CN216742139U - Sealing device, sealing control system and silane compressor - Google Patents
Sealing device, sealing control system and silane compressor Download PDFInfo
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Abstract
The application relates to a sealing device, a sealing control system and a silane compressor, which relate to the technical field of silicon-containing semiconductor production, wherein the sealing device comprises a first-stage sealing mechanism, a second-stage sealing mechanism, a third-stage sealing mechanism and a fourth-stage sealing mechanism which are sequentially arranged from a medium side to a bearing side; the primary sealing mechanism, the secondary sealing mechanism and the tertiary sealing mechanism are all in dry gas sealing structure and are arranged in series, the quaternary sealing mechanism is in a comb tooth sealing structure, and the sealing gas of the primary sealing mechanism is the same as the medium; the silane compressor comprises the sealing device, and the sealing gas pressure of the secondary sealing mechanism is greater than the leakage gas pressure of the primary sealing mechanism; the sealing control system comprises an air supply unit, a filtering unit, a flow regulating unit, an air pressure detection unit and a leakage air monitoring unit. The application has the advantages that external non-silane gas can be prevented from entering the compressor, so that the operation stability is improved, and the leakage silane can be controlled and recycled.
Description
Technical Field
The application relates to the technical field of polycrystalline silicon production, in particular to a sealing device, a silane compressor and a sealing control system.
Background
Polycrystalline silicon is widely used in the semiconductor and photovoltaic industries. With the development of the semiconductor industry as well as the photovoltaic industry, the demand for polycrystalline silicon is rapidly increasing. The production technology of polycrystalline silicon mainly aims at improving a Siemens method and a silane method, and the silane method has low energy consumption and small influence on the environment, so that the method accords with the concept of emphasizing green development at present, the silane method is a mainstream process route for preparing polycrystalline silicon and other silicon-containing semiconductor devices, and a silane compressor is core equipment for compressing high-purity silane.
See patent publication No. CN203628252U, which discloses a system for increasing the efficiency of silane gas charging, including a silane compressor.
Because the purity of silane has a great relationship to the performance and the yield of devices, external non-silane gas is not allowed to enter the interior of the compressor under the ideal application state of the silane compressor so as to avoid influencing the purity of silane, but the prior sealing structure has the conditions of external gas entering the compressor and medium loss, and can not meet the production requirement.
SUMMERY OF THE UTILITY MODEL
In order to improve the problem that the external gas enters the compressor to influence the process gas purity and the medium gas leakage loss in the existing silane compressor, the application provides a sealing device, a silane compressor and a sealing control system.
In a first aspect, the present application provides a sealing device that employs the following technical solution:
a sealing device comprises a four-stage seal arranged from a medium side to a bearing side, and a first-stage sealing mechanism, a second-stage sealing mechanism, a third-stage sealing mechanism and a four-stage sealing mechanism are sequentially arranged; the first-stage sealing mechanism, the second-stage sealing mechanism and the third-stage sealing mechanism are all dry gas sealing structures and are connected in series, the fourth-stage sealing mechanism is a comb tooth sealing structure, and sealing gas of the first-stage sealing mechanism is the same as a medium.
By adopting the technical scheme, because the sealing gas of the primary sealing mechanism is the same as the medium, the medium can be used as the sealing gas of the primary dry gas seal, and even if the sealing gas of the primary dry gas seal enters the medium, the purity of the original medium cannot be influenced, so that self-circulation can be formed. The secondary and tertiary dry gas seals reduce the possibility of pollution caused by leakage gas of the primary dry gas seal. On one hand, the comb tooth sealing structure with the four-stage sealing can reduce the possibility that the oil mist at the bearing end pollutes the three-stage sealing; on the other hand, when the dry gas seal of the previous three stages fails due to failure, the comb tooth sealing structure can be used as temporary safety seal to play a role in blocking, and a large amount of dangerous gas can be ensured to flow into the three-stage leakage gas channel. Thereby increasing the whole sealing effect, preventing the outside gas from entering the medium to influence the purity, and increasing the safety and the reliability.
