CN216560336U - Light source device for chip detection and detection device - Google Patents
Light source device for chip detection and detection device Download PDFInfo
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- CN216560336U CN216560336U CN202122752770.XU CN202122752770U CN216560336U CN 216560336 U CN216560336 U CN 216560336U CN 202122752770 U CN202122752770 U CN 202122752770U CN 216560336 U CN216560336 U CN 216560336U
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Abstract
The utility model discloses a light source device and a detection device for chip detection, wherein the light source device comprises a light source mechanism and a light environment adjusting mechanism; the light environment adjusting mechanism comprises a driving piece and a light source transmission plate; the light source transmission plate is provided with a first light hole and a second light hole with the aperture smaller than that of the first light hole; the driving piece is configured to drive the light source transmission plate to move so that the light generated by the light source mechanism can selectively correspond to the first light transmission hole or the second light transmission hole; the first light-transmitting hole is configured to enable the light generated by the light source mechanism to irradiate the chip in a uniform light mode; the second light-transmitting hole is configured to enable part of light rays generated by the light source mechanism to irradiate the chip at a preset angle. The utility model can rapidly switch different light conditions to rapidly detect a plurality of different defects of the chip.
Description
Technical Field
The utility model relates to the technical field of testing. And more particularly, to a light source device for chip inspection and an inspection device.
Background
Nowadays, the digital image technology is continuously innovated and changed, and the digital camera carrier of the mobile phone are all developed to be miniaturized, so as to meet the requirement, the image sensing chip of the optical system is not limited to be a photosensitive coupling element or a complementary metal oxide semiconductor. However, with the continuous improvement of the technology, the requirements of zooming by hundreds of times, hundreds of millions of pixels and shooting 8K films can be met only by relying on the cmos high-speed image sensing chip. Before the high-speed image sensing chip leaves factory, a series of tests are required, and the test process must provide a light source to make the photosensitive area obtain the required light type and intensity for performing the related tests.
The existing detection equipment for testing the chip comprises a light source device, but the traditional light source device can only provide a single-color uniform light for the chip to be detected, and only detects a certain single defect aiming at the chip. When the chip to be detected needs to be subjected to another defect detection different from that under monochromatic uniform light, another group of light source devices with other light conditions needs to be replaced for testing, so that the testing time is wasted, the testing efficiency is reduced, and the testing cost is also improved.
Therefore, it is desirable to provide a new light source device and a new detecting device for detecting multiple defects of a chip under different light conditions.
SUMMERY OF THE UTILITY MODEL
In view of the above problems, a first technical problem to be solved by the present invention is to provide a light source device for chip detection, so as to solve the problem that the existing detection equipment cannot rapidly switch different light conditions to rapidly detect multiple different defects of a chip.
The second technical problem to be solved by the present invention is to provide a detection apparatus, which improves the testing efficiency of the detection apparatus, saves the testing time, and reduces the testing cost by applying the light source apparatus.
In order to solve the first technical problem, the utility model adopts the following technical scheme:
the present invention first provides a light source device for chip detection, the light source device comprising:
a light source mechanism configured to function as a light source to generate light; and
the light environment adjusting mechanism is positioned on the light emitting side of the light source mechanism;
the light environment adjustment mechanism comprises:
a drive member; and
the light source transmission plate is positioned on the light emitting side of the light source mechanism;
the light source transmission plate is provided with first light holes arranged along a first direction and second light holes with the aperture smaller than that of the first light holes;
the driving piece is configured to drive the light source transmission plate to move, so that light generated by the light source mechanism can selectively correspond to the first light transmission hole or the second light transmission hole;
the first light-transmitting hole is configured to enable the light generated by the light source mechanism to irradiate the chip in a uniform light mode;
the second light-transmitting hole is configured to enable part of light rays generated by the light source mechanism to irradiate on the chip at a preset angle.
In addition, preferably, the duct of the first light-transmitting hole and the duct of the second light-transmitting hole are both of an equal-diameter duct structure.
In addition, preferably, a pore passage of the second light-transmitting hole is in a hole expansion structure with gradually expanded pore diameter from the light inlet port to the light outlet port of the second light-transmitting hole.
In addition, preferably, the pore passage of the second light-transmitting hole at least includes a hole section with an equal diameter located at one side of the light-entering port and a hole-expanding section with a gradually expanding pore diameter located at one side of the light-exiting port from the light-entering port to the light-exiting port of the second light-transmitting hole.
