CN216696125U - X fluorescence dispersion analyzer optical path system capable of being automatically adjusted - Google Patents

X fluorescence dispersion analyzer optical path system capable of being automatically adjusted Download PDF

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CN216696125U
CN216696125U CN202122669616.6U CN202122669616U CN216696125U CN 216696125 U CN216696125 U CN 216696125U CN 202122669616 U CN202122669616 U CN 202122669616U CN 216696125 U CN216696125 U CN 216696125U
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crystal
light splitting
round hole
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张伟
吴佰逊
刘晓峰
李存磊
吴耀昕
孙晓艳
聂崧航
张辉斌
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Dongfang Measurement & Control Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2209Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using wavelength dispersive spectroscopy [WDS]

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Abstract

The utility model provides an automatically-adjustable X-ray fluorescence dispersion analyzer optical path system, which comprises a crystal platform and a crystal seat which are arranged in a light splitting shell, wherein a light splitting crystal is arranged on the crystal seat, the crystal seat is connected with the crystal platform through a shaft pin and can rotate, the rotation angle of the crystal seat is adjusted by controlling the movement of an electric push rod through a motor, the rotation angle of the crystal seat is indirectly recorded through a motor control module, and the optimal rotation angle of the crystal seat is determined by processing the spectrum shape of counting rate-rotation angle. Through the control to the motor, realize the automatically regulated to the light path, make the effect of whole light path reach the best, avoided reducing because of the instrument analysis precision that adverse factor influences such as the temperature variation of environment, vibrations caused, reduced the work load of maintaining, need not open the instrument device and carry out manual regulation.