Optionally, the sealing gas of the first-stage sealing mechanism is silane gas, the sealing gas of the second-stage sealing mechanism is hydrogen gas, and the sealing gas of the third-stage sealing mechanism and the sealing gas of the fourth-stage sealing mechanism are nitrogen gas or inert gas.
By adopting the technical scheme, in order to realize the recovery of trace silane gas leaked by the primary sealing mechanism, the secondary sealing mechanism is adopted to adopt high-purity hydrogen, so that the primary leaked mixed gas formed by silane gas and hydrogen is recycled, and the loss rate of silane is reduced. Because the second-stage sealing mechanism still adopts hydrogen as sealing gas, and the second-stage leakage gas is still dangerous because of hydrogen, the third-stage dry gas seal can prevent the possibility of pollution caused by leakage gas of the second-stage dry gas seal.
Optionally, the sealing air pressure of the second-stage sealing mechanism is greater than the leakage air pressure of the first-stage sealing mechanism, and the sealing air pressure of the third-stage sealing mechanism is greater than the leakage air pressure of the second-stage sealing mechanism.
Through adopting above-mentioned technical scheme, the sealed atmospheric pressure of second grade seal is greater than one-level leakage atmospheric pressure, prevents to leak that silane hazardous gas in the gas enters into the sealed region of second grade, has reduced the silane to the sealed possibility of leaking the transmission of next grade, reduces silane leakage to outside atmospheric possibility, improves equipment operation security.
In a second aspect, the present application provides a sealing control system, which adopts the following technical solutions:
a seal control system for a sealing device as described above, the seal control system comprising:
an air supply unit comprising: a silane gas source for providing silane to the sealing gas inlet of the primary sealing mechanism; a hydrogen source for providing hydrogen to the seal gas inlet of the secondary seal mechanism; an inert gas source for providing nitrogen or inert gas to the seal gas inlets of the tertiary seal mechanism and the quaternary seal mechanism;
the filtering unit is used for filtering the gas of the gas supply unit;
the air pressure monitoring unit and the flow regulating unit are connected to an external central control system, the flow regulating unit is used for monitoring the working state of the filtering unit and the flow of the sealing air and feeding back signals to the central control system, and the air pressure monitoring unit is used for detecting the pressure of the sealing air on site.
By adopting the technical scheme, the sealing control system can adjust the air pressure and the flow of each sealing mechanism of the sealing device and monitor the pressure of the leaked air, so that the equipment runs stably, the possibility of silane gas leakage in the atmosphere is reduced, and the running reliability and the safety of the equipment are improved.
Optionally, the sealing control system further includes:
and the leakage gas monitoring unit is connected with an external central control system and is used for monitoring the leakage gas pressure and flow of the primary sealing mechanism and the leakage gas pressure of the secondary sealing mechanism.
Through adopting above-mentioned technical scheme, can detect leaking gas pressure, the monitoring facilities operational aspect of being convenient for reduces the hazardous gas and leaks to the atmosphere.
Optionally, the flow rate adjusting unit controls the pressure of the gas injected into the first-stage sealing mechanism by the gas supply unit, so that the sealing gas pressure of the first-stage sealing mechanism monitored by the gas pressure monitoring unit is greater than the leakage gas pressure of the first-stage sealing mechanism.
Through adopting above-mentioned technical scheme, the sealed atmospheric pressure of second grade seal is greater than one-level leakage atmospheric pressure, prevents to leak that silane hazardous gas in the gas enters into the sealed region of second grade, has reduced the silane to the sealed possibility of leaking the transmission of next grade, reduces silane leakage to outside atmospheric possibility, improves equipment operation security.
