CN216585179U

CN216585179U - Crucible system of vacuum evaporation machine

Info

Publication number: CN216585179U
Application number: CN202123112846.9U
Authority: CN
Inventors: 薛蒙晓
Original assignee: Suzhou Youlun Vacuum Equipment Technology Co ltd
Current assignee: Suzhou Youlun Vacuum Equipment Technology Co ltd
Priority date: 2021-12-13
Filing date: 2021-12-13
Publication date: 2022-05-24
Anticipated expiration: 2031-12-13

Abstract

The application provides a crucible system of a vacuum evaporation machine, which comprises an electron gun structure and a crucible structure, wherein the electron gun structure is arranged in front of the crucible structure, and emits an electron beam to bombard and heat a film material in a crucible of the crucible structure; the electron gun structure includes support, filament, high pressure head, integral type coil and magnetic pole, the support has a depressed part from the top down, and filament and high pressure head set up in the depressed part, and the high pressure head sets up in the below of filament, and the high pressure head carries out high-pressure discharge to the filament, and the integral type coil sets up the place ahead at the filament, and the magnetic pole setting is in the both sides and the rear of support, and the integral type coil comprises the X coil that a level transversely set up and the vertical Y coil that sets up of two levels, and the X coil sets up in the front, and two Y coils are connected with the both ends of X coil respectively and are located the rear of X coil, integral type coil and magnetic pole are used for making the facula of squeezing into in the crucible for some shape or circular.

Description

Crucible system of vacuum evaporation machine

Technical Field

The utility model relates to the technical field of vacuum evaporation machines, in particular to a crucible system of a vacuum evaporation machine.

Background

The vacuum evaporation plating machine is used for evaporating and gasifying a coating material (or called a coating material) by means of current heating, electron beam bombardment heating, ion source bombardment and the like under a vacuum condition, and then enabling gasified particles to fly to the surface of a substrate to be condensed, and finally forming a thin film. The vacuum evaporation has the advantages of simple film forming method, high film purity and compactness, unique film structure and performance and the like, thereby being widely applied.

In the processing technique of vacuum evaporation, a crucible is adopted to gasify a coating material under the vacuum condition, and the crucible comprises: the evaporation coating device comprises an evaporation coating cavity and an evaporation coating source (source) arranged in the evaporation coating cavity, wherein the evaporation coating source is heated to evaporate evaporation coating materials evaporated in the evaporation coating source, the evaporation coating materials are upwards evaporated in a fan-shaped structure, a coating pot with an umbrella-shaped structure for bearing a coated workpiece is arranged above a crucible, and the coated workpiece is fixed on the coating pot, so that molecules of the evaporation coating materials are deposited on the coated workpiece to form a coating film. In the prior art, the light spot which is driven into the crucible after the electron gun turns through the magnetic field is crescent, the light spot is an energy ring formed by energy driven by an electron beam, and if the film material is an optical film material or a non-metal film material, a deep pit is easily formed at the light spot position due to the low melting point of the optical film material or the non-metal film material, and even the crucible is damaged. In addition, the X coil in the prior art is arranged at the front lower part of the crucible device, the two Y coils are respectively arranged at two sides of the crucible device, the X coil is matched with a type of crucible, different crucible types are matched with different X coils, and the universality is poor.

In view of the above, the present invention provides a crucible system of a vacuum evaporation machine, which is suitable for various types of crucibles and can be applied to non-metal film materials.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a crucible system of a vacuum evaporation machine, which is suitable for various types of crucibles and can be suitable for non-metal film materials.

According to the crucible system of the vacuum evaporation machine, the electron gun structure and the crucible structure are two independent structures, one electron gun structure is suitable for various types of crucible structures, and the universality is high; more importantly, due to the structural design of the electron gun, the magnetic field surrounded by the magnetic field is strong in intensity and large in adjustment allowance, so that light spots driven into the crucible are point-shaped or circular, the size of the circle can be adjusted, and optical film materials or non-metal materials with low melting points can be evaporated. The present applicant has completed the present application on this basis.

