CN216082560U - Automatically adjustable on-line X fluorescence analyzer light path system - Google Patents
Automatically adjustable on-line X fluorescence analyzer light path system Download PDFInfo
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2209—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using wavelength dispersive spectroscopy [WDS]
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Abstract
The utility model provides an automatically-adjustable online X-ray fluorescence analyzer light path system, which comprises a crystal platform and a crystal seat which are arranged in a light splitting shell, wherein a light splitting crystal is arranged on the crystal seat, the crystal seat is connected with the crystal platform through a shaft pin and can rotate, the rotation angle of the crystal seat is adjusted through the transmission of a worm gear and a worm controlled by a motor, the rotation angle of the crystal seat is indirectly recorded through a multi-turn absolute value encoder, and the optimal rotation angle of the crystal seat is determined through processing the spectrum shape of the counting rate-rotation angle. Through the control to the motor, realize the automatically regulated to the light path, make the effect of whole light path reach the best, avoided reducing because of the instrument analysis precision that adverse factor influences such as the temperature variation of environment, vibrations caused, reduced the work load of maintaining, need not open the instrument device and carry out manual regulation.
Description
Technical Field
The utility model relates to the field of on-line analysis of components of industrial materials, in particular to an automatically adjustable on-line X-ray fluorescence analyzer light path system.
Background
X-ray fluorescence spectroscopy is a rapid, non-destructive method of material measurement. X-ray fluorescence is the secondary X-ray that is excited when a material is bombarded with high energy X-rays or gamma rays. This phenomenon is widely used for elemental and chemical analysis, particularly in the investigation and research of metals, glass, ceramics and building materials, geochemistry, forensic science, archaeology and art works such as oil paintings and murals.
X-ray fluorescence spectrometers, also known as XRF spectrometers, are classified into dispersive and non-dispersive types. The dispersion type is classified into a wavelength dispersion type and an energy dispersion type. The wavelength dispersion type fluorescence spectrometer is used for measuring the content of various elements by measuring the characteristic X-ray wavelength and the intensity of various elements after a fluorescence beam is dispersed by a spectroscopic crystal. The energy dispersion type fluorescence spectrometer separates undispersed X-ray fluorescence into X-ray spectral lines according to photon energy by means of a high-resolution sensitive semiconductor inspection instrument and a multi-channel analyzer, and measures the quantity of each element according to the energy of each element. The energy dispersion type fluorescence and the wavelength dispersion type fluorescence have all the defects, and the energy dispersion type fluorescence and the wavelength dispersion type fluorescence can only be complemented but cannot be replaced.
The wavelength dispersion type XRF spectrometer comprises an X-ray tube excitation source, a light splitting system, a detector system, a vacuum system, an airflow system and the like. According to different focusing geometrical conditions of the analysis crystal, the analysis crystal is divided into a non-focusing reflection flat crystal type, a semi-focusing reflection curved crystal type, a full-focusing reflection curved crystal type, a semi-focusing transmission curved crystal type and the like. In order to accurately measure the angle between the diffracted beam and the incident beam, the spectroscopic crystal needs to be mounted on a precise goniometer, and a large, precise and complex mechanical movement device is also needed.
If the content of one element is analyzed, an angle measuring instrument is not needed, and the spectroscopic crystal is fixed in the spectroscopic system at a proper angle. The structure of the light splitting system of the wavelength dispersion analyzer is precise, so that the wavelength dispersion analyzer is suitable for analysis in a laboratory at present, and when the wavelength dispersion analyzer is used for industrial on-line detection and analysis, the effect of the wavelength dispersion analyzer in industrial field application is seriously influenced due to harsh conditions of industrial production fields, such as large fluctuation of environmental temperature, continuous vibration or large amplitude of vibration, and the like.
Particularly, after the wavelength dispersion analyzer operates in an industrial field for a period of time, the reflection focusing state of the X fluorescence by the spectroscopic crystal is changed along with the influence of temperature change, vibration and the like, so that the effective X fluorescence intensity received by the detector is reduced, and the analysis precision is influenced. At present, the maintenance means for the phenomenon is that workers disassemble the analyzer and use manual adjustment, and the debugging work is very difficult due to the adverse conditions of large moisture, much dust, narrow space and the like on the site.
