CN216487970U

CN216487970U - Die bonder assembly and die bonder

Info

Publication number: CN216487970U
Application number: CN202122975329.8U
Authority: CN
Inventors: 雷伟庄
Original assignee: Weijian Intelligent Packaging Technology Shenzhen Co ltd
Current assignee: Weijian Intelligent Packaging Technology Shenzhen Co ltd
Priority date: 2021-11-26
Filing date: 2021-11-26
Publication date: 2022-05-10
Anticipated expiration: 2031-11-26

Abstract

The utility model relates to the technical field of die bonder, in particular to a die bonder and a die bonder, wherein the die bonder comprises heating equipment, a camera device and an air knife device, the heating equipment comprises an eutectic platform, the eutectic platform comprises a bearing plate and a cover body matched with the bearing plate to form an accommodating space for accommodating a substrate to be processed, an opening is formed in the cover body, the camera device is arranged corresponding to the position of the opening to shoot an image, and the air knife device is arranged close to one side of the eutectic platform and blows air towards the surface of the cover body to remove hot air at the opening; a die bonder comprises the die bonder component. The die bonder component and the die bonder can effectively solve the problem that hot air generated by heating influences shooting.

Description

Die bonder assembly and die bonder

[ technical field ] A method for producing a semiconductor device

The utility model relates to the technical field of die bonder, in particular to a die bonder assembly and a die bonder.

[ background of the utility model ]

With the rapid progress of modern electronic technology, the preparation and production of electronic equipment are developed towards high precision, and the die bonder is an important device of a high-precision patch in the field of electronic technology.

In the chip packaging process of the existing die bonder, a substrate needs to be heated and then a chip needs to be mounted, orientation information of an area for bonding the chip needs to be shot and obtained before the substrate is heated, but hot air heated last time remains after the previous substrate is heated, and shooting of the substrate may be hindered.

[ Utility model ] content

The utility model provides a die bonder component and a die bonder, aiming at solving the technical problem that hot air generated by heating equipment can influence shooting.

The utility model provides a die bonding assembly which comprises heating equipment, a camera device and an air knife device, wherein the heating equipment comprises an eutectic platform, the eutectic platform comprises a bearing plate and a cover body matched with the bearing plate to form an accommodating space for accommodating a substrate to be processed, an opening is formed in the cover body, the camera device is arranged corresponding to the opening to shoot images, and the air knife device is arranged at one side close to the eutectic platform and blows air towards the surface of the cover body to remove hot air at the opening.

Preferably, the bearing plate is used for placing a substrate, and the bearing plate is detachably connected with the cover body; when the cover body is connected to the bearing plate, the substrate is exposed out of the opening, and the image of the substrate is shot by the camera device corresponding to the position of the opening.

Preferably, the bearing plate is provided with a through hole for inputting shielding gas to the accommodating space.

Preferably, the air knife device includes the main part, forms airflow channel in the main part, the main part leans on the warp one side of eutectic platform sets up, is provided with the air inlet in the main part, the venthole that a plurality of intervals set up and communicate with inside airflow channel is seted up on the main part surface, the venthole is seted up the direction unanimity, and the air current gets into airflow channel from the air inlet and follows the venthole is discharged in order to blow away the steam of opening part.

Preferably, the main part is roughly rectangular form, airflow channel extends along main part length direction, just the main part includes a plurality of surfaces, the venthole is seted up and is being unanimous at same surface and apart from the eutectic platform distance.

Preferably, the level of the air outlet is higher than the level of the plane of the cover body.

Preferably, the air flow discharged from the air outlet hole by the air knife device at least covers the whole area of the opening.

Preferably, the air knife device further comprises a control component, and the control component controls the strength of the air flow output by the air knife device.

Preferably, the air knife device further comprises a support frame connected with the main body to fix the main body.

The utility model further provides a die bonder for solving the technical problem, which comprises the air knife device.

Compared with the prior art, the die bonder assembly and the die bonder have the following advantages:

1. the die bonding assembly comprises heating equipment, a camera device and a wind knife device, wherein the heating equipment comprises an eutectic platform, the eutectic platform comprises a bearing plate and a cover body matched with the bearing plate to form a space for accommodating a substrate to be processed, the cover body is provided with an opening, and the camera device is arranged at a position corresponding to the opening to shoot an image. Because can produce certain steam in the heating process, part steam can fly away out along the opening part of lid in the accommodation space, and steam can directly influence camera device's shooting efficiency, sets up the air knife device and blow towards the lid surface and can effectually blow away the steam that the opening goes out in the one side that is close to the eutectic platform to solve steam and can influence the problem of camera device shooting base plate's efficiency.