Description

X fluorescence dispersion analyzer optical path system capable of being automatically adjusted
Technical Field
The utility model relates to the field of on-line analysis of components of industrial materials, in particular to an automatically adjustable X fluorescence dispersion analyzer optical path system.
Background
X-ray fluorescence spectroscopy is a rapid, non-destructive method of material measurement. X-ray fluorescence is the secondary X-ray that is excited when a material is bombarded with high energy X-rays or gamma rays. This phenomenon is widely used for elemental and chemical analysis, particularly in the investigation and research of metals, glass, ceramics and building materials, geochemistry, forensic science, archaeology and art works such as oil paintings and murals.
X-ray fluorescence spectrometers, also known as XRF spectrometers, are classified into dispersive and non-dispersive types. The dispersion type is classified into a wavelength dispersion type and an energy dispersion type. The wavelength dispersion type fluorescence spectrometer is used for measuring the content of various elements by measuring the characteristic X-ray wavelength and the intensity of various elements after a fluorescence beam is dispersed by a spectroscopic crystal. The energy dispersion type fluorescence spectrometer separates undispersed X-ray fluorescence into X-ray spectral lines according to photon energy by means of a high-resolution sensitive semiconductor inspection instrument and a multi-channel analyzer, and measures the quantity of each element according to the energy of each element. The energy dispersion type fluorescence and the wavelength dispersion type fluorescence have all the defects, and the energy dispersion type fluorescence and the wavelength dispersion type fluorescence can only be complemented but cannot be replaced.
The wavelength dispersion type XRF spectrometer comprises an X-ray tube excitation source, a light splitting system, a detector system, a vacuum system, an airflow system and the like. According to different focusing geometrical conditions of the analysis crystal, the analysis crystal is divided into a non-focusing reflection flat crystal type, a semi-focusing reflection curved crystal type, a full-focusing reflection curved crystal type, a semi-focusing transmission curved crystal type and the like. In order to accurately measure the angle between the diffracted beam and the incident beam, the spectroscopic crystal needs to be mounted on a precise goniometer, and a large, precise and complex mechanical movement device is also needed.
If the content of one element is analyzed, an angle measuring instrument is not needed, and the spectroscopic crystal is fixed in the spectroscopic system at a proper angle. The structure of the light splitting system of the wavelength dispersion analyzer is precise, so that the wavelength dispersion analyzer is suitable for analysis in a laboratory at present, and when the wavelength dispersion analyzer is used for industrial on-line detection and analysis, the effect of the wavelength dispersion analyzer in industrial field application is seriously influenced due to harsh conditions of industrial production fields, such as large fluctuation of environmental temperature, continuous vibration or large amplitude of vibration, and the like.
Particularly, after the wavelength dispersion analyzer operates in an industrial field for a period of time, the reflection focusing state of the X fluorescence by the spectroscopic crystal is changed along with the influence of temperature change, vibration and the like, so that the effective X fluorescence intensity received by the detector is reduced, and the analysis precision is influenced. At present, the maintenance means for the phenomenon is that workers disassemble the analyzer and use manual adjustment, and the debugging work is very difficult due to the adverse conditions of large moisture, much dust, narrow space and the like on the site.
Disclosure of Invention
Aiming at the defects of the existing system, the utility model provides an automatically adjustable X fluorescence dispersion analyzer optical path system.
The specific content of the utility model is as follows:
four shielding blocks (102) are arranged in the light splitting shell (101), and a crystal platform (203) is arranged; the crystal seat (202) is connected with the crystal platform (203) through a shaft pin (204), and the crystal seat (202) can rotate by taking the shaft pin (204) as a center; a spring piece (205) is fixed on the crystal platform (203), and the tilting part of the spring piece (205) is propped against one end of the crystal seat (202); a light splitting crystal (206) is fixed on the crystal seat (202); the light splitting shell (101) is provided with a round hole; the crystal platform (203) is provided with a round hole, the round hole of the crystal platform (203) and the round hole of the light splitting shell (101) are concentric, and the inner diameter of the round hole of the crystal platform (203) is the same as that of the round hole of the light splitting shell (101);
the servo motor (401) is connected with the electric push rod (301), and the servo motor (401) and the electric push rod (301) form a conventional servo electric push rod; the length of the electric push rod (301) in the internal space of the light splitting shell (101) can be adjusted through the clockwise or anticlockwise rotation of the servo motor (401); one end of the electric push rod (301) in the light splitting shell (101) is connected with a top head (303), the top head (303) is cylindrical, and the end which is not connected with the electric push rod (301) is in a circular truncated cone shape; the plug (303) is concentric with the round hole of the crystal platform (203), and the outer diameter of the plug (303) is smaller than the inner diameter of the round hole of the crystal platform (203);
the servo motor (401) is connected with the motor control module (404) through a cable, and the motor control module (404) provides a working power supply for the servo motor (401), receives signals and sends control signals;
the light splitting shell (101) is provided with a slit A (103) and a slit B (104), X fluorescence enters from the slit A (103), is reflected by the light splitting crystal (206), and then exits from the slit B (104); the light splitting shell (101) is connected with a detector (105), and the detector (105) receives X fluorescent light emitted from the slit B (104); the detector (105) is connected with the signal processor (106) through a cable, and the signal processor (106) provides a working power supply for the detector (105) and receives signals;
the signal processor (106) is connected with the industrial personal computer (107) through a cable, and the signal processor (106) converts the pulse signals received by the detector (105) into digital signals of counting rate and transmits the digital signals to the industrial personal computer (107);
the motor control module (404) is connected with the industrial personal computer (107) through a cable.
When the spectroscopic crystal (206) needs to be adjusted to the optimal position, the industrial personal computer (107) controls the rotation of the servo motor (401) through the motor control module (404) to enable the crystal seat (202) to gradually change from the state of the limit position 1 to the state of the limit position 2, in the process, the signal of the servo motor (401) is transmitted to the motor control module (404), and is converted into digital signals representing different positions of the crystal seat (202) through the motor control module (404) and then is transmitted to the industrial personal computer (107); meanwhile, the signal processor (106) converts the pulse signals received by the detector (105) into digital signals of counting rate and transmits the digital signals to the industrial personal computer (107); the industrial personal computer (107) processes the data into a spectrum shape;