In a third aspect, the silane compressor provided by the present application adopts the following technical scheme:
a silane compressor, which is applied with the sealing device; the sealing gas of the secondary sealing mechanism is hydrogen;
specifically, the sealing gas of the third-stage sealing mechanism and the isolating gas of the fourth-stage sealing mechanism are both inert gases; specifically, the inert gas is one of nitrogen, argon or helium.
By adopting the technical scheme, because the secondary sealing adopts dry gas sealing, considering that most of gas in silane is hydrogen and inert gases such as nitrogen and the like cannot be brought into a recovery system, the secondary sealing prefers hydrogen as sealing gas, and the normal use of the secondary sealing is ensured. The leakage gas composed of silane and hydrogen can be safely recycled.
The third-stage dry gas sealing gas adopts inert gas, can plug the trace hydrogen leaked from the second-stage sealing end face, and sweeps the trace hydrogen to a second-stage leakage gas channel for safe discharge.
Optionally, the air inlet ends of the first-stage sealing mechanism, the second-stage sealing mechanism and the third-stage sealing mechanism are all connected with a flow regulating unit, the first-stage sealing mechanism is further connected with an air pressure monitoring unit, the flow regulating unit is connected with an external central control system, the air pressure monitoring unit is used for detecting the sealing air pressure of each sealing mechanism and feeding signals back to the central control system, and the flow regulating unit regulates the air flow after receiving the signals.
Optionally, at least one air inlet end of the primary sealing mechanism, the secondary sealing mechanism and the tertiary sealing mechanism is connected with a filtering unit, and the filtering unit is used for filtering sealing air;
specifically, the filtering unit is mounted at the front end of the inlet of the air passage pipeline of the flow regulating unit and the air pressure monitoring unit;
preferably, the gas filtering precision of the filtering unit is less than or equal to 1 um.
Through adopting above-mentioned technical scheme, the filter unit can filter granule and liquid impurity in the gas, improve equipment operating stability.
Optionally, a leakage gas outlet of the primary sealing mechanism is connected with a recovery device for treating silane.
By adopting the technical scheme, the damage caused by silane leaking to the atmosphere is reduced, and the equipment operation safety is improved.
Optionally, the outlet end of the compressor is communicated with the sealing gas inlet of the primary sealing mechanism.
By adopting the technical scheme, the medium in the compressor can directly enter the first-stage sealing mechanism to be used as sealing gas, so that internal circulation is formed, and other gases cannot be brought in.
In summary, the present application includes at least one of the following beneficial technical effects: the flammable and explosive silane is not easy to leak into the atmosphere through the sealing device and the sealing control system; other external gases cannot enter the silane reaction system, so that the operation requirement of equipment is met; the operation stability and safety of the equipment are increased.
Drawings
FIG. 1 is a schematic structural diagram of a sealing device of a silane compressor according to an embodiment of the present application;
FIG. 2 is a schematic diagram of a silane compressor seal control system.
Description of the reference numerals:
1. an air supply unit; 11. a silane gas source; 12. a source of hydrogen gas; 13. an inert gas source;
2. a filtration unit; 21. a primary seal gas filtration module; 22. a secondary seal gas filtration module; 23. a third-stage seal gas and isolation gas filtering module;
3. an air pressure adjusting unit; 31. a secondary seal gas pressure regulating module; 32. a third-stage sealing gas and isolation gas pressure adjusting module;
4. a flow rate adjusting unit; 41. a primary seal gas flow regulating module; 42. a secondary sealing gas flow regulating and monitoring module; 43. a third-stage sealing air flow adjusting module; 44. an isolated airflow regulation module;
5. an air pressure monitoring unit; 51. a primary seal gas pressure monitoring module; 52. an isolated gas pressure monitoring module;
6. a silane compressor sealing device; 61. a shaft sleeve; 62. a dry gas sealing mechanism; 621. a primary seal gas inlet; 622. a primary leakage gas outlet; 623. a secondary seal gas inlet; 624. a secondary leakage gas outlet; 625. a tertiary seal gas inlet; 626. a third-stage leakage gas outlet; 627. an insulating gas inlet; 628. a condensate draining port; 63. a comb sealing mechanism;
7. a leakage gas monitoring unit; 71. a primary leakage gas monitoring module; 72. a secondary leakage gas monitoring module;
8. a silane recovery device.
