CN115993369A - Film defect detection method and device - Google Patents

Film defect detection method and device Download PDF

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Publication number
CN115993369A
CN115993369A CN202211728011.2A CN202211728011A CN115993369A CN 115993369 A CN115993369 A CN 115993369A CN 202211728011 A CN202211728011 A CN 202211728011A CN 115993369 A CN115993369 A CN 115993369A
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China
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light
film
light emitting
prism
detection
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CN202211728011.2A
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Chinese (zh)
Inventor
董庆荣
许晓鸣
肖永平
陈凤军
范辉
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Zhejiang Jiemei Electronic and Technology Co Ltd
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Zhejiang Jiemei Electronic and Technology Co Ltd
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Priority to CN202211728011.2A priority Critical patent/CN115993369A/en
Publication of CN115993369A publication Critical patent/CN115993369A/en
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Abstract

The invention belongs to the field of optical film quality detection, and particularly relates to a film defect detection method and device, wherein a light receiving mechanism is utilized to detect reflected scattered light reflected by inspection light with multiple angles and/or multiple luminous intensities in the TD direction irradiated from a light emitting mechanism to the film surface; or, the transmitted scattered light of the inspection light transmitted through the film is detected at a plurality of angles in the TD direction and/or at a plurality of luminous intensities irradiated from the light emitting means to the film; and inspecting defects on the film surface based on the detection result. According to the invention, the detection light of multiple angles in the TD direction is increased and/or the detection light in the TD direction is made to have multiple luminous intensities in the multiple modes, so that the detection of micro scratches and discontinuous scratch defects of the film is realized, and the detection range and probability of the scratch defects on the surface of the film are improved.