2. The bearing plate of the die bonding assembly is used for placing a substrate, when the cover body is connected to the bearing plate, the substrate is exposed from the opening, the image of the substrate is shot by the camera device corresponding to the opening, and because protective gas needs to be continuously introduced when the heating device is used for heating, the bearing plate is also provided with a through hole for inputting the protective gas into the accommodating space, the accommodating space can be used for filling the protective gas more sufficiently, the protective gas can expel air in the accommodating space, and the substrate is prevented from being influenced by some gas or substances in the air when the heating device is used for heating. The air knife device can effectively blow off the protective gas flowing out from the opening and the hot gas generated by heating so as to facilitate better shooting

3. The air knife device comprises a main body, wherein an airflow channel for guiding airflow is formed in the main body, an air inlet is formed in one end of the main body, a plurality of air outlet holes which are arranged at intervals and communicated with the airflow channel in the main body are formed in the surface of the main body, the air outlet holes are formed in the same direction, airflow enters the airflow channel from the air inlet, flows along the airflow channel and then is discharged from the air outlet holes, and finally the airflow is blown to an eutectic platform to blow away hot air at the eutectic platform.

4. The main body of the air knife device is roughly in a long strip shape, the purpose of the arrangement is mainly to form an air flow channel with a certain length in the main body, and meanwhile, the long strip shape of the main body is convenient for arranging a plurality of air outlet holes communicated with the air flow channel at intervals on the main body. The main part still includes a plurality of surfaces, and it is exactly that to open the venthole on same surface for all ventholes can all blow towards this one direction of eutectic platform, in order to reach better effect of blowing.

5. The horizontal height of the air outlet hole is higher than that of the plane of the cover body so as to ensure that air flow discharged from the air outlet hole can be blown to the position of the opening exposed out of the substrate, and meanwhile, the air flow is blown downwards in the horizontal direction or in an inclined mode so as to ensure that hot air is not blown away to the camera device to influence shooting.

6. When the die bonding assembly starts to work continuously, a plurality of substrates need to be heated one by one, the cover body is always connected to the bearing plate during the period, the substrates are directly taken and placed through the opening in the cover body when the substrates are replaced, otherwise, a step of taking and placing the cover body is needed to be added when one substrate is replaced for heating, the working efficiency can be directly influenced, most of hot air generated by heating and protective air introduced in the heating process can flow out from the opening, the air knife device mainly blows the hot air and the protective air at the opening, and air flow discharged from the air outlet can at least completely cover all areas above the exposed opening of the substrate, so that the phenomenon that shooting is influenced by the fact that hot air exists in a part above the opening is avoided.

7. The air knife device also comprises a control component, and a user can control the strength of the air flow output by the air knife device through an intelligent device automatic control component or a manual control component, so that the phenomenon that the substrate moves due to too small air flow and poor effect or too large air flow is avoided.

8. The air knife device further comprises a support frame, and the support frame is connected with the main body so as to support the main body to a certain height and ensure that the air outlet hole can blow air towards the eutectic platform.

9. The embodiment of the utility model also provides a die bonder, which has the same beneficial effects as the die bonder, and the details are not repeated herein.

[ description of the drawings ]

Fig. 1 is a schematic perspective view of a die attach assembly according to a first embodiment of the present invention.

Fig. 2 is a schematic perspective view of an air knife device of a die bonding assembly according to a first embodiment of the present invention.

Fig. 3 is a schematic perspective view of a heating apparatus of a die bonding assembly according to a first embodiment of the present invention.

Fig. 4 is a schematic view of a die attach assembly according to a first embodiment of the present invention.

Fig. 5 is a schematic view of a die bonder according to a second embodiment of the utility model.

Description of the figures:

1. a die bonding assembly; 2. a die bonder;

11. a heating device; 12. an air knife device; 13. image pickup apparatus

111. A eutectic platform; 121. a main body; 122. an air outlet; 123. an air inlet; 124. a support frame;

1111. a carrier plate; 1112. a cover body; 1113. a through hole; 1114. and (4) opening.

[ detailed description ] embodiments

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.