Preferably, the light environment adjusting mechanism further includes a diffusion plate, the diffusion plate is located on a side of the light source transmission plate close to the light source mechanism, and the diffusion plate covers the first light transmission hole and the second light transmission hole.
In order to solve the second technical problem, the utility model adopts the following technical scheme:
the utility model also provides a detection device comprising the light source device; the detection device also comprises a light emitting mechanism positioned on one side of the light environment adjusting mechanism, which is far away from the light source mechanism, and the light emitting mechanism is arranged on the light emitting side of the light source device; the light emitting mechanism comprises a light transmitting channel; one end of the light transmission channel is opposite to the light generated by the light source mechanism, and the chip covers one end of the light transmission channel, which is far away from the light source mechanism.
In addition, preferably, the inner wall surface of the light transmission channel is a frosted surface, and the frosted surface comprises a light absorption material layer.
In addition, preferably, the light emitting mechanism comprises a mounting structure detachably connected with the light source mechanism; the mounting structure is provided with a light through hole which is opposite to a light source emitted by the light source mechanism, the light through hole penetrates through the upper side surface and the lower side surface of the mounting structure, and the inner cavity of the light through hole forms the light transmission channel.
In addition, preferably, the light emitting mechanism comprises a mounting structure detachably connected with the light source mechanism; the mounting structure comprises a light through hole which is opposite to a light source emitted by the light source mechanism and penetrates through the upper side surface and the lower side surface of the mounting structure;
the light emitting mechanism further comprises a light tube fixed in the through hole, and the inner cavity of the light tube forms the light transmitting channel.
In addition, preferably, the light emitting mechanism further includes a test head capable of being fixed to the chip by compression, the test head is fixed to the light emitting side of the mounting structure, a light inlet end of the test head faces the light emitting side of the light transmitting channel, and the optical test head includes a window structure for exposing the light sensing area of the chip;
the test head is configured to project light generated by the light source mechanism to the chip light sensitive area through the window structure to realize detection of the chip.
The utility model has the following beneficial effects:
according to the light source device provided by the utility model, two light holes with different apertures are arranged on the light source transmission plate, each light hole has different functional functions, when the driving part drives the light source transmission plate to move, light rays generated by the light source mechanism can be selectively opposite to the light holes with different functional functions, and the light rays irradiate on a light sensitive area of a chip to be detected through the light holes with different functional functions to generate different effects, so that one set of light source device can provide at least two different defect detection modes for the chip to be detected. The light source device does not need to be replaced repeatedly to test the chip to be tested, so that the test time is saved, the test efficiency is improved, and the test cost is reduced. In addition, the detection device provided by the utility model at least achieves the technical effect of the light source device provided by the utility model compared with the prior art by applying the light source device. Other advantages of the light source device and the detection device provided by the present invention over the prior art are described in detail in the following embodiments.
Drawings
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
Fig. 1 shows an assembly view of a detection device provided by the present invention.
Fig. 2 shows a schematic structural diagram of a detection device provided by the present invention.
Fig. 3 shows a bottom view of the detection device provided by the present invention.
Fig. 4 shows a cross-sectional view a-a of the view shown in fig. 3.
Fig. 5 shows an enlarged schematic view at B in fig. 4.
FIG. 6 is a schematic diagram illustrating a defect detection of a chip in one operation mode of the detection apparatus of the present invention.
Fig. 7 is a schematic diagram illustrating another defect detection of a chip in another operation mode of the detection apparatus provided by the present invention.
Detailed Description
Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: the relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.
The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the utility model, its application, or uses.
Techniques and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail, but are intended to be considered a part of the specification where appropriate.
In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
The detection device provided by the embodiment is mainly applied to the detection of the performance of other photosensitive elements such as an image sensing chip of an optical system, and aims to solve the problem that the conventional detection device cannot rapidly switch different light conditions in the detection process so as to rapidly detect multiple different defects of the chip. With reference to fig. 1 to 7, specifically, firstly, the detection apparatus provided in this embodiment includes a light source device 1 and a light emitting mechanism 2, the light source device 1 provides a light source for detecting a chip to be detected, the light emitting mechanism 2 is disposed on a light emitting side of the light source device 1, and the light emitting mechanism 2 includes a light transmitting channel 21; one end of the light-transmitting channel 21 is opposite to the light generated by the light source device 1, and the chip 10 to be tested is configured to cover a light-emitting port formed at one end of the light-transmitting channel 21 far away from the light source device 1.
