CN216595889U - Light shield box - Google Patents
Light shield box Download PDFInfo
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- CN216595889U CN216595889U CN202122563200.6U CN202122563200U CN216595889U CN 216595889 U CN216595889 U CN 216595889U CN 202122563200 U CN202122563200 U CN 202122563200U CN 216595889 U CN216595889 U CN 216595889U
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- shell
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- Preparing Plates And Mask In Photomechanical Process (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a photomask box, which comprises a base and a shell, wherein the position precision of the photomask box loaded on a bearing table is m millimeters, the diameters of a base sensor and a shell sensor are respectively x millimeters and y millimeters, and the area of a sensing area of the base sensor is larger than (m + x)2Square millimeter, the area of the sensing area of the shell sensor is larger than (m + x)2Square millimeter. In the utility model, the area setting of the base sensor sensing area and the shell sensor sensing area of the photomask box simultaneously considers two factors of the size of the sensor and the position precision of the photomask box, so that when the photomask box is carried to the bearing table, the base sensor sensing area is within the position precision range of the photomask boxThe base sensor can be completely covered by the sensor sensing area, the shell sensor sensing area can also completely cover the shell sensor, the problem that equipment is down due to false alarm of the equipment is solved, and accordingly capacity loss and labor waste caused by the equipment are effectively avoided.
Description
Technical Field
The utility model relates to the field of semiconductor integrated circuit manufacturing, in particular to a photomask box.
Background
In an integrated circuit process, patterns on a photomask are assigned on a semiconductor through an etching technology, so that the requirement on the surface cleanliness of the photomask is high, any flaw or particle on the surface of the photomask can affect the yield of products, and the photomask must be placed in a photomask box with high cleanliness, good air tightness and static electricity resistance during the transmission or storage. When the photomask is used, the photomask and the photomask box are transmitted to a bearing table of the photoetching equipment, then the photomask box is opened, and the photomask is taken out for a subsequent photoetching process.
The bearing platform is provided with a base sensor used for sensing a base of the light shield box and a shell sensor used for sensing a shell of the light shield box, generally speaking, the base sensor and the shell sensor are two in number, the sensors of all types are distributed on the periphery of the bearing platform in a diagonal form, when the bearing platform is provided with the light shield box, the base sensor contacts the base of the light shield box, the shell sensor contacts the shell of the light shield box, when the four sensors are in contact with the light shield box, the equipment determines that the bearing platform is provided with the light shield box, the equipment performs next operation, as long as one sensor is not in contact with the light shield box, the equipment determines that the bearing platform is not provided with the light shield box, the equipment is down and needs field personnel to process. On the existing photomask box, the base sensor sensing area and the shell sensor sensing area are both slender strip-shaped areas, and the line width range of the strip-shaped areas is equivalent to the position precision range of the photomask box on the bearing platform, so that when the photomask box is placed on the bearing platform, the strip-shaped areas can not completely cover the base sensor or the shell sensor, equipment is mistakenly reported, equipment breakdown is caused, the equipment needs to be placed or confirmed again, the productivity is influenced, and manpower is wasted.
SUMMERY OF THE UTILITY MODEL
The technical problem to be solved by the utility model is to provide a photomask box, which can realize that a base sensor and a shell sensor of a bearing table are completely covered when the photomask box is loaded on the bearing table, so that breakdown caused by misinformation cannot occur, and the production capacity cannot be influenced.
In order to solve the above technical problem, the present invention provides a reticle pod, comprising:
a base formed with a base sensor sensing region;
the shell cover is arranged on the base in a covering mode, and a shell cover sensor sensing area is formed on the bottom edge of the shell cover;
when the photomask box is carried on the bearing table, the base sensor sensing area is positioned at the position of the base sensor of the bearing table; the shell sensor sensing area is positioned at the position of a shell sensor of the bearing table;
the position precision of the photomask box loaded on the bearing table is m millimeters, the diameter of the base sensor is x millimeters, and the diameter of the shell sensor is y millimeters;
the area of the sensing area of the base sensor is larger than (m + x)2Square millimeter, the area of the sensing area of the shell sensor is larger than (m + y)2Square millimeter.
Preferably, the base sensor sensing area is in the shape of a circle having a radius at least equal to (m + x) mm.
Preferably, the shape of the sensing area of the shell sensor is a circle with a radius at least equal to (m + y) mm.
Preferably, the base sensor sensing area is in the shape of a square with a side length at least equal to (m + x) mm.