It is to be noted that the terms "first" and "second" and the like in the description and the claims of the present invention are used for distinguishing different objects, and are not used for describing a specific order.

It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.

In the present invention, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "center", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate an orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are used primarily to better describe the utility model and its embodiments and are not intended to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.

Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meanings of these terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.

Furthermore, the terms "mounted," "disposed," "provided," "connected," and "connected" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; can be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements or components. The specific meanings of the above terms in the present invention can be understood by those of ordinary skill in the art according to specific situations.

Referring to fig. 1, 2 and 3, a die attach assembly 1 according to a first embodiment of the present invention includes a heating apparatus 11, an air knife device 12 and an image pickup device 13, wherein the heating apparatus 11 includes an eutectic stage 111, the eutectic stage 111 includes a carrier 1111 and a cover 1112 cooperating with the carrier 1111 to form an accommodating space for accommodating a substrate to be processed, the cover 1112 has an opening 1114, the image pickup device 13 captures an image corresponding to the opening 1114, and the air knife device 12 is disposed near one side of the eutectic stage 111 and blows hot air towards the surface of the cover 1112 at the opening 1114.

It can be understood that before the substrate is placed on the carrier plate 1111 for heating, the substrate needs to be photographed to obtain the orientation information of the region where the chip is bonded, but hot air remained when the substrate is heated remains at the substrate, and the hot air may affect the photographing of the camera device 13; the technical problem that hot air generated by the heating equipment can influence the shooting of the camera device 13 can be solved by using the air knife device.

Further, the carrier plate 1111 is used for placing the substrate, and the carrier plate 1111 is detachably connected to the cover 1112; when the cover 1112 is attached to the carrier 1111, the substrate is exposed from the opening 1114, and the image capturing device 13 captures an image of the substrate corresponding to the position of the opening 1114. It will be appreciated that the shape and size of the opening 1114 should correspond to the shape and size of the substrate to ensure that all areas of the substrate can be completely imaged.

Alternatively, the cover 1112 and the carrier plate 1111 may be one of a magnetic attraction connection and a snap connection. Specifically, in the present embodiment, the cover 1112 and the carrier 1111 are connected in a snap-fit manner.

Furthermore, the bearing plate 1111 is provided with a through hole 1113 for inputting shielding gas into the receiving space.

It can be understood that when the heating device 11 heats the substrate, the protective gas needs to be continuously introduced through the through hole 1113, the accommodating space can be filled with the protective gas more sufficiently, and the protective gas can also expel the air in the accommodating space, so as to prevent some gases or substances in the air from affecting the substrate during heating.

It can be understood that after the continuous operation, a plurality of substrates need to be heated one by one, during which the cover 1112 is always connected to the carrier 1111, and the substrate is replaced by directly accessing the substrate through the opening 1114 of the cover 1112, otherwise, the operation efficiency is directly affected by adding a step of accessing the cover 1112 every time a substrate is replaced for heating, during heating, a part of the introduced protective gas and the hot gas generated by heating will flow out from the opening 1114, after the substrate is replaced, the air drifted at the opening 1114 can influence the shooting of the substrate, the air knife device 12 is arranged close to the eutectic platform 111, the heating device 11 heats to generate hot air covering the eutectic platform 111, and the protective air drifted at the position can be blown away by the air knife device 12, so that the problem that the residual air at the opening 1114 can influence the shooting of the substrate is solved.

It can be understood that whether the heating device 11 adopts an infrared light source to irradiate for heating or arranges a circuit board below the bearing plate 1111 to heat the substrate, air around the eutectic platform 111 will be heated accordingly after heating, the volume expansion density of the heated air will be reduced, light will be slightly refracted through the place with variable air density, and some deviation may occur when a camera is used to take a picture or directly through visual observation. The air knife device 12 is used for blowing air, and meanwhile air flow around the eutectic platform 111 can be guaranteed, so that the situation is avoided.

In other embodiments, the cover 1112 may not be provided, and the air knife device 12 may be directly used to blow the air toward the substrate to blow away the air on the surface of the substrate, so as not to affect the shooting; meanwhile, the through hole 1113 is not arranged, and the air knife device 12 is directly used for blowing protective gas, so that the structure is simpler.