A crucible system of a vacuum evaporation machine comprises an electron gun structure 1 and a crucible structure 2, wherein the electron gun structure 1 is arranged in front of the crucible structure 2, and the electron gun structure 1 emits an electron beam to bombard and heat a film material in a crucible 21 of the crucible structure 2; the electron gun structure 1 comprises a support 11, a filament 12, a high voltage head 13, an integrated coil 14 and a magnetic pole 15, wherein the support 11 is provided with a concave part 111 from top to bottom, the filament 12 and the high voltage head 13 are arranged in the concave part 111, the high voltage head 13 is arranged below the filament 12, the high voltage head 13 carries out high voltage discharge on the filament 12, the integrated coil 14 is arranged in front of the filament 12, the magnetic pole 15 is arranged at two sides and rear of the support 11, the integrated coil 14 is composed of an X coil 141 horizontally arranged horizontally and two Y coils 142 horizontally and longitudinally arranged horizontally, the X coil 141 is arranged in front, the two Y coils 142 are respectively connected with two ends of the X coil 141 and are positioned behind the X coil 141, and the integrated coil 14 and the magnetic pole 15 are used for enabling light spots driven into the crucible 21 to be point-shaped or circular.

In some embodiments, after the integrated coil 14 is energized, the spot driven into the crucible 21 is in a dot shape or a circular shape by surrounding the integrated coil with the magnetic field under the action of the magnetic pole 15, and the size of the spot is adjusted by adjusting the current of the two Y coils 142.

Further, the current of the Y coil 142 adjusted to the left side of the X coil 141 increases, and the current of the Y coil 142 adjusted to the right side of the X coil 141 decreases, and the light spot moves to the left; similarly, the current of the Y coil 142 adjusted to the left of the X coil 141 decreases, and the current of the Y coil 142 adjusted to the right of the X coil 141 increases, and the spot moves to the right.

In some embodiments, the upper portion of the support 11 protrudes forward from the middle portion of the support 11, the upper portion and the middle portion of the support 11 are trapezoidal, the lower portion of the support 11 is a base, the size of the lower portion of the support 11 is larger than that of the middle portion of the support 11, the recess 111 penetrates through the middle portion of the upper portion of the support 11 and penetrates through the front portion of the middle portion of the support 11, the lower surface of the high voltage head 13 is fixed to the bottom surface of the recess 111, the filament 12 is mounted at the upper end of the high voltage head 13, and the filament 12 is located in the recess 111 of the upper portion of the support 11.

Furthermore, the holder 11 at the front and both sides of the recess 111 is a hollow part 112 at the upper part of the holder 11, and the hollow part 112 is used for accommodating and arranging the integrated coil 14; the hollow part 112 in front of the recess 111 accommodates the X coil 141, the hollow parts 112 at both sides of the recess 111 accommodate the Y coils 142, the two Y coils 142 are fixed to both ends of the X coil 141, respectively, and the right end of the X coil 141 is also connected to an electric wire.

Further, the inside of the support 11 has a flow passage 113, the flow passage 113 is used for water or cooling liquid to flow and cool in the flow passage 113, an inlet and an outlet of the flow passage 113 are provided at both sides of the lower portion of the support 11, and the flow passage 113 includes a branch passage horizontally and transversely provided in the lower portion of the support 11, a branch passage vertically provided in the middle portion of the support 11, and a branch passage provided below the hollow portion 112 in the upper portion of the support 11.

Furthermore, two supporting columns 16 are fixed on the upper surface of the lower part of the support 11, and the two supporting columns 16 are used for fixing the electron gun structure 1 and the crucible structure 2.

In some embodiments, the magnetic pole 15 is composed of a first magnetic pole 151 disposed on the left side of the support 11, a second magnetic pole 152 disposed on the right side of the support 11, and a magnetic plate 153 disposed on the rear side of the support 11, and the first magnetic pole 151 and the second magnetic pole 152 have the same structure. Further, the first magnetic pole 151 is composed of an inverted L-shaped upper portion, a middle portion and a lower portion, a lower surface of the inverted L-shaped upper portion of the first magnetic pole 151 is flush with an upper surface of the support 11, the middle portion and the lower portion of the first magnetic pole 151 are thin plate-shaped, the middle portion of the first magnetic pole 151 has the same height as the upper portion of the support 11, and the lower portion of the first magnetic pole 151 has the same width and height as the middle portion of the support 11; the second magnetic pole 152 is composed of an inverted L-shaped upper portion, a middle portion and a lower portion, a lower surface of the inverted L-shaped upper portion of the second magnetic pole 152 is flush with an upper surface of the support 11, the middle portion and the lower portion of the second magnetic pole 152 are thin plate-shaped, the middle portion of the second magnetic pole 152 is as high as the upper portion of the support 11, and the lower portion of the second magnetic pole 152 is as wide as and as high as the middle portion of the support 11.