Disclosure of Invention
Aiming at the defects of the existing system, the utility model provides an automatically-adjustable on-line X fluorescence analyzer light path system.
The specific content of the utility model is as follows:
four shielding blocks (102) are arranged in the light splitting shell (101), and a crystal platform (203) is arranged; the crystal seat (202) is connected with the crystal platform (203) through a shaft pin (204), and the crystal seat (202) can rotate by taking the shaft pin (204) as a center; a spring piece (205) is fixed on the crystal platform (203), and the tilting part of the spring piece (205) is propped against one end of the crystal seat (202); a light splitting crystal (206) is fixed on the crystal seat (202); a circular hole is formed in the light splitting shell (101), and a sealing sleeve (304) is connected inside the circular hole; the crystal platform (203) is provided with a round hole, the round hole of the crystal platform (203) and the round hole of the light splitting shell (101) are concentric, and the inner diameter of the round hole of the crystal platform (203) is the same as that of the round hole of the light splitting shell (101); a guide strip (305) is arranged in the round hole of the crystal platform (203) and the round hole of the light splitting shell (101);
the turbine (301) is connected with one end of the screw shaft (302); the other end of the screw shaft (302) is a thin rod with threads, the thread part of the screw shaft (302) is matched with the threads of the inner round hole of the top nut (303), and the length of the screw shaft (302) in the inner space of the top nut (303) can be adjusted through the clockwise rotation or the anticlockwise rotation of the turbine (301); the top nut (303) is cylindrical, and one end of the top nut, which is not connected with the screw shaft (302), is set to be in a circular truncated cone shape; the plug nut (303) is concentric with the screw shaft (302), the outer diameter of the plug nut (303) is phi 2, the inner diameter of a round hole of the crystal platform (203) is phi 3, the inner diameter of the sealing sleeve (304) is phi 1, and phi 1 is less than phi 2 and less than or equal to phi 3;
a stepping motor (401) is fixed outside the light splitting shell (101), the stepping motor (401) is connected with a worm (402), and the worm (402) and a worm wheel (301) form a worm and gear structure; when the stepping motor (401) rotates, the worm (402) drives the worm wheel (301), the screw shaft (302) is in threaded connection with the top nut (303), the distance between the worm wheel (301) and the light splitting shell (101) is fixed, but the top nut (303) can move relative to the screw shaft (302), so that the relative position of the top nut (303) and the light splitting shell (101) can be controlled through the rotation of the stepping motor (401), and the crystal seat (202) can be in any position between two states of a limit position 1 and a limit position 2 under the action of the circular table of the top nut (303) and the spring piece (205);
one side of the turbine (301) is connected with the screw shaft (302), and the other side of the turbine is connected with the multi-turn absolute value encoder (403) through the coupler (405); the multi-turn absolute value encoder (403) is connected with the motor control module (404) through a cable, and the motor control module (404) provides a working power supply and receives signals for the multi-turn absolute value encoder (403); the stepping motor (401) is connected with the motor control module (404) through a cable, and the motor control module (404) provides a working power supply for the stepping motor (401) and sends a control signal;
the light splitting shell (101) is provided with a slit A (103) and a slit B (104), X fluorescence enters from the slit A (103), is reflected by the light splitting crystal (206), and then exits from the slit B (104); the light splitting shell (101) is connected with a detector (105), and the detector (105) receives X fluorescent light emitted from the slit B (104); the detector (105) is connected with the signal processor (106) through a cable, and the signal processor (106) provides a working power supply for the detector (105) and receives signals;
the signal processor (106) is connected with the industrial personal computer (107) through a cable, and the signal processor (106) converts the pulse signal received by the detector (105) into a digital signal of a counting rate and transmits the digital signal to the industrial personal computer (107);
the motor control module (404) is connected with the industrial personal computer (107) through a cable.