Detailed Description
In the field of preparing silane compressors for high-purity and ultra-high-purity polysilicon, a reciprocating compressor unit is generally adopted in the conventional silane compressors, but with the requirements of increasing yield and prolonging operation period, a centrifugal compressor is tried to be adopted as compressor equipment, with the change of the equipment, the shaft end sealing of the silane compressor becomes a prominent technical problem, and based on the characteristics of flammability and explosiveness of a silane compressor medium, the use requirement that non-silane gas is not allowed to enter a process system and the requirement that silane can not leak or can be recycled after leakage during operation, the inventor provides a sealing device consisting of four-stage sealing and a sealing control system scheme through technical research. By the scheme, the special process system requirements of the silane compressor are met, and the safe, reliable and stable long-period operation of the compressor is ensured.
The present application is described in further detail below with reference to figures 1-2.
The embodiment of the application discloses a silane compressor sealing device, a silane compressor and a sealing control system.
Referring to fig. 1, the silane compressor sealing device 6 includes a shaft sleeve 61 fixed on the shaft, and three dry gas sealing mechanisms 62 and one comb tooth sealing mechanism 63 mounted in series on the shaft sleeve 61, wherein the three dry gas sealing mechanisms 62 and the one comb tooth sealing mechanism 63 together form a four-stage seal. The four-stage sealing is a first-stage sealing mechanism, a second-stage sealing mechanism, a third-stage sealing mechanism and a four-stage sealing mechanism from the medium end to the bearing end in sequence, wherein the comb sealing mechanism 63 is arranged close to the bearing end, and two adjacent sealing mechanisms can be fixed through bolts so as to be assembled. In addition, after the single sealing mechanism is damaged in the use process, only the single sealing mechanism needs to be maintained and replaced, and the service life of the whole sealing device is prolonged.
The silane compressor comprises the silane compressor sealing device 6, and a plurality of through holes communicated with the inner cavity are formed in the shell of the silane compressor. The plurality of through holes are a primary sealing gas inlet 621, a primary leakage gas outlet 622, a secondary sealing gas inlet 623, a secondary leakage gas outlet 624, a tertiary sealing gas inlet 625, a tertiary leakage gas outlet 626 and an isolation gas inlet 627 in sequence from the medium end to the bearing end; the first-stage sealing gas inlet 621 and the first-stage leakage gas outlet 622 correspond to the first-stage sealing mechanism, the second-stage sealing gas inlet 623 and the second-stage leakage gas outlet 624 correspond to the second-stage sealing mechanism, the third-stage sealing gas inlet 625 and the third-stage leakage gas outlet 626 correspond to the third-stage sealing mechanism, and the isolation gas inlet 627 corresponds to the fourth-stage sealing mechanism. And a condensation discharge port 628 communicated with the inner cavity is formed at the bottom of the peripheral area of the shell where the third-stage leakage gas outlet 626 is positioned, so that liquefied substances in the inner cavity can be discharged in time.
Referring to fig. 2, the embodiment of the present application further discloses a sealing control system, which includes a gas supply unit 1 connected to the sealing gas end of the sealing device 6 of the silane compressor, and a leakage gas monitoring unit 7 connected to the leakage gas end.