the industrial personal computer (107) smoothes the spectrum shape, then the maximum value of the smoothed spectrum shape is found, and the position of the crystal seat (202) corresponding to the abscissa position n1 of the maximum value is the optimal position; the industrial personal computer (107) controls the rotation of the servo motor (401) through the motor control module (404), so that the position of the crystal seat (202) corresponds to n 1.
Has the advantages that:
by adopting the content of the utility model for implementation, the automatic adjustment of the optical path can be realized, the optical path with chromatic dispersion is automatically adjusted to the optimal state, the reduction of the instrument analysis precision caused by the influence of adverse factors such as temperature change, vibration and the like of the environment is avoided, the workload of maintenance is reduced, and the instrument device is not required to be opened for manual adjustment.
Drawings
FIG. 1: working principle diagram of optical splitter system
FIG. 2: partial enlargement of crystal mount
FIG. 3: electric push rod and top head partial enlarged view
FIG. 4 is a schematic view of: position diagram of servo motor, electric push rod and crystal seat
FIG. 5: crystal seat extreme position 1 schematic diagram
FIG. 6: extreme position 2 of the crystal mount
In the figure: 101 light splitting shell, 102 blocking block, 103 slit A, 104 slit B, 105 detector, 106 signal processor, 107 industrial personal computer, 202 crystal seat, 203 crystal platform, 204 shaft pin, 205 spring leaf, 206 light splitting crystal, 301 electric push rod, 303 top, 401 servo motor, 404 motor control module.
Detailed Description
As shown in fig. 1, four shielding blocks (102) are arranged in a light splitting shell (101), and a crystal platform (203) is arranged;
as shown in fig. 1 and 2, the crystal holder (202) is connected with the crystal stage (203) through a shaft pin (204), and the crystal holder (202) can rotate around the shaft pin (204); a spring piece (205) is fixed on the crystal platform (203), the spring piece (205) can be fixed on the crystal platform (203) by a screw, and the tilting part of the spring piece (205) is propped against one end of the crystal seat (202); a light splitting crystal (206) is fixed on the crystal seat (202);
as shown in fig. 1, 2, 3 and 4, the light-splitting shell (101) is provided with a circular hole; the crystal platform (203) is provided with a round hole, the round hole of the crystal platform (203) and the round hole of the light splitting shell (101) are concentric, and the inner diameter of the round hole of the crystal platform (203) is the same as that of the round hole of the light splitting shell (101);
the servo motor (401) and the electric push rod (301) form a conventional servo electric push rod; the length of the electric push rod (301) in the internal space of the light splitting shell (101) can be adjusted through the clockwise or anticlockwise rotation of the servo motor (401); one end of the electric push rod (301) in the light splitting shell (101) is connected with a top head (303), the top head (303) is cylindrical, and the end which is not connected with the electric push rod (301) is in a circular truncated cone shape; the plug (303) is concentric with the round hole of the crystal platform (203), and the outer diameter of the plug (303) is smaller than the inner diameter of the round hole of the crystal platform (203);
the servo motor (401) is connected with the motor control module (404) through a cable, and the motor control module (404) provides a working power supply for the servo motor (401), receives signals and sends control signals;
as shown in fig. 1, 5 and 6, the servo motor (401) is connected with a motor control module (404) through a cable, and the motor control module (404) provides a working power supply for the servo motor (401), receives signals and sends control signals;
the servo motor (401) and the electric push rod (301) form a conventional servo electric push rod; the length of the electric push rod (301) in the internal space of the light splitting shell (101) can be adjusted through the clockwise or anticlockwise rotation of the servo motor (401); thereby controlling various states of the crystal seat (202) from the state of the extreme position 1 to the state of the extreme position 2;
the light splitting shell (101) is provided with a slit A (103) and a slit B (104), X fluorescence enters from the slit A (103), is reflected by the light splitting crystal (206), and then exits from the slit B (104); the light splitting shell (101) is connected with a detector (105), and the detector (105) receives X fluorescent light emitted from the slit B (104); the detector (105) is connected with the signal processor (106) through a cable, and the signal processor (106) provides a working power supply for the detector (105) and receives signals;
the signal processor (106) is connected with the industrial personal computer (107) through a cable, and the signal processor (106) converts the pulse signal received by the detector (105) into a digital signal of a counting rate and transmits the digital signal to the industrial personal computer (107);
the motor control module (404) is connected with the industrial personal computer (107) through a cable.
When the spectroscopic crystal (206) needs to be adjusted to the optimal position, the industrial personal computer (107) controls the rotation of the servo motor (401) through the motor control module (404) to enable the crystal seat (202) to gradually change from the state of the limit position 1 to the state of the limit position 2, in the process, a pulse signal of the servo motor (401) is transmitted to the motor control module (404), and the pulse signal is converted into a digital signal representing different positions of the crystal seat (202) through the motor control module (404) and then transmitted to the industrial personal computer (107); meanwhile, the signal processor (106) converts the pulse signals received by the detector (105) into digital signals of counting rate and transmits the digital signals to the industrial personal computer (107); the industrial personal computer (107) processes the data into a spectrum shape, the horizontal axis of the spectrum shape represents different positions of the crystal seat (202), the value range is 1-N, wherein the state of the extreme position 1 corresponds to 1, the state of the extreme position 2 corresponds to N, and N is the number of pulse signals sent by the servo motor (401) in the process that the crystal seat (202) gradually changes from the state of the extreme position 1 to the state of the extreme position 2; the vertical axis represents the counting rate of the crystal holder (202) in the position state.
In order to avoid the fluctuation effect, the industrial personal computer (107) carries out smoothing treatment on the spectrum shape, and the specific smoothing expression is as follows:
when N is more than or equal to 1 and less than or equal to 5 or N-5 and less than or equal to N,
Figure DEST_PATH_IMAGE001
when 5< N-5,
Figure DEST_PATH_IMAGE002
wherein
Figure DEST_PATH_IMAGE003
To smooth the count rate of a channel address n in the previous spectral shape,
Figure DEST_PATH_IMAGE004
the count rate with the channel address n in the smoothed spectrum shape;
then find the maximum value for the smoothed spectral shape, find max: (
Figure 686398DEST_PATH_IMAGE004
) Corresponding to max: (
Figure 400276DEST_PATH_IMAGE004
) The number of the addresses is n1, namely
Figure DEST_PATH_IMAGE005
If the position of the crystal seat (202) corresponding to the track address n1 is the optimal position, the industrial personal computer (107) controls the rotation of the servo motor (401) through the motor control module (404) so that the signal of the position of the crystal seat (202) corresponds to n 1.
Wherein:
the detector (105) is a gas flow proportional counter;
the servo motor (401) is selected from an M-link brand, a model: JM-CP 6224-M-E.