In an optional embodiment, accessible quick detach subassembly detachable is connected between light source device 1 and the light-emitting mechanism 2, when detection device need detect different grade type or not structural dimension chip, only need tear open fast trade with the chip assorted light-emitting mechanism 2 that awaits measuring can, need not to change whole detection device, reduce the cost, the simple operation saves check-out time. Moreover, when one of the light source device 1 or the light emitting mechanism 2 fails, the failed part is detached and the replaced part is installed on the part which normally works, so that the maintenance cost of the detection equipment can be greatly reduced. Particularly, quick detach subassembly can be for hasp structure or buckle structure, when changing, need not to dismantle spare parts such as screw, can realize quick replacement, and in addition, hasp structure and buckle structure have simple structure, assemble easy characteristics.
The traditional check out test set that is used for testing the chip, light source device only can provide a monochromatic even light for waiting to detect the chip, only carries out the detection of a certain single defect to the chip. When the chip to be detected needs to be subjected to another defect detection different from that under monochromatic uniform light, another group of light source devices with other light conditions needs to be replaced for testing, so that the testing time is wasted, the testing efficiency is reduced, and the testing cost is also improved.
The problem of present check out test set be difficult to fast switch over different light conditions in order to carry out short-term test to the multinomial different defects of chip is solved in order to solve. As shown in fig. 1 to 5, the light source device 1 provided in the present embodiment includes a light source mechanism 11 and a light environment adjusting mechanism 12; the light source mechanism 11 is configured to be a light source to generate light, the light environment adjusting mechanism 12 includes a driving member 121 and a light source transmission plate 122 located at a light emitting side of the light source mechanism, and a first light transmission hole 1221 arranged along a first direction and a second light transmission hole 1222 having a smaller aperture than that of the first light transmission hole 1221 are formed on the light source transmission plate 122; the first light hole 1221 and the second light hole 1222 have different functions. The light environment adjusting mechanism 12 is located on the light emitting side of the light source mechanism 11, that is, the light environment adjusting mechanism 12 is located on one side of the light source mechanism 11 close to the light emitting mechanism 2.
Referring to fig. 5, the driving member 121 is configured to drive the light source transmission plate 122 to move along a first direction, so that the light generated by the light source mechanism 11 can be selectively aligned with the first light transmission hole 1221 or the second light transmission hole 1222. As shown in fig. 6 and fig. 7, the light generated by the light source mechanism 11 passes through the first light hole 1221 or the second light hole 1222 and irradiates on the light sensitive area of the chip 10 to be tested, so as to generate different irradiation effects, specifically, the first light hole 1221 is configured to enable the light generated by the light source mechanism 11 to irradiate on the chip 10 in a uniform light manner. The second light hole 1222 is configured to allow a portion of the light generated by the light source mechanism 11 to irradiate the chip 10 at a predetermined angle. Unlike the light generated by the light source mechanism 11 that is irradiated onto the chip 10 through the first light-transmitting hole 1221 in a uniform light manner, the light generated by the light source mechanism 11 after passing through the second light-transmitting hole 1222 includes a portion that forms an included angle with the surface of the chip 10 when irradiated onto the chip 10, so as to provide at least two different defect detection modes for the chip to be detected. It should be understood by those skilled in the art that when the second light-transmitting hole is provided with different apertures as required, the angle of the light generated by the light source mechanism after passing through the second light-transmitting hole and illuminating on the chip will also be changed by different angles.
The light source device that this embodiment provided is through setting up two kinds of light traps that have different aperture sizes on light source transmission plate 122, the function effect of every kind of light trap is different, it passes through the motion of plate 122 to see through as driving piece 121 drive light source, light mechanism 11 produced light is optionally just right with the light trap that has different function effects, light shines through the light trap that has different function effects and can produce different effects on waiting to detect chip light sensitive area, thereby make one set of light source device alright provide two kinds of different defect detection modes at least for the chip that awaits measuring. The light source device does not need to be replaced repeatedly to test the chip to be tested, so that the test time is saved, the test efficiency is improved, and the test cost is reduced.