The gas supply unit 1 comprises a silane gas source 11, a hydrogen gas source 12 and an inert gas source 13; wherein, silane gas source 11 is injected into the first-stage sealing gas inlet 621 on the driving end and the non-driving end of the compressor; a source of hydrogen 12 is injected into the secondary seal gas inlet 623 on the drive and non-drive ends of the compressor; the inert gas source 13 may be any of nitrogen, argon or helium, among other inert gases, where a nitrogen source is selected that feeds into the tertiary seal gas inlet 625 and barrier gas inlet 627 on both the drive and non-drive sides of the compressor. The silane gas source 11 is here a compressor internal gas source.
In order to remove particles and liquid impurities which may be contained in the gas source, a filter unit 2 is arranged between the gas supply unit 1 and the pipeline of the silane compressor sealing device 6. The filtering unit 2 comprises a first-stage sealed gas filtering module 21, a second-stage sealed gas filtering module 22 and a third-stage sealed gas and isolated gas filtering module 23. The first-stage sealing gas filtering module 21 is connected with a silane gas source 11, the second-stage sealing gas filtering module 22 is connected with a hydrogen gas source 12, and the third-stage sealing gas and isolating gas filtering module 23 is connected with a nitrogen gas source. Each filtering module can adopt a gas filter, such as a filter made of glass fiber, ceramic and the like. Preferably, the filtering precision of the gas filter is less than or equal to 1 um. The gas filter is provided with a differential pressure controller and is used for judging the use state of the filter and carrying out maintenance and replacement in time.
In order to enable the silane compressor sealing device 6 to work better, an air pressure adjusting unit 3, a flow adjusting unit 4 and an air pressure monitoring unit 5 are further arranged between the filtering unit 2 and the pipeline of the silane compressor sealing device 6, the air pressure adjusting unit 3, the flow adjusting unit 4 and the air pressure monitoring unit 5 are all connected with an external central control system such as a computer, and the connection mode can be data line transmission and wireless transmission such as Bluetooth or WIFI, 4G and 5G signal transmission so as to receive and feed back signals and then perform actions. The flow regulating unit 4 may also be connected to a display to display the flow value in real time.
The air pressure adjusting unit 3 includes a secondary sealing air pressure adjusting module 31 and a tertiary sealing air and isolation air pressure adjusting module 32. Each pressure regulating module may be a pneumatic diaphragm valve.
The flow rate adjusting unit 4 includes a primary seal gas flow rate adjusting module 41, a secondary seal gas flow rate adjustment monitoring module 42, a tertiary seal gas flow rate adjusting module 43, and an isolated gas flow rate adjusting module 44. The primary sealing airflow regulation and monitoring module 41 comprises a flowmeter and an air pressure sensor which are connected in series, and all the other flow regulation modules can be flowmeters which can adopt metal rotor flowmeters.
The air pressure monitoring unit 5 includes a primary seal air pressure monitoring module 51 and an isolation air pressure monitoring module 52. Each pressure monitoring module may be an air pressure detector or an air pressure sensor.
Since the gas is fed to the driving end and the non-driving end of the silane compressor sealing device 6, the flow rate adjusting unit 4 and the gas pressure monitoring unit 5 are provided in two sets, one set is connected in series to the gas pipe line at the driving end, and the other set is connected in series to the gas pipe line at the non-driving end.
Taking the first-stage seal gas as an example, the process gas inside the compressor is filtered by the first-stage seal gas filtering module 21 and then divided into two gases, each gas sequentially passes through the first-stage seal gas flow regulating module 41 and the first-stage seal gas pressure monitoring module 51, and the first-stage seal gas pressure monitoring module 51 feeds the pressure back to the central control system, so that the first-stage seal gas flow regulating module 41 is controlled to regulate the gas injection flow. In the process, the air pressure of the secondary sealing air flow regulation monitoring module 42 is compared with the monitoring value of the primary sealing air pressure monitoring module 51, so that the secondary sealing air pressure is always ensured to be greater than the pressure of the primary leakage air, and silane is ensured not to enter a secondary sealing area.