Description

Film defect detection method and device
Technical Field
The invention belongs to the field of optical film quality detection, and particularly relates to a film defect detection method and device, which are particularly suitable for detecting scratch defects of micro scratches and discontinuous scratches.
Background
The preparation of the release film comprises a preparation process of a base film and a process of coating a release agent on the base film. In the step of producing a base film, defects such as V-shaped scratches in the film traveling direction (MD direction) are often caused by foreign matter or the like, and the optical characteristics are poor after the film is coated and produced into a release film, which reduces the quality of the product, and particularly, in the case of a release film for MLCC casting and polarizer, the use requirement is high, and the use requirement cannot be met due to fine defects. Therefore, it is necessary to improve the accuracy of detecting the film scratch defect, prevent defective products from flowing into the final application process, and increase the loss.
In a film defect inspection method for inspecting a minute flaw (14) on a film surface by detecting reflected scattered light reflected on the film surface by an inspection light (20) irradiated from a projector (22) to a transparent film (12) surface by a light receiving machine (24), and inspecting the minute flaw (14) on the film surface based on the detection result, the inspection light (20) is irradiated to the film surface in a state in which the light receiving machine (22) is arranged substantially parallel to the generation direction of the minute flaw (14) while maintaining the flatness of the film by pulling the transparent film (12) in the longitudinal direction and the width direction, and the reflected scattered light is received in a state in which the light receiving machine (24) is arranged substantially parallel to the generation direction of the minute flaw (14), as disclosed in publication No. CN101551343 a. Thus, even fine defects generated on the film surface can be detected with high sensitivity.
The detection device can adjust the angle of the light source before testing, but cannot be adjusted in real time during testing, and is a fixed light source, so that scratches in a certain depth range can be detected only; the adoption of a plurality of high-brightness light sources greatly increases the energy consumption, and a blank area exists between the two light sources, so that the quantity of stray light received by a light receiver is increased, the contrast is reduced, the detection range of scratches is further reduced, only the scratches with the width of 5-30 mu m, the length of 30-250 mu m and the depth of 0.04-0.1 mu m can be detected, and the defects cannot be detected for finer scratches, so that a new film scratch defect detection method and device are required to be developed.
Disclosure of Invention
In order to solve the problems, the invention provides a film defect detection method for detecting scratch defects of micro scratches and discontinuous scratches of a film.
The invention adopts the following technical scheme:
a film defect detecting method detects reflected scattered light reflected on a film surface by inspection light of a plurality of angles in a TD direction and/or a plurality of luminous intensities irradiated from a light emitting mechanism to the film surface by a light receiving mechanism; or, the transmitted scattered light of the inspection light transmitted through the film is detected at a plurality of angles in the TD direction and/or at a plurality of luminous intensities irradiated from the light emitting means to the film; and inspecting defects on the film surface based on the detection result.
In the prior art, the direction of the light emitted by the light emitting mechanism reaching the surface of the film is relatively single, and enough light for identification cannot be formed for the defect part, so that the identification degree of the defect is low. In particular, for fine scratches, detection is impossible.
The key point of detecting the micro scratch defects is that the light receiving mechanism can receive enough light of the identifiable defect parts, and the scratch defects generated by film roll casting, bidirectional (MD\TD) stretching, coating and other processing are mostly generated in the MD direction of the film, so that the detection rate of the micro scratch defects is improved by increasing the light of the identifiable defect parts which can be received by the light receiving mechanism through increasing the inspection light of multiple angles and/or multiple luminous intensities in the TD direction.
In the invention, the light emitting mechanism and the light receiving mechanism can be positioned on two opposite sides of the film or on the same side of the film, and can be selectively configured according to different material transmittance and scratch defect detection requirements of the film. When the light emitting mechanism and the light receiving mechanism are positioned on the same side, the light received by the light receiving mechanism is mainly light reflected and scattered from the surface of the film, and the light is marked as a reflection mode which can be used for transparent film materials and can also be used for opaque film materials; when the light emitting means and the light receiving means are located on opposite sides of the film, the light received by the light receiving means is mainly transmitted scattered light transmitted from the opposite sides of the film with respect to the light receiving means, and is denoted as a transmission mode. When the detection film is a transparent film such as a release film, the transmission mode is preferable, and the anti-interference ability is stronger than that of the reflection mode.
In one embodiment of the present invention, the light emitting means implements the TD-direction multi-angle inspection light irradiated to the film through the lens and the prism diffusion film, with the prism of the prism diffusion film facing away from the film.
In the above technical scheme, the light emitted by the light source is converted into parallel light by the lens, and then the parallel light is converted into the inspection light of multiple angles in the TD direction by the prism through the prism diffusion film. The principle is that the parallel light can be refracted and reflected after passing through the prism side of the prism diffusion film, most of the parallel light can be converted into multi-angle inspection light in the TD direction after being refracted, and the other part of the parallel light can be reflected back to the light source and is converted into inspection light after being reflected by the reflecting plate in the light source, so that the light can be reused.
In one embodiment of the present invention, the prism angle of the prism side of the prism diffusion film is 83 ° to 97 °, and the gap is 25 μm to 250 μm.
The prism angle and the gap on the prism side of the prism diffusing film may be selected according to the actual product properties, for example, the prism angle is 90 ° and the gap is 50 μm. When the angle of the prism is more than 97 degrees, the parallel light is diffused at more angles in the TD direction, but the luminous intensity is reduced while the light diffusion area is increased, the light quantity received by the light receiving mechanism is reduced, and the detection rate of micro scratches and discontinuous scratch defects is reduced.
In one embodiment of the present invention, the light emitting means emits the inspection light of various luminous intensities in the TD direction of the film by the light field with alternating brightness.
Because the sensitivity degree of different scratches to different lights is different, the inspection light has light-dark contrast through the light field with light-dark alternation, so that the inspection light in the TD direction has various luminous intensities, and the detection rate of the micro scratches is improved.
In an embodiment of the invention, the light field with alternating brightness is realized by a light emitting module capable of alternately flashing and/or a shading grating light emitting module with alternately arranged light transmitting parts and shading parts.