The detection device that this embodiment provided can provide two kinds of defect detection modes of at least difference for the chip that awaits measuring, in a detection mode, refer to fig. 7 and show, when light that light source mechanism 11 produced corresponds with first light trap 1221, first light trap 1221 can simulate the lens mode, makes light source mechanism 11 produce light and can shine on chip 10 light sensitive area by even light mode, is even bright field mode, does benefit to and detects chip 10 surface dirt nature defect. Except that above-mentioned mode of operation, detection device still has the second kind and detects the mode, refer to fig. 6 and show, when light that light source mechanism 11 produced corresponds with second light trap 1222, similar lens effect can be realized to second light trap 1222, with even light with certain angle projection to waiting to detect chip 10 light sensitive area, the light that shines on chip 10 light sensitive area promptly is including even light part that directly shines on chip light sensitive area promptly, still including shining the light part on the chip with predetermineeing the angle, the light source ambient brightness of waiting to detect chip 10 light sensitive area this moment is middle bright gradually and weakens to the edge, can do benefit to under this kind of condition and detect chip 10 surperficial striae form defect.
As shown in fig. 6 and 7, in one embodiment, the hole of the first light hole 1221 and the hole of the second light hole 1222 are both of an equal-diameter hole structure, the aperture of the first light hole 1221 is not smaller than the inner diameter of the light transmission channel 21, when the light generated by the light source mechanism 11 corresponds to the first light hole 1221, the first light hole 1221 can simulate a lens mode, and the light generated by the light source mechanism 11 can irradiate the light sensitive area of the chip in a uniform light mode, so as to be in a uniform bright field mode. Specifically, the edge of the projection of the first light-transmitting hole 1221 on the horizontal plane coincides with the edge of the projection of the light-transmitting channel 21 on the same horizontal plane, or the edge of the projection of the first light-transmitting hole 1221 on the horizontal plane is located outside the edge of the projection of the light-transmitting channel 21 on the same horizontal plane. The projected edge of the second light-transmitting hole 1222 in the horizontal plane is located inside the projected edge of the light-transmitting channel 21 in the same horizontal plane.
When the light generated by the light source mechanism 11 corresponds to the second light hole 1222, in order to avoid that the aperture of the second light hole 1222 is too small, the light generated by the light source mechanism 11 cannot meet the requirement of irradiating the light in the light sensitive area of the chip 10 after being emitted through the light emitting port of the second light hole 1222, namely, the light includes a light portion which is uniformly and directly irradiated on the light sensitive area of the chip to be measured, and the light portion is irradiated on the chip at a preset angle. The second light trap that is reaming structure through the pore can make light cover the chip light sensitive area that awaits measuring completely after second light trap light outlet port jets out, form the effect of shining of preferred on the chip light sensitive area that awaits measuring, guarantee to shine the light part on the chip light sensitive area that awaits measuring including even direct light part of shining on the chip light sensitive area again including shining the light part on the chip with predetermineeing the angle promptly, similar lens effect can be realized to the second light trap, carry out the detection to the chip surface vertical line form defect that awaits measuring.
Based on the above-mentioned improvement concept, in a preferred embodiment, as shown in fig. 5, from the light input port to the light output port of the second light-transmitting hole 1222, the hole of the second light-transmitting hole 1222 at least includes a hole section 12221 with a constant diameter located at one side of the light input port, and a hole-expanding section 12222 with a gradually expanding hole diameter located at one side of the light output port, which all form the best irradiation effect on the light sensitive area of the chip 10 to be tested. It should be noted that the aperture of the second light-transmitting hole 1222 is smaller than the aperture of the first light-transmitting hole 1221, which means that the aperture of the largest aperture portion of the channel of the second light-transmitting hole 1222 should be smaller than the aperture of the first light-transmitting hole 1221. The light can generate different effects on the light sensitive area of the chip to be detected by irradiating the light through the light holes with different functions, so that one set of light source device can provide at least two different defect detection modes for the chip to be detected.