Claims (3)

1. An X fluorescence dispersion analyzer optical path system capable of being automatically adjusted is characterized in that:
a crystal stage (203) is arranged in the light splitting shell (101); the crystal seat (202) is connected with the crystal platform (203) through a shaft pin (204), and the crystal seat (202) can rotate by taking the shaft pin (204) as a center; a spring piece (205) is fixed on the crystal platform (203), and the tilting part of the spring piece (205) is propped against one end of the crystal seat (202); a light splitting crystal (206) is fixed on the crystal seat (202);
the light splitting shell (101) is provided with a round hole; the crystal platform (203) is provided with a round hole, and the round hole of the crystal platform (203) is concentric with the round hole of the light splitting shell (101);
the servo motor (401) is connected with the electric push rod (301); one end of the electric push rod (301) in the light splitting shell (101) is connected with a plug (303);
the servo motor (401) is connected with the motor control module (404) through a cable, and the motor control module (404) provides a working power supply for the servo motor (401), receives signals and sends control signals;
the light splitting shell (101) is provided with a slit A (103) and a slit B (104), X fluorescence enters from the slit A (103), is reflected by the light splitting crystal (206), and then exits from the slit B (104); the light splitting shell (101) is connected with a detector (105), and the detector (105) receives X fluorescent light emitted from the slit B (104); the detector (105) is connected with the signal processor (106) through a cable, and the signal processor (106) provides a working power supply for the detector (105) and receives signals;
the signal processor (106) is connected with the industrial personal computer (107) through a cable, and the signal processor (106) converts the pulse signal received by the detector (105) into a digital signal of a counting rate and transmits the digital signal to the industrial personal computer (107);
the motor control module (404) is connected with the industrial personal computer (107) through a cable.
2. The automatically adjustable optical path system of X-ray fluorescence dispersion analyzer according to claim 1, wherein:
the length of the electric push rod (301) in the internal space of the light splitting shell (101) can be adjusted through the clockwise rotation or the anticlockwise rotation of the servo motor (401).
3. The automatically adjustable optical path system of X-ray fluorescence dispersion analyzer according to claim 1, wherein:
the outer diameter of the plug (303) is smaller than the inner diameter of the round hole of the crystal platform (203), and the inner diameter of the round hole of the crystal platform (203) is the same as that of the round hole of the light splitting shell (101).
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CN202111204355.9A Withdrawn CN113916921A (en) 2020-11-11 2021-10-15 Automatically adjustable on-line X fluorescence analyzer light path system
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CN202111204469.3A Withdrawn CN113916922A (en) 2020-11-11 2021-10-15 Automatically-adjustable wavelength dispersion analyzer optical path device and use method
CN202111236540.6A Withdrawn CN113834836A (en) 2020-11-11 2021-10-23 Automatically-adjustable online X-ray fluorescence analyzer light path device and using method
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JP3677766B2 (en) * 2002-12-10 2005-08-03 理学電機工業株式会社 X-ray fluorescence analyzer
CN201522463U (en) * 2009-10-23 2010-07-07 北京邦鑫伟业技术开发有限公司 Wavelength dispersion X-ray fluorescence analyzer with energy dispersion detecting technology
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CN108152313B (en) * 2017-12-27 2023-11-21 钢研纳克检测技术股份有限公司 Automatic debugging and correcting system and method for light-splitting light path of X-ray fluorescence spectrometer
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