When the spectroscopic crystal (206) needs to be adjusted to the optimal position, the industrial personal computer (107) controls the rotation of the stepping motor (401) through the motor control module (404) to enable the crystal holder (202) to gradually change from the state of the limit position 1 to the state of the limit position 2, in the process, signals of the multi-turn absolute value encoder (403) are transmitted to the motor control module (404), and are converted into digital signals representing different positions of the crystal holder (202) through the motor control module (404) and then transmitted to the industrial personal computer (107); meanwhile, the signal processor (106) converts the pulse signals received by the detector (105) into digital signals of counting rate and transmits the digital signals to the industrial personal computer (107); the industrial personal computer (107) processes the data into a spectrum shape;
the industrial personal computer (107) smoothes the spectrum shape, then the maximum value is found for the smoothed spectrum shape, the position of the crystal seat (202) corresponding to the abscissa position n1 of the maximum value is the optimal position, and the industrial personal computer (107) controls the rotation of the stepping motor (401) through the motor control module (404), so that the signal of the multi-turn absolute value encoder (403) corresponds to n 1.
Has the advantages that:
by adopting the content of the utility model for implementation, the automatic adjustment of the optical path can be realized, the optical path with chromatic dispersion is automatically adjusted to the optimal state, the reduction of the instrument analysis precision caused by the influence of adverse factors such as temperature change, vibration and the like of the environment is avoided, the workload of maintenance is reduced, and the instrument device is not required to be opened for manual adjustment.
Drawings
FIG. 1: working principle diagram of optical splitter system
FIG. 2: partial enlargement of crystal mount
FIG. 3: screw shaft and ejector nut local enlarged view
FIG. 4: motor, driving pinion and driven bull gear position map
FIG. 5: crystal seat extreme position 1 schematic diagram
FIG. 6: extreme position 2 of the crystal mount
In the figure: 101 light splitting shell, 102 blocking block, 103 slit A, 104 slit B, 105 detector, 106 signal processor, 107 industrial personal computer, 202 crystal seat, 203 crystal platform, 204 shaft pin, 205 spring leaf, 206 light splitting crystal, 301 turbine, 302 screw shaft, 303 top nut, 304 sealing sleeve, 305 guide bar, 401 stepping motor, 402 worm, 403 multi-turn absolute value encoder, 404 motor control module and 405 coupler.
Detailed Description
As shown in fig. 1, four shielding blocks (102) are arranged in a light splitting shell (101), and a crystal platform (203) is arranged;
as shown in fig. 1 and 2, the crystal holder (202) is connected with the crystal stage (203) through a shaft pin (204), and the crystal holder (202) can rotate around the shaft pin (204); a spring piece (205) is fixed on the crystal platform (203), the spring piece (205) can be fixed on the crystal platform (203) by a screw, and the tilting part of the spring piece (205) is propped against one end of the crystal seat (202); a light splitting crystal (206) is fixed on the crystal seat (202);
as shown in fig. 1, 2 and 3, a light splitting shell (101) is provided with a round hole, and a sealing sleeve (304) is connected inside the round hole; the crystal platform (203) is provided with a round hole, the round hole of the crystal platform (203) and the round hole of the light splitting shell (101) are concentric, and the inner diameter of the round hole of the crystal platform (203) is the same as that of the round hole of the light splitting shell (101); a guide strip (305) is arranged in the round hole of the crystal platform (203) and the round hole of the light splitting shell (101);
the turbine (301) is connected with one end of the screw shaft (302), and the turbine (301) is concentric with the screw shaft (302); the screw shaft (302) penetrates through the interior of the sealing sleeve (304) and can freely rotate but cannot relatively displace under the support of the sealing sleeve (304); the other end of the screw shaft (302) is a thin rod provided with threads, the size of the threads is matched with the size of the internal threads of the round hole of the top nut (303), one end of the screw shaft (302) in the light splitting shell (101) is connected with the top nut (303), the top nut (303) is cylindrical, one end which is not connected with the screw shaft (302) is arranged to be in a round table shape, and the round table props against the crystal seat (202); the plug nut (303) is concentric with the screw shaft (302), a round hole is formed in the plug nut (303), threads are arranged on the round hole and are matched with the threads of the thin rod of the screw shaft (302); the outer side of the top nut (303) is provided with a groove, and the top nut can only slide but cannot rotate under the action of the guide strip (305); the threaded part of the screw shaft (302) is connected with a round hole in the inner part of the plug nut (303), and the length of the screw shaft (302) in the inner space of the plug nut (303) can be adjusted through the clockwise rotation or the anticlockwise rotation of the worm wheel (301); the outer diameter of the top (303) is phi 2, the inner diameter of the round hole of the crystal platform (203) is phi 3, the inner diameter of the sealing sleeve (304) is phi 1, and phi 1 is less than phi 2 and less than or equal to phi 3;