Further, the air knife device 12 includes a main body 121, an air flow channel is formed in the main body 121, the main body 121 is disposed on one side close to the eutectic platform 111, an air inlet 123 is disposed at one end of the main body 121, a plurality of air outlet holes 122 which are disposed at intervals and communicated with the internal air flow channel are disposed on the surface of the main body 121, the air outlet holes 122 are disposed in the same direction, and air flow enters the air flow channel from the air inlet 123 and is discharged from the air outlet holes 122 to blow away hot air at the opening 1114.

It will be appreciated that the air flow passage in the main body 121 is used to guide the flow of the air flow, the air inlet 123 is mainly connected to other external air flow-making devices to deliver the air flow into the air flow passage, and the air flow enters the air flow passage from the air inlet 123, flows along the direction of the air flow passage, and finally exits from the air outlet 122, so as to blow off the hot air at the opening 1114. It is understood that the air inlet 123 may be opened at any position of the main body, as long as an air flow channel capable of connecting with an external device and conveying air flow into the main body 121 is realized. In a specific embodiment, the air inlet 123 is opened at one end of the main body 121.

Further, the main body 121 of the air knife device 12 is substantially long, the internal air flow channel extends along the length direction of the main body 121, the main body 121 includes a plurality of surfaces, and the air outlet 122 is opened on the same surface and has the same distance from the eutectic platform.

It is understood that the body 121 and the outlet aperture 122 may be any shape and size. Specifically, in one specific embodiment, the body 121 is in the shape of a quadrangular prism, and the outlet holes 122 are circular and have a hole diameter of 0.79 cm.

It can be understood that in the embodiment, the main body 121 has a quadrangular shape, and the air outlets 122 are further formed on a surface closest to the eutectic platform 111, so that all the air outlets 122 can blow air towards the eutectic platform 111, thereby achieving a better effect of blowing the heat. It is understood that the distances are consistent and include not only lateral distances from the eutectic platform 111, but also distances from the eutectic platform 111 in the longitudinal direction.

Further, the air outlet hole 122 has a level higher than that of the plane of the cover 1112 to ensure that the air flow discharged from the air outlet hole 122 by the air knife device 12 can pass through the opening 1114.

Further, the air flow discharged from the air outlet hole 122 covers at least the opening.

It can be understood that, in the embodiment, the shape and size of the opening 1114 is corresponding to the shape and size of the substrate, and a part of the hot air generated by heating and the introduced shielding gas will drift out through the opening 1114 and gather on the opening 1114, and the image pickup device 13 needs to shoot the substrate from the opening 1114, the gas existing at the opening 1114 will directly affect the shooting effect of the image pickup device 13, so it is necessary to ensure that the air flow discharged from the air outlet 122 by the air knife device 12 needs to at least completely cover the opening 1114 to ensure that the shooting is not affected.

In other embodiments, a control component may be disposed on or connected to the air knife device 12, and the control component may be used to control the strength of the air flow output from the air knife device 12. It can be understood that if the air flow output by the air knife device 12 is small, the air flow may not completely blow away the air collected at the opening 1114, and if the air flow output by the air knife device 12 is too large, the image may shake during shooting, which affects the shooting efficiency, and by connecting or arranging the control component, the user can manually control or use an intelligent device to control the control component, so as to achieve the purpose of controlling the intensity of the air flow output by the air knife device 12; the control component may be a valve disposed at the air outlet 122 or the air inlet 123, and the user may adjust the valve by manually adjusting or connecting other intelligent devices to control the air flow intensity; or the control component is a device for generating airflow, which is directly connected to the air inlet 123 to input airflow to the main body 121, and the user can directly control the device for generating airflow manually or intelligently to control the lightness of the airflow.

Referring to fig. 1, fig. 2, fig. 3 and fig. 4, further, in the present embodiment, the air knife device 12 further includes a supporting frame 124, and the supporting frame 124 is connected to the main body 121 to fix the position of the main body 121.

It can be understood that, since the air outlet 122 is opened on the main body 121, the supporting frame 124 supports the main body 121 to ensure that the horizontal height of the air outlet 122 can be higher than the horizontal height of the plane of the cover 1112, and meanwhile, in the present embodiment, the main body 121 is fixed on the side of the eutectic platform 111 through the supporting frame 124 and is not in direct contact with the eutectic platform 111.