In some embodiments, the crucible structure 2 is fixed to a bottom plate of a main cavity of a vacuum evaporation machine, the crucible structure 2 comprises one or more crucibles 21, and the crucibles 21 are in the shape of bowl-shaped depressions.

Further, the crucible structure 2 can be rotated by providing a plurality of crucibles 21.

Drawings

Fig. 1 is a schematic structural view of a crucible system of a vacuum evaporator according to embodiment 1 of the present application.

Fig. 2 is a schematic structural view of an electron gun structure of a crucible system of a vacuum evaporator according to embodiment 1 of the present application.

Fig. 3 is a schematic structural view of a filament, a high pressure head, an integrated coil, and a support with a front cover removed of a crucible system of a vacuum evaporator according to embodiment 1 of the present application.

Fig. 4 is a schematic structural view of a filament, a high pressure head, and a support for removing a front cover of a crucible system of a vacuum evaporator according to embodiment 1 of the present application.

Fig. 5 is a schematic structural view of an integrated coil of a crucible system of a vacuum evaporator according to embodiment 1 of the present application.

Fig. 6 is a schematic structural view of a magnetic pole of a crucible system of a vacuum evaporator according to embodiment 1 of the present application.

Fig. 7 is a schematic structural view of a holder of a crucible system of a vacuum evaporator according to embodiment 1 of the present application.

Description of the main element symbols:

the electron gun structure 1, the crucible structure 2, the support 11, the filament 12, the high voltage head 13, the integrated coil 14, the magnetic pole 15, the support column 16, the recess 111, the hollow portion 112, the runner 113, the X coil 141, the Y coil 142, the first magnetic pole 151, the second magnetic pole 152, the magnetic plate 153, and the crucible 21.

Detailed Description

The following examples are described to aid in the understanding of the present application and are not, and should not be construed to, limit the scope of the present application in any way.

In the following description, those skilled in the art will recognize that components may be described throughout this discussion as separate functional units (which may include sub-units), but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including being integrated within a single system or component). Also, connections between components or systems are not intended to be limited to direct connections. Rather, data between these components may be modified, reformatted, or otherwise changed by the intermediate components. Additionally, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" and "fixed" should be understood to encompass direct connections, indirect connections, or fixed through one or more intermediaries.

In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "side", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships commonly recognized in the product of the application, and are only used for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present application. Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

Example 1:

a crucible system of a vacuum evaporation machine is shown in figures 1-7, and comprises an electron gun structure 1 and a crucible structure 2, wherein the electron gun structure 1 is arranged in front of the crucible structure 2, and the electron gun structure 1 emits an electron beam to bombard and heat a film material in a crucible 21 of the crucible structure 2; the electron gun structure 1 comprises a support 11, a filament 12, a high voltage head 13, an integrated coil 14 and a magnetic pole 15, wherein the support 11 is provided with a concave part 111 from top to bottom, the filament 12 and the high voltage head 13 are arranged in the concave part 111, the high voltage head 13 is arranged below the filament 12, the high voltage head 13 carries out high voltage discharge on the filament 12, the integrated coil 14 is arranged in front of the filament 12, the magnetic pole 15 is arranged at two sides and rear of the support 11, the integrated coil 14 is composed of an X coil 141 horizontally arranged horizontally and two Y coils 142 horizontally and longitudinally arranged horizontally, the X coil 141 is arranged in front, the two Y coils 142 are respectively connected with two ends of the X coil 141 and are positioned behind the X coil 141, and the integrated coil 14 and the magnetic pole 15 are used for enabling light spots driven into the crucible 21 to be point-shaped or circular.