Further, the light-emitting module capable of alternately flashing is preferably a light-emitting module composed of a plurality of LED lamp beads, and has the advantages of stable wavelength output, strong illumination, high energy, small volume, easy splicing and adjustment of flashing frequency and array of the light-emitting module, and realization of light irradiation of various luminous intensities in the TD direction.
The inspection light emitted by the light emitting module may be light of all the common wavelength bands, but in consideration of the detection limit of the light receiving mechanism, light of a wavelength band of 380-800nm is preferred, and in special cases, light sources of other wavelength bands, such as infrared rays or ultraviolet rays, may be used. The light emitting module adopting the light with different wavelength ranges can be used for detecting various defects such as foreign matters, dirt and the like without being limited to scratch defect detection.
The shading grating light-emitting module comprises a light source and a shading grating, wherein the shading grating comprises a light-transmitting part and a shading part which are alternately arranged. The light-transmitting part can transmit all light rays, the shading part shields all light rays except the corresponding color according to different settings of colors, materials and the like, for example, the shading part is red, then red light can transmit, other light rays are shaded, so that inspection light has light-dark contrast, light irradiation of various luminous intensities in the TD direction is realized, and the detection rate of micro scratch defects is improved.
In one embodiment of the present invention, a plurality of groups of light emitting modules are configured to alternately flash. In the biaxial stretching process of a film, although scratch defects are mostly generated in the MD direction of the film, the generation of scratch defects in the TD direction cannot be completely avoided, and at this time, it is necessary to detect the scratch defects in both MD and TD directions. The light-emitting modules capable of alternately flashing are increased from one group to a plurality of groups, so that through different arrays, lamp beads with different time sequences are alternately flashed off, thereby not only realizing the scratch defect detection of TD multiple light-emitting intensity light sources to the MD direction, but also simultaneously realizing the scratch defect detection of the MD multiple light-emitting intensity light sources to the TD direction.
In one embodiment of the present invention, an absorptive polarizer having an absorption axis parallel to the MD direction is disposed right in front of the light receiving means. Because the light emitting mechanism can not completely avoid the stray light in the MD all the time, the polarizer with the absorption axis parallel to the MD is arranged, so that the stray light in the MD can be absorbed, the contrast is increased, and the detection range and probability of scratch defects are further improved.
In one embodiment of the present invention, a reflective polarizer having a reflective axis parallel to the MD direction is disposed right in front of the light emitting mechanism. It is known that the scratch detection effect is not only related to the angle of the light source but also to the luminous intensity, and the scratch is detected by dark field, so that the utilization rate of the luminous intensity is low and the energy consumption is high. By adopting the reflective polarizer, the MD direction light which can form interference is reflected, and then is diffused to the TD direction through the light emitting mechanism, so that the light source utilization rate is improved, the scratch detection range and probability are further enlarged, and the energy consumption is reduced.
The invention also provides a film scratch defect detection device based on the detection method, which comprises the following parts:
a light emission mechanism for irradiating inspection light of multiple angles and/or multiple luminous intensities to the surface of the film TD;
and a light receiving means for receiving and detecting the reflected scattered light reflected by the surface of the film or the transmitted scattered light transmitted through the film.
In one embodiment of the present invention, the light emitting mechanism includes a light source, a lens, and a prism diffusing film disposed in sequence, the prism diffusing film being disposed adjacent to the film and the prism facing away from the film.
In one embodiment of the present invention, the prism angle of the prism side of the prism diffusion film is 83 ° to 97 °, and the gap is 25 um to 250um.
In one embodiment of the present invention, the light emitting mechanism is a light field with alternating brightness.
Specifically, the light field with alternating brightness comprises a light emitting module capable of alternately flashing and/or a shading grating light emitting module with alternately arranged light transmitting parts and shading parts.
The light-emitting module capable of alternately flashing is preferably a light-emitting module composed of a plurality of LED lamp beads, and has the advantages of stable wavelength output, strong illumination, high energy, small volume, easy splicing and adjustment of flashing frequency and array of the light-emitting module, and formation of light fields with light and dark alternation.
The shading grating light-emitting module comprises a light source and a shading grating, wherein the shading grating comprises light-transmitting parts and shading parts which are alternately arranged. The light-transmitting part can transmit all light rays, the shading part shields all light rays except the corresponding color according to different settings of colors, materials and the like, for example, the shading part is red, so that red light can transmit, other light rays are shaded, and a light field with alternate brightness is formed.
In an embodiment of the invention, the light emitting modules capable of alternately flashing are arranged in a plurality of groups. In the biaxial stretching process of a film, although scratch defects are mostly generated in the MD direction of the film, the generation of scratch defects in the TD direction cannot be completely avoided, and at this time, it is necessary to detect the scratch defects in both MD and TD directions. The light-emitting modules capable of alternately flashing are increased from one group to a plurality of groups, so that through different arrays, lamp beads with different time sequences are alternately flashed off, thereby not only realizing the scratch defect detection of TD multiple light-emitting intensity light sources to the MD direction, but also simultaneously realizing the scratch defect detection of the MD multiple light-emitting intensity light sources to the TD direction.
In one embodiment of the present invention, an absorptive polarizer having an absorption axis parallel to the MD direction is disposed right in front of the light receiving means. Because the light emitting mechanism can not completely avoid the stray light in the MD all the time, the polarizer with the absorption axis parallel to the MD is arranged, so that the stray light in the MD can be absorbed, the contrast is increased, and the detection range and probability of scratch defects are further improved.
In one embodiment of the present invention, a reflective polarizer having a reflective axis parallel to the MD direction is disposed right in front of the light emitting mechanism. It is known that the scratch detection effect is not only related to the angle of the light source but also to the luminous intensity, and the scratch is detected by dark field, so that the utilization rate of the luminous intensity is low and the energy consumption is high. By adopting the reflective polarizer, the MD direction light which can form interference is reflected, and then is diffused to the TD direction through the light emitting mechanism, so that the light source utilization rate is improved, the scratch detection range and probability are further enlarged, and the energy consumption is reduced.