As shown in fig. 1 to 4, the light source mechanism 11 according to the present embodiment includes a mounting plate 111, a diffusion sheet 112, and a lamp set 113. The mounting plate 111 is used for being connected with the light emitting mechanism 2, and a mounting hole 1111 is formed in the mounting plate 111; a diffusion sheet 112 disposed in the mounting hole 1111; the light set 113 includes light-emitting lamp beads 1131, and the light-emitting lamp beads 1131 include but are not limited to LED lamp beads. The light-emitting lamp beads 1131 are disposed in the mounting hole 1111 and located on the light incident side of the diffusion sheet 112, and are arranged along the axial direction of the mounting hole 1111 with the diffusion sheet 112, in the detection apparatus provided in this embodiment, the light-emitting lamp beads 1131, the diffusion sheet 112, and the light-transmitting channel 21 of the light-emitting mechanism 2 are coaxially disposed.
The light emitted from the light-emitting lamp beads 1131 passes through the mounting holes 1111 and the diffusion sheet 112 in sequence, and then is transmitted out. Diffusion piece 112 has certain diffusion to light, can evenly see out after carrying out the atomization to the light that luminous lamp pearl 1131 launches for the light distribution that jets out from diffusion piece 112 is more even, can not see the shadow of scattering point from the face of jetting of diffusion piece 112, makes the light that gets into the light trap more even, so that the light trap of different function effects handles even light, thereby obtains the light source environment that accords with the piece that awaits measuring. In an alternative embodiment, in order to improve the diffusion effect of the light source mechanism 1 on the light source, at least two diffusion sheets 112 are disposed in the mounting hole 1111, and the uniformity of the light distribution of the emitted light can be improved by disposing at least two diffusion sheets compared to a scheme in which one diffusion sheet is disposed. In addition, two at least diffusion pieces are arranged along the axis direction interval of mounting hole, and this embodiment is through two adjacent diffusion piece interval distribution, and light can carry out abundant refraction and reflection in two adjacent diffusion pieces, can make the diffusion effect of light more abundant, improves the homogeneity of penetrating light. Wherein, the interval between two adjacent diffusion pieces is big more, and the diffusion effect of light is better, and the light that jets out is more even, can provide better incident light for the light trap, and the first light trap or the second light trap of being convenient for are handled light better. In order to further improve the diffusion effect of the light, the inside of the mounting hole can be subjected to sand blasting, and the protrusions formed inside the mounting hole can diffuse the light, so that the uniformity of the light after passing through the diffusion sheet is improved.
The light emitting mechanism 2 comprises a mounting structure 22 which can be detachably connected with a mounting plate 111 of the light source mechanism 11 in the light source device 1; the mounting structure 22 comprises a light through hole 23 opposite to the light source emitted by the light source device 1, the light through hole 23 penetrates through the upper and lower side surfaces of the mounting structure 22, and in one embodiment, the inner cavity of the light through hole forms the light transmission channel. In order to enable light rays entering the light transmission channel to irradiate on a light sensitive area of the chip to be detected under the condition of not generating refraction and reflection, the inner wall surface of the light transmission channel is a frosted surface, and the frosted surface comprises a light absorption material layer. In one approach, the frosted surface of the inner wall of the light-transmitting channel may be formed by a sand blasting process and the layer of light-absorbing material may preferably be formed by painting a black light-absorbing material as is well known in the art.
In general, to ensure the overall structural strength of the light emitting mechanism, the mounting structure 22 is usually made of a metal material, such as aluminum, and it is difficult to form an inner wall surface with a frosted surface on the through hole of the mounting structure 22 and to apply black light absorbing material, which is well known in the art. Referring to fig. 1, in this embodiment, the light emitting mechanism 2 further includes a light tube 24 fixed in the through hole 23, and an inner cavity of the light tube 24 forms the light transmitting channel 21. Plastics can be chooseed for use to light section of thick bamboo 24's material, from this forms the frosting and paints black extinction material technology more simple and practical at light section of thick bamboo 24 inner wall, and light section of thick bamboo 24 as independent component when needs detect different grade type or different structure size chip, only need tear open fast trade select with the chip assorted that awaits measuring have different internal diameter size printing opacity passageways can, need not to change whole light-emitting mechanism, reduce the cost, the simple operation saves check-out time. It can be understood that the outer wall of the light tube 24 is tightly attached and fixed to the inner wall of the through hole 23, so as to prevent the light source emitted by the light source mechanism 1 from leaking out from the gap between the inner wall of the through hole 23 and the outer wall of the light tube 24, and thus the detection accuracy of the chip is affected.
