CN216671553U - Plasma cleaning cavity structure for flexible material - Google Patents

Plasma cleaning cavity structure for flexible material Download PDF

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Publication number
CN216671553U
CN216671553U CN202123115515.0U CN202123115515U CN216671553U CN 216671553 U CN216671553 U CN 216671553U CN 202123115515 U CN202123115515 U CN 202123115515U CN 216671553 U CN216671553 U CN 216671553U
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CN
China
Prior art keywords
vacuum
electrode
cavity
plasma cleaning
flexible material
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CN202123115515.0U
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Chinese (zh)
Inventor
郭峰
王宇
陈晓明
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Kunshan Plaux Electronics Technology Co ltd
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Kunshan Plaux Electronics Technology Co ltd
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Priority to CN202123115515.0U priority Critical patent/CN216671553U/en
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Abstract

The utility model discloses a plasma cleaning cavity structure for flexible materials, which comprises: a jig frame is arranged in the vacuum cavity; a plurality of groups of insulating clamping grooves are formed in two ends of the bottom of the jig frame, and a supporting rod is arranged between every two adjacent insulating clamping grooves; the insulating clamping groove is provided with an electrode anode and an electrode cathode at intervals; two groups of water-cooled electrodes are arranged in each of the electrode anode and the electrode cathode, wherein one of the water-cooled electrodes is an inlet, and the other water-cooled electrode is an outlet; the water-cooled electrode is connected with a conductive copper plate; the conductive copper plate is provided with a shielding box; the vacuum door is arranged at the top of the vacuum cavity, the vacuum tube is arranged at the bottom of the vacuum cavity in a penetrating mode, and an air tube is arranged on one surface, facing the jig frame, of the vacuum door; according to the utility model, the water-cooled electrode pipeline is arranged in the electrode to carry out circulating water cooling on the electrode, so that the heat dissipation problem is effectively solved.

Description

Plasma cleaning cavity structure for flexible material
Technical Field
The utility model relates to a flexible material plasma cleaning cavity structure, and belongs to the technical field of cleaning.
Background
Plasma cleaning is mainly applied to the automobile field at present, such as instrument panel cleaning, control panel bonding pretreatment and automobile door and window sealing part treatment; generally, hardware products are cleaned, with the development and progress of the society, the requirements of various industries are continuously strict, plasma cleaning is needed to be carried out on some flexible products, the existing plasma cleaning cavity does not have a structure suitable for the flexible products, and a plasma cavity capable of solving the problem of the flexible products is provided firstly.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the defects in the prior art and provides a plasma cleaning cavity structure for flexible materials.
A plasma cleaning chamber structure for flexible materials, comprising:
the jig frame is arranged in the vacuum cavity; a plurality of groups of insulating clamping grooves are formed in two ends of the bottom of the jig frame, and a supporting rod is arranged between every two adjacent insulating clamping grooves;
the insulating clamping groove is provided with an electrode anode and an electrode cathode at intervals; two groups of water-cooled electrodes are arranged in each of the electrode anode and the electrode cathode, wherein one of the water-cooled electrodes is an inlet, and the other water-cooled electrode is an outlet; the water-cooled electrode is connected with a conductive copper plate; the conductive copper plate is provided with a shielding box;
the vacuum door is arranged at the top of the vacuum cavity, the vacuum tube is arranged at the bottom of the vacuum cavity in a penetrating mode, and the air tube is arranged on one surface, facing the jig frame, of the vacuum door.
Furthermore, one end of the vacuum door is connected with the vacuum cavity through a hinge, and the other end of the vacuum door is clamped and connected with the handle assembly through a hinge.
Furthermore, the handle assembly comprises a handle and a handle fixing block, wherein one of the handle and the handle fixing block is arranged at the end part of the vacuum door, and the other one of the handle and the handle fixing block is arranged on the vacuum cavity and matched with the vacuum door.
Further, the vacuum door is provided with an observation window.
Furthermore, one side of the vacuum cavity is provided with a hollow flange, and the other side of the vacuum cavity is provided with a temperature control flange.
Furthermore, the inside lateral wall of vacuum cavity is equipped with the leading wheel, tool frame outside lateral wall is equipped with the slide rail with the leading wheel adaptation.
Compared with the prior art, the utility model has the following beneficial effects: according to the utility model, the water-cooled electrode pipeline is arranged in the electrode to carry out circulating water cooling on the electrode, so that the problem of heat dissipation is effectively solved;
according to the utility model, the support rods are arranged between the insulating clamping grooves and used for supporting the flexible product, so that the problem of fixing the flexible product in the cavity is solved, and the flexible product is treated by generating plasma gas for the cavity through the gas pipe.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of a vacuum chamber according to the present invention;
FIG. 3 is a schematic view of a jig frame according to the present invention;
FIG. 4 is a bottom view of the jig frame according to the present invention;
FIG. 5 is a schematic front view of the present invention;
in the figure: 1. a vacuum chamber; 2. a vacuum door; 3. a hinge; 4. a handle; 5. a handle fixing block; 6. a shield case; 7. an observation window; 8. a vacuum tube; 9. a guide wheel; 10. an insulating clamping groove; 11. a support bar; 12. water-cooling the electrode; 13. a jig frame; 14. a slide rail; 15. an electrode positive electrode; 16. an electrode negative electrode; 17. an insulating sleeve; 18. a conductive copper plate; 19. an air pipe; 20. breaking the hollow flange; 21. producing a product; 22. and a temperature control flange.
Detailed Description
The utility model is further described below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
As shown in fig. 1-5, a plasma cleaning chamber structure for flexible materials is disclosed, comprising:
the jig device comprises a vacuum cavity 1, wherein a jig frame 13 is arranged in the vacuum cavity 1; a plurality of groups of insulating clamping grooves 10 are formed in two ends of the bottom of the jig frame 13, and a supporting rod 11 is arranged between every two adjacent insulating clamping grooves 10;
the insulating clamping groove 10 is provided with an electrode anode 15 and an electrode cathode 16 at intervals; two groups of water-cooled electrodes 12 are arranged in each electrode anode 15 and each electrode cathode 16, wherein one is an inlet, and the other is an outlet, so that water circulation is formed to improve the cooling effect; the water-cooled electrode 12 is connected with a conductive copper plate 18; the conductive copper plate 18 is provided with a shielding box 6; the conductive copper plate 18 conducts electricity to the electrodes;
in the embodiment, the vacuum door 2 is arranged at the top of the vacuum cavity 1, the vacuum tube 8 is arranged at the bottom of the vacuum cavity 1 in a penetrating mode, the air tube 19 is arranged on one surface, facing the jig frame 13, of the vacuum door 2, the vacuum door 2 can be opened and closed, the inner jig frame 13 can be conveniently taken out, meanwhile, the guide wheel 9 is arranged on the side wall of the inside of the vacuum cavity 1, the slide rail 14 matched with the guide wheel 9 is arranged on the side wall of the outside of the jig frame 13, and therefore the jig frame can be more conveniently pushed in; the vacuum door 2 is provided with an observation window 7, so that the internal condition can be observed conveniently in the cleaning process.
In this embodiment, 2 one end of vacuum door is connected with vacuum chamber 1 through hinge 3, and the other end passes through handle subassembly joint.
In this embodiment, the handle assembly comprises a handle 4 and a handle fixing block 5, one of the handle 4 and the handle fixing block 5 is arranged at the end of the vacuum door 2, and the other is arranged on the vacuum chamber 1 and is matched with the vacuum door.
In this embodiment, a blank breaking flange 20 is disposed on one side of the vacuum chamber 1, and a temperature control flange 22 is disposed on the other side.
According to the utility model, the water-cooled electrode pipeline is arranged in the electrode to carry out circulating water cooling on the electrode, so that the problem of heat dissipation is effectively solved;
according to the utility model, the support rods are arranged between the insulating clamping grooves and used for supporting the flexible product, so that the problem of fixing the flexible product in the cavity is solved, and the flexible product is treated by generating plasma gas for the cavity through the gas pipe.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims (6)