Referring to fig. 2, since the three-stage leakage gas mainly includes nitrogen and a small amount of hydrogen, it is sufficient to directly discharge the leakage gas to a safe area in the air, and the air pollution is small. The first-stage leakage gas is a mixed gas of a small amount of silane gas and a large amount of hydrogen gas, and the silane gas may leak a small amount from the end face of the first-stage seal, so the leakage gas monitoring unit 7 mainly detects the leakage gas in the first-stage seal and the second-stage seal area. The leakage gas monitoring unit 7 includes a primary leakage gas monitoring module 71 and a secondary leakage gas monitoring module 72. The primary leakage gas monitoring module 71 may include a gas pressure sensor and a flow meter connected in series, and the primary leakage gas monitoring module 71 is installed at the primary leakage gas outlet 622 and is used for monitoring the flow rate and pressure of the primary leakage gas; the secondary leak monitoring module 72 includes a series air pressure sensor for monitoring the pressure of the secondary leak. Thereby judging whether the working states of the primary seal and the secondary seal are normal.
Because the first-level leakage gas contains silane which is a dangerous gas and is easy to explode when meeting air, the first-level leakage gas monitoring port is connected with a recovery device 8, and the recovery device 8 can be tail gas treatment equipment commonly used in the current silane method process.
The working principle of the silane compressor is as follows:
the process gas in the compressor, namely high-purity silane, is filtered and then injected from the first-stage sealing gas inlet 621, and the first-stage sealing is dry gas sealing, and high-pressure silane gas at the outlet end of the equipment is used as sealing gas, so that the silane gas of the process system is circulated, and other gases cannot be brought in. Even if a small part of gas enters the compressor through the first-stage seal, the purity of the process gas cannot be influenced due to the fact that the gas components are the same.
Hydrogen is injected from the secondary seal gas inlet 623, and during this process, the pressure of the hydrogen is ensured to be greater than the pressure of the primary leak gas, ensuring that silane does not enter the secondary seal area. Because the secondary seal adopts dry gas seal, considering that most of gas in silane is hydrogen and inert gases such as nitrogen and the like cannot be brought into a recovery system, the secondary seal prefers hydrogen as the seal gas, and the normal use of the secondary seal is ensured. The leakage gas composed of silane and hydrogen can be safely recycled.
The leakage gas monitoring unit 7 monitors the air pressure and flow of the first-stage leakage gas and the air pressure of the second-stage leakage gas, feeds back whether the working states of the first-stage seal and the second-stage seal are normal or not, and reduces the abnormal leakage possibility of silane.
Nitrogen is injected from the third-stage sealing gas inlet 625, dry gas sealing is adopted, trace hydrogen leaked from the second-stage sealing end face can be blocked, and the trace hydrogen is blown to a pipeline connected with the second-stage leakage gas outlet 624 to be safely discharged.
The four-stage seal mainly blocks oil mist at the bearing end from polluting the three-stage seal, and meanwhile, when the current three-stage seal fails, the four-stage seal can be used as a temporary safety seal to play a role in blocking, so that a large amount of dangerous gas can be ensured to flow into a leakage channel corresponding to the three-stage leakage gas outlet 626.
The application realizes that flammable and explosive silane cannot leak to the atmosphere, outside hydrogen and nitrogen cannot enter a closed silane reaction system, and leaked silane can be controllably recovered, so that the equipment operation requirement, high safety and reliability are realized.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.
Claims (10)
1. A seal assembly, characterized by: the device comprises a medium side, a bearing side, a first-stage sealing mechanism, a second-stage sealing mechanism, a third-stage sealing mechanism and a fourth-stage sealing mechanism, wherein the medium side is provided with a fourth-stage seal; the first-stage sealing mechanism, the second-stage sealing mechanism and the third-stage sealing mechanism are all of dry gas sealing structures and are arranged in series, and the fourth-stage sealing mechanism is of a comb tooth sealing structure.