Preferably, the sensing area of the shell sensor is in the shape of a square with a side length at least equal to (m + y) mm.
Preferably, the base further comprises a connecting hole and a supporting piece, the connecting hole is fixedly connected with the pin of the bearing table so as to fix the base, and the supporting piece is used for placing the light cover.
Preferably, the number of the connecting holes is three, and the number of the supporting pieces is four.
Preferably, the bottom edge of the shell is flush with the bottom surface of the base.
Preferably, the housing is snap-fit to the base.
Preferably, the top surface of the housing is provided with a handle.
According to the utility model, the area setting of the base sensor sensing area and the shell sensor sensing area of the light cover box simultaneously considers two factors of the size of the sensor and the position precision of the light cover box, so that when the light cover box is carried to the bearing table, the base sensor sensing area can completely cover the base sensor and the shell sensor sensing area can also completely cover the shell sensor within the position precision range, the problem of equipment downtime caused by equipment misreport is solved, and the capacity loss and manpower waste caused by the equipment downtime are effectively avoided.
Drawings
In order to more clearly illustrate the technical solution of the present invention, the drawings needed to be used in the present invention are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a bottom view of a base of an embodiment of a reticle pod of the present invention;
FIG. 2 is a schematic view of a mask cassette and a carrier stage according to an embodiment of the utility model;
FIG. 3 is a top view of a carrier stage of an embodiment of the reticle pod of the present invention wherein the dashed box represents the base sensor sensing area or the shell sensor sensing area;
fig. 4 is a schematic view of the shape of the base sensor sensing area or the shell sensor sensing area of an embodiment of the reticle pod of the present invention, wherein the dashed lines represent the base sensor or the shell sensor.
In the figure, 1-base; 2-a housing; 3-a bearing platform; 11-base sensor sensing zone; 12-a connection hole; 13-a support; 21-a can sensor sensing zone; 22-a handle; 31-a base sensor; 32-a can sensor; 33-pins.
Detailed Description
The technical solutions in the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, 2 and 3, there is shown a reticle pod of an embodiment of the present invention comprising:
a base formed with a base sensor sensing region;
the shell cover is arranged on the base in a covering mode, and a shell cover sensor sensing area is formed on the bottom edge of the shell cover;
when the photomask box is carried on the bearing table, the base sensor sensing area is positioned at the position of the base sensor of the bearing table; the shell sensor sensing area is positioned at the position of a shell sensor of the bearing table;
the position precision of the photomask box loaded on the bearing table is m millimeters, the diameter of the base sensor is x millimeters, and the diameter of the shell sensor is y millimeters;
the area of the sensing area of the base sensor is larger than (m + x)2Square millimeter, the area of the sensing area of the shell sensor is larger than (m + y)2Square millimeter.
In the embodiment of the utility model, the area setting of the base sensor sensing area and the shell sensor sensing area of the mask box simultaneously considers two factors of the size of the sensor and the position precision of the mask box, so that when the mask box is carried to the bearing table, the base sensor sensing area can completely cover the base sensor and the shell sensor sensing area can also completely cover the shell sensor within the position precision range, the problem of equipment downtime caused by equipment misreport is effectively solved, the production capacity is not influenced, and the manpower waste is not caused.
In a specific embodiment, the base sensor sensing area is in the shape of a circle having a radius at least equal to (m + x) millimeters. It is understood that, after the mask case is mounted on the stage, the mask case moves within a circular range having a radius of the position accuracy value m, and the base sensor itself has a diameter of x, so that the base sensor sensing area is formed in a circular shape having a radius of at least (m + x) mm, and the base sensor can be completely covered with the circular shape.
In a specific embodiment, the shape of the can sensor sensing area is a circle having a radius at least equal to (m + y) millimeters. Understandably, after the mask box is mounted on the bearing table, the mask box moves in a circular range with the position precision value m as the radius, and the diameter of the shell sensor is considered to be y, so that the shape of the sensing area of the shell sensor is a circle with the radius at least equal to (m + y) millimeters, and the base sensor can be completely covered.
In a specific embodiment, the base sensor sensing area is in the shape of a square having a side length at least equal to (m + x) millimeters. Understandably, the arrangement can also meet the requirement that the sensing area of the base sensor completely covers the base sensor. It should be noted that the shape of the sensing area of the base sensor is not limited to a circle or a square, and may be other shapes such as a polygon or an ellipse, as long as the shape completely includes a circle with a radius of (m + x), and fig. 4 shows a schematic partial shape.
