: Stamping Driver

53: Limit seat

54: Aggregate Box

55: Return spring

Claims (18)

A wafer sticking device is used for a mucous membrane and a frame, the wafer sticking device includes: a film roll mechanism for placing the mucous membrane; a film conveying device, comprising a plurality of cyclically moving and adsorbing and conveying the mucous membrane Film pulling mechanism; all film mechanisms, corresponding to the configuration of the plurality of film pulling mechanisms, the film cutting mechanism includes a moving knife; and a cutting angle mechanism, which is arranged between the film rolling mechanism and the film cutting mechanism, and the angle cutting mechanism includes a configuration Two bevel cutters on both sides of the mucous membrane; wherein, the two bevel cutters are used to cut two missing corners on both sides of the mucous membrane, and the moving cutter is used to completely cut and separate from the two missing corners The mucous membrane and the frame correspond to the separated mucoadhesion. The wafer lamination equipment as claimed in claim 1, wherein the corner cutting mechanism further comprises a two punching driver connected to the two corner cutting knives and driving the two corner cutting knives to move toward the mucosa. The wafer lamination equipment as claimed in claim 2, wherein each of the corner cutters has a cylinder, one end of each of the cylinders is fixed to each of the stamping drivers, and the other end of the cylinder extends with an angled blade and a cam Multiple blow holes inside the blade. The wafer lamination equipment as claimed in claim 3, wherein the corner cutting mechanism further comprises two limiting seats and two collecting boxes disposed under the two limiting seats, each of the cylinders is provided with the plurality of blowing holes connected to each other Each of the limiting seats is provided with a guide rail and a positive pressure passage, each of the cylinders is accommodated and slid on each of the guide rails, each of the positive pressure passages and each of the The air chambers can be oppositely disposed and communicated with each other. The wafer lamination equipment as claimed in claim 4, wherein the corner cutting mechanism further comprises two return springs, one end of each return spring is connected to each of the pillars and the other end of each of the return springs is connected to each of the limiting seats. The wafer lamination equipment as claimed in claim 4, wherein the corner cutting mechanism further comprises a transverse film support rod disposed on one side of the two limit seats, each of the limit seats is provided opposite to the transverse film support rod And a film containing groove communicated with each of the guide rails, the lower part of the mucous membrane is pressed against by the transverse film support rod, and the two sides pass through each of the film containing grooves. The wafer lamination equipment as claimed in claim 1, wherein each of the film pulling mechanisms comprises a carrying table, a porous fixed suction plate fixed on one side of the carrying table, and a reciprocating suction plate corresponding to the other side of the carrying table. A porous movable suction plate, the porous fixed suction plate and the porous movable suction plate jointly absorb both sides of the mucous membrane, and the porous movable suction plate can drive one side of the mucous membrane to move away from the porous The direction of the fixed suction plate is moved to tighten the mucosa. The wafer lamination device as claimed in claim 7, wherein the film cutting mechanism further comprises a horizontal driver and a vertical driver, the horizontal driver is disposed above the plurality of film pulling mechanisms, the vertical driver is fixed to the horizontal driver and Following the horizontal drive to move horizontally, the moving tool is fixed to the vertical drive and moves vertically following the vertical drive. The wafer lamination equipment according to claim 8, wherein each of the porous fixed suction plates and each of the porous movable suction plates are respectively located on the left and right sides of the top surface of each of the carrying platforms, and each of the The lower side of the top surface is provided with a plurality of first negative pressure suction holes and the upper side is provided with a plurality of second negative pressure suction holes. When the mucous membrane is adsorbed on the two adjacent bearing platforms, the horizontal driver and the two The missing corners are located between the adjacent first negative pressure suction holes and the plurality of second negative pressure suction holes. The wafer lamination equipment according to claim 8, wherein the film cutting mechanism further comprises a protective outer frame, and the protective outer frame covers the outside of the horizontal driver, the vertical driver and the moving tool, and the vertical driver can The moving tool is driven to be stored in the protective outer frame, and the moving tool is a conical blade. The wafer film attaching equipment according to claim 7, wherein the film transfer device further comprises a circulating driving mechanism, the circulating driving mechanism is connected to and drives the plurality of film pulling mechanisms to move cyclically along a loop path, and each of the porous movable suction mechanisms The direction of the plate away from each of the porous fixed suction plates is defined as a stretching direction, the stretching direction is perpendicular to the loop path, and the moving cutter can move along the stretching direction and cut the mucosa. The wafer lamination equipment according to claim 1, further comprising a transfer mechanism, the transfer mechanism is disposed at one end of the plurality of film pulling mechanisms away from the film rolling mechanism, and the transfer mechanism includes a pressing actuator, fixed on the The push-down actuator, an adsorption piece vertically moving following the push-down actuator, and a push-up actuator disposed below the adsorption piece, the push-up actuator can drive each film pulling mechanism to ascend or When descending, the adsorbent can adsorb the frame and press the frame and the separated mucous membrane to adhere to each other. A corner cutting mechanism of a wafer lamination equipment is used for a mucosa, the corner cutting mechanism comprises: two corner cutting knives, which are arranged on both sides of the mucosa, and the two corner cutting knives are used for cutting the two sides of the mucosa. Cut out two missing corners. The chamfering mechanism of the wafer lamination equipment according to claim 13, further comprising two punching drivers, the second punching drivers are connected to the two chamfering knives and drive the two chamfering knives to move toward the mucous membrane. The chamfering mechanism of the wafer lamination equipment as claimed in claim 14, wherein each chamfering cutter has a cylinder, one end of each cylinder is fixed to each of the punching drivers, and the other end extends an angular blade and is provided with A plurality of blow holes are arranged inside the angular blade. The corner cutting mechanism of a wafer lamination equipment according to claim 15, further comprising two limiting seats and two collecting boxes, the two collecting boxes are arranged below the two limiting seats, and each of the cylinders is provided with There is an air cavity connected with the plurality of blowing holes, each of the limiting seats is provided with a guide track and a positive pressure through pipe, each of the The cylinder is accommodated and slid on each of the guide rails, and each of the positive pressure through-pipes and each of the air-accommodating chambers can be disposed opposite to each other and communicated with each other. The corner cutting mechanism of the wafer lamination equipment as claimed in claim 16 further comprises two return springs, one end of each return spring is connected to each of the cylinders and the other end of each of the return springs is connected to each of the limiting seats. The corner cutting mechanism of the wafer lamination equipment as claimed in claim 16, further comprising a transverse film support rod, the transverse film support rod is disposed on one side of the two limit seats, and each limit seat is provided with a The transverse membrane-stretching rod is opposite to and communicated with each of the guide rails to a membrane-containing groove, the bottom of the mucous membrane is pressed against by the transverse membrane-stretching rod, and both sides pass through each of the membrane-containing grooves.

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