In order to realize the stable setting of the driving member, as shown in fig. 4, the light environment adjusting mechanism 12 further includes a driving member mounting plate 4, the driving member mounting plate 4 is fixed on the light source mechanism 11 mounting plate 111, the driving member 121 is disposed on the driving member mounting plate 4, and the driving member 121 can be fixed well by disposing the driving member mounting plate 4. In an alternative embodiment, the driving member mounting plate may also be connected and fixed to the light emitting mechanism mounting structure, and a better fixing of the driving member may also be achieved, which is not limited to the present invention.
In addition, in order to make the light source transmission plate slide more stably, as shown in fig. 1, the detection device further includes a guide mechanism 5, and the guide mechanism 5 is configured to make the light source transmission plate 122 slidable in the first direction with respect to the light source mechanism 11 and the light emitting mechanism 2. In the present embodiment shown in fig. 1, the driver 121 is fixedly attached to the light source mechanism 11 attachment plate 111 via the driver attachment plate 4, and thus the guide mechanism 5 is disposed on the attachment structure 22 of the light emitting mechanism 2. The guiding mechanism 5 can provide guiding function for the light source to penetrate through the plate 122 to slide along the left and right directions (i.e. the first direction) of the light source mechanism 11 and/or the light emitting mechanism 2, so as to avoid the light source to penetrate through the plate 122 to shift when sliding between the light source mechanism 11 and the light emitting mechanism 2, so that the light source and the light holes emitted by the light source mechanism 11 are staggered, and accurate switching of different light holes can be ensured. Obviously, with different installation manners, the guiding mechanism may also be configured and formed on the mounting plate of the light source mechanism without considering the complexity of the processing technology, and the fixing manner and position of the driving member and the mounting plate of the driving member, and the installation position of the guiding mechanism, etc. include different forms of changes or variations, which cannot be exhaustive list of all embodiments, but should belong to obvious changes or variations led by the technical solutions of the structures provided in the present embodiment.
For improving detection efficiency, can realize detecting simultaneously many chips of waiting to detect, it is shown to combine the figure structure, light source mechanism 11 is including a plurality of luminescent lamp pearls 1131 of arranging along first direction, for light source mechanism provides the light source, correspond with a plurality of luminescent lamp pearls 1131, including a plurality of first light trap 1221 and a plurality of second light trap 1222 along first direction interval arrangement on the light source see-through plate 122, the light source that each luminescent lamp pearl 1131 sent is optionally corresponding to a set of first light trap 1221 and the second light trap 1222 that is adjacent setting, and light-emitting mechanism 2 includes a plurality of light-transmitting channel 21 that set up with luminescent lamp pearl 1131 one-to-one. But when improving detection efficiency, detection device including a plurality of detection station also has some problems, specifically, between the even light after the diffusion piece jets out through two adjacent mounting holes of the light that two adjacent luminous lamp pearls jetted out, when getting into in two adjacent first printing opacity holes or two adjacent second printing opacity holes simultaneously, can appear overlapping crisscross mutual interference's the condition between the two adjacent even light in same printing opacity hole, lead to the uneven incident light condition of light and shade can appear in same first printing opacity hole or same second printing opacity hole from this, influence the chip measuring environment and the accurate nature that detects.
To overcome the above problem, as shown in fig. 1, 4 and 5, the light environment adjusting mechanism 12 further includes a diffuser plate 13, and the diffuser plate 13 is located on the plate surface of the light source transmission plate 122 near the light source mechanism 11. The diffusion plate 13 covers the first light transmission hole 1221 and the second light transmission hole 1222. Through the diffusion effect of the diffusion plate 13 on the light, two adjacent uniform light rays emitted by two adjacent diffusion sheets can be further atomized through the diffusion plate and then uniformly emitted, so that the light rays emitted by the diffusion plate are uniformly distributed, shadows of scattering points cannot be seen from the emitting surface of the diffusion plate, and the light rays entering two adjacent first light transmission holes 1221 or two adjacent second light transmission holes 1222 are uniform and meet the detection requirement.
As shown in fig. 1 to 4, in this embodiment, the light emitting mechanism 2 further includes a test head 25 capable of being fixed to the chip 10 by pressing, the test head 25 is fixed to the light emitting side of the mounting structure 22, a light input end of the test head 25 is opposite to the light emitting side of the light transmitting channel 21, and the test head 25 includes a window structure 251 for exposing the light sensing area of the chip; the test head 25 is configured to project light generated by the light source mechanism 11 to the light sensitive area of the chip 10 through the window structure 251 for chip detection.