After the integrated coil 14 is powered on, the light spot driven into the crucible 21 is in a point shape or a circular shape in a magnetic field surrounding mode under the action of the magnetic pole 15, and the size of the light spot is adjusted by adjusting the current of the two Y coils 142. The current of the Y coil 142 adjusted to the left of the X coil 141 increases and the current of the Y coil 142 adjusted to the right of the X coil 141 decreases, and the light spot moves to the left; similarly, the current of the Y coil 142 adjusted to the left of the X coil 141 decreases, and the current of the Y coil 142 adjusted to the right of the X coil 141 increases, and the spot moves to the right. The upper portion of support 11 protrudes forward in the middle part of support 11, the upper portion and the middle part of support 11 are trapezoidal, the lower part of support 11 is the base, the size of support 11 lower part is greater than the size of support 11 middle part, depressed part 111 runs through the middle part of support 11 upper portion to run through the front portion in support 11 middle part, the lower surface of high-pressure head 13 is fixed with the bottom surface of depressed part 111, filament 12 is installed in the upper end of high-pressure head 13, and filament 12 is located the depressed part 111 on support 11 upper portion. The holder 11 at the front and both sides of the recess 111 at the upper part of the holder 11 is a hollow part 112, and the hollow part 112 is used for accommodating and arranging the integrated coil 14; the hollow part 112 in front of the recess 111 accommodates the X coil 141, the hollow parts 112 at both sides of the recess 111 accommodate the Y coils 142, the two Y coils 142 are fixed to both ends of the X coil 141, respectively, and the right end of the X coil 141 is also connected to an electric wire. The inside of the support 11 has a flow passage 113, the flow passage 113 is used for water or cooling liquid to flow and cool in the flow passage 113, an inlet and an outlet of the flow passage 113 are provided at both sides of the lower portion of the support 11, and the flow passage 113 includes a branch passage horizontally and transversely provided in the lower portion of the support 11, a branch passage vertically provided in the middle portion of the support 11, and a branch passage provided below the hollow portion 112 in the upper portion of the support 11. Two support columns 16 are fixed on the upper surface of the lower part of the support 11, and the two support columns 16 are used for fixing the electron gun structure 1 and the crucible structure 2.

The magnetic pole 15 is composed of a first magnetic pole 151 arranged on the left side of the support 11, a second magnetic pole 152 arranged on the right side of the support 11 and a magnetic plate 153 arranged on the rear side of the support 11, and the first magnetic pole 151 and the second magnetic pole 152 have the same structure. The first magnetic pole 151 is composed of an inverted L-shaped upper part, a middle part and a lower part, the lower surface of the inverted L-shaped upper part of the first magnetic pole 151 is flush with the upper surface of the support 11, the middle part and the lower part of the first magnetic pole 151 are in thin plate shapes, the height of the middle part of the first magnetic pole 151 is the same as that of the upper part of the support 11, and the width and the height of the lower part of the first magnetic pole 151 are the same as those of the middle part of the support 11; the second magnetic pole 152 is composed of an inverted L-shaped upper portion, a middle portion and a lower portion, a lower surface of the inverted L-shaped upper portion of the second magnetic pole 152 is flush with an upper surface of the support 11, the middle portion and the lower portion of the second magnetic pole 152 are thin plate-shaped, the middle portion of the second magnetic pole 152 is the same as the upper portion of the support 11 in height, and the lower portion of the second magnetic pole 152 is the same as the middle portion of the support 11 in width and height. Crucible structure 2 is fixed with the bottom plate of vacuum evaporation machine's the main cavity body, crucible structure 2 includes 4 crucibles 21, and crucible 21 is the sunken shape of bowl form, crucible structure 2 can rotate.

While various aspects and embodiments have been disclosed herein, it will be apparent to those skilled in the art that other aspects and embodiments can be made without departing from the spirit of the disclosure, and that several modifications and improvements can be made without departing from the spirit of the disclosure. The various aspects and embodiments disclosed herein are presented by way of example only and are not intended to limit the present disclosure, which is to be controlled in the spirit and scope of the appended claims.

Claims

1. The utility model provides a crucible system of vacuum evaporation machine, crucible system includes electron gun structure (1) and crucible structure (2), and electron gun structure (1) sets up in the place ahead of crucible structure (2), and electron gun structure (1) sends the coating material in electron beam bombardment heating crucible structure's (2) crucible (21), its characterized in that, electron gun structure (1) includes support (11), filament (12), high-pressure head (13), integral type coil (14) and magnetic pole (15), support (11) have one from top to bottom depressed part (111), and filament (12) and high-pressure head (13) set up in depressed part (111), and high-pressure head (13) set up the below of filament (12), and high-pressure head (13) carry out high-pressure discharge to filament (12), and integral type coil (14) set up in the place ahead of filament (12), and magnetic pole (15) set up both sides and rear at support (11), the integrated coil (14) is composed of an X coil (141) horizontally and transversely arranged and two Y coils (142) horizontally and longitudinally arranged, the X coil (141) is arranged in the front, the two Y coils (142) are respectively connected with two ends of the X coil (141) and are positioned behind the X coil (141), and the integrated coil (14) and the magnetic poles (15) are used for enabling light spots driven into the crucible (21) to be point-shaped or circular.