In a specific embodiment, the sensing area of the shell sensor is in the shape of a square with a side length at least equal to (m + y) millimeters. Understandably, the arrangement can also meet the requirement that the sensing area of the base shell and shell sensor completely covers the shell and shell sensor. It should be noted that the shape of the sensing area of the shell sensor is not limited to a circle or a square, and may be other shapes such as a polygon or an ellipse, as long as the shape completely includes a circle with a radius of (m + y), and fig. 4 shows a schematic partial shape.
In a specific embodiment, the base further includes a connecting hole and a supporting member, the connecting hole is fixedly connected with the pin of the bearing table to fix the base, and the supporting member is used for placing the light cover. Preferably, the number of the connecting holes is three, and the number of the supporting pieces is four. Understandably, after the bearing table carries the photomask box, the photomask box needs to be fixed, and the pin on the bearing table is inserted into the connecting hole of the base to fix the photomask box; in addition, when the photomask is stored in the photomask box, the photomask is placed on the supporting piece.
In a specific embodiment, the bottom edge of the housing is flush with the bottom surface of the base.
In a specific embodiment, the housing is snap-fit to the base. Understandably, the light shield can be prevented from being polluted because the shell and the base are separated in the transmission process after the shell and the base are connected in a buckling manner.
In a specific embodiment, the top surface of the housing is provided with a handle to facilitate access.
In summary, in the utility model, the area setting of the base sensor sensing area and the area setting of the shell sensor sensing area of the mask box simultaneously take two factors of the size of the sensor and the position precision of the mask box into consideration, so that when the mask box is carried to the carrying table, the base sensor sensing area can completely cover the base sensor and the shell sensor sensing area can also completely cover the shell sensor within the position precision range, thereby solving the problem of equipment downtime caused by equipment misreport, and effectively avoiding the productivity loss and manpower waste caused by the equipment misreport.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and should not be taken as limiting the scope of the present invention, which is intended to cover any modifications, equivalents, improvements, etc. within the spirit and scope of the present invention.
Claims (10)
1. A reticle pod comprising:
a base formed with a base sensor sensing region;
the shell cover is arranged on the base in a covering mode, and a shell cover sensor sensing area is formed on the bottom edge of the shell cover;
when the photomask box is carried on the bearing table, the base sensor sensing area is positioned at the position of the base sensor of the bearing table; the shell sensor sensing area is positioned at the position of a shell sensor of the bearing table;
the position precision of the photomask box loaded on the bearing table is m millimeters, the diameter of the base sensor is x millimeters, and the diameter of the shell sensor is y millimeters;
the area of the sensing area of the base sensor is larger than (m + x)2Square millimeter, the area of the sensing area of the shell sensor is larger than (m + y)2Square millimeter.
2. The reticle pod of claim 1, wherein the base sensor sensing area is circular in shape with a radius at least equal to (m + x) millimeters.
3. The reticle pod of claim 1, wherein the shape of the pod sensor sensing area is a circle having a radius at least equal to (m + y) millimeters.
4. The reticle pod of claim 1, wherein the base sensor sensing area is shaped as a square having a side length at least equal to (m + x) millimeters.
5. The reticle pod of claim 1, wherein the pod sensor sensing area is in the shape of a square having a side length at least equal to (m + y) millimeters.
6. The reticle pod of claim 1, wherein the base further comprises attachment holes and a support, the attachment holes fixedly attached to the pins of the stage to secure the base, the support for positioning a reticle.
7. The mask box of claim 6, wherein the number of the connection holes is three and the number of the supporting members is four.
8. The reticle pod of claim 1, wherein a bottom edge of the enclosure is disposed flush with a bottom surface of the base.
9. The reticle pod of claim 1, wherein the enclosure is snap-fit to the base.
10. The reticle pod of claim 1, wherein a top surface of the enclosure is provided with a handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122563200.6U CN216595889U (en) | 2021-10-25 | 2021-10-25 | Light shield box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122563200.6U CN216595889U (en) | 2021-10-25 | 2021-10-25 | Light shield box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216595889U true CN216595889U (en) | 2022-05-24 |
Family
ID=81641652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122563200.6U Active CN216595889U (en) | 2021-10-25 | 2021-10-25 | Light shield box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216595889U (en) |
-
2021
- 2021-10-25 CN CN202122563200.6U patent/CN216595889U/en active Active
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