By implementing the technical scheme, the invention has the following beneficial effects:
according to the invention, the detection light of multiple angles in the TD direction is increased and/or the detection light in the TD direction is made to have multiple luminous intensities in the multiple modes, so that the detection of micro scratches and discontinuous scratch defects of the film is realized, and the detection range and probability of the scratch defects on the surface of the film are improved. In particular, a minute scratch having a width of 5 μm or less can be detected.
According to the invention, the absorption type polaroid with the absorption axis parallel to the MD direction is arranged, so that the parasitic light is absorbed, the interference and the background noise are reduced, and the higher contrast is obtained, thereby being beneficial to scratch detection.
According to the invention, the reflection axis and the MD direction parallel reflection type polaroid are arranged, so that the MD direction parasitic light is reflected back to the light source, the effect of increasing the brightness of the light source is achieved, the scratch detection is improved, and the energy consumption is saved.
Drawings
FIG. 1 is a schematic diagram of a detecting device according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a detecting device according to another embodiment of the present invention;
FIG. 3 is a schematic diagram of a single set of beads for an alternate strobe light source;
FIG. 4 is a schematic diagram showing the variation of a plurality of groups of beads with alternate strobe light sources;
FIG. 5 is a schematic structural diagram of a detecting device according to another embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a detecting device according to another embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made more apparent and fully hereinafter with reference to the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the embodiments described below, the devices and components not labeled with specific structures or models are generally selected from devices or components conventional in the art, and the specific connection modes are not labeled, which are generally conventional in the art or suggested by manufacturers.
Example 1
Referring to fig. 1, the film scratch defect detecting device comprises a light emitting mechanism 100 and a light receiving mechanism 200, wherein the light emitting mechanism 100 adopts a light source, is arranged on one side of a film 300 to be detected, and is parallel to the direction of the film TD. The light receiving means 200 is a camera, and is disposed on the other side of the film. The light emitting mechanism 100 and the light receiving mechanism 200 may be located on the same side of the film. The present embodiment preferably has the light receiving mechanism 200 located above the film and the light emitting mechanism 100 located below the film. The film to be detected uniformly moves under the action of the driving mechanism, and real-time detection is carried out in the moving process.
In the present embodiment, the light receiving mechanism 200 detects the transmission scattered light of the inspection light transmitting film at a plurality of angles in the TD direction irradiated from the light emitting mechanism 100 to the film surface. The concrete structure is as follows: a lens 400 and a prism-diffusing film 500 are sequentially provided between the light emitting mechanism 100 and the film to be detected, with the prism of the prism-diffusing film 500 facing the lens side. The lens 400 converts light emitted from a light source into parallel light, and the prism-diffusing film 500 converts the parallel light into inspection light of multiple angles in the TD direction through a prism. The principle is that the parallel light is refracted and reflected after passing through the prism side of the prism diffusion film 500, most of the parallel light is converted into multi-angle inspection light in the TD direction after being refracted, and a small part of the parallel light is reflected back to the light source and is converted into inspection light after being reflected by the reflecting plate in the light source, so that the light can be reused. The prism angle and the gap on the prism side of the prism diffusion film 500 can be selected according to the actual product performance, and in this embodiment, the prism angle is 90 ° and the gap is 50 μm.
Example 2
A film scratch defect detection device, see fig. 2, is different from embodiment 1 in that the light emitting mechanism 100 adopts an alternate strobe light source, which may be a single group of lamp beads, and implements TD direction multi-angle, multi-intensity light sources by alternate flashing at different timings, see fig. 3. In the biaxial stretching process of the film, although most of scratch defects are generated in the MD direction of the film, the generation of the scratch defects in the TD direction cannot be completely avoided, and the scratch defects in the MD and TD directions need to be detected simultaneously at the moment, so that the film can be pertinently arranged into a plurality of groups of lamp beads, and the effect of multiple luminous intensity light sources in the MD and TD directions can be realized through alternate flickering at different time sequences, and the film is shown in the attached figure 4.
Example 3
Referring to fig. 5, a film scratch defect detecting device is different from embodiment 2 in that a shading grating 600 is arranged at the rear of the prism, the shading grating comprises a light transmitting part and a shading part which are alternately arranged, all light can be transmitted through the light transmitting part, all light of corresponding colors can be shaded according to different settings of colors, materials and the like, the shading part is red in the embodiment, red light can be transmitted, other light can be shaded, so that inspection light has light-shade contrast, light irradiation of various luminous intensities in the TD direction is realized, and the detection rate of micro scratch defects is improved.
Example 4
Referring to fig. 6, a film scratch defect detecting device includes a light emitting mechanism 100 and a light receiving mechanism 200, which are disposed on the same side of a film 300 to be detected. The light receiving mechanism 200 detects reflected scattered light reflected at the film surface by the inspection light irradiated from the light emitting mechanism 100 to the film surface.
The light receiving means 200 is a camera, and an absorptive polarizer 700 having an absorption axis parallel to the MD direction is provided in front of the light receiving means 200. The light emitting mechanism 100 adopts a combination mode of combining a light source with the shading grating 600 to realize inspection light with various luminous intensities. The light source adopts alternate stroboscopic light source, the shading grating 600 includes the printing opacity portion and the shading portion that set up in turn, printing opacity portion can sees through all light, shading portion shields all light except corresponding colour according to different settings such as colour, material, and shading portion is red in this embodiment, and red light can see through, and other light is shielded, makes the inspection light have bright and dark contrast, realizes the multiple luminous intensity light irradiation of TD direction, has improved the detectability of fine fish tail defect. A lens 400 and a prism-diffusing film 500 are sequentially disposed between the light emitting mechanism 100 and the film 300 to be detected, with the prism of the prism-diffusing film 500 facing the lens side. The lens 400 converts light emitted from a light source into parallel light, and the prism-diffusing film 500 converts the parallel light into inspection light of multiple angles in the TD direction through a prism. The prism angle and the gap on the prism side of the prism diffusion film 500 can be selected according to the actual product performance, and in this embodiment, the prism angle is 90 ° and the gap is 50 μm.