2. The crucible system of the vacuum evaporator according to claim 1, wherein the spot driven into the crucible (21) is point-shaped or circular in a magnetic field surrounding manner under the action of the magnetic pole (15) after the integrated coil (14) is energized, and the size of the spot is adjusted by adjusting the current of the two Y coils (142).

3. The crucible system of the vacuum evaporator according to claim 2, wherein the light spot moves to the left by increasing the current of the Y coil (142) adjusted to the left side of the X coil (141) and decreasing the current of the Y coil (142) adjusted to the right side of the X coil (141); similarly, the current of the Y coil (142) adjusted to the left of the X coil (141) decreases, and the current of the Y coil (142) adjusted to the right of the X coil (141) increases, and the light spot moves to the right.

4. The crucible system of vacuum evaporation machine according to claim 1, wherein the upper part of the support (11) protrudes forward from the middle part of the support (11), the upper part and the middle part of the support (11) are trapezoidal, the lower part of the support (11) is a base, the size of the lower part of the support (11) is larger than that of the middle part of the support (11), the recess (111) penetrates through the middle part of the upper part of the support (11) and penetrates through the front part of the middle part of the support (11), the lower surface of the high pressure head (13) is fixed with the bottom surface of the recess (111), the filament (12) is installed at the upper end of the high pressure head (13), and the filament (12) is located in the recess (111) of the upper part of the support (11).

5. The crucible system for a vacuum evaporator according to claim 4, wherein the holder (11) in front of and on both sides of the recess (111) is a hollow part (112) at the upper part of the holder (11), and the hollow part (112) accommodates and accommodates the integrated coil (14); the X coil (141) is accommodated in the hollow part (112) in front of the concave part (111), the Y coils (142) are accommodated in the hollow parts (112) on two sides of the concave part (111), the two Y coils (142) are fixed to two ends of the X coil (141) respectively, and the right end of the X coil (141) is further connected with an electric wire.

6. The crucible system of the vacuum evaporator according to claim 5, wherein the support (11) has a flow channel (113) inside, the flow channel (113) is used for water or cooling liquid to flow and cool in the flow channel (113), the inlet and the outlet of the flow channel (113) are arranged on both sides of the lower part of the support (11), and the flow channel (113) comprises a branch channel horizontally and transversely arranged in the lower part of the support (11), a branch channel vertically arranged in the middle part of the support (11), and a branch channel arranged below the hollow part (112) of the upper part of the support (11).

7. The crucible system of the vacuum evaporator according to claim 1, wherein the magnetic pole (15) is composed of a first magnetic pole (151) disposed at the left side of the support (11), a second magnetic pole (152) disposed at the right side of the support (11), and a magnetic plate (153) disposed at the rear of the support (11), and the first magnetic pole (151) and the second magnetic pole (152) have the same structure.

8. The crucible system of the vacuum evaporator according to claim 7, wherein the first magnetic pole (151) is composed of an inverted L-shaped upper portion, a middle portion and a lower portion, a lower surface of the inverted L-shaped upper portion of the first magnetic pole (151) is flush with an upper surface of the holder (11), the middle portion and the lower portion of the first magnetic pole (151) are thin plate-shaped, the middle portion of the first magnetic pole (151) has the same height as the upper portion of the holder (11), and the lower portion of the first magnetic pole (151) has the same width and height as the middle portion of the holder (11); the second magnetic pole (152) consists of an inverted L-shaped upper part, a middle part and a lower part, the lower surface of the inverted L-shaped upper part of the second magnetic pole (152) is flush with the upper surface of the support (11), the middle part and the lower part of the second magnetic pole (152) are in a thin plate shape, the height of the middle part of the second magnetic pole (152) is the same as that of the upper part of the support (11), and the width and the height of the lower part of the second magnetic pole (152) are the same as those of the middle part of the support (11).

9. The crucible system of the vacuum evaporator according to claim 1, wherein the crucible structure (2) is fixed to a bottom plate of a main chamber of the vacuum evaporator, the crucible structure (2) comprises one or more crucibles (21), and the crucibles (21) are in the shape of a bowl-shaped recess.

10. The crucible system of the vacuum evaporator according to claim 9, wherein the crucible structure (2) is rotatable if there are a plurality of crucibles (21).