as shown in fig. 4, a stepping motor (401) is fixed outside the light splitting housing (101), the stepping motor (401) is connected with a worm (402), and the worm (402) and a worm wheel (301) form a worm and gear structure;
as shown in fig. 5 and 6, when the stepping motor (401) rotates, the worm gear (301) is driven by the worm (402), the screw shaft (302) is in threaded connection with the plug nut (303), the distance between the worm gear (301) and the spectroscopic shell (101) is fixed, but the plug nut (303) is movable relative to the screw shaft (302), so that the relative position between the plug nut (303) and the spectroscopic shell (101) can be controlled by the rotation of the stepping motor (401), and the crystal holder (202) can be in any position between two states of the limit position 1 and the limit position 2 under the action of the circular table of the plug nut (303) and the spring piece (205);
as shown in fig. 1, one side of the turbine (301) is connected with the screw shaft (302), and the other side is connected with the multi-turn absolute value encoder (403) through the coupling (405); the multi-turn absolute value encoder (403) is connected with the motor control module (404) through a cable, and the motor control module (404) provides a working power supply and receives signals for the multi-turn absolute value encoder (403); the stepping motor (401) is connected with the motor control module (404) through a cable, and the motor control module (404) provides a working power supply for the stepping motor (401) and sends a control signal;
the light splitting shell (101) is provided with a slit A (103) and a slit B (104), X fluorescence enters from the slit A (103), is reflected by the light splitting crystal (206), and then exits from the slit B (104); the light splitting shell (101) is connected with a detector (105), and the detector (105) receives X fluorescent light emitted from the slit B (104); the detector (105) is connected with the signal processor (106) through a cable, and the signal processor (106) provides a working power supply for the detector (105) and receives signals;
the signal processor (106) is connected with the industrial personal computer (107) through a cable, and the signal processor (106) converts the pulse signal received by the detector (105) into a digital signal of a counting rate and transmits the digital signal to the industrial personal computer (107);
the motor control module (404) is connected with the industrial personal computer (107) through a cable.
When the spectroscopic crystal (206) needs to be adjusted to the optimal position, the industrial personal computer (107) controls the rotation of the stepping motor (401) through the motor control module (404) to enable the crystal holder (202) to gradually change from the state of the limit position 1 to the state of the limit position 2, in the process, signals of the multi-turn absolute value encoder (403) are transmitted to the motor control module (404), and are converted into digital signals representing different positions of the crystal holder (202) through the motor control module (404) and then transmitted to the industrial personal computer (107); meanwhile, the signal processor (106) converts the pulse signals received by the detector (105) into digital signals of counting rate and transmits the digital signals to the industrial personal computer (107); the industrial personal computer (107) processes the data into a spectrum shape, the horizontal axis of the spectrum shape represents different positions of the crystal seat (202), the value range is 1-N, the state of the extreme position 1 corresponds to 1, the state of the extreme position 2 corresponds to N, and the vertical axis represents the counting rate of the crystal seat (202) in the position state.
In order to avoid the fluctuation effect, the industrial personal computer (107) carries out smoothing treatment on the spectrum shape, and the specific smoothing expression is as follows:
whereinTo smooth the count rate of a channel address n in the previous spectral shape,the count rate with the channel address n in the smoothed spectrum shape;
then find the maximum value for the smoothed spectrum shape, find max: () Corresponding to max: () The number of the addresses is n1, namelyIf the position of the crystal seat (202) corresponding to the track address n1 is the optimal position, the industrial personal computer (107) controls the rotation of the stepping motor (401) through the motor control module (404), so that the signal of the multi-turn absolute value encoder (403) corresponds to n 1.
Wherein:
the detector (105) is a gas flow proportional counter;
the stepping motor (401) adopts a three-topology stepping motor 39HS4006A 4;
the WDGA 58B absolute value encoder (Germany) is selected as the multi-turn absolute value encoder (403).