Claims (10)

1. A film defect detecting method is characterized in that reflected scattered light reflected on the film surface by inspection light of multiple angles in the TD direction and/or multiple luminous intensities irradiated from a light emitting mechanism to the film surface is detected by a light receiving mechanism; or, the transmitted scattered light of the inspection light transmitted through the film is detected at a plurality of angles in the TD direction and/or at a plurality of luminous intensities irradiated from the light emitting means to the film; and inspecting defects on the film surface based on the detection result.
2. The method according to claim 1, wherein the light emitting means implements the TD-direction multi-angle inspection light irradiated to the film through a lens and a prism diffusion film, the prism of the prism diffusion film facing away from the film.
3. The method according to claim 1, wherein the light emitting means emits the inspection light of a plurality of luminous intensities in the TD direction irradiated to the film by the light field having alternating brightness.
4. A film defect detecting method according to claim 3, wherein the light field with alternating brightness is realized by a light emitting module capable of alternately flashing and/or a light shielding grating light emitting module having alternately arranged light transmitting portions and light shielding portions.
5. The method of claim 1, wherein an absorptive polarizer having an absorption axis parallel to the MD direction is disposed immediately in front of the light receiving means.
6. The method of claim 1 or 5, wherein a reflective polarizer having a reflective axis parallel to an MD direction is disposed immediately in front of the light emitting mechanism.
7. A film scratch defect detection device, characterized by comprising the following parts:
a light emission mechanism for irradiating inspection light of multiple angles and/or multiple luminous intensities to the surface of the film TD;
and a light receiving means for receiving and detecting the reflected scattered light reflected by the surface of the film or the transmitted scattered light transmitted through the film.
8. The film scratch defect detection device of claim 7, wherein the light emitting mechanism comprises a light source, a lens, and a prism diffusing film disposed in sequence, the prism of the prism diffusing film facing away from the film.
9. The film scratch defect detection device of claim 7, wherein the light emitting mechanism is a light field with alternating brightness.
10. The device according to claim 9, wherein the light field with alternating brightness comprises a light emitting module capable of alternately flashing and/or a light shielding grating light emitting module having alternately arranged light transmitting portions and light shielding portions.
CN202211728011.2A 2022-12-31 2022-12-31 Film defect detection method and device Pending CN115993369A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211728011.2A CN115993369A (en) 2022-12-31 2022-12-31 Film defect detection method and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211728011.2A CN115993369A (en) 2022-12-31 2022-12-31 Film defect detection method and device

Publications (1)

Publication Number Publication Date
CN115993369A true CN115993369A (en) 2023-04-21

Family

ID=85993305

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202211728011.2A Pending CN115993369A (en) 2022-12-31 2022-12-31 Film defect detection method and device

Country Status (1)

Country Link
CN (1) CN115993369A (en)

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