2. The sealing device of claim 1, wherein: the sealing gas of the first-stage sealing mechanism is silane gas, the sealing gas of the second-stage sealing mechanism is hydrogen gas, and the sealing gas of the third-stage sealing mechanism and the sealing gas of the fourth-stage sealing mechanism are nitrogen gas or inert gas.
3. A sealing device according to claim 1 or 2, wherein: the sealing air pressure of the secondary sealing mechanism is greater than the leakage air pressure of the primary sealing mechanism, and the sealing air pressure of the tertiary sealing mechanism is greater than the leakage air pressure of the secondary sealing mechanism.
4. A seal control system, characterized by: a seal assembly for use in accordance with any one of claims 1 to 3, said seal control system comprising:
air supply unit (1) comprising: a silane gas source (11) for providing silane to the seal gas inlet of the primary seal mechanism; a hydrogen source (12) for providing hydrogen to the seal gas inlet of the secondary seal mechanism; an inert gas source (13) for providing nitrogen or inert gas to the seal gas inlets of the tertiary and quaternary sealing mechanisms;
the filtering unit (2) is used for filtering the gas of the gas supply unit (1);
the sealing air pressure monitoring system comprises an air pressure monitoring unit (5) and a flow regulating unit (4) which are connected to an external central control system, wherein the flow regulating unit (4) is used for monitoring the working state of the filtering unit (2) and the flow of sealing air and feeding back signals to the central control system, and the air pressure monitoring unit (5) is used for detecting the pressure of the sealing air on site.
5. The seal control system of claim 4, wherein: the seal control system further comprises:
and the leakage gas monitoring unit (7) is connected with an external central control system and is used for monitoring the leakage gas pressure and flow of the primary sealing mechanism and the leakage gas pressure of the secondary sealing mechanism.
6. The seal control system of claim 4, wherein: the flow regulating unit (4) controls the pressure of gas injected into the gas supply unit (1) at the first-stage sealing mechanism, so that the sealing gas pressure of the first-stage sealing mechanism monitored by the gas pressure monitoring unit (5) is greater than the leakage gas pressure of the first-stage sealing mechanism.
7. A silane compressor, characterized by: use of a sealing device according to any of claims 1 to 3; the sealing gas of the secondary sealing mechanism is hydrogen;
specifically, the sealing gas of the third-stage sealing mechanism and the isolating gas of the fourth-stage sealing mechanism are both inert gases; specifically, the inert gas is one of nitrogen, argon or helium.
8. The silane compressor of claim 7, wherein: the air inlet end of the first-stage sealing mechanism, the air inlet end of the second-stage sealing mechanism and the air inlet end of the third-stage sealing mechanism are both connected with a flow adjusting unit (4), the first-stage sealing mechanism is further connected with an air pressure monitoring unit (5), the flow adjusting unit (4) is connected with an external central control system, the air pressure monitoring unit (5) is used for detecting the sealing air pressure of each sealing mechanism and feeding signals back to the central control system, and the flow adjusting unit (4) adjusts the air flow after receiving the signals.
9. The silane compressor of claim 8, wherein: at least one air inlet end of the first-stage sealing mechanism, the second-stage sealing mechanism and the third-stage sealing mechanism is connected with a filtering unit (2), and the filtering unit (2) is used for filtering sealing air;
specifically, the filtering unit (2) is installed at the front end of an inlet of an air passage pipeline of the flow regulating unit (4) and the air pressure monitoring unit (5);
preferably, the gas filtering precision of the filtering unit (2) is less than or equal to 1 um.
10. The silane compressor of claim 9, wherein: and a leakage gas outlet of the primary sealing mechanism is connected with a recovery device for treating silane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202123453189.4U CN216742139U (en) | 2021-12-31 | 2021-12-31 | Sealing device, sealing control system and silane compressor |
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| CN202123453189.4U CN216742139U (en) | 2021-12-31 | 2021-12-31 | Sealing device, sealing control system and silane compressor |
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