Claims (5)
1. But automatically regulated's online X fluorescence analysis appearance light path system, its characterized in that:
a crystal stage (203) is arranged in the light splitting shell (101); the crystal seat (202) is connected with the crystal platform (203) through a shaft pin (204), and the crystal seat (202) can rotate by taking the shaft pin (204) as a center; a spring piece (205) is fixed on the crystal platform (203), and the tilting part of the spring piece (205) is propped against one end of the crystal seat (202); a light splitting crystal (206) is fixed on the crystal seat (202);
a circular hole is formed in the light splitting shell (101), and a sealing sleeve (304) is connected inside the circular hole; a round hole is formed in the crystal platform (203), the round hole of the crystal platform (203) and the round hole of the light splitting shell (101) are concentric, and a guide strip (305) is arranged in the round hole of the crystal platform (203) and the round hole of the light splitting shell (101);
the turbine (301) is connected with one end of the screw shaft (302); the other end of the screw shaft (302) is a thin rod with threads, and the thread part of the screw shaft (302) is matched with the threads of the inner round hole of the plug nut (303);
a stepping motor (401) is fixed outside the light splitting shell (101), the stepping motor (401) is connected with a worm (402), and the worm (402) and a worm wheel (301) form a worm and gear structure; when the stepping motor (401) rotates, the worm (402) drives the turbine (301);
one side of the turbine (301) is connected with the screw shaft (302), and the other side of the turbine is connected with the multi-turn absolute value encoder (403) through the coupler (405); the multi-turn absolute value encoder (403) is connected with the motor control module (404) through a cable, and the motor control module (404) provides a working power supply and receives signals for the multi-turn absolute value encoder (403); the stepping motor (401) is connected with the motor control module (404) through a cable, and the motor control module (404) provides a working power supply for the stepping motor (401) and sends a control signal;
the light splitting shell (101) is provided with a slit A (103) and a slit B (104), X fluorescence enters from the slit A (103), is reflected by the light splitting crystal (206), and then exits from the slit B (104); the light splitting shell (101) is connected with a detector (105), and the detector (105) receives X fluorescent light emitted from the slit B (104); the detector (105) is connected with the signal processor (106) through a cable, and the signal processor (106) provides a working power supply for the detector (105) and receives signals;
the signal processor (106) is connected with the industrial personal computer (107) through a cable, and the signal processor (106) converts the pulse signal received by the detector (105) into a digital signal of a counting rate and transmits the digital signal to the industrial personal computer (107);
the motor control module (404) is connected with the industrial personal computer (107) through a cable.
2. The automatically adjustable optical path system of the on-line X-ray fluorescence analyzer of claim 1, wherein:
the relative position of the top nut (303) and the light splitting shell (101) is controlled by the rotation of the stepping motor (401), and the crystal seat (202) is in any position between two states of a limit position 1 and a limit position 2 under the action of the round table of the top nut (303) and the spring piece (205).
3. The automatically adjustable optical path system of the on-line X-ray fluorescence analyzer of claim 1, wherein:
the plug nut (303) is cylindrical and has a truncated cone shape at the end not connected to the screw shaft (302).
4. The optical path device of wavelength dispersion analyzer capable of being automatically adjusted and the use method thereof based on claim 1 are characterized in that:
the outer diameter of the plug nut (303) is phi 2, the inner diameter of the round hole of the crystal platform (203) is phi 3, the inner diameter of the sealing sleeve (304) is phi 1, and phi 1 is less than or equal to phi 2 and less than or equal to phi 3.