1. The utility model provides a plasma cleaning cavity structure to flexible material, characterized by includes:
the device comprises a vacuum cavity (1), wherein a jig frame (13) is arranged in the vacuum cavity (1); a plurality of groups of insulating clamping grooves (10) are formed in two ends of the bottom of the jig frame (13), and a supporting rod (11) is arranged between every two adjacent insulating clamping grooves (10);
the insulating clamping groove (10) is provided with an electrode anode (15) and an electrode cathode (16) at intervals; two groups of water-cooling electrodes (12) are arranged in each electrode anode (15) and each electrode cathode (16), wherein one group is an inlet, and the other group is an outlet; the water-cooled electrode (12) is connected with a conductive copper plate (18); the conductive copper plate (18) is provided with a shielding box (6);
the vacuum door (2) is arranged at the top of the vacuum cavity (1), the vacuum tube (8) is arranged at the bottom of the vacuum cavity (1) in a penetrating mode, and the air tube (19) is arranged on one surface, facing the jig frame (13), of the vacuum door (2).
2. The plasma cleaning cavity structure aiming at the flexible material is characterized in that one end of the vacuum door (2) is connected with the vacuum cavity (1) through a hinge (3), and the other end of the vacuum door is clamped through a handle assembly.
3. The plasma cleaning chamber structure aiming at the flexible material is characterized in that the handle assembly comprises a handle (4) and a handle fixing block (5), one of the handle (4) and the handle fixing block (5) is arranged at the end part of the vacuum door (2), and the other one is arranged on the vacuum chamber (1) and is matched with the vacuum door.
4. The plasma cleaning chamber structure aiming at the flexible material according to the claim 1, characterized in that the vacuum door (2) is provided with a viewing window (7).
5. The plasma cleaning cavity structure aiming at the flexible material is characterized in that a blank breaking flange (20) is arranged on one side of the vacuum cavity (1), and a temperature control flange (22) is arranged on the other side of the vacuum cavity.
6. The plasma cleaning cavity structure aiming at the flexible material according to claim 1, wherein a guide wheel (9) is arranged on the inner side wall of the vacuum cavity (1), and a slide rail (14) matched with the guide wheel (9) is arranged on the outer side wall of the jig frame (13).
CN202123115515.0U 2021-12-13 2021-12-13 Plasma cleaning cavity structure for flexible material Active CN216671553U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202123115515.0U CN216671553U (en) 2021-12-13 2021-12-13 Plasma cleaning cavity structure for flexible material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202123115515.0U CN216671553U (en) 2021-12-13 2021-12-13 Plasma cleaning cavity structure for flexible material

Publications (1)

Publication Number Publication Date
CN216671553U true CN216671553U (en) 2022-06-03

Family

ID=81794430

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202123115515.0U Active CN216671553U (en) 2021-12-13 2021-12-13 Plasma cleaning cavity structure for flexible material

Country Status (1)

Country Link
CN (1) CN216671553U (en)

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