In other embodiments, the support frame 124 may not be provided, and the main body 121 may be directly disposed on one side of the eutectic platform 111. If the eutectic platform does not include the cover 1112, the main body 121 may be directly disposed on a surface of the carrier 1111 carrying the substrate, and the air outlet 122 is disposed toward the substrate; if the eutectic platform 111 further includes the cover 1112, a notch is required to be formed at a position of the cover 1112 corresponding to the position of the main body 121 on the carrying plate 1111, when the cover 1112 is connected to the carrying plate, the main body 121 exposes the surface of the cover 1112 from the notch, and it can be ensured that the air flow discharged from the air outlet 122 can blow away the hot air and the shielding gas at the opening 1114, or the main body is directly disposed on the surface of the cover 1112, because the cover 1112 does not need to be removed after the eutectic platform starts to continuously operate, the structure is simpler.

Referring to fig. 5, a die bonder 2 according to a second embodiment of the present invention includes a die bonding assembly 1 according to the first embodiment of the present invention.

Compared with the prior art, the die bonder of the die bonder component machine provided by the utility model has the following advantages:

2. The bearing plate of the die bonding assembly is used for placing a substrate, when the cover body is connected to the bearing plate, the substrate is exposed from the opening, the image of the substrate is shot by the camera device corresponding to the position of the opening, and because protective gas is required to be continuously introduced when the heating device is used for heating, the bearing plate is also provided with a through hole for inputting the protective gas into the accommodating space, the accommodating space can be used for filling the protective gas more sufficiently, the protective gas can expel air in the accommodating space, and the substrate can be prevented from being influenced by some gas or substances in the air when the heating device is used for heating. The air knife device can effectively blow off the protective gas flowing out from the opening and the hot gas generated by heating so as to facilitate better shooting

4. The main body of the air knife device is approximately in a long strip shape, the purpose of the arrangement is mainly to form an air flow channel with a certain length in the main body, and meanwhile, the long strip shape of the main body is also convenient for arranging a plurality of air outlet holes communicated with the air flow channel at intervals on the main body. The main part still includes a plurality of surfaces, and it is exactly that to open the venthole on same surface for all ventholes can all blow towards this one direction of eutectic platform, in order to reach better effect of blowing.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the utility model, and any modifications, equivalents and improvements made within the spirit of the present invention are intended to be included within the scope of the present invention.

Claims

1. A die bond assembly, comprising: including firing equipment, camera device and air knife device, firing equipment includes the eutectic platform, the eutectic platform include the loading board and with loading board complex lid in order to form the accommodation space who holds the pending base plate, the opening has been seted up on the lid, camera device corresponds the open position sets up in order to shoot the image, one side setting that the air knife device is close to the eutectic platform and orientation the lid surface is bloied in order to get rid of the steam of opening part.

2. The die bond assembly of claim 1, wherein: the bearing plate is used for placing a substrate and is detachably connected with the cover body; when the cover body is connected to the bearing plate, the substrate is exposed out of the opening, and the image of the substrate is shot by the camera device corresponding to the position of the opening.

3. The die attach assembly of claim 2, wherein: the bearing plate is provided with a through hole for inputting protective gas to the accommodating space.

4. The die bond assembly of claim 1, wherein: the air knife device comprises a main body, wherein an air flow channel is formed in the main body, the main body leans on the channel to be arranged on one side of the eutectic platform, an air inlet is formed in the main body, a plurality of air outlet holes which are arranged at intervals and communicated with the internal air flow channel are formed in the surface of the main body, the air outlet holes are formed in the same direction, air flow enters the air flow channel from the air inlet and is discharged to blow away hot air at the opening.

5. The die attach assembly of claim 4, wherein: the main part is roughly rectangular form, airflow channel extends along main part length direction, just the main part includes a plurality of surfaces, the venthole is seted up and is being unanimous at same surface and apart from the eutectic platform distance.

6. The die attach assembly of claim 4, wherein: the level of the air outlet is higher than that of the cover body plane.

7. The die attach assembly of claim 4, wherein: the air flow discharged from the air outlet hole by the air knife device at least covers the whole area of the opening.

8. The die attach assembly of claim 4, wherein: the air knife device further comprises a control assembly, and the control assembly controls the strength of the air flow output by the air knife device.

9. The die bond assembly of claim 4, wherein: the air knife device further comprises a support frame, and the support frame is connected with the main body to fix the main body.

10. A die bonder is characterized in that: the die bonder comprises the die bonder assembly as claimed in any one of claims 1 to 9.