It should be understood that the above-mentioned embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention, and it will be obvious to those skilled in the art that other variations or modifications may be made on the basis of the above description, and all embodiments may not be exhaustive, and all obvious variations or modifications may be included within the scope of the present invention.
Claims (10)
1. A light source device for chip detection, the light source device comprising:
a light source mechanism configured to be a light source to generate light; and
the light environment adjusting mechanism is positioned on the light emitting side of the light source mechanism;
the light environment adjustment mechanism includes:
a drive member; and
the light source transmission plate is positioned on the light emitting side of the light source mechanism;
the light source transmission plate is provided with first light holes arranged along a first direction and second light holes with the aperture smaller than that of the first light holes;
the driving piece is configured to drive the light source transmission plate to move, so that light generated by the light source mechanism can selectively correspond to the first light transmission hole or the second light transmission hole;
the first light-transmitting hole is configured to enable the light generated by the light source mechanism to irradiate the chip in a uniform light mode;
the second light-transmitting hole is configured to enable part of light rays generated by the light source mechanism to irradiate on the chip at a preset angle.
2. The light source device of claim 1, wherein the first hole and the second hole are both of a constant diameter hole structure.
3. The light source device of claim 1, wherein the channel of the second light-transmitting hole has a hole-expanding structure with gradually expanding hole diameter from the light-entering port to the light-exiting port of the second light-transmitting hole.
4. The light source device of claim 1, wherein the hole channel of the second light hole at least includes a hole segment with a constant diameter located at one side of the light inlet port and a hole-expanding segment with a gradually expanding hole diameter located at one side of the light outlet port.
5. The light source device of claim 1, wherein the light environment adjusting mechanism further comprises a diffuser plate disposed on a side of the light source transmission plate adjacent to the light source mechanism, the diffuser plate covering the first light transmission hole and the second light transmission hole.
6. A detection device characterized by comprising the light source device according to any one of claims 1 to 5;
the detection device also comprises a light emitting mechanism positioned on one side of the light environment adjusting mechanism, which is far away from the light source mechanism, and the light emitting mechanism is arranged on the light emitting side of the light source device; the light emitting mechanism comprises a light transmitting channel; one end of the light transmission channel is opposite to the light generated by the light source mechanism, and the chip covers one end of the light transmission channel, which is far away from the light source mechanism.
7. The detecting device for detecting the rotation of a motor rotor according to the claim 6, wherein the inner wall surface of the light transmitting channel is a frosted surface, and the frosted surface comprises a light absorbing material layer.
8. The detecting device for detecting the rotation of a motor rotor as claimed in claim 6, wherein the light emitting mechanism comprises a mounting structure detachably connected with the light source mechanism; the mounting structure is provided with a light through hole which is opposite to a light source emitted by the light source mechanism, the light through hole penetrates through the upper side surface and the lower side surface of the mounting structure, and the inner cavity of the light through hole forms the light transmission channel.
9. The detecting device for detecting the rotation of a motor rotor as claimed in claim 6, wherein the light emitting mechanism comprises a mounting structure detachably connected with the light source mechanism; the mounting structure comprises a light through hole which is opposite to a light source emitted by the light source mechanism and penetrates through the upper side surface and the lower side surface of the mounting structure;
the light emitting mechanism further comprises a light cylinder fixed in the light through hole, and the inner cavity of the light cylinder forms the light transmission channel.
10. The detecting device according to claim 8 or 9, wherein the light emitting mechanism further includes a testing head capable of being fixed to the chip by pressing, the testing head is fixed to the light emitting side of the mounting structure, a light input end of the testing head faces the light emitting side of the light transmitting channel, and the optical testing head includes a window structure for exposing the light sensing area of the chip;
the test head is configured to project light generated by the light source mechanism to the chip light sensitive area through the window structure to realize detection of the chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122752770.XU CN216560336U (en) | 2021-11-11 | 2021-11-11 | Light source device for chip detection and detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122752770.XU CN216560336U (en) | 2021-11-11 | 2021-11-11 | Light source device for chip detection and detection device |
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