5. The automatically adjustable optical path system of the on-line X-ray fluorescence analyzer of claim 1, wherein:
when the spectroscopic crystal (206) needs to be adjusted to the optimal position, the industrial personal computer (107) controls the rotation of the stepping motor (401) through the motor control module (404) to enable the crystal holder (202) to gradually change from the state of the limit position 1 to the state of the limit position 2, in the process, signals of the multi-turn absolute value encoder (403) are transmitted to the motor control module (404), and are converted into digital signals representing different positions of the crystal holder (202) through the motor control module (404) and then transmitted to the industrial personal computer (107); meanwhile, the signal processor (106) converts the pulse signals received by the detector (105) into digital signals of counting rate and transmits the digital signals to the industrial personal computer (107); the industrial personal computer (107) processes the data into a spectrum shape;
the industrial personal computer (107) smoothes the spectrum shape, then the maximum value is found for the smoothed spectrum shape, the position of the crystal seat (202) corresponding to the abscissa position n1 of the maximum value is the optimal position, and the industrial personal computer (107) controls the rotation of the stepping motor (401) through the motor control module (404), so that the signal of the multi-turn absolute value encoder (403) corresponds to n 1.
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CN202011381042.6A Pending CN112611776A (en) | 2020-11-11 | 2020-12-01 | Automatically-adjustable online wavelength dispersion analyzer optical path device and use method |
CN202022827777.9U Active CN213933660U (en) | 2020-11-11 | 2020-12-01 | Automatically adjustable on-line wavelength dispersion analyzer light path device |
CN202111204355.9A Pending CN113916921A (en) | 2020-11-11 | 2021-10-15 | Automatically adjustable on-line X fluorescence analyzer light path system |
CN202122488087.XU Active CN216082560U (en) | 2020-11-11 | 2021-10-15 | Automatically adjustable on-line X fluorescence analyzer light path system |
CN202111204469.3A Pending CN113916922A (en) | 2020-11-11 | 2021-10-15 | Automatically-adjustable wavelength dispersion analyzer optical path device and use method |
CN202122488090.1U Active CN216082561U (en) | 2020-11-11 | 2021-10-15 | Automatically adjustable wavelength dispersion analyzer optical path device |
CN202111236540.6A Pending CN113834836A (en) | 2020-11-11 | 2021-10-23 | Automatically-adjustable online X-ray fluorescence analyzer light path device and using method |
CN202122669616.6U Active CN216696125U (en) | 2020-11-11 | 2021-11-03 | X fluorescence dispersion analyzer optical path system capable of being automatically adjusted |
CN202111292984.1A Pending CN113834837A (en) | 2020-11-11 | 2021-11-03 | X fluorescence dispersion analyzer optical path system capable of being automatically adjusted |
CN202122695513.7U Active CN216285007U (en) | 2020-11-11 | 2021-11-05 | Automatically-adjustable online X fluorescence dispersion analyzer optical path system |
CN202111305057.9A Pending CN113834838A (en) | 2020-11-11 | 2021-11-05 | Automatically-adjustable online X fluorescence dispersion analyzer optical path system |
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CN202022827777.9U Active CN213933660U (en) | 2020-11-11 | 2020-12-01 | Automatically adjustable on-line wavelength dispersion analyzer light path device |
CN202111204355.9A Pending CN113916921A (en) | 2020-11-11 | 2021-10-15 | Automatically adjustable on-line X fluorescence analyzer light path system |
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CN202111204469.3A Pending CN113916922A (en) | 2020-11-11 | 2021-10-15 | Automatically-adjustable wavelength dispersion analyzer optical path device and use method |
CN202122488090.1U Active CN216082561U (en) | 2020-11-11 | 2021-10-15 | Automatically adjustable wavelength dispersion analyzer optical path device |
CN202111236540.6A Pending CN113834836A (en) | 2020-11-11 | 2021-10-23 | Automatically-adjustable online X-ray fluorescence analyzer light path device and using method |
CN202122669616.6U Active CN216696125U (en) | 2020-11-11 | 2021-11-03 | X fluorescence dispersion analyzer optical path system capable of being automatically adjusted |
CN202111292984.1A Pending CN113834837A (en) | 2020-11-11 | 2021-11-03 | X fluorescence dispersion analyzer optical path system capable of being automatically adjusted |
CN202122695513.7U Active CN216285007U (en) | 2020-11-11 | 2021-11-05 | Automatically-adjustable online X fluorescence dispersion analyzer optical path system |
CN202111305057.9A Pending CN113834838A (en) | 2020-11-11 | 2021-11-05 | Automatically-adjustable online X fluorescence dispersion analyzer optical path system |
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2020
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CN113834838A (en) | 2